CN102955250B - Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror - Google Patents
Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror Download PDFInfo
- Publication number
- CN102955250B CN102955250B CN201210415462.0A CN201210415462A CN102955250B CN 102955250 B CN102955250 B CN 102955250B CN 201210415462 A CN201210415462 A CN 201210415462A CN 102955250 B CN102955250 B CN 102955250B
- Authority
- CN
- China
- Prior art keywords
- micro mirror
- mems micro
- catoptron
- mirror
- mems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses an optical scanning device based on an MEMS (Micro-electromechanical Systems) micromirror. The optical scanning device based on the MEMS micromirror comprises an optical collimator and the MEMS micromirror. The incident ray emitted by a light source and collimated by the optical collimator is reflected by the MEMS micromirror. A reflector is arranged on a light path between the light source and the MEMS micromirror. The middle part of the reflector is hollow or transparent, so that the incident ray can pass through normally. A reflective mirror face is arranged on the outer ring of the reflector to reflect ray reflected by the MEMS micromirror to a scanning sample. According to the optical scanning device based on the MEMS micromirror provided by the invention, the scanning range is effectively expanded, and lateral circular scanning and forward circular scanning can be realized through a design of the reflective mirror face. Compared with the prior art, the optical scanning device based on the MEMS micromirror provided by the invention is wider in scanning range, simple in structure, and low in cost.
Description
Technical field
The present invention relates to a kind of optical scanner, particularly relate to a kind of based on MEMS(Micro-Electro-Mechanic System, MEMS (micro electro mechanical system)) optical scanner of micro mirror.
Background technology
Optical scanner is widely used in the fields such as medical imaging, projector, spectrometer and graphic code reader at present.Such as, the scanning head used in medical imaging.Microminiaturization is the Main Trends of The Development of optical scanner, the delicate structure that MEMS micro mirror has due to it, control the advantages such as simple, low in energy consumption, be specially adapted to microminiaturized optical scanner, therefore, the main flow of current micro-optical scanning technique has been become based on the optical scanner of MEMS micro mirror.
The ultimate principle of MEMS micro mirror is: the driving force accurately being controlled the rotation of micro mirror minute surface by micro electronmechanical driving mechanism, realizes the anglec of rotation accurately controlling micro mirror minute surface, thus reaches the direction of propagation of accurately control light.MEMS micro mirror sums up primarily of three parts composition (as shown in Figure 1): frame C, drives structure B, minute surface A.Wherein drives structure B is for connecting minute surface A and frame C and driving minute surface A to rotate and then control the reflection direction of the light incided on minute surface.Existing MEMS micro mirror can be divided into a peacekeeping two dimension MEMS micro mirror according to the rotatable direction of minute surface, can be divided into again the kinds such as electrostatic is driving, electromagnetic drive type, electrothermal drive type and piezoelectric driven according to type of drive difference.Optical scanner based on MEMS micro mirror generally includes optics collimator (such as Green lens, lenticule etc.) and MEMS micro mirror, and the sleeve pipe also comprised for the protection of each optical device had, sleeve pipe is provided with beam projecting window.The incident ray that light source sends, after optics collimator collimation, by MEMS micromirror reflects to target sample, by the rotation of control MEMS micro mirror minute surface, changes the direction of reflection ray, can realize the scanning to target sample.
But, although what MEMS micro mirror was different is designed with different performances, but the corner of present stage MEMS micro mirror is by the restriction of the factors such as material, technique or cost, its corner less (being usually less than 30 degree), therefore sweep limit is less, and wide-angle scanning (particularly lateral circumference scanning) is difficult to realize.Meanwhile, because the incident ray of MEMS micro mirror is different with the direction of reflection ray, the scan forward that realize MEMS micro mirror is also very difficult.
In sum, the existing optical scanner based on MEMS micro mirror is owing to being subject to the restriction of MEMS micro mirror performance, the deficiency that ubiquity sweep limit is little, light channel structure is complicated.
Summary of the invention
Technical matters to be solved by this invention is to overcome the deficiencies in the prior art, provides a kind of optical scanner based on MEMS micro mirror, has the scope that more exposes thoroughly, and structure is simple, realizes with low cost.
The present invention specifically solves the problems of the technologies described above by the following technical solutions:
Based on an optical scanner for MEMS micro mirror, comprising: optics collimator and MEMS micro mirror, the incident ray that light source sends through optics collimator collimation after, by MEMS micromirror reflects; Light path between light source and MEMS micro mirror is provided with a catoptron; The center section hollow or transparent of this catoptron, can for incident ray normal through; The outer ring of this catoptron is mirror surface, by the light reflection of MEMS micromirror reflects to scanned samples.
