CN102967556A - Micro-flow control chip machining and detection experiment device based on digital micro-mirror device - Google Patents
Micro-flow control chip machining and detection experiment device based on digital micro-mirror device Download PDFInfo
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- CN102967556A CN102967556A CN201210517515XA CN201210517515A CN102967556A CN 102967556 A CN102967556 A CN 102967556A CN 201210517515X A CN201210517515X A CN 201210517515XA CN 201210517515 A CN201210517515 A CN 201210517515A CN 102967556 A CN102967556 A CN 102967556A
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Abstract
The invention provides a micro-flow control chip machining and detection experiment device based on a digital micro-mirror device, comprising an ultraviolet LED (Light-Emitting Diode) light source, a first double-convex lens, a first reflection mirror, a DMD (Digital Micro-mirror Device), a dichroic mirror, a first microscope objective lens, a three-dimensional electric platform, a second microscope objective lens, a second double-convex lens, a white light LED light source, a second reflection mirror, a light filtering mirror, a third double-convex lens, a CCD (Charge Coupled Display) camera and a computer. The experiment device can effectively work at two modes of photoresist exposure and visible light and ultraviolet fluorescence detection of a micro-flow control chip; and the computer is respectively connected with an ultraviolet LED light source, the white light LED light source, the DMD, the a three-dimensional electric platform and the CCD camera. The micro-flow control chip machining and detection experiment device based on the digital micro-mirror device can realize soft photoetching exposure of a micro-flow-channel pattern in a manufacturing process of the micro-flow control chip and can also realize the real-time visible light and ultraviolet fluorescence detection of trace samples in the micro-flow control chip.
Description
Technical field
The invention belongs to little processing, microfluid sample detection technique field, particularly a kind of Novel experiment device that detects in real time based on micro-fluidic chip rapid processing and the microfluid sample of Digital Micromirror Device (DMD).
Background technology
Micro-fluidic chip has played an important role in fields such as analytical chemistry, systems biology, biophysics, clinical medicine, bio-pharmaceuticals since occurring.Micro-fluidic chip technology self is constantly development and perfection in these are used also.The making of fluid channel processing is expanded out new technologies such as photoetching, soft lithographic by the micro electronmechanical process technology (such as chemical etching) of initial microelectronic in the micro-fluidic chip.A large amount of new technologies has also been used for reference in the detection of micro-example in the micro-fluidic chip, such as fluoroscopic examination, and Ultrasonic Detection etc.These process technologies and detection technique promote and have developed preparation and the research of micro-fluidic chip greatly.
Existing micro-fluidic chip processing and fabricating technology does not well combine design process and the manufacturing process of fluid channel, can not realize the soft lithographic exposure of fluid channel pattern in the facture of microchip process and visible light and the Ultraluminescence of micro-example in the micro-fluidic chip is detected in real time, therefore can not process and detect at same table apparatus realization micro-fluidic chip simultaneously, can't realize rapid processing and real-time detection.
An important innovative point of the present invention is to adopt Digital Micromirror Device (DMD) technology, by in computing machine, utilizing the pattern of the direct design fluid channel of software, and by data line detail of design is directly outputed in the Digital Micromirror Device (DMD), then utilize imaging optical path directly the photoresist of having processed to be carried out the exposure of fluid channel pattern, but can be directly with the mask plate of the upper pattern that shows of DMD as real time modifying.Can shorten greatly like this micro-fluidic chip from being designed into the cycle of masterplate preparation, guarantee simultaneously the miniature scale of the fluid channel of design requirement.
Another innovative point of the present invention be with the processing of micro-fluidic chip and testing process comprehensively to an experimental provision.So that the present invention when having the micro-fluidic chip working ability, also can carry out multiple real-time detection to the micro-example in the micro-fluidic chip.The shared space of experimental apparatus that so namely can reduce micro-fluidic chip processing and detect also can be done certain macroscopical thinking with microminiaturization for the further integration of multifunctional microflow control chip and be probed into.
