CN102937598A - Method and device for ultraviolet optic online automatic detection of indium tin oxide (ITO) membrane circuit pattern defect information - Google Patents
Method and device for ultraviolet optic online automatic detection of indium tin oxide (ITO) membrane circuit pattern defect information Download PDFInfo
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- CN102937598A CN102937598A CN2012104498676A CN201210449867A CN102937598A CN 102937598 A CN102937598 A CN 102937598A CN 2012104498676 A CN2012104498676 A CN 2012104498676A CN 201210449867 A CN201210449867 A CN 201210449867A CN 102937598 A CN102937598 A CN 102937598A
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Abstract
The invention discloses a method and a device for ultraviolet optic online automatic detection of indium tin oxide (ITO) membrane circuit pattern defect information. The device comprises an ultraviolet optic device, a micro visual imaging device, an image collecting synchronous control device, an image processing device and a result output device. The bright-dark field illumination can be formed on an ITO membrane through the ultraviolet optic device at the same time, gray contract and enhancement circuit pattern defect information of ITO circuit patterns and polyethylene terephthalate (PET) base material backgrounds in the image space are highlighted, synchronous signals are established by a coder, the image collecting synchronous control device modulates the synchronous signals, the precise synchronization of image acquisition triggering signals and membrane running speeds is controlled, the micro visual imaging device is used for conducting high-resolution amplification for the defect information, the image collecting synchronous control device is used for transmitting the defect information to a processer, the image processing device is used for analyzing and processing the defect information, and the result output device is used for counting, classifying, alarming, storing and displaying the detected defect information.
Description
Technical field
The present invention is specifically related to a kind of ultraviolet optics online automatic detection method and apparatus of ito thin film circuit pattern defect information.
Background technology
Indium tin oxide films (Indium Oxide doped with Tin Film, ITO) there are the excellent physical properties such as low-resistivity, high visible light transmissivity, its rete is high temperature resistant, humidity, stability is splendid, be the important materials of manufacturing various optical devices, electrooptical device and photoelectric instrument, have a wide range of applications in the products such as LCDs, touch-screen, sun power electroplax, automotive anti-mist glass.In recent years, along with the high speed development in the markets such as LCD TV, PDA, LCD, notebook computer, the demand of ITO material has obtained great growth.
The ito thin film surface often need process trickle pattern electrodes.Because graphic defects directly affects circuit characteristic and the function of ITO end product, therefore, the detection of the circuit pattern defect information of the rear formation of switching on is had to vital meaning.Yet, although the detection technique based on machine vision is applied in industries such as printing, glassware, plastic sheetings more and more, but the transparent material characteristic due to ito thin film, grey-scale contrast between its surfacial pattern and PET base material is extremely low, for the application of vision detection technology has caused huge obstacle.Therefore, the detection of ito thin film surface circuit pattern defect is had to rely on for a long time and manually complete with offline mode by instruments such as microscopes, not only have that labour intensity is large, efficiency is low, loss is high, testing result is subject to the drawbacks such as reviewer's subjective factor impact, and long-time intensive work, very unfavorable to health.
Summary of the invention
A purpose of the present invention is, provides that a kind of detection speed is fast, precision is high, and testing result is stable, the ultraviolet optics online automatic detection method of the ito thin film circuit pattern defect information that repdocutbility is good.
Another object of the present invention is, a kind of device that is used for realizing the ultraviolet optics online automatic detection method of circuit pattern defect information is provided.
Technical scheme of the present invention is:
The ultraviolet optics online automatic detection method of ito thin film circuit pattern defect information, it comprises:
1) strengthen the step of grey-scale contrast and defect information, it forms the illumination of light-dark field by the ultraviolet optics device to ito thin film, grey-scale contrast and intensifier circuit pattern defect characteristic information between outstanding ITO circuit pattern and PET base material background in image space;
2) step of Sync image capture, adopt and the coaxial scrambler output synchronizing signal be connected of ito thin film, and after the image acquisition sync control device is modulated this synchronizing signal, control chart is as the precise synchronization of trigger collection signal and film travelling speed;
3) step of original image analyzing and processing, its image resolution ratio amplification of circuit pattern defect information being carried out reaching more than 10um/pixel by microspur visual imaging device obtains original image, transfers to image processing apparatus by image collecting device through high speed data bus and is analyzed and process;
4) step of in real time defect information discriminatory analysis, it is added up defect characteristic information and positional information, classified, stored, reported to the police and is shown by output unit as a result.
In the step of described enhancing grey-scale contrast and defect information, the transmitter module of described ultraviolet optics device adopts the ultraviolet leds particle that wavelength is 330 ~ 355nm to be arranged in line style, the light source luminescent face is equipped with diffusing panel, so that beam direction is modulated, form uniform light, thereby ito thin film is formed to the illumination of light-dark field; Wherein, form a secretly-illumination of backlight, a bright-illumination that side light source forms.
In the step of described Sync image capture, described image acquisition sync control device carries out Isolation, shaping, frequency modulation (PFM) to original coding device signal, form the scanning trigger pip of ultraviolet CCD camera, image acquisition is synchronizeed by required imaging precision with the ito thin film movement velocity, thereby obtain the original image that comprises defect information.
In the step of described original image analyzing and processing, the original image that described image processing apparatus will comprise defect information carries out image pre-service, defect Segmentation, Defect Search and cluster and defect characteristic extraction and identification.
In the step of described real-time defect information discriminatory analysis, described output unit is as a result added up defect characteristic information and positional information, classify, store, and carries out alarm and demonstration simultaneously.
Realize the pick-up unit of the ultraviolet optics online automatic detection method of above-mentioned ito thin film circuit pattern defect information, it comprises:
The ultraviolet optics device, comprise ultraviolet light transmitter module, radiation direction modulation module, light source refrigerating module, brightness regulated power supply driver module, be used for ito thin film is formed to the illumination of light-dark field grey-scale contrast and intensifier circuit pattern defect characteristic information between outstanding ITO circuit pattern and PET base material background in image space;
Microspur visual imaging device, comprise one or more micro-lenss, ultraviolet filtering mirror, adapter ring, ultraviolet CCD camera, is used for defect characteristic information is carried out to the high resolving power amplification;
The image acquisition sync control device, it is used for original coding device signal is carried out to Isolation, shaping, frequency modulation (PFM), form the scanning trigger pip of ultraviolet CCD camera, image acquisition is synchronizeed by required imaging precision with the ito thin film movement velocity, thereby obtain the original image that comprises defect information;
Image processing apparatus, its original image that is used for comprising defect information carries out image pre-service, defect Segmentation, Defect Search and cluster and defect characteristic extraction and identification;
Output unit as a result, it is used for, by defect characteristic information and positional information statistics, classification, storage, carrying out alarm and demonstration simultaneously.
The technique effect that the present invention reaches is:
1, adopt wavelength at the ultraviolet light of 330～355nm as the pick-up unit lighting source, under the transillumination mode, ITO graphics field and PET base material reach maximization to the absorptivity difference of this wave band, thereby produce and contrast high-definition picture clearly in ultraviolet microspur CCD camera, by efficient image processing algorithm, analyzed, realization detects the automatic on-line of graphic defects, can be in order to substitute the manual detection of poor efficiency, the reliability and the accuracy that detect have greatly been strengthened, for the quality control of ITO product provides effective way;
2, eliminated the obstacle that general visible light source and formation method can't capture the ITO circuitous pattern defect image that contrast is high, for the automatic machinery vision-based detection has been cleared away obstacle, have that detection speed is fast, precision is high, testing result is stable, the advantage that repdocutbility is good.
The accompanying drawing explanation
Fig. 1 is the ultraviolet optics online automatic detection method and apparatus functional-block diagram of ito thin film circuit pattern defect information.
Fig. 2 is ultraviolet optics Plant arrangement figure.
Fig. 3 is ultraviolet LED linear light sorurce pie graph.
Fig. 4 is image acquisition sync control device cut-away view.
Fig. 5 is microspur visual imaging structure drawing of device.
Fig. 6 is the image processing apparatus functional-block diagram.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
The embodiment of the present invention is referring to Fig. 1～6.
As shown in Figure 1, pick-up unit of the present invention comprises ultraviolet optics device, microspur visual imaging device, image acquisition sync control device, image processing apparatus and output unit as a result.Each device is sequentially connected and collaborative work, its step is as follows: after pick-up unit starts, the user opens image acquisition by human-computer interaction device, now, the ultraviolet optics device enters duty, and the microspur imaging device that pre-sets imaging resolution for the concrete testing requirement of basis provides suitable illumination, the coaxial scrambler connected of ito thin film is exported original synchronizing signal, after the image acquisition sync control device carries out conversion process, export to image collecting device, control its speed according to the ito thin film operation and carry out Sync image capture, it is medium pending that the realtime graphic collected is stored in an annular FIFO, wherein, the length of FIFO can be configured when the device initialization, image processing apparatus is worked in a looping fashion, each working cycle captures a pending image from this FIFO, record the encoder position signal of this image simultaneously, then carry out differentiation and the analysis of defect by real-time defects detection algorithm, if discovery defect, defect characteristic information and positional information deposit database in by output unit as a result, reported to the police simultaneously and shown.
As shown in Figure 2, described ultraviolet optics device, comprise ultraviolet light transmitter module 1, radiation direction modulation module 2, light source refrigerating module 3, brightness regulated power supply driver module 4.Transmitter module adopts wavelength to be arranged in line style on 330～355nm high power ultraviolet leds lamp pearl, and the light source luminescent face is equipped with diffusing panel, so that beam direction is modulated, forms uniform light.The wavelength coverage of ultraviolet source is strictly selected, and it is according to being transmittance and the difference in reflectivity maximization that makes ITO and PET base material, thus the pixel grey scale contrast between enhancing ITO circuit pattern and background.During detection, by electric power driving module, to the ultraviolet LED lamp 5,6 shown in Fig. 3, provide constant current to drive, by the power of adjusting power supply, the brightness of light source and the imaging characteristic of ultraviolet CCD are complementary.Ultraviolet source is arranged in ITO film both sides, wherein, a dark-illumination that backlight 6 forms, a bright-illumination that side light source 5 forms, as shown in Figure 3.Regulate the beam projecting angle of light source, make light reflection direction and the camera lens light shaft coaxle of backlight 6, and the light that makes side light source 6 send is also coaxial with camera lens optical axis after refraction.The image acquisition sync control device is controlled the keying of light source 5,6, realizes the alternately illumination to detected object, like this, each film position will obtain light-dark field two width light images simultaneously, and they are sent to image processing apparatus in real time, by the latter, carry out concrete graphical analysis.
The high resolving power programmable-coder is set up synchronizing signal, and after the image acquisition sync control device is modulated this synchronizing signal, control chart is as the precise synchronization of trigger collection signal and film travelling speed.As shown in Figure 4, the image acquisition sync control device carries out Isolation, shaping, frequency modulation (PFM) to original coding device signal, forms the scanning trigger pip of ultraviolet CCD camera, and image acquisition is synchronizeed by required imaging precision with the ito thin film movement velocity.
Microspur visual imaging device, comprise the image device that one or more sets are connected to form by micro-lens, ultraviolet filtering mirror, adapter ring, ultraviolet CCD camera, as shown in Figure 5.The lens optical enlargement ratio is definite by the device testing requirement, and its image circle is greater than line style CCD overall length.
As shown in Figure 6, treatment step comprises image processing apparatus: the image pre-service comprises noise reduction filtering, figure image intensifying; Defect Segmentation, obtain the binaryzation defect image; Defect Search and cluster; Defect characteristic extracts and identification.
According to the above embodiment of the present invention, possess detection method and device with the same or similar technical characterictic of the present embodiment, all in protection domain of the present invention.
Claims (6)
1.ITO the ultraviolet optics online automatic detection method of thin film circuit pattern defect information, it comprises:
1) strengthen the step of grey-scale contrast and defect information, it forms the illumination of light-dark field by the ultraviolet optics device to ito thin film, grey-scale contrast and intensifier circuit pattern defect characteristic information between outstanding ITO circuit pattern and PET base material background in image space;
2) step of Sync image capture, adopt and the coaxial scrambler output synchronizing signal be connected of ito thin film, and after the image acquisition sync control device is modulated this synchronizing signal, control chart is as the precise synchronization of trigger collection signal and film travelling speed;
3) step of original image analyzing and processing, its image resolution ratio amplification of circuit pattern defect information being carried out reaching more than 10um/pixel by microspur visual imaging device obtains original image, transfers to image processing apparatus by image collecting device through high speed data bus and is analyzed and process;
4) step of in real time defect information discriminatory analysis, it is added up defect characteristic information and positional information, classified, stored, reported to the police and is shown by output unit as a result.
2. method according to claim 1, it is characterized in that, in the step of described enhancing grey-scale contrast and defect information, the transmitter module of described ultraviolet optics device adopts the ultraviolet leds particle that wavelength is 330 ~ 355nm to be arranged in line style, the light source luminescent face is equipped with diffusing panel, so that beam direction is modulated, form uniform light, thereby ito thin film is formed to the illumination of light-dark field; Wherein, form a secretly-illumination of backlight, a bright-illumination that side light source forms.
3. method according to claim 1, it is characterized in that, in the step of described Sync image capture, described image acquisition sync control device carries out Isolation, shaping, frequency modulation (PFM) to original coding device signal, form the scanning trigger pip of ultraviolet CCD camera, image acquisition is synchronizeed by required imaging precision with the ito thin film movement velocity, thereby obtain the original image that comprises defect information.
4. method according to claim 1, it is characterized in that, in the step of described original image analyzing and processing, the original image that described image processing apparatus will comprise defect information carries out image pre-service, defect Segmentation, Defect Search and cluster and defect characteristic extraction and identification.