In technique scheme, catoptron can be arranged between light source and optics collimator, also can be arranged between optics collimator and MEMS micro mirror, as long as can make incident ray normal through and reflect the light of MEMS micromirror reflects, but in order to make the more compact structure of device, the preferred following scheme of the present invention: described catoptron center section hollow, the geomery of hollow space and the outer shape size of described optics collimator adapt, and catoptron is placed on optics collimator outside by hollow space.
In the present invention, the minute surface of catoptron can adopt various feasible design according to actual needs, is below several concrete preferred versions:
The mirror surface entirety of preferred version one, described catoptron outer ring is a half cone-shaped; According to the difference for scanned samples position, the cone mouth of described half cone-shaped can point to MEMS micro mirror, also can point to light source.
The mirror surface entirety of preferred version two, described catoptron outer ring is the partial ellipsoids obtained spheroid cutting by two parallel planes, and two parallel planes are parallel to major axis or the minor axis of spheroid.
The mirror surface entirety of preferred version three, described catoptron outer ring comprises at least two coaxial half cone-shaped.
Two dimension MEMS micro mirror comprises the controlled rotating shaft of two independence, by prior programming, to each axle periodic voltage signal in some way, can realize the multiple scanning of different graphic.Apply the triangular wave of different frequency or just profound ripple respectively, can raster scanning be realized.Apply sinusoidal signal and cosine signal respectively, can circular scan be realized.The preferred two-dimentional MEMS micro mirror of MEMS micro mirror in the present invention, thus side direction/forward direction circular scan can be realized.
The MEMS micro mirror of various existing type of drive can be adopted in the present invention, consider that common MEMS micro mirror needs to connect wire, can produce light path and block, though do not affect entire scan effect, but a small amount of scan area can be sacrificed.This problem can utilize transparent conductors to solve, and the present invention preferably adopts the MEMS micro mirror of wireless driving, the MEMS micro mirror that such as RF drives, or realizes wireless driving by installing battery at MEMS micro mirror end.
The present invention, by an additional catoptron, by the light of MEMS micromirror reflects secondary reflection again, deflects to scanned samples, effectively extends sweep limit, and by the design of mirror mirror, realizes lateral circumference scanning and forward direction circular scan.Compared to existing technology, the present invention has wider sweep limit, and structure is simple, realizes with low cost.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of existing two-dimentional MEMS micro mirror, and wherein A is minute surface, and B is drives structure, and C is frame;
Fig. 2 is the principle schematic that optical scanner of the present invention realizes lateral circumference scanning;
Fig. 3 is the principle schematic that optical scanner of the present invention realizes forward direction circular scan;
Fig. 4 (a) to Fig. 4 (e) is respectively the transverse section of several different designs of mirror mirror in optical scanner of the present invention;
Fig. 5 is the cross section structure schematic diagram of optical scanner embodiment one of the present invention;
Fig. 6 is the cross section structure schematic diagram of optical scanner embodiment two of the present invention;
Fig. 7 is the cross section structure schematic diagram of optical scanner embodiment three of the present invention;
Each label implication in figure: 1 is optics collimator, 2 is catoptron, and 3 is MEMS micro mirror, and 4 is sleeve pipe, and 5 is exit window, and 6 is transparent supporting columns.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is described in detail:
Thinking of the present invention is for the little deficiency of MEMS micro mirror sweep limit, utilizes a catoptron to carry out secondary reflection to the reflected light of MEMS micro mirror, thus effectively expands sweep limit; By the design of suitable mirror mirror, lateral circumference scanning and forward direction circular scan that prior art is difficult to realization can be realized.
Due to the light that this catoptron needs reflection MEMS micromirror reflects to go out, therefore should be arranged in the light path between light source and MEMS micro mirror; In order to not to incident ray formed block, this catoptron is divided into two parts: center section hollow or transparent, can for incident ray normal through; Outer ring is mirror surface.Like this, the scanning of larger angle can be realized by the rotation by a small margin of MEMS micro mirror.In order to make the more compact structure of device, the preferred following scheme of the present invention: catoptron center section hollow, the geomery of hollow space and the outer shape size of optics collimator adapt, and catoptron is placed on optics collimator outside by hollow space.Fig. 2 and Fig. 3 respectively illustrates the principle that apparatus of the present invention realize lateral circumference scanning and forward direction circular scan, as shown in the figure, incident ray is through catoptron hollow or transparent part, and collimate through optics collimator (such as Green lens, lenticule etc.), be radiated on MEMS micro mirror minute surface, the light of MEMS micro mirror mirror-reflection to side direction or forward direction secondary reflection, by the rotation of control MEMS micro mirror, can be realized lateral circumference scanning and forward direction circular scan by the mirror surface of catoptron outer ring.