Another important innovations point of the present invention is that all function is switched and is finished by computer control fully, do not need manual adjustments, like this so that experimental implementation is more convenient, and got rid of the impact of artificial subjective factor, be conducive to experiment and carry out accurately fast.
In addition, this device the is integrated micro-fluidic detection of visible light and Ultraluminescence are detected on all over the body, by the flexible conversion between these two kinds of detecting patterns that is controlled at of computing machine, are conducive to the characteristic of the samples such as the micro-biology of more quick comprehensively research, chemistry, medicine.
Summary of the invention
The technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, a kind of micro-fluidic chip processing and test experience device based on Digital Micromirror Device is provided, realize micro-fluidic chip processing and detect at same table apparatus, and be coupled in the CCD camera by the light path of designed, designed, realize the real-time detection of micro-example in the rapid processing of micro-fluidic chip and the micro-fluidic chip.
The technical scheme that the present invention adopts in order to achieve the above object is: a kind of micro-fluidic chip processing and test experience device based on Digital Micromirror Device (DMD) comprise ultraviolet LED light source, the first biconvex lens, the first catoptron, DMD device, dichroic mirror, the first micro objective, three-D electric platform, the second micro objective, the second biconvex lens, white LED light source, the second catoptron, color filter, the 3rd biconvex lens, CCD camera and computing machine.Wherein,
Described micro-fluidic chip soft lithographic exposure light path is made of ultraviolet LED light source, the first biconvex lens, the first catoptron, DMD device, dichroic mirror, the first micro objective, three-D electric platform and computing machine;
The visible light of micro-example detects optical routing white LED light source, the second biconvex lens, the second micro objective, three-D electric platform, the first micro objective, dichroic mirror, the second catoptron, color filter, the 3rd biconvex lens, CCD camera and computing machine formation in real time in the described micro-fluidic chip;
The Ultraluminescence of micro-example detects optical routing ultraviolet LED light source, the first biconvex lens, the first catoptron, DMD device, dichroic mirror, the first micro objective, three-D electric platform, the second catoptron, color filter, the 3rd biconvex lens, CCD camera and computing machine formation in real time in the described micro-fluidic chip;
Sample cell is placed on the three-D electric platform, and under computer control, sample is mobile along with carrying out three-dimensional on the three-D electric platform; The input end of described computing machine links to each other with described ultraviolet LED light source, DMD device, white LED light source, three-D electric platform, CCD camera respectively by signal wire; The fluid channel pattern of described Computer Design is loaded into the microchannel structural design pattern on the DMD device by databus; Described computing machine can and be stored the sequential image sequence that the CCD camera produces by the signal acquiring system collection.
The switching of the soft lithographic exposure light path of described fluid channel pattern need be by computing machine moving three dimension electric platforms to correct position, close white LED light source, close the CCD camera, load the fluid channel pattern to the DMD device, open ultraviolet LED light source, and throw light is to the DMD device, and this moment, this device was operated in the soft lithographic exposure mode.
In the described micro-fluidic chip visible light of micro-example and Ultraluminescence detect in real time light path switch to need by the control of computer starting three-D electric platform and with the three-D electric platform movement to correct position, open the CCD camera, load pattern to the DMD device, realize the switching of two kinds of detecting patterns by the switching of ultraviolet LED light source and white LED light source: when closing white LED light source, open ultraviolet LED light source, when control DMD exported complete bright pattern, this device was operated in the real-time detecting pattern of Ultraluminescence; When closing ultraviolet LED light source, close the DMD device, when opening white LED light source, this device is operated in the real-time detecting pattern of visible light.
Adopt real-time controlled DMD device to substitute the mask plate in the traditional handicraft, have and revise the advantages such as convenient.