5. method according to claim 1, is characterized in that, in the step of described real-time defect information discriminatory analysis, described output unit is as a result added up defect characteristic information and positional information, classify, store, and carries out alarm and demonstration simultaneously.
6. be used for realizing the pick-up unit of the ultraviolet optics online automatic detection method of the described ito thin film circuit pattern of claim 1 defect information, it comprises:
The ultraviolet optics device, comprise ultraviolet light transmitter module, radiation direction modulation module, light source refrigerating module, brightness regulated power supply driver module, be used for ito thin film is formed to the illumination of light-dark field grey-scale contrast and intensifier circuit pattern defect characteristic information between outstanding ITO circuit pattern and PET base material background in image space;
Microspur visual imaging device, comprise one or more micro-lenss, ultraviolet filtering mirror, adapter ring, ultraviolet CCD camera, is used for defect characteristic information is carried out to the high resolving power amplification;
The image acquisition sync control device, it is used for original coding device signal is carried out to Isolation, shaping, frequency modulation (PFM), form the scanning trigger pip of ultraviolet CCD camera, image acquisition is synchronizeed by required imaging precision with the ito thin film movement velocity, thereby obtain the original image that comprises defect information;
Image processing apparatus, its original image that is used for comprising defect information carries out image pre-service, defect Segmentation, Defect Search and cluster and defect characteristic extraction and identification;
Output unit as a result, it is used for, by defect characteristic information and positional information statistics, classification, storage, carrying out alarm and demonstration simultaneously.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104569712A (en) * | 2013-10-16 | 2015-04-29 | 财团法人工业技术研究院 | Photoelectric detection system |
| CN106383127A (en) * | 2016-02-29 | 2017-02-08 | 深港产学研基地 | Acquisition system for defect image of ITO transparent film |
| CN108572175A (en) * | 2018-07-02 | 2018-09-25 | 福建晟哲自动化科技有限公司 | slitting blade image automatic detecting machine |
| CN109345586A (en) * | 2018-11-02 | 2019-02-15 | 国网湖南省电力有限公司 | Electrical equipment discharge characteristic extracting method based on ultraviolet imagery technology |
| CN109781739A (en) * | 2019-03-04 | 2019-05-21 | 杭州晶耐科光电技术有限公司 | Automobile finish surface appearance defects automatic detection system and method |
| CN110554048A (en) * | 2019-09-12 | 2019-12-10 | 南京先进激光技术研究院 | touch-sensitive screen ITO membrane roughness defect detection device |
| CN111402190A (en) * | 2018-12-28 | 2020-07-10 | 上海尤图智能科技有限公司 | Image processing device and system for wire rod on-line detection |
| CN113419251A (en) * | 2021-05-17 | 2021-09-21 | 重庆大学 | Attitude recognition, coding and decoding and communication method based on laser reflection |
| CN114113137A (en) * | 2021-11-10 | 2022-03-01 | 佛山科学技术学院 | Defect detection system and method for thin film material |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104569712A (en) * | 2013-10-16 | 2015-04-29 | 财团法人工业技术研究院 | Photoelectric detection system |
| CN106383127A (en) * | 2016-02-29 | 2017-02-08 | 深港产学研基地 | Acquisition system for defect image of ITO transparent film |
| CN108572175A (en) * | 2018-07-02 | 2018-09-25 | 福建晟哲自动化科技有限公司 | slitting blade image automatic detecting machine |
| CN109345586A (en) * | 2018-11-02 | 2019-02-15 | 国网湖南省电力有限公司 | Electrical equipment discharge characteristic extracting method based on ultraviolet imagery technology |
| CN111402190A (en) * | 2018-12-28 | 2020-07-10 | 上海尤图智能科技有限公司 | Image processing device and system for wire rod on-line detection |
| CN111402190B (en) * | 2018-12-28 | 2023-06-09 | 上海尤图智能科技有限公司 | Image processing device and system for wire rod on-line detection |
| CN109781739A (en) * | 2019-03-04 | 2019-05-21 | 杭州晶耐科光电技术有限公司 | Automobile finish surface appearance defects automatic detection system and method |
| CN110554048A (en) * | 2019-09-12 | 2019-12-10 | 南京先进激光技术研究院 | touch-sensitive screen ITO membrane roughness defect detection device |
| CN113419251A (en) * | 2021-05-17 | 2021-09-21 | 重庆大学 | Attitude recognition, coding and decoding and communication method based on laser reflection |
| CN113419251B (en) * | 2021-05-17 | 2023-07-18 | 重庆大学 | Gesture recognition, coding and decoding and communication method based on laser reflection |
| CN114113137A (en) * | 2021-11-10 | 2022-03-01 | 佛山科学技术学院 | Defect detection system and method for thin film material |
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