In the present invention, the design of mirror mirror determines direction of scanning and the sweep limit of whole device, the minute surface profile that therefore flexible design can be needed different according to actual scanning.Mirror surface parting face can be oblique line shape, arc or other is irregularly shaped, and Fig. 4 (a) to Fig. 4 (e) respectively illustrates the transverse section of several different designs of mirror mirror in optical scanner of the present invention; This several design is rotational symmetry design, and the vertical view of minute surface is circular.In design wherein shown in Fig. 4 (a) He Fig. 4 (c), mirror mirror entirety is a half cone-shaped, and in Fig. 4 (a), the cone mouth of half cone-shaped points to MEMS micro mirror, and in Fig. 4 (c), the cone mouth of half cone-shaped points to light source; In design shown in Fig. 4 (b) He Fig. 4 (d), the mirror surface entirety of catoptron outer ring is the partial ellipsoids obtained spheroid cutting by two parallel planes, and two parallel planes are parallel to major axis or the minor axis of spheroid; Mirror mirror of the present invention can also be made up of two or more coaxial half cone-shaped or partial ellipsoids, and in the design of Fig. 4 (e), namely mirror mirror is made up of two coaxial half cone-shaped.Certainly, mirror design such as, can be also square-shaped hopper shape by the various designs that minute surface can also adopt other feasible, and funnel oral area points to MEMS micro mirror, otherwise or, point to light source.
Understand further for the ease of the public, with three specific embodiments, technical scheme of the present invention is described in detail below.
Embodiment one,
Optical scanner in the present embodiment, as shown in Figure 5, comprising: optics collimator 1, catoptron 2, MEMS micro mirror 3, sleeve pipe 4, exit window 5.In order to prevent blocking light path, and realize circular scan, in the present embodiment, MEMS micro mirror is the electromagnetic drive type two dimension MEMS micro mirror not needing wire to connect.In order to make more compact structure, as shown in Figure 7, the center section hollow of catoptron 2, the geomery of hollow space and the outer shape size of described optics collimator adapt, and it is outside that catoptron 2 is placed on optics collimator 1 by this hollow space.The minute surface entirety of catoptron 2 is the half cone-shaped that a cone mouth points to MEMS micro mirror 3.Optics collimator 1, catoptron 2 and MEMS micro mirror 3 are all sealed in sleeve pipe 4, and to protect each optical device, wherein, MEMS micro mirror 3 is directly fixed on sleeve pipe 4 head inwall.As shown in the figure, on sleeve pipe 4 correspond to light injection position be provided with transparent exit window 5, due to catoptron in the present embodiment 2 by light to sideswipe, therefore exit window 5 is for being positioned at the ring-like window on sleeve pipe 4 sidewall.And dispersing in order to compensatory reflex light, the clear glass of exit window 5 is designed to the arc concaved.
The incident light that light source sends from left side, after optics collimator 1 collimates and passes catoptron 2, penetrate on the minute surface of MEMS micro mirror 3, the minute surface of MEMS micro mirror 3 by light reflection on the mirror surface of catoptron 2 outer ring, the mirror surface of catoptron 2 outer ring again through exit window 5 by light reflection on the sample of side direction.Carry out circular scan according to existing control method control MEMS micro mirror 3, the scanning of large-scale lateral circumference can be realized.
Embodiment two,
Optical scanner in this enforcement, comprises equally: optics collimator 1, catoptron 2, MEMS micro mirror 3, sleeve pipe 4, exit window 5, its structure as shown in Figure 6.In the present embodiment, the minute surface entirety of catoptron 2 is the half cone-shaped that a cone mouth points to light source; Correspondingly, according to the reflection direction of catoptron 2, the head entirety of sleeve pipe 4 is transparent exit window 5; MEMS micro mirror 3 is fixed on the sidewall of sleeve pipe 4 by pillar 6, and block to do not formed light, pillar 6 adopts transparent material to make.The remainder of this example is identical with embodiment one.
The incident light that light source sends from left side, after optics collimator 1 collimates and passes catoptron 2, penetrate on the minute surface of MEMS micro mirror 3, the minute surface of MEMS micro mirror 3 by light reflection on the mirror surface of catoptron 2 outer ring, the mirror surface of catoptron 2 outer ring again through exit window 5 by light reflection on the sample of forward direction.Carry out circular scan according to existing control method control MEMS micro mirror 3, large-scale forward direction circular scan can be realized.
