CN102944185B - A kind of device detecting miniature deformation under multaxial stress effect - Google Patents
A kind of device detecting miniature deformation under multaxial stress effect Download PDFInfo
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- CN102944185B CN102944185B CN201210456250.7A CN201210456250A CN102944185B CN 102944185 B CN102944185 B CN 102944185B CN 201210456250 A CN201210456250 A CN 201210456250A CN 102944185 B CN102944185 B CN 102944185B
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- thin plate
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Abstract
The present invention proposes a kind of device detecting miniature deformation under multaxial stress effect, described device comprises laser generator, soft reflective thin plate, surface can be reflective hemisphere, the reflective thin plate of hard and light sensor; Described soft reflective thin plate is parallel to be fixed on the reflective thin plate of hard, and form light slit between, described surface can be distributed in soft reflective thin plate lower surface by reflective hemisphere; Described laser generator is arranged at outside slit side, and incident ray is towards slit, and the hemisphere that the soft reflective thin plate of oblique upper subtend and surface can be reflective; Described light sensor arranges slit opposite side, relative with laser generator.This apparatus structure is simple, can measure various small stress deformation exactly, especially detects the size and Orientation of multidimensional small strain.
Description
technical field:
The invention belongs to electronic technology field, be specifically related to a kind of Photoelectric Detection experimental provision.
background technology:
Electronic technology develops into now, people can utilize the various non-electrical signal of sensor measurement, as by the subtle change of electric bridge monitor strain sheet resistance to measure miniature deformation, also proposition optical interferometry is had to measure miniature deformation, but generally also do not have proven technique to measure various small stress deformation exactly, especially detect the size and Orientation of multidimensional small strain.
summary of the invention:
For above problem, object of the present invention is just to provide a kind of device detecting miniature deformation under multaxial stress effect, with the size and Orientation of optical reflectance measurements multaxial stress deformation.
Technical scheme of the present invention is as follows:
Detect a device for miniature deformation under multaxial stress effect, described device comprise laser generator, hemisphere, the reflective thin plate of hard and light sensor that soft reflective thin plate, surface can be reflective; Described soft reflective thin plate is parallel to be fixed on the reflective thin plate of hard, and form light slit between, described surface can be distributed in soft reflective thin plate lower surface by reflective hemisphere; Described laser generator is arranged at outside slit side, and incident ray is towards slit, and the hemisphere that the soft reflective thin plate of oblique upper subtend and surface can be reflective; Described light sensor arranges slit opposite side, relative with laser generator.
Described soft reflective thin plate adopts inside surface to be coated with the soft material of reflective membrane, is the material that deformation can occur under minimal stress 0.001-0.1 Niu Zuoyong.
Described surface can be reflective hemispheroidal material identical with the material of soft reflective thin plate, be coated with reflective membrane above, sphere is very easily reflective, and its tangent plane circle can be sticked together with soft reflective thin plate, or they can be integrated.
Described laser generator can launch the one-wavelength laser of various intensity and pulse as required, and laser head aims at the parallel and reflective hemisphere of soft reflective thin plate, and light can enter very easily.The angle of laser head can regulate on demand, and light angle is 10-60 °.
Soft reflective thin plate is fixed on the reflective thin plate of hard by support is parallel, and described support is hard material, also can be soft material, and it is full impregnated luminescent material.
Described light sensor can be four-quadrant light sensor, also can be other light sensor, the optical signalling of outgoing from the slit of soft material can be transferred to electric signal.
This apparatus structure is simple, can measure various small stress deformation exactly, especially detects the size and Orientation of multidimensional small strain.
accompanying drawing illustrates:
Fig. 1 is the structural drawing of this device.
embodiment:
This device is described in detail below in conjunction with accompanying drawing:
Whole device as shown in Figure 1, it comprises laser generator 6, soft reflective thin plate 1, surface can be reflective hemisphere 2, the reflective thin plate 4 of hard and light sensor 5.Soft reflective thin plate 1 is fixed on the reflective thin plate 4 of hard by support 3 is parallel, forms the slit 7 of light between, and soft reflective thin plate 1 lower surface is distributed with the hemisphere 2 that many surfaces can be reflective.What soft reflective thin plate adopted is the soft material silica gel that inside surface is coated with reflective membrane, and this material deformation can occur under minimal stress (0.001-0.1 ox) effect.Surperficial hemispheroidal material that can be reflective is identical with the material of soft reflective thin plate.Laser generator 6 is arranged at the outer side of slit 7, and incident ray is towards slit, and the hemisphere that the soft reflective thin plate of oblique top subtend and surface can be reflective, angle is 10-60 °.Light sensor 5 is fixed on slit opposite side, and relative with laser generator.In actual applications, laser generator 6 can be fixed separately, is positioned over outside slit.
