CN102945716B - A kind of annular resistor film correction method - Google Patents
A kind of annular resistor film correction method Download PDFInfo
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- CN102945716B CN102945716B CN201210505704.5A CN201210505704A CN102945716B CN 102945716 B CN102945716 B CN 102945716B CN 201210505704 A CN201210505704 A CN 201210505704A CN 102945716 B CN102945716 B CN 102945716B
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Abstract
The invention discloses the modification method of annular resistor film, by repairing the carbon dust layer carving head incision annular resistor film surface, the thickness of carbon dust layer is changed, thus the total voltage of annular resistor film is changed, when the total voltage of annular resistor film is equal with the total voltage preset, stop incision, what complete this point repaiies process at quarter.Utilize this method, introduce total voltage feedback algorithm and can exempt the participation adding brush in man-hour, improve certainty of measurement, make measurement simultaneously and repair the process at quarter to be simplified.
Description
Technical field
The present invention relates to transducer and manufacture field, particularly relate to a kind of annular resistor film correction method.
Background technology
Annular synthesis film potential meter, in manufacturing process, needs to repair quarter to annular resistor film, to make the scale of described annular synthesis film potential accurate.At present, to described annular resistor film to repair what generally adopt quarter be that the mode of Bian Xiuke is measured on limit, can be divided into two kinds according to the difference of supply power mode, one is that constant pressure source is powered, and another kind is constant current source power supply.
But that powers at constant pressure source repaiies in process at quarter, the contact resistance of brush can be introduced in integrated circuit, thus affects certainty of measurement.Repair in process at quarter at constant current source power supply, brush contacts with carbon film all the time, and the vibrations of generation can make the contact of brush and carbon film not firm, thus affect the accuracy of measurement.
Visible, the technology that quarter repaiied by potentiometer domestic at present all can have influence on the accuracy of measurement.
Summary of the invention
In view of this, the invention provides a kind of annular resistor film correction method, to solve in prior art the problem of repairing the accuracy that lithography impact is measured, its concrete scheme is as follows:
A kind of annular resistor film correction method, described annular resistor film is in constant current source power supply system, and described method comprises:
Determine center dead-center position and the carbon film border of described annular resistor film;
Region is carved as repairing in region between the center dead-center position of described annular resistor film and carbon film border;
Described repair to carve region chooses repair punctum;
Repair to carve described in head edge and repair the carbon dust layer that punctum cuts described annular resistor film surface, and detect the total voltage of annular resistor film;
The total voltage of more described annular resistor film and default total voltage;
When the total voltage of described annular resistor film is equal with the total voltage preset, stop the incision of repairing punctum.
Also comprise: repair described in foundation and measure the corresponding relation with total voltage quarter, described in determining, repair the default total voltage that punctum is corresponding.
Determine that the process of the center dead-center position of described annular resistor film comprises:
Mobile described annular resistor film;
Gather the voltage between described brush contact and centre cap, when described voltage is zero, described annular resistor film stops mobile, zero point centered by position corresponding with described brush contact in described annular resistor film.
The method of mobile described annular resistor film, comprising:
Be positioned on rotary table by described annular resistor film, rotate described rotary table, described annular resistor film rotates along with described rotary table;
When voltage when between the described brush collected and centre cap is greater than the first preset voltage value, described rotary table High Rotation Speed;
When voltage when between the described brush collected and centre cap is less than the first preset voltage value, described rotary table is rotated in deceleration.
Determine the process on the carbon film border of described annular resistor film, comprising:
Mobile described brush, gathers the output voltage between described brush and center zero point;
Drawing described output voltage curve, there are four voltage kick points in described output voltage curve, and the position choosing contiguous annular resistor film corresponding to two voltage kick point line mid points is the carbon film border of described annular resistor film.
As can be seen from technique scheme, annular resistor film correction method disclosed by the invention, by repairing the carbon dust layer carving head incision annular resistor film surface, the thickness of carbon dust layer is changed, thus the total voltage of annular resistor film is changed, when the total voltage of annular resistor film is equal with the total voltage preset, stop incision, what complete this point repaiies process at quarter.Utilize this method, introduce total voltage feedback algorithm and can exempt the participation adding brush in man-hour, improve certainty of measurement, make measurement simultaneously and repair the process at quarter to be simplified.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The flow chart of Fig. 1 annular resistor film correction method disclosed in the embodiment of the present invention;
Fig. 2 determines the flow chart of the method at center zero point disclosed in the embodiment of the present invention;
Fig. 3 determines the flow chart of the method on the carbon film border of annular resistor film disclosed in the embodiment of the present invention;
Output voltage curve chart near Fig. 4 annular resistor film left end silver band disclosed in the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The flow chart of annular resistor film correction method disclosed by the invention as shown in Figure 1, comprising:
Step S11, the center dead-center position determining described annular resistor film and carbon film border;
The center zero point of described annular resistor film and the determination of carbon film boundary position are the bases of annular resistor film correction.
Step S12, using the region between the center dead-center position of described annular resistor film and carbon film border as repair carve region;
The voltage of described center dead-center position is zero, is repairing in process at quarter, with the center dead-center position in annular resistor film for benchmark, carries out measuring and repairing quarter.
Described annular resistor film needs the region of repairing quarter to be the carbon dust layer of annular resistor film, carbon dust layer is positioned at the centre position of described annular resistor film, two ends are silver-colored zone, carbon dust layer is with resistance, electrical resistance length is that certain rule changes, and the resistance of silver-colored zone is very little, and resistance variations can be very little, can ignore.
Step S13, described repair to carve region chooses repair punctum;
Described repair to carve region chooses repair punctum, when repairing punctum and being one, following steps be only to one repair that punctum carries out repair quarter; When repairing punctum and being multiple, once repair quarter process and terminate, that carries out that the next one repaiies punctum repaiies quarter, repaiies to carve terminate until all repair punctum.
Step S14, repair carve head along described in repair the carbon dust layer that punctum cuts described annular resistor film surface, and detect the total voltage of annular resistor film.
Repair on cutter at quarter and repair head at quarter, repair and carve head along repairing the carbon dust layer that punctum cuts described annular resistor film surface, described carbon dust layer has resistance, after repairing head incision at quarter carbon dust layer, the described thickness repairing the carbon dust layer at punctum place changes, and the cross-sectional area namely repairing the carbon dust layer at punctum place changes.
According to resistance calculations formula R=ρ l/S, wherein ρ is resistivity, and l is length, and S is cross-sectional area, can know, resistance and cross-sectional area are inversely proportional to, and namely cross-sectional area reduces, and resistance increases.It can thus be appreciated that when the cross-sectional area of the carbon dust layer repairing punctum place reduces, the resistance repaiied between punctum and center zero point increases, and is set to Δ R
i.
And now, in annular resistor film, the resistance of all the other points does not change, therefore, the all-in resistance of described annular resistor film changes, and its all-in resistance variable quantity is also Δ R
i.
Because described annular resistor film is in constant current source power supply system, its electric current is certain, is set to I
c, therefore, detect that the variable quantity of the total voltage of described annular resistor film is I
cΔ R
i, therefore, the total voltage of described annular resistor film also can obtain, and this process is called total voltage feedback transmitter.
The total voltage of step S15, more described annular resistor film and default total voltage;
Described annular resistor film repair in process at quarter, when repairing punctum and determining, the total voltage of annular resistor film is certain, presets its total voltage, compares the total voltage of the described annular resistor film detected and the total voltage preset.
Step S16, when the total voltage of described annular resistor film is equal with default total voltage, stop repairing the incision of punctum.
When the total voltage of the described annular resistor film detected is equal with the total voltage preset, described in repair punctum and reach the amount will repairing quarter in advance, that repaiies punctum described in completing repaiies quarter.
Be not only have to repair a punctum in Ruo Xiuke region, now will continue that punctum is repaiied to remaining and repair quarter.
The repair and carving method that the present embodiment provides, also comprises:
Repair described in foundation and measure the corresponding relation with total voltage quarter, described in determining, repair the default total voltage that punctum is corresponding.Because each position of repairing punctum is different, thus need to preset each repair punctum repair quarter order and each repair total voltage corresponding after punctum repaiies quarter, the total voltage variable quantity namely preset.Therefore, can by the total voltage of the described annular resistor film detected with preset total voltage compare, treat the two identical time, repair quarter amount just reach requirement, namely stop to this repair punctum repair quarter time.
The modification method of annular resistor film disclosed in the present embodiment, the participation of brush is realized exempting by introducing total voltage feedback transmitter, avoid and the contact resistance of brush is introduced integrated circuit, thus affect the problem of certainty of measurement, in addition, utilize total voltage feedback transmitter, make to repair quarter process and be simplified, and improve certainty of measurement.
The flow chart determining the method at center zero point disclosed by the invention as shown in Figure 2, comprising:
Step S21, mobile described annular resistor film;
Mobile described annular resistor film, makes described brush move left and right at the centre cap of described annular resistor film.The move mode of described annular resistor film, can be manually, also can be machine turns.
Step S22, gather voltage between described brush contact and centre cap;
Gather the voltage between described brush contact and centre cap, when on the left of described brush contact is positioned at described centre cap, the described voltage collected is negative value; When on the right side of described brush contact is positioned at described centre cap, the described brush collected on the occasion of.
Step S23, when collecting the voltage between described brush contact and centre cap and being zero, described annular resistor film stops mobile.
When collecting the voltage between described brush contact and centre cap and being zero, determine that in annular resistor film corresponding with described brush contact in described annular resistor film, position is the position at center zero point.
Preferably, described annular resistor film is positioned on rotary table, rotate described rotary table, described annular resistor film rotates along with described rotary table, and the centre tapped relative position in described brush and described annular resistor film is changed.
The rotary course of described rotary table is:
When voltage when between the described brush collected and centre cap is greater than the first preset voltage value, described rotary table High Rotation Speed;
When voltage when between the described brush collected and centre cap is less than the first preset voltage value, described rotary table is rotated in deceleration.
Further, the voltage when between the described brush collected and centre cap is less than the first preset voltage value, and when being greater than the second preset voltage value, described rotary table is rotated in deceleration according to the functional relation of voltage-rotating speed.
Further, described first preset voltage value is 500mV, and described second preset voltage value is 100mV.
Determine the method at center zero point disclosed in the present embodiment, by mobile described annular resistor film, the relative position of centre cap and brush is changed, thus the voltage between centre cap and brush is changed, and then determine the position at center zero point.Realize the position determining center zero point fast and accurately.Further, utilize rotary table that annular resistor film is moved, decrease manually operated program, improve automaticity.
The flow chart determining the method on the carbon film border of annular resistor film disclosed by the invention as shown in Figure 3, comprising:
Step S31, mobile described brush;
Shifting brush, makes described brush move in annular resistor film.
Step S32, gather output voltage between described brush and center zero point;
Along with the movement of brush, the voltage between described brush and center zero point changes, and gathers the voltage between Dian Yu center zero point that described brush is positioned at the diverse location of described annular resistor film.
Step S33, drafting output voltage curve;
Being positioned at the magnitude of voltage between diverse location Shi Yu center zero point according to the described brush collected, drawing output voltage curve, as shown in Figure 4, is the output voltage curve chart near described annular resistor film left end silver band.
Step S34, according to described output voltage curve, determine the carbon film border of described annular resistor film.
The carbon film border of described annular resistor film, the i.e. border of carbon film district and silver-colored zone in annular resistor film.According to output voltage curve, determine carbon film border.
Preferably, according to output voltage curve, can find out, when described brush is from carbon film district to silver-colored zone, or from silver-colored zone to the process in carbon film district, there will be kick point.As shown in Figure 4, there are two kick points near described annular resistor film left end silver band, choose the carbon film border of mid point as described annular resistor film of the line of two kick points.Carbon film border near described annular resistor film right-hand member silver band choose in like manner, select mid point another carbon film border as described annular resistor film of two kick point lines near right-hand member silver band.
Determine the method on the carbon film border of annular resistor film disclosed in the present embodiment, by drawing the method for output voltage curve, the carbon film border of simple and quick determination annular resistor film, for the quarter of accurately repairing of annular resistor film establishes basis.
In this specification, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.For device disclosed in embodiment, because it corresponds to the method disclosed in Example, so description is fairly simple, relevant part illustrates see method part.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (5)
1. an annular resistor film correction method, is characterized in that, described annular resistor film is in constant current source power supply system, and described method comprises:
Determine center dead-center position and the carbon film border of described annular resistor film, the voltage of described center dead-center position is zero;
Region is carved as repairing in region between the center dead-center position of described annular resistor film and carbon film border;
Described repair to carve region chooses repair punctum;
Repair to carve described in head edge and repair the carbon dust layer that punctum cuts described annular resistor film surface, and detect the total voltage of annular resistor film;
The total voltage of more described annular resistor film and default total voltage;
When the total voltage of described annular resistor film is equal with the total voltage preset, stop the incision of repairing punctum.
2. method according to claim 1, is characterized in that, also comprises: set up to repair and measure the corresponding relation with total voltage quarter, repair the total voltage preset that punctum is corresponding described in determining.
3. method according to claim 1, is characterized in that, determines that the process of the center dead-center position of described annular resistor film comprises:
Mobile described annular resistor film;
Gather the voltage between brush contact and centre cap, when described voltage is zero, described annular resistor film stops mobile, zero point centered by position corresponding with described brush contact in described annular resistor film.