Embodiment three,
Optical scanner in the present embodiment, comprises equally: optics collimator 1, catoptron 2, MEMS micro mirror 3, sleeve pipe 4, exit window 5, its structure as shown in Figure 7.In the present embodiment, the minute surface of catoptron 2 is made up of two coaxial half cone-shaped, as shown in the figure, the half cone-shaped cone mouth of outer ring points to MEMS micro mirror 3, the half cone-shaped cone mouth of inner ring points to light source, description according to embodiment 1,2: the mirror surface of outer ring will to sideswipe light, and the mirror surface of inner ring will to forward direction reflection ray; Correspondingly, in the present embodiment, exit window 5 as shown in the figure, is made up of, is equivalent to the combination of exit window in embodiment 1 and embodiment 2 head of sleeve pipe 4 and the ring shape that is connected with sleeve pipe 4 head; Remainder is all identical with embodiment one.By the control to MEMS micro mirror 3 anglec of rotation, side direction in a big way and forward direction circular scan can be realized simultaneously.
Mirror substrate material of the present invention can be polymkeric substance, the solid materials such as metal, can mechanical abrasion, or uses die casting, and specular material can use the highly reflecting films such as vacuum sputtering Au/Al/Ag.Exit window can use glass/optical resin to carry out die casting, then weld with sleeve pipe or stick in together with.
In sum, the optical scanner based on MEMS micro mirror of the present invention has the advantage that structure is simple, sweep limit is large, and make simple, realize with low cost, there is high using value, be particularly useful for the optic probe in medical imaging.
Claims (5)
1. based on an optical scanner for MEMS micro mirror, comprising: optics collimator and MEMS micro mirror, the incident ray that light source sends through optics collimator collimation after, by MEMS micromirror reflects; It is characterized in that, the light path between light source and MEMS micro mirror is provided with a catoptron; The center section hollow or transparent of this catoptron, can for incident ray normal through; The outer ring of this catoptron is mirror surface, can by the light reflection of MEMS micromirror reflects to the scanned samples being positioned at incident ray side direction; The mirror surface entirety of described catoptron outer ring is the half cone-shaped that a cone mouth points to MEMS micro mirror, and this mirror substrate is mechanical abrasion or uses die casting to form; Or the mirror surface of described catoptron outer ring entirety comprises at least two coaxial half cone-shaped, wherein, the half cone-shaped cone mouth of outer ring points to MEMS micro mirror; Or, the partial ellipsoids of the mirror surface of described catoptron outer ring entirety for being obtained spheroid cutting by two parallel planes, two parallel planes are parallel to major axis or the minor axis of spheroid, described spheroid be centrally located near described light source side; Or the mirror surface entirety of described catoptron outer ring is square-shaped hopper shape, funnel oral area points to MEMS micro mirror.
2. as claimed in claim 1 based on the optical scanner of MEMS micro mirror, it is characterized in that, described catoptron center section hollow, the geomery of hollow space and the outer shape size of described optics collimator adapt, and catoptron is placed on optics collimator outside by hollow space.
3. as claimed in claim 1 or 2 based on the optical scanner of MEMS micro mirror, it is characterized in that, described MEMS micro mirror is two-dimentional MEMS micro mirror.
4. as claimed in claim 1 or 2 based on the optical scanner of MEMS micro mirror, it is characterized in that, the type of drive of described MEMS micro mirror is wireless driving.
