CN102963124B - Gas jet printing device and jet printing method - Google Patents
Gas jet printing device and jet printing method Download PDFInfo
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- CN102963124B CN102963124B CN201210496208.8A CN201210496208A CN102963124B CN 102963124 B CN102963124 B CN 102963124B CN 201210496208 A CN201210496208 A CN 201210496208A CN 102963124 B CN102963124 B CN 102963124B
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- jet printing
- gas
- gas jet
- printing appts
- injection apparatus
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Abstract
The invention discloses a gas jet printing device, which comprises a gasifying chamber, a gas inlet pipe connected with the gasifying chamber, a gas outlet pipe connected with the gasifying pipe, and a receiving device, wherein the gasifying chamber is provided with an accommodating space and comprises a heating device and a material chamber for accommodating samples; the gas inlet pipe is used for feeding carrier gas; the gas outlet pipe is used for conveying aerial fog; a spraying device is arranged at the tail end of the gas outlet pipe and comprises a sprayer and a carrier gas pipe; and the receiving device is arranged in front of the spraying device and is used for receiving the aerial fog from the spraying device. The gas jet printing device has the advantages of simplicity in operation, accuracy in positioning and wide application range; a solid is not required to be dissolved into a solution; the problem caused by solution preparation in a nano manufacturing technology, such as printing and electric spinning, can be solved; and the shortcoming that a nano material cannot be accurately manufactured in a microcell range in the conventional physical vapor deposition (PVD), chemical vapor deposition (CVD) and vacuum evaporation process can be overcome.
Description
Technical field
The present invention relates to one in an atmosphere without the need to mask plate, can to realize the device that within the scope of microcell, nano material preparation and component graphics are constructed, particularly relate to a kind of gas jet printing appts.
Background technology
In recent years, along with microminiaturization and the patterning of nano-device, the minute manufacturing technique of " from bottom to top " is build nano functional device of new generation to provide a kind of feasible means.Traditional " from bottom to top " nanometer manufacturing process mainly contains solwution method and PVD method, PVD method is by directly then heating materials distillation being deposited into corresponding substrate, the factor such as solubility and solvent not by material affects, there is applied range advantage, but PVD is generally used for extensive deposition, be difficult to realize the preparation of nano material in microcell and even nano-scale range and constructing of graphical device, people bring into use solwution method to realize the preparation of microcell nano material and constructing of microcell patterning nano-device for this reason, at present for constructing method major print and the Electrospinning of graphical nano material, these two kinds of technology all can realize the preparation of nano material within the scope of microcell and constructing of graphical device at ambient temperature, but require high to the dissolubility of material in actual applications, particularly for a lot of indissoluble even slightly soluble material cannot be suitable for, in processing technology, solvent is selected simultaneously, viscosity, the physicochemical properties such as surface tension and environmental factor require harsher, technique is difficult to obtain stability contorting.
Therefore, seek a kind of applied range, simple to operate, the device and method tool of the preparation and component graphics that simultaneously can realize material in microcell and even nano-scale range is of great significance.
Summary of the invention
For the above-mentioned prior art Problems existing mentioned, the invention provides a kind of gas jet printing appts and application thereof, this apparatus structure is simple, easy and simple to handle, spray printing accurate positioning, applied range.
In order to realize above-mentioned object, the invention provides following technical scheme:
A kind of gas jet printing appts, comprising:
Vaporizer, has a receiving space;
Be positioned at supplies room and the heater of described receiving space, this heater heats the material in supplies room and makes it be sublimed into aerosol;
The air inlet pipe for passing into carrier gas be communicated with described vaporizer;
The escape pipe for exporting aerosol be communicated with described vaporizer;
Injection apparatus, is located at the end of described escape pipe;
Receiving system, receives the aerosol from injection apparatus.
Preferably, described air inlet pipe is provided with the mass flowmenter for controlling charge flow rate.
Preferably, described escape pipe is provided with the mass flowmenter for controlling out throughput.
Further, described injection apparatus is connected with the conduit for carrier gas; Described conduit is provided with the mass flowmenter controlling carrier gas flux.
Preferably, described escape pipe is arranged with heating jacket; Described heating jacket is used for preventing aerosol from condensing in escape pipe.