The laser launched of laser generator 6 from the light inlet of slit enter by soft reflector 1 and surface can be reflective the slit 7 that formed of hemisphere 2 and the reflective thin plate 4 of hard, when the detection thing generation miniature deformation contacted with soft reflective thin plate 1, the change of the generation local between 1 and 4 can be caused during the miniature deformation occurred, light is radiated at the different parts of the hemisphere 2 that soft reflective thin plate 1 and surface can be reflective, produce the reflection of different directions, utilizing emitted light is launched through the reflective thin plate 4 of hard, original light path is finally caused to change, this change is by light sensor 5 perception and provide data, because soft reflective thin plate 1 and the deformation of surperficial hemisphere 2 that can be reflective can by the impacts of extraneous deformation, its change is multidimensional, therefore can utilize light path on light sensor 5, react deformation position and brightness and direction and size, also the size and Orientation that all directions strain can just be judged.
As required this device can being fixed in one plane during use, detecting the deformation size that this plane occurs when being subject to vertical strain.The surface of object under test can be distributed in, because the size and Orientation of the deformation of stress generation in detection all directions.
The present invention can be used in and measure object miniature deformation as sheet material or the occasion measuring other needs.
Described light sensor can be fight to contain four-quadrant so66a or other model, and the material of soft light reflecting membrane and spherical refractive body can be silica gel, plates reflective membrane above.
Claims (2)
1. a device for the small multidimensional strain of detection, is characterized in that, described device comprises laser generator, soft reflective thin plate, surface can be reflective hemisphere, the reflective thin plate of hard and light sensor; Described soft reflective thin plate is parallel to be fixed on the reflective thin plate of hard, forms slit between, and described surface can be distributed in soft reflective thin plate lower surface by reflective hemisphere; Described laser generator is arranged at outside slit side, and incident ray is towards slit, and the hemisphere that the soft reflective thin plate of oblique upper subtend and surface can be reflective; Described light sensor arranges slit opposite side, relative with laser generator; Described soft reflective thin plate adopts inside surface to be coated with the soft material of reflective membrane, and it is the material that deformation can occur under minimal stress 0.001-0.1 Niu Zuoyong;
Described surface can be reflective hemispheroidal material identical with the material of soft reflective thin plate;
The light angle of described laser generator is 10-60 °;
Described light sensor is four-quadrant light sensor.
2. the device of the multidimensional strain that detection according to claim 1 is small, it is characterized in that, soft reflective thin plate is fixed on the reflective thin plate of hard by support is parallel.
Priority Applications (1)
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CN201210456250.7A CN102944185B (en) | 2012-11-14 | 2012-11-14 | A kind of device detecting miniature deformation under multaxial stress effect |
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CN201210456250.7A CN102944185B (en) | 2012-11-14 | 2012-11-14 | A kind of device detecting miniature deformation under multaxial stress effect |
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CN102944185A CN102944185A (en) | 2013-02-27 |
CN102944185B true CN102944185B (en) | 2016-04-27 |
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CN201210456250.7A Expired - Fee Related CN102944185B (en) | 2012-11-14 | 2012-11-14 | A kind of device detecting miniature deformation under multaxial stress effect |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US10274386B2 (en) * | 2016-06-20 | 2019-04-30 | X Development Llc | Retroreflective multi-axis force torque sensor |
CN106153227B (en) * | 2016-08-31 | 2019-03-08 | 贾岳杭 | Stress and strain detection device based on intensity of illumination measurement |
CN107742455A (en) * | 2017-11-07 | 2018-02-27 | 温州市龙湾区教师发展中心 | The apparatus for demonstrating of object miniature deformation |
CN113029418B (en) * | 2021-03-09 | 2022-05-17 | 中国科学院自动化研究所 | Multi-dimensional force sensor |
CN114659553A (en) * | 2022-02-28 | 2022-06-24 | 联想(北京)有限公司 | Detection method, device, equipment and storage medium |
Citations (1)
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CN1514203A (en) * | 2003-07-31 | 2004-07-21 | 汪应斌 | Flatness detecting method and detecting instrument thereby |
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JPH01219644A (en) * | 1988-02-29 | 1989-09-01 | Nkk Corp | Measurement of photoelastic strain |
JP2000021941A (en) * | 1998-07-06 | 2000-01-21 | Toshiba Corp | Wafer stress measuring device and wafer condition measuring device |
JP5164086B2 (en) * | 2005-03-04 | 2013-03-13 | 独立行政法人物質・材料研究機構 | Method and apparatus for detecting distortion of an object |
CN202522351U (en) * | 2012-02-21 | 2012-11-07 | 徐东升 | Micro force detector |
CN102589769A (en) * | 2012-02-29 | 2012-07-18 | 西安邮电学院 | High sensitivity stress sensing detection system based on scatterer strain |
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Patent Citations (1)
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CN1514203A (en) * | 2003-07-31 | 2004-07-21 | 汪应斌 | Flatness detecting method and detecting instrument thereby |
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