Advantage of the present invention and good effect:
(1) the present invention is a kind of by computer control, utilizes the DMD device just can directly realize the photoresist of having processed is carried out the exposure of fluid channel pattern, and utilizes choosing of parts to realize the visible light of the interior micro-example of fluid channel and the device that Ultraluminescence detects.The device of inventing in conjunction with the preparation and determination methods technology of micro-fluidic chip is realized the ingenious switching of two kinds of functions by the control of computing machine.Wherein, the exposure of the soft lithographic of micro-fluidic chip utilizes imaging optical path to realize processing the exposure of photoresist; The detection of micro-example utilizes the imaging optical path realization to the selection of two kinds of pattern light sources in the micro-fluidic chip, utilizes the Real-time Motion Image of micro-example in the quick CCD collected by camera micro-fluidic chip.
(2) compare with traditional micro-fluidic chip process technology, the present invention adopts the imaging optical path of designed, designed, utilize the required fluid channel pattern of computer software design, then directly the fluid channel pattern is projected on the photoresist of having processed by imaging optical path, realize the exposure to photoresist.But can be directly with the mask plate of the upper pattern that shows of DMD as real time modifying, shortened the manufacturing cycle of micro-fluidic chip, overcome simultaneously, the uv-exposure unequal fluid channel yardstick limited problem that cause inadequate because of the mask plate precision, a kind of fluid channel method for making of quick accurate exposure is provided.
(3) apparatus of the present invention not only can be carried out the processing preparation of micro-fluidic chip; Can also be operated in the micro-fluidic chip detecting pattern, be used for measure the rheological characteristics of micro-example in the micro-fluidic chip and the real-time evolutionary process of test sample under concrete biochemical environment.It is that a cover combines micro-fluidic chip processing and is detected on device all over the body, will process at micro-fluidic chip, biological, chemistry, medicine and other fields play an important role.
Description of drawings
Micro-fluidic chip processing and the test experience device synoptic diagram of Fig. 1 radix word of the present invention micro mirror element;
Among the figure, 1 is ultraviolet LED light source, and 2 is the first biconvex lens, 3 is the first catoptron, and 4 is the DMD device, and 5 is dichroic mirror, 6 is the first micro objective, and 7 is the three-D electric platform, and 8 is the second micro objective, 9 is the second biconvex lens, and 10 is white LED light source, and 11 is the second catoptron, 12 is color filter, 13 is the 3rd biconvex lens, and 14 is the CCD camera, and 15 is computing machine.
Embodiment
Embodiments of the invention below are described.But following embodiment only limits to explain the present invention, and protection scope of the present invention should comprise the full content of claim, and namely can realize the full content of claim of the present invention to the person skilled in art by following examples.
As shown in Figure 1, Fig. 1 is the micro-fluidic chip processing and test experience device synoptic diagram that the present invention is based on Digital Micromirror Device (DMD), also is the structural representation of one embodiment of the present of invention.As seen from the figure, the present invention is based on the micro-fluidic chip processing and test experience device of Digital Micromirror Device, its formation comprises ultraviolet LED light source 1, the first biconvex lens 2, the first catoptron 3, DMD device 4, dichroic mirror 5, the first micro objective 6, three-D electric platform 7, the second micro objective 8, the second biconvex lens 9, white LED light source 10, the second catoptron 11, color filter 12, the 3rd biconvex lens 13, CCD camera 14 and computing machine 15.
Described micro-fluidic chip soft lithographic exposure light path is made of ultraviolet LED light source 1, the first biconvex lens 2, the first catoptron 3, DMD device 4, dichroic mirror 5, the first micro objective 6, three-D electric platform 7 and computing machine 15;
The visible light of micro-example detects optical routing white LED light source 10, the second biconvex lens 9, the second micro objective 8, three-D electric platform 7, the first micro objective 6, dichroic mirror 5, the second catoptron 11, color filter 12, the 3rd biconvex lens 13, CCD camera 14 and computing machine 15 formations in real time in the described micro-fluidic chip;
The Ultraluminescence of micro-example detects optical routing ultraviolet LED light source 1, the first biconvex lens 2, the first catoptron 3, DMD device 4, dichroic mirror 5, the first micro objective 6, three-D electric platform 7, the second catoptron 11, color filter 12, the 3rd biconvex lens 13, CCD camera 14 and computing machine 15 formations in real time in the described micro-fluidic chip;
Sample cell is placed on the three-D electric platform 7, and under computing machine 15 controls, sample is mobile along with carrying out three-dimensional on the three-D electric platform 7; The input end of described computing machine 15 links to each other with described ultraviolet LED light source 1, DMD device 4, white LED light source 10, three-D electric platform 7, CCD camera 13 respectively by signal wire;
The fluid channel pattern of described computing machine 15 designs also is loaded into the microchannel structural design pattern on the DMD device 4 by databus; Described computing machine 15 can and be stored the sequential image sequence that CCD camera 14 produces by the signal acquiring system collection.