Concrete, the material in described supplies room is distillation to occur and the sublimate organic matter or inorganic matter that react; Described organic matter mainly comprises the small molecular semiconductors such as metal phthalocyanine, metalloporphyrin and fullerene; Described inorganic matter mainly comprises the metal oxide such as the metals such as gold, silver, copper, aluminium and zinc oxide, titanium oxide, cupric oxide.
Preferably, the opening diameter of described injection apparatus is 10nm-1mm.
Preferably, the distance between described injection apparatus and receiving system is greater than 0, is less than or equal to 2cm.
Present invention also offers a kind of jet printing method, the method use gas jet printing appts as above, it mainly comprises the following steps:
S1, substrate to be positioned on receiving system, and the position that needs are deposited is positioned at immediately below shower nozzle, to realize the accurate location of course of injection;
S2, heating is carried out to material make it to be sublimed into aerosol;
S3, by injection apparatus, described aerosol to be sprayed on the reception device.
The gas jet printing appts provided of the present invention is applicable to all organic matter and inorganic matter that distillation and process of sublimating occur, its principle is placed on receiving device by the substrate cleaned up, be right against immediately below injection apparatus by needing the position of deposition materials, sample is put into feed indoor, pass into carrier gas from air inlet pipe simultaneously, opening heater makes sample distillation produce aerosol, and aerosol flows into shower nozzle through escape pipe under the impetus of carrier gas, is accurately sprayed onto on receiving device.The present invention has simple to operate, accurate positioning, the advantage of applied range, without the need to by dissolution of solid wiring solution-forming, both the puzzlement that in the nano-fabrication technique such as printing, Electrospun, solution allocation is brought can be overcome, simultaneously conventional P VD can be overcome again, the shortcoming that cannot be accurately positioned in manufacture nano material microcell within the scope of existed in CVD and vacuum evaporation process.
Accompanying drawing explanation
Fig. 1 is the structural representation of the gas jet printing appts of a preferred embodiment of the present invention.
Detailed description of the invention
As previously mentioned, in order to overcome prior art Problems existing, provide a kind of gas jet printing appts, as shown in Figure 1, this device comprises:
Vaporizer 1, described vaporizer 1 has a receiving space, and described vaporizer 1 comprises heater 2 and the supplies room 3 for placing sample; The air inlet pipe 4 be connected with vaporizer 1, described air inlet pipe 4 is for passing into carrier gas; The escape pipe 5 be connected with vaporizer 1, described escape pipe 5 is for conveying air fog; The end of escape pipe 5 is provided with injection apparatus 6, and described injection apparatus 6 comprises shower nozzle and carrier gas pipe 12; And, be arranged at the receiving device 7 in injection apparatus 6 front, for receiving the aerosol from injection apparatus 6.
Described heater 2 is positioned at the below of supplies room 3; Or described heater 2 is surrounded on the surrounding of supplies room 3.
The gas jet printing appts provided of the present invention is applicable to all organic matter and inorganic matter that distillation and process of sublimating occur, and concrete, described organic matter mainly comprises the small molecular semiconductors such as metal phthalocyanine, metalloporphyrin and fullerene; Described inorganic matter mainly comprises the metal oxide such as the metals such as gold, silver, copper, aluminium and zinc oxide, titanium oxide, cupric oxide, its principle is that sample is put into feed indoor, pass into carrier gas from air inlet pipe simultaneously, opening heater makes sample distillation produce aerosol, aerosol flows into shower nozzle through escape pipe under the impetus of carrier gas, is accurately sprayed onto on receiving device.
Further, this device also comprises the mass flowmenter 10,9,11 be arranged at respectively on air inlet pipe 4, escape pipe 5 and carrier gas pipe 12, for controlling the flow velocity of carrier gas and sample aerosol.
Preferably, described escape pipe 5 is connected with heating jacket 8; Described heating jacket 8 condenses in escape pipe 5 for preventing aerosol; At escape pipe shorter or length ignore time, also can not be provided with heating jacket.
Preferably, the opening diameter of described injection apparatus is 50nm-1mm.