5. as claimed in claim 1 or 2 based on the optical scanner of MEMS micro mirror, it is characterized in that, also comprise for by each device package sleeve pipe in the inner, position sleeve pipe corresponding to light injection is provided with transparent exit window, and this exit window of the light therethrough that described catoptron reflects is incident upon scanned samples.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210415462.0A CN102955250B (en) | 2012-10-26 | 2012-10-26 | Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210415462.0A CN102955250B (en) | 2012-10-26 | 2012-10-26 | Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102955250A CN102955250A (en) | 2013-03-06 |
| CN102955250B true CN102955250B (en) | 2014-12-24 |
Family
ID=47764274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210415462.0A Active CN102955250B (en) | 2012-10-26 | 2012-10-26 | Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102955250B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318889A (en) * | 2018-04-23 | 2018-07-24 | 北京因泰立科技有限公司 | One kind being based on MEMS micromirror laser range sensor |
| CN108873015A (en) * | 2018-05-24 | 2018-11-23 | 远景能源（江苏）有限公司 | A kind of LDV technique lateral wind measuring device and method |
| CN110764251B (en) * | 2018-07-25 | 2021-11-09 | 中国科学院苏州纳米技术与纳米仿生研究所 | Method and device for driving scanning micro-mirror to rotate |
| CN113031254A (en) * | 2019-12-09 | 2021-06-25 | 觉芯电子(无锡)有限公司 | Micro-mirror device, micro-mirror wafer level packaging method and optical window prototype manufacturing method |
| CN213934211U (en) * | 2020-07-17 | 2021-08-10 | 中国工程物理研究院应用电子学研究所 | MEMS one-dimensional laser radar and digital camera surveying and mapping device |
| CN112630959A (en) * | 2021-01-12 | 2021-04-09 | 东莞理工学院 | Optical scanning device based on MEMS (micro-electromechanical system) micro-mirror |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5903386A (en) * | 1998-01-20 | 1999-05-11 | Northrop Grumman Corporation | Tilted primary clamshell lens laser scanner |
| JP2000055661A (en) * | 1998-08-05 | 2000-02-25 | Yasaka:Kk | Variable ring beam forming device |
| US20040027449A1 (en) * | 2002-05-07 | 2004-02-12 | Turner Arthur Monroe | Laser printing apparatus using a pivoting scanning mirror |
| JP4088188B2 (en) * | 2003-04-07 | 2008-05-21 | セイコーエプソン株式会社 | projector |
| CN100457020C (en) * | 2003-06-23 | 2009-02-04 | 微视公司 | Scanning endoscope |
| CN202886728U (en) * | 2012-10-26 | 2013-04-17 | 无锡微奥科技有限公司 | Optical scanning device based on MEMS (micro-electro mechanical system) micromirror |
-
2012
- 2012-10-26 CN CN201210415462.0A patent/CN102955250B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN102955250A (en) | 2013-03-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102955250B (en) | Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror | |
| CN108205124B (en) | Optical device and laser radar system based on micro-electromechanical galvanometer | |
| CN107843886B (en) | Non-mechanical scanning laser radar optical device and laser radar system | |
| US6760168B2 (en) | TIR prism system for DMD and projector adopting the same | |
| US5898809A (en) | Projecting a sheet of laser light such as a laser reference plane using a fiber optic bundle | |
| US8174749B2 (en) | Light-beam-scanning system utilizing counter-rotating prism wheels | |
| CN104656355A (en) | Projector with optical conversion media pumped by low etendue sourCE | |
| CN103454765A (en) | Image display apparatus and head-mounted display | |
| US7123394B2 (en) | System and method for the laser beam deflection for optical measuring systems | |
| WO2012100645A1 (en) | Speckle removal device based on mie scattering and perturbation drive | |
| CN111699425B (en) | Photon source comprising a plurality of light sources and an optical housing for receiving light emitted by the light sources | |
| CN105824176A (en) | Curved surface reflecting type ultra-short focal projection lens based on mems | |
| CN104076507A (en) | Laser rotation scanning lighting device and application thereof | |
| CN202886728U (en) | Optical scanning device based on MEMS (micro-electro mechanical system) micromirror | |
| WO2012100644A1 (en) | Speckle removal device based on mie scattering and polymer of field-induced deformation | |
| CN106645801A (en) | Micro-cantilever array cyclic scanning system | |
| JP5035055B2 (en) | Light source device | |
| CN100578147C (en) | Level gauge | |
| JP2008003593A (en) | Light integrating system, use of light integrating system and method for generating formed uniform light spot | |
| CN211086603U (en) | Laser radar scanning device and laser radar | |
| CN114421265A (en) | Laser for scanning word line | |
| CN109251857B (en) | Laser micro-cutting instrument and working method thereof | |
| CN203561789U (en) | Collimator | |
| CN108710136B (en) | Three-dimensional imaging laser radar transmitting device | |
| CN203241618U (en) | Scanning illumination device with laser rotation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent of invention or patent application | ||
| CB02 | Change of applicant information |
Address after: 214135 Jiangsu province Wuxi City Linghu Road No. 200 Chinese Sensor Network International Innovation Park building C Auxiliary Building Room 302 Applicant after: WUXI WIO TECHNOLOGY Co.,Ltd. Address before: Room 16, software park, 8905 Changjiang Road, Wuxi New District, Jiangsu, Wuxi, 214028 Applicant before: WUXI WIO TECHNOLOGY Co.,Ltd. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221223 Address after: B2-305, No. 200, Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee after: Wuxi Weiwen Semiconductor Technology Co.,Ltd. Address before: Room 302, Building C, China Sensor Network International Innovation Park, No. 200 Linghu Avenue, Wuxi City, Jiangsu Province Patentee before: WUXI WIO TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |