CN102921198B - Defoaming device for stripping developing solution KOH/NaOH - Google Patents
Defoaming device for stripping developing solution KOH/NaOH Download PDFInfo
- Publication number
- CN102921198B CN102921198B CN201210467735.6A CN201210467735A CN102921198B CN 102921198 B CN102921198 B CN 102921198B CN 201210467735 A CN201210467735 A CN 201210467735A CN 102921198 B CN102921198 B CN 102921198B
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- liquid
- developer solution
- netted
- liquid medicine
- stripping
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Abstract
The invention relates to a defoaming device for stripping developing solution KOH/NaOH. An air drafting pipe and a plurality of liquid medicine spraying parts are arranged above a substrate transmission box; a transmission idler pulley is arranged below the substrate transmission box; a net-shaped heating pipe is arranged below the transmission idler pulley; net-shaped defoaming cotton is arranged on the lower surface of the heating pipe; a liquid medicine draining port is arranged at the bottom of the box body; channel openings for connecting a previous process and a following process and transmitting a glass substrate are arranged on two sides of the substrate transmission box; a liquid medicine reflowing port on a liquid medicine groove is positioned below a liquid medicine level; a new liquid medicine spraying part is arranged above the liquid medicine in the liquid medicine groove; the liquid medicine draining port is connected with the liquid medicine groove by a pipeline; a liquid outlet of the liquid medicine groove is connected with a spraying pump by the pipeline; and a liquid supplying pipeline is connected with the spraying parts of the substrate transmission box, so that a complete liquid supplying system is formed. By adopting the defoaming device, most of foams produced in a production pprocess can be removed, cooperation is brought to a production technology, and the liquid medicine is prevented from polluting, so that normal production can be ensured, and quality of products can be improved.
Description
Technical field
The present invention relates to defoaming device, be particularly related to the defoaming device of a kind of stripping developer solution KOH/NaOH, the foam producing while production as stripper solution and developer solution mainly for the solution of KOH and NaOH, or the foam that in other production processes, some liquids produce, on production line, carry out a series of transformations, foam is broken automatically by the method for physics, and to reach the object of eliminating foam, this device can be in use to the field that much needs froth breaking.
Background technology
At LCD, in TFT and TP processing industry, commonly use KOH or NaOH solution as stripper solution and imaging liquid, this inorganic alkaline liquid easily produces foam in the production process of production line, when concentration reaches 3%-5%(g/L), when temperature is 45 DEG C-50 DEG C, the reaction of liquid and to wash away the foam causing very many, and be not easy to eliminate, cause very large inconvenience to production.
Conventional debubbling method has use defoamer, strengthen and bleed and foam overflow is drained, but defoamer easily pollutes the product in production, therefore can not add; The air draft of bleeding strengthens, a part of foam can be taken away, form negative pressure, accelerate vanishing of foam, but to maintain certain temperature (as 50 DEG C) in producing, the increasing of bleeding, equally also can take heat away, causes fluid temperature to decline, do not meet the requirement of production technology, therefore the rate of air sucked in required using is limited, and foam is very many again, does not reach needed de-bubble effect; The third method is to allow foam flow to dipper, in dipper, increase by a baffle plate, foam exceeds baffle plate top edge and overflows, because foam is too many, medicinal liquid flow is larger, so it is very limited to flow to the foam of dipper, a lot of foams also rest in the casing of production line, therefore effect is also not obvious, so be badly in