Specific embodiment
The specific embodiment of the invention is the preferred embodiment of basic embodiment, and concrete is as follows:
In the present embodiment, the wavelength of described ultraviolet LED light source 1 emergent ray is 365nm, and line width is 7.5nm; The first biconvex lens 2 focal lengths are 200mm, and diameter is 50.8mm (2 inches), plating 350-700nm anti-reflection film.Jointly consist of ultraviolet LED by ultraviolet LED light source 1, the first biconvex lens 2 and expand light source.The beam diameter of this light source after expanding is about 10mm.
The size of described DMD device 4 is about 10*10mm, and dichroic mirror 5 can see through ultraviolet light and reflect visible light; The first micro objective 6 enlargement factors are 10X, and effective focal length is 20mm, plating 325-500nm near ultraviolet anti-reflection film.By DMD device 4, dichroic mirror 5 and the first micro objective 6 common composing images projecting light paths.
The optical wavelength that described white LED light source 10 produces is at 400-700nm; The second biconvex lens 9 focal lengths are 200mm, and diameter is 50.8mm (2 inches), plating 350-700nm anti-reflection film; The second micro objective 8 enlargement factors are 10X, and effective working distance is 10.6mm.Jointly consist of the illumination light system that detects light path by white LED light source 10, the second biconvex lens 9, the second micro objective 8, this lighting system adopts kohler's illumination.
Described CCD camera 14 resolution are 1280x1024, colour; What the 3rd biconvex lens 13 adopted is that focal length is 200mm, and diameter is 50.8mm (2 inches); The anti-visible light of dichroic mirror 5 saturating ultraviolet lights; The first micro objective 6 enlargement factors are 10X, and effective focal length is 20mm, plating 325-500nm near ultraviolet anti-reflection film; External hanging type three-D electric platform 7, stroke 50mm centre-height 102mm, range of adjustment ± 25mm.Jointly consist of the microscope light path by CCD camera 14 the 3rd biconvex lens 13 dichroic mirrors 5 first micro objectives 6 three-D electric platforms 7.Can select suitable optical filtering 12 according to detecting needs therebetween, light signal is filtered selection.
In this example, at micro-fluidic chip soft lithographic exposure mode, the ultraviolet light that ultraviolet LED light source 1 sends expands by the first biconvex lens 2, projects on the DMD device 4 with 45° angle after 3 reflections of the first catoptron again; By computing machine 15 the fluid channel pattern is loaded on the DMD device 4; Light sees through dichroic mirror 5 and the first micro objective 6 and directly projects on the three-D electric platform 7 through the selective reflecting of DMD device 4, and the photoresist of having processed is exposed.Under exposure mode, effectively the holding time of fluid channel pattern that is loaded into DMD device 4 recommends to be not less than 20s, closes ultraviolet LED light source 1 after exposure is finished.
The real-time detecting pattern of the visible light of micro-example in micro-fluidic chip, the visible light that is sent by white LED light source 10 expands by the second micro objective 8 by the second biconvex lens 9 and converges the micro-fluidic chip that shines on the three-D electric platform 7; Light sees through the first micro objective 6, through the reflection of dichroic mirror 5 and the second catoptron 11, through color filter 12, is imaged onto in the CCD camera 14 through the 3rd biconvex lens 13 again.Utilize computing machine 15 to gather the light signal that CCD camera 14 is accepted;
The real-time detecting pattern of the Ultraluminescence of micro-example in the described micro-fluidic chip sends ultraviolet light by ultraviolet LED light source 1 and projects on the DMD device 4 with 24 ° of angles through the first catoptron 3 by after the expanding of the first biconvex lens 2 again; By computing machine 15 complete bright pattern is loaded on the DMD device 4; Light sees through dichroic mirror 5 and the first micro objective 6 and converges the micro-fluidic chip that shines on the three-D electric platform 7 via 4 reflection of DMD device; Fluorescence sees through the first micro objective 6, by the reflection of dichroic mirror 5 and the second catoptron 11, after optical filtering 12 filters, converges in the CCD camera 14 through the 3rd biconvex lens 13 again.Utilize computing machine 15 to gather the light signal that CCD camera 14 is accepted.The inspection of effectively holding time that is loaded into the complete bright pattern of DMD device 4 is surveyed time length and is decided.
In the present embodiment, the height of ultraviolet LED light source 1 and white LED light source 10 outgoing beams is 100mm, is coupling optical path, and the present invention is adjusted at the 100mm height with corresponding optical device.
A key character of the present invention is, adopt the imaging optical path of designed, designed, utilize computer software (such as AdobeIillustrator or CorelDraw) design fluid channel pattern, then directly the fluid channel figure is projected on the glass sheet of having processed by imaging optical path, photoresist is carried out the exposure of fluid channel pattern.But can be directly with the mask plate of the upper pattern that shows of DMD as real time modifying.
Apparatus of the present invention not only can be carried out the processing preparation of micro-fluidic chip; Can also be operated in the micro-fluidic chip detecting pattern, and can effectively between these two patterns, switch.Be used for to measure the rheological characteristics of micro-example in the micro-fluidic chip and the real-time evolutionary process of test sample under concrete biochemical environment.
Wherein, can adopt following method to the processing of photoresist (selecting the SU-8 photoresist to carry out the present embodiment explanation):
The SU-8 photoresist is coated on Photoresisting coating machines (two stages of recommended hour are spared glue: the phase one rotating speed is 500rpm, and the time is 10s on the glass sheet; Subordinate phase rotating speed 2000rpm, the time is 30s), then glass sheet is placed on and toasts processing on the electric hot plate (two stages of recommended hour toast: the phase one temperature is 65 ℃, and the time is 6min; The subordinate phase temperature is 95 ℃, and the time is 20min), namely realized the processing to photoresist.
Other parts that do not elaborate of the present invention belong to techniques well known.
The above; only be part embodiment of the present invention, but protection scope of the present invention is not limited to this, any those skilled in the art are in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.
Claims (4)
1. micro-fluidic chip processing and test experience device based on a Digital Micromirror Device is characterized in that comprising: ultraviolet LED light source (1), the first biconvex lens (2), the first catoptron (3), DMD device (4), dichroic mirror (5), the first micro objective (6), three-D electric platform (7), the second micro objective (8), the second biconvex lens (9), white LED light source (10), the second catoptron (11), color filter (12), the 3rd biconvex lens (13), CCD camera (14) and computing machine (15); Wherein:
Ultraviolet LED light source (1), the first biconvex lens (2), the first catoptron (3), DMD device (4), dichroic mirror (5), the first micro objective (6), three-D electric platform (7) and computing machine (15) consist of micro-fluidic chip soft lithographic exposure light path;
The visible light that white LED light source (10), the second biconvex lens (9), the second micro objective (8), three-D electric platform (7), the first micro objective (6), dichroic mirror (5), the second catoptron (11), color filter (12), the 3rd biconvex lens (13), CCD camera (14) and computing machine (15) consist of micro-example in the micro-fluidic chip detects light path in real time;
The Ultraluminescence that ultraviolet LED light source (1), the first biconvex lens (2), the first catoptron (3), DMD device (4), dichroic mirror (5), the first micro objective (6), three-D electric platform (7), the second catoptron (11), color filter (12), the 3rd biconvex lens (13), CCD camera (14) and computing machine (15) consist of micro-example in the micro-fluidic chip detects light path in real time;
Sample cell is placed on the three-D electric platform (7), and under computing machine (15) control, sample moves along with three-D electric platform (7) carries out three-dimensional; The input end of described computing machine (15) links to each other with described ultraviolet LED light source (1), DMD device (4), white LED light source (10), three-D electric platform (7) and CCD camera (14) respectively by signal wire;
In the described computing machine (15) the microchannel structural design pattern is loaded on the DMD device (4); The sequential image sequence that described computing machine (15) produces by signal acquiring system collection and storage CCD camera (14);
Visible light and the Ultraluminescence of micro-example detect in real time in the soft lithographic exposure of fluid channel pattern, the micro-fluidic chip, by the switching of computer control implementation pattern.
2. according to claim 1 described micro-fluidic chip processing and test experience device based on Digital Micromirror Device, it is characterized in that: the switching of the soft lithographic exposure processing light path of described fluid channel pattern is passed through computing machine (15) moving three dimension electric platforms (7) to correct position, close white LED light source (10), close CCD camera (14), load micro-fluidic pattern to DMD (4) device, open ultraviolet LED light source (1), and throw light is to DMD device (4), and this moment, this device was operated in the soft lithographic exposure mode.
3. according to claim 1 described micro-fluidic chip processing and test experience device based on Digital Micromirror Device, it is characterized in that: the visible light of micro-example and Ultraluminescence detect in real time the light path switching and move to correct position by computer starting three-D electric platform (7) and with three-D electric platform (7) in the described micro-fluidic chip, open CCD camera (14), load figure signal to DMD (4) device, the switching of control ultraviolet LED light source (1) and white LED light source (10) realizes the switching of two kinds of detecting patterns: when closing white LED light source (10), open ultraviolet LED light source (1), during the complete bright pattern of control DMD (4) output, this device is operated in the real-time detecting pattern of Ultraluminescence; When closing ultraviolet LED light source (1), close DMD (4) output, when opening white LED light source (10), this device is operated in the real-time detecting pattern of visible light.
4. micro-fluidic chip processing and test experience device based on Digital Micromirror Device according to claim 1 is characterized in that: adopt real-time controlled DMD device to substitute the mask plate in the traditional handicraft, have and revise the advantages such as convenient.
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| CN109507117A (en) * | 2018-11-12 | 2019-03-22 | 中国科学技术大学 | A kind of micro-nano image checking experimental provision based on optoacoustic beam shaping |
| CN110376128A (en) * | 2019-07-24 | 2019-10-25 | 中国科学技术大学 | Microlens array preparation and detection device based on Digital Micromirror Device diffraction effect |
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| CN103486980A (en) * | 2013-08-28 | 2014-01-01 | 华侨大学 | Cross-scale measurement method based on digital micromirror device |
| CN108738344A (en) * | 2015-11-03 | 2018-11-02 | 沃特世科技公司 | The UV absorption detectors based on DMD for liquid chromatogram |
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| CN109507117A (en) * | 2018-11-12 | 2019-03-22 | 中国科学技术大学 | A kind of micro-nano image checking experimental provision based on optoacoustic beam shaping |
| CN109507117B (en) * | 2018-11-12 | 2020-04-03 | 中国科学技术大学 | Micro-nano imaging detection experimental device based on photoacoustic beam shaping |
| CN110376128A (en) * | 2019-07-24 | 2019-10-25 | 中国科学技术大学 | Microlens array preparation and detection device based on Digital Micromirror Device diffraction effect |
| CN112345477A (en) * | 2020-10-11 | 2021-02-09 | 嘉兴天培智能检测科技有限公司 | Calibration system and method for calibrating gas phase concentration of laser-induced fluorescence measurement |
| CN115268223A (en) * | 2022-07-15 | 2022-11-01 | 广东工贸职业技术学院 | Male die photoetching method, system and device for microfluidic chip and chip manufacturing method |
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