Preferably, the distance between described receiving device 7 and the shower nozzle of injection apparatus 6 is less than 2 cm.
embodiment 1:
The substrate cleaned up is placed on receiving device 7, and will the position of deposited material be needed accurately in alignment with below injection apparatus 6, organic molecule CuPc (CuPc) is put into supplies room 3, open mass flowmenter 10 and from air inlet pipe 4, pass into nitrogen as carrier gas using the flow velocity of 100 ml/min, open heater, the temperature of heater 2 is risen to 500 DEG C by the speed of 50 DEG C/min, open the heater 8 of the outside of escape pipe simultaneously, its temperature is made to rise to 500 DEG C, after heating 2 min clocks, the speed of mass flowmenter 4 is set to 50 ml/min, and open mass flowmenter 11 and pass into nitrogen as carrier gas for driving aerosol by the flow velocity of 80 ml/min, aerosol is accurately sprayed onto substrate 7 under the driving of carrier gas, aerosol is sprayed onto rapid crystallization after substrate, substrate obtains CuPc nanocrystalline.
embodiment 2:
Experimental procedure is identical with enforcement case 1, but the material selected by the implementation case is cupric oxide, the heating-up temperature of heater 2 is 1500 DEG C, and the flow velocity of mass flowmenter 10 is 150 ml/min, the flow velocity of mass flowmenter 4 is 100 ml/min, and the flow velocity of mass flowmenter 11 is 70 ml/min.
embodiment 3:
Experimental procedure is identical with case study on implementation one, but the target material selected by the implementation case is silver, the raw material that supplies room 3 is put into is silver strip, heating-up temperature is 1000 DEG C, the flow velocity of mass flowmenter 10 is 20 ml/min, the flow velocity of mass flowmenter 4 is 110 ml/min, and the flow velocity of mass flowmenter 11 is 20 ml/min.
The above is only the detailed description of the invention of the application; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the application's principle; can also make some improvements and modifications, these improvements and modifications also should be considered as the protection domain of the application.
Claims (7)
1. a gas jet printing appts, is characterized in that, comprising:
Vaporizer, has a receiving space;
Be positioned at supplies room and the heater of described receiving space, this heater heats the material in supplies room and makes it be sublimed into aerosol;
The air inlet pipe for passing into carrier gas be communicated with described vaporizer;
The escape pipe for exporting aerosol be communicated with described vaporizer;
Injection apparatus, is located at the end of described escape pipe, and the opening diameter of described injection apparatus is 10nm ~ 1mm;
Receiving system, receives the aerosol from injection apparatus, realizes component graphics in microcell and even nano-scale range.
2. gas jet printing appts according to claim 1, is characterized in that: described air inlet pipe is provided with the mass flowmenter for controlling charge flow rate.
3. gas jet printing appts according to claim 1, is characterized in that: described escape pipe is provided with the mass flowmenter for controlling out throughput.
4. gas jet printing appts according to claim 1, is characterized in that: described injection apparatus is connected with the conduit for carrier gas.
5. gas jet printing appts according to claim 4, is characterized in that: described conduit is provided with the mass flowmenter controlling carrier gas flux.
6. gas jet printing appts according to claim 1, is characterized in that: described escape pipe is arranged with heating jacket.
7. gas jet printing appts according to claim 1, is characterized in that: the material in described supplies room is distillation to occur and the sublimate organic matter or inorganic matter that react.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210496208.8A CN102963124B (en) | 2012-11-29 | 2012-11-29 | Gas jet printing device and jet printing method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210496208.8A CN102963124B (en) | 2012-11-29 | 2012-11-29 | Gas jet printing device and jet printing method |
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| CN102963124A CN102963124A (en) | 2013-03-13 |
| CN102963124B true CN102963124B (en) | 2015-06-03 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104962863B (en) * | 2015-05-06 | 2018-05-25 | 中国科学院广州能源研究所 | A kind of atom level vacuum gaseous state 3D printing system |
| CN106498369B (en) * | 2017-01-04 | 2019-02-19 | 合肥京东方光电科技有限公司 | A kind of container and the prosthetic appliance for being repaired to display base plate |
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| US6810575B1 (en) * | 1998-04-30 | 2004-11-02 | Asahi Kasai Chemicals Corporation | Functional element for electric, electronic or optical device and method for manufacturing the same |
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| CN101568666A (en) * | 2006-12-26 | 2009-10-28 | 株式会社Cowindst | Metal gas supply apparatus and remaining gas removal apparatus used for thin film depositing apparatus and method thereof |
| EP2239227A1 (en) * | 2008-01-31 | 2010-10-13 | Nikkiso Co., Ltd. | Carbon nanotube synthesizer |
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Granted publication date: 20150603 Termination date: 20201129 |