CN101226279A - Digital control light reaction system - Google Patents

Digital control light reaction system Download PDF

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Publication number
CN101226279A
CN101226279A CNA2007101952609A CN200710195260A CN101226279A CN 101226279 A CN101226279 A CN 101226279A CN A2007101952609 A CNA2007101952609 A CN A2007101952609A CN 200710195260 A CN200710195260 A CN 200710195260A CN 101226279 A CN101226279 A CN 101226279A
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light
control
lens
numeralization
photoreaction
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CNA2007101952609A
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CN101226279B (en
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高云华
周稳稳
徐百
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Technical Institute of Physics and Chemistry of CAS
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Technical Institute of Physics and Chemistry of CAS
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Abstract

The invention provides a digital control photoreaction system, which comprises: the device comprises an optical fiber light source system, a wavelength tunable filter, a light condensing and beam collimating system, a digital micromirror device, a total internal reflection prism, a projection combination lens group, a three-dimensional object stage, a CCD imager and a computer. The invention selects ultraviolet light, visible light or near infrared light according to the properties of the sample, can be widely applied to photochemical reaction and the research field of cells and microorganisms, and can realize digital control, high resolution and low cost.

Description

A kind of numeralization control photoreaction system
Technical field
The present invention relates to a kind of numeralization control photoreaction system, specifically, a kind of digital micro-mirror control photochemical reaction and light stimulus zone of utilizing, the system of realization biological sample, chemical example controllable reaction.
Background technology
Present known digital light is handled (DLP, Digital Light Processing) projection display equipment is to adopt reflective Digital Micromirror Device (DMD, Digital MicromirrorDevice), illuminating bundle reflection by micro mirror array provides lighting unit is presented on the screen to form image through projection lens.This technology is widely used in the projector.
Along with the Digital Micromirror Device development of technology, DMD just is being used in the instrument and equipment of various programmables, for example be applied to the mask-free photolithography system of microelectronic, be exactly that the miniature shadow casting technique of digital micro-mirror technology and light is combined, and quick, the highly sensitive digital mask lithography equipment that forms.But above-mentioned technology is the use that is confined to ultraviolet source, has only and could use the reaction system of ultraviolet light sensitivity, and the range of application of equipment is restricted.
Summary of the invention
The objective of the invention is in order to overcome the restriction of above-mentioned prior art, provide a kind of, in chemistry and the biological field Digital Control that can be applied, high resolution, photochemical reaction system cheaply not only at microelectronic.
Numeralization control photoreaction system of the present invention can be used for optionally controlling the photochemical reaction that the photopolymerization reaction, photolysis reactions, solid surface of sample on the substrate modified.Numeralization control photoreaction system of the present invention also can be used for optionally irritation cell or microorganism, realizes unicellular and stimulation, observation and test microorganism.
Numeralization control photoreaction system of the present invention comprises:
The optical fiber source system is used for penetrating light;
The wavelength-tunable light filter is used to filter the light that comes out from light emitted, selects suitable wavelengths;
Optically focused and passing through a collimating system are used to focus on and throw the light that sees through out from light filter;
Digital micro-mirror device is connected with computing machine and is subjected to computer control, photosignal display image;
Total internal reflection prism, the light that digital micro-mirror is reflected projects projection compound lens group by this total internal reflection prism;
Projection compound lens group, the image that digital micro-mirror device shows is adjusted size, precision and the image quality of image by light reflecting ﹠ transmitting projection compound lens;
Three-dimensional loading translation stage is used to carry reactant;
The CCD imager projects the on-chip light of three-dimensional transfer table from digital micro-mirror device by projection lens set, and again by the mirror reflects in the projection lens set, the state by observing reactant on the three-dimensional loading transfer table is connected with computing machine;
Computing machine is used for connecting and control light-source system, digital micro-mirror device three-dimensional loading translation stage and CCD imager.
Wherein, described optical fiber source system comprises LED or high-pressure sodium lamp, condenser lens, shutter and optical fiber, and condenser lens is arranged at the lamp front, is used for collecting the diverging light that projects from lamp; Shutter is arranged at the condenser lens front, is used for controlling the projection of light; Optical fiber is arranged at the shutter front, is used for conducting the light through shutter.
Wherein, described wavelength-tunable light filter is made up of a plurality of wavelength filter, is used in ultraviolet between the near infrared.
Wherein, described optically focused and passing through a collimating system comprise open column lens, light shade and one group of lens composition, so that hot spot that casts out and digital micro-mirror is measure-alike.