4. method according to claim 3, is characterized in that, the method for mobile described annular resistor film, comprising:
Be positioned on rotary table by described annular resistor film, rotate described rotary table, described annular resistor film rotates along with described rotary table;
When voltage when between the described brush collected and centre cap is greater than the first preset voltage value, described rotary table High Rotation Speed;
When voltage when between the described brush collected and centre cap is less than the first preset voltage value, described rotary table is rotated in deceleration.
5. method according to claim 1, is characterized in that, determines the process on the carbon film border of described annular resistor film, comprising:
Shifting brush, gathers the output voltage between described brush and center zero point;
Drawing described output voltage curve, there are four voltage kick points in described output voltage curve, and the position choosing contiguous annular resistor film corresponding to two voltage kick point line mid points is the carbon film border of described annular resistor film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210505704.5A CN102945716B (en) | 2012-11-30 | 2012-11-30 | A kind of annular resistor film correction method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210505704.5A CN102945716B (en) | 2012-11-30 | 2012-11-30 | A kind of annular resistor film correction method |
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| Publication Number | Publication Date |
|---|---|
| CN102945716A CN102945716A (en) | 2013-02-27 |
| CN102945716B true CN102945716B (en) | 2015-11-18 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19514989A1 (en) * | 1995-04-24 | 1996-10-31 | Rheinmetall Ind Ag | Trimming process for electrical thin film resistors |
| CN2692808Y (en) * | 2004-04-21 | 2005-04-13 | 上海好光科工贸有限责任公司 | Potentiometer cutting device |
| CN101295572A (en) * | 2008-06-25 | 2008-10-29 | 东莞市华兰海电子有限公司 | Automatic resistance regulating machine of resistor type strain foil |
| CN201289771Y (en) * | 2008-10-29 | 2009-08-12 | 成都承宏机电有限公司 | Machine for repairing and engraving potentiometer |
| TW201137901A (en) * | 2010-04-16 | 2011-11-01 | Cyntec Co Ltd | A resistance trimmer, a resistance trimming method, and an electronic device having a resistance element |
| CN202523499U (en) * | 2012-01-17 | 2012-11-07 | 东莞市迈恩传感科技有限公司 | Resistance linearization repair carving machine |
-
2012
- 2012-11-30 CN CN201210505704.5A patent/CN102945716B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19514989A1 (en) * | 1995-04-24 | 1996-10-31 | Rheinmetall Ind Ag | Trimming process for electrical thin film resistors |
| CN2692808Y (en) * | 2004-04-21 | 2005-04-13 | 上海好光科工贸有限责任公司 | Potentiometer cutting device |
| CN101295572A (en) * | 2008-06-25 | 2008-10-29 | 东莞市华兰海电子有限公司 | Automatic resistance regulating machine of resistor type strain foil |
| CN201289771Y (en) * | 2008-10-29 | 2009-08-12 | 成都承宏机电有限公司 | Machine for repairing and engraving potentiometer |
| TW201137901A (en) * | 2010-04-16 | 2011-11-01 | Cyntec Co Ltd | A resistance trimmer, a resistance trimming method, and an electronic device having a resistance element |
| CN202523499U (en) * | 2012-01-17 | 2012-11-07 | 东莞市迈恩传感科技有限公司 | Resistance linearization repair carving machine |
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| CN102945716A (en) | 2013-02-27 |
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Inventor after: Zuo Xianghan Inventor after: Wang Huifeng Inventor after: Meng Shuhong Inventor after: Wang Guanglin Inventor after: Zeng Hao Inventor before: Zuo Xianghan Inventor before: Wang Huifeng Inventor before: Meng Shuhong Inventor before: Wang Guanglin Inventor before: Zeng Hao Inventor after: Meng Shuhong Inventor after: Wang Huifeng Inventor after: Zuo Xianghan Inventor after: Wang Guanglin Inventor after: Zeng Hao Inventor before: Zuo Xianghan Inventor before: Wang Huifeng Inventor before: Meng Shuhong Inventor before: Wang Guanglin Inventor before: Zeng Hao |
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Free format text: CORRECT: INVENTOR; FROM: ZUO XIANGHAN WANG HUIFENG MENG SHUHONG WANG GUANGLIN CENG HAO TO: MENG SHUHONG WANG HUIFENG ZUO XIANGHAN WANG GUANGLIN CENG HAO |
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Address after: 611130 Changan Road, Liucheng, Wenjiang District, Chengdu, Sichuan Province, No. 198 Patentee after: Sichuan Aerospace beacon Servo Control Technology Co., Ltd. Address before: 611100 Liucheng Road, Wenjiang, Sichuan, No. Changan Road, No. 198 Patentee before: Fenghuo Machine Works of China Aerospace Science and Technology Corporation |