Wherein, described projection compound lens group comprises 0.5~20 times of different interchangeable lens group of dwindling.
Wherein, be equipped with on the described three-dimensional loading translation stage and can be used for fixing sample by pressure reducing mode with the structure of substrate suction on table top.
Described numeralization control photoreaction system can be used for optionally controlling photopolymerization reaction, photodestruciton reaction, the photochemical reaction of sample on the substrate, and the photosensitive region that can be used for optionally controlling cell on the substrate or microorganism.
Therefore the present invention has the following advantages:
1) use LED or high-pressure sodium lamp etc. and optical fiber coupling to form light-source system, can collect light beam easily, instrument is installed easily, also easily be connected with passing through a collimating system with optically focused, and overall price is cheap.
2) native system is connected with the CCD imager above the object lens of sample, can observe constantly and the recording light chemical reaction process, has increased the functions of use of this device.
2) the wavelength-tunable light filter is installed by this system, has expanded the usability of instrument.Therefore in the past prior art limitation near ultraviolet and ultraviolet light zone mainly are to be used for photoetching formation pattern; And reaction unit of the present invention has been installed the wavelength-tunable light filter in light path, can character per sample select ultraviolet light, visible light or near infrared light, therefore can be widely used in photochemical reaction and cell, microbe research field.
Description of drawings
Fig. 1 represents a kind of numeralization control photoreaction system synoptic diagram of the embodiment of the invention 1.
Fig. 2 represents a kind of numeralization control photoreaction system synoptic diagram of the embodiment of the invention 2.
Description of reference numerals:
Optical fiber source system 10; Lamp 101; Condenser lens 102; Shutter 103; Optical fiber 104; Wavelength-tunable light filter 20; Optically focused and passing through a collimating system 30; The bar-shaped integral mirror 301 of reflection-type; Lens 302,303,304; Digital micro-mirror device (DMD) 40; Digital micro-mirror 401; Total internal reflection prism 50; Projection compound lens group 60; Lens 601; Catoptron 602; Post lens combination 603; Miniature projection lens set 604; Half-reflecting mirror 605; Lens 606; Three-dimensional loading translation stage 70; Sample surfaces 701; CCD imager 80; Computing machine 90; Data line 901,902,903.
Embodiment
The present invention will be further described below with reference to drawings and Examples, and embodiments of the invention only are used to technical scheme of the present invention is described, and non-limiting the present invention.
Embodiment 1: a kind of numeralization control photoreaction system
With reference to figure 1, the numeralization control photoreaction system of the embodiment of the invention 1 comprises: optical fiber source system 10, wavelength- tunable light filter 20,40, one total internal reflection prisms 50 of 30, one digital micro-mirror devices of optically focused and passing through a collimating system (DMD), projection compound lens group 60, three-dimensional loading translation stage 70, observed and recorded CCD imager 80, computing machine 90 is formed.
The light that sends from optical fiber source system 10, behind wavelength-tunable light filter 20, incide digital micro-mirror 401 surfaces of digital micro-mirror device (DMD) 40 again by optically focused and passing through a collimating system 30, the light of digital micro-mirror 401 reflections projects projection compound lens group 60 by total internal reflection prism 50, make bulk compression or amplify after project sample surfaces 701 on the three-dimensional transfer table 70, the light of sample surfaces reflection is via the lens combination 604 in the projection compound lens group 60, and half-reflecting mirror 605 and one group of lens 606 enter CCD imager 80 record by imaging.Computing machine 90 connects also control figure micro-mirror device 40, three-dimensional loading translation stage 70, CCD 80 by data line 901,902,903.
Described optical fiber source system comprises a lamp 101, condenser lens 102, shutter 103 and optical fiber 104.The hot spot that condenser lens will focus on optical fiber internal diameter size from the optical fiber that lamp sends incides in the optical fiber by shutter.Shutter is used for controlling seeing through of light.
The other end at optical fiber 104 is connected with wavelength-tunable light filter 20, because the interior diameter of optical fiber is smaller usually, therefore can use undersized light filter.The light that sees through light filter 20 utilizes the bar-shaped integral mirror 301 of a kind of reflection-type all to restraint further by an integral mirror 301, and the length of side of integral mirror endpiece and digital micro-mirror 401 effective edges grow up to ratio, but are less than or equal to the length of side of digital micro-mirror 401.The light that comes out from integral mirror 301 passes through to project digital micro-mirror 401 surfaces through prism 50 after 302,303,304 lens expand bundle.
Pass through a total internal reflection prism 50 from the light of digital micro-mirror 401 surface reflections, lens 601, catoptron 602, post lens combination 603, half-reflecting mirror 605 and miniature projecting lens 604 project sample 701 surfaces on the three-dimensional loading translation stage 70.The image on sample 701 surfaces after half-reflecting mirror 605 and the lens combination 606, is recorded as picture by 80 seizure of CCD imager by miniature lens 604.The light path design that adopts in the miniature lens 604 of projection compound lens group 60 can make the pattern on the sample reflect on miniature lens 604 Central Plains road, the imaging resolution height in the CCD imager, and it is little to distort.
Described digital micro-mirror device 40 is the known DMD that DMD on the projector or TI company produce for specific use that are used for.This DMD is connected by data line with computing machine.
Described miniature lens 604 comprise that 0.5~20 times of different lens combination of dwindling forms, and as the object lens of optical microscope, can select the lens that use by the rotation of rotating disk.
Described three-dimensional loading translation stage is used for adjusting the position between sample 701 and the miniature projection lens set 604, and sample is positioned on the image of miniature lens 604 as far as possible.Large-area example reaction, needs change the relative position of sample and miniature lens 604, and the change of sample position realizes by moving three dimension loading translation stage 70.
Described observing system is made up of lens 606 and CCD imager 80, and the variation of sample structure, change in color are preserved by the CCD record by imaging.
Computing machine 90 is used for designed image and be transferred to digital micro-mirror device 40, and computing machine also is used for controlling the mobile process of three-dimensional loading translation stage 70, and simultaneous computer also is used for controlling CCD imager 80.
The equipment of this invention can be used for carrying out selective light chemical reaction, selective light cracking reaction, selective photocatalysis reaction etc.Also can be used for the research of optionally light stimulus such as cell, tissue, photoresponse.
Embodiment 2: a kind of numeralization control photoreaction system
With reference to figure 2, the parts of the present invention and embodiment are formed basic identical, and just therefore the structure difference of projection compound lens group 60 is used also different.Concrete structure is as follows:
The numeralization control photoreaction system of embodiment 2 comprises: optical fiber source system 10, wavelength-tunable light filter 20, optically focused and passing through a collimating system 30, a digital micro-mirror device (DMD) 40, a total internal reflection prism 50, projection compound lens group 60, three-dimensional loading translation stage 70, observed and recorded CCD imager 80, computing machine 90 is formed.
The light that sends from optical fiber source system 10, behind wavelength-tunable light filter 20, incide digital micro-mirror 401 surfaces of digital micro-mirror device (DMD) 40 again by optically focused and passing through a collimating system 30, the light of digital micro-mirror 401 reflections projects projection compound lens group 60 by total internal reflection prism 50, make bulk compression or amplify after project sample surfaces 701 on the three-dimensional transfer table 70, the light of sample surfaces reflection is via the miniature projection lens set 604 in the projection compound lens group 60, and half-reflecting mirror 605 and one group of lens 606 enter CCD imager 80 record by imaging.Computing machine 90 connects also control figure micro-mirror device 40, three-dimensional loading translation stage 70, CCD 80 by data line 901,902,903.
Described optical fiber source system comprises a lamp 101, condenser lens 102, shutter 103 and optical fiber 104.The hot spot that condenser lens will focus on optical fiber internal diameter size from the optical fiber that lamp sends incides in the optical fiber by shutter.Shutter is used for controlling seeing through of light.
The other end at optical fiber 104 is connected with wavelength-tunable light filter 20, because the interior diameter of optical fiber is smaller usually, therefore can use undersized light filter.The light that sees through light filter 20 utilizes the bar-shaped integral mirror 301 of a kind of reflection-type all to restraint further by an integral mirror 301, and the length of side of integral mirror endpiece and digital micro-mirror 401 effective edges grow up to ratio, but are less than or equal to the length of side of digital micro-mirror 401.The light that comes out from integral mirror 301 passes through to project digital micro-mirror 401 surfaces through prism 50 after 302,303,304 lens expand bundle.
Pass through a total internal reflection prism 50 from the light of digital micro-mirror 401 surface reflections, lens 601, catoptron 602, post lens combination 603, half-reflecting mirror 605 and miniature projection lens set 604 project sample 701 surfaces on the three-dimensional loading translation stage 70.The image on sample 701 surfaces after half-reflecting mirror 605 and the lens combination 606, is recorded as picture by 80 seizure of CCD imager by miniature projection lens set 604.
One group of convex lens is arranged in the lens combination 604 among the present invention, make incident light (light that reflects back from DMD) and reflected light (light of being caught by CCD) according to different path projections, this design is not only applicable to the projection of the incident light light identical with catoptrical wavelength, also be applicable to incident light (exciting light) and the different reaction of reflected light (emission light), as the photochemically reactive demand of fluorescence, further enlarged the usable range of this apparatus.
The present invention is illustrated by top embodiment, and still, the present invention is not limited to particular example as described herein and embodiment.The purpose that comprises these particular example and embodiment here is to help those of skill in the art to put into practice the present invention.Any those of skill in the art are easy to be further improved under the situation that does not break away from branch invention spirit and scope and are perfect, therefore the restriction that divides invention only to be subjected to the content and the scope of claim of the present invention, its intention are contained all and are included in alternatives and equivalent in the spirit and scope of the invention that is limited by appendix claim.

Claims (10)

1. a numeralization control photoreaction system is characterized in that, described numeralization control photoreaction system comprises:
The optical fiber source system is used for penetrating light;
The wavelength-tunable light filter is used to filter the light that comes out from light emitted, selects suitable wavelengths;
Optically focused and passing through a collimating system are used to focus on and throw the light that sees through out from light filter;
Digital micro-mirror device is connected with computing machine and is subjected to computer control, photosignal display image;
Total internal reflection prism, the light that digital micro-mirror is reflected projects projection compound lens group by this total internal reflection prism;
Projection compound lens group, the image that digital micro-mirror device shows is adjusted size, precision and the image quality of image by light reflecting ﹠ transmitting projection compound lens;
Three-dimensional loading translation stage is used to carry reactant;
The CCD imager projects the on-chip light of three-dimensional transfer table from digital micro-mirror device by projection lens set, and again by the mirror reflects in the projection lens set, the state by observing reactant on the three-dimensional loading transfer table is connected with computing machine;
Computing machine is used for connecting and control light-source system, digital micro-mirror device three-dimensional loading translation stage and CCD imager.
2. numeralization control photoreaction system according to claim 1 is characterized in that: described optical fiber source system comprises: LED or high-pressure sodium lamp, condenser lens, shutter and optical fiber, wherein,
Condenser lens is arranged at the lamp front, is used for collecting the diverging light that projects from lamp;
Shutter is arranged at the condenser lens front, is used for controlling the projection of light;
Optical fiber is arranged at the shutter front, is used for conducting the light through shutter.
3. numeralization control photoreaction system according to claim 1 is characterized in that: described wavelength-tunable light filter is made up of a plurality of wavelength filter, is used in ultraviolet between the near infrared.
4. numeralization control photoreaction system according to claim 1 is characterized in that: described optically focused and passing through a collimating system comprise open column lens, light shade and one group of lens composition, so that hot spot that casts out and digital micro-mirror is measure-alike.
5. numeralization control photoreaction system according to claim 1 is characterized in that: described projection compound lens group comprises 0.5~20 times of different interchangeable lens group of dwindling.
6. numeralization control photoreaction system according to claim 1 is characterized in that: be equipped with on the described three-dimensional loading translation stage and can be used for fixing sample by pressure reducing mode with the structure of substrate suction on table top.
7. according to the arbitrary described numeralization control photoreaction system of claim 1~6, it is characterized in that: described numeralization control photoreaction system can be used for optionally controlling the photopolymerization reaction of sample on the substrate.
8. according to the arbitrary described numeralization control photoreaction system of claim 1~6, it is characterized in that: described numeralization control photoreaction system can be used for optionally controlling the photodestruciton reaction of sample on the substrate.
9. according to the arbitrary described numeralization control photoreaction system of claim 1~6, it is characterized in that: described numeralization control photoreaction system can be used for optionally controlling the photochemical reaction that substrate surface is modified.
10. according to the arbitrary described numeralization control photoreaction system of claim 1~6, it is characterized in that: described numeralization control photoreaction system can be used for optionally controlling the photosensitive region of cell on the substrate or microorganism.
CN2007101952609A 2007-12-05 2007-12-05 Digital control light reaction system Expired - Fee Related CN101226279B (en)

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Cited By (9)

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CN101813287A (en) * 2010-03-23 2010-08-25 深圳市华测检测技术股份有限公司 Illumination control method of atmospheric photochemical reaction
CN102967556A (en) * 2012-12-06 2013-03-13 中国科学技术大学 Micro-flow control chip machining and detection experiment device based on digital micro-mirror device
CN103364345A (en) * 2013-06-25 2013-10-23 浙江大学 Total-reflection microscope circular scanning method and device based on digital micro-mirror device
CN103595483A (en) * 2013-11-20 2014-02-19 中国电子科技集团公司第四十一研究所 Multiband modulation light source based on ultraviolet LED
CN103868889A (en) * 2012-12-18 2014-06-18 中国科学技术大学 Micro cantilever beam array biochemical sensing device based on micro-mirror scanning and method
CN106772994A (en) * 2016-11-28 2017-05-31 华东师范大学 The ken may be programmed microscopie unit
CN108732736A (en) * 2017-04-24 2018-11-02 复旦大学 It is integrated with microscopic system of the digital micromirror array to electro-optical device
CN108803204A (en) * 2017-04-28 2018-11-13 宏碁股份有限公司 The operating method of projector and projector
CN110095948A (en) * 2019-05-03 2019-08-06 南昌航空大学 A kind of optical fibre device digital photolithography method based on combination DMD

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CN1039453C (en) * 1994-06-23 1998-08-05 武汉大学 Multifunction Aadamard's transformation micrograph analytical instrument
US6002476A (en) * 1998-04-22 1999-12-14 Chemicon Inc. Chemical imaging system
US7046359B2 (en) * 2004-06-30 2006-05-16 Chemimage Corporation System and method for dynamic chemical imaging
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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101813287A (en) * 2010-03-23 2010-08-25 深圳市华测检测技术股份有限公司 Illumination control method of atmospheric photochemical reaction
CN101813287B (en) * 2010-03-23 2013-04-24 深圳市华测检测技术股份有限公司 Illumination control method of atmospheric photochemical reaction
CN102967556A (en) * 2012-12-06 2013-03-13 中国科学技术大学 Micro-flow control chip machining and detection experiment device based on digital micro-mirror device
CN102967556B (en) * 2012-12-06 2014-12-10 中国科学技术大学 Micro-flow control chip machining and detection experiment device based on digital micro-mirror device
CN103868889A (en) * 2012-12-18 2014-06-18 中国科学技术大学 Micro cantilever beam array biochemical sensing device based on micro-mirror scanning and method
CN103364345A (en) * 2013-06-25 2013-10-23 浙江大学 Total-reflection microscope circular scanning method and device based on digital micro-mirror device
CN103364345B (en) * 2013-06-25 2015-11-11 浙江大学 Based on total reflection microscope circular scan method and the device of digital micromirror elements
CN103595483A (en) * 2013-11-20 2014-02-19 中国电子科技集团公司第四十一研究所 Multiband modulation light source based on ultraviolet LED
CN106772994A (en) * 2016-11-28 2017-05-31 华东师范大学 The ken may be programmed microscopie unit
CN108732736A (en) * 2017-04-24 2018-11-02 复旦大学 It is integrated with microscopic system of the digital micromirror array to electro-optical device
CN108803204A (en) * 2017-04-28 2018-11-13 宏碁股份有限公司 The operating method of projector and projector
CN110095948A (en) * 2019-05-03 2019-08-06 南昌航空大学 A kind of optical fibre device digital photolithography method based on combination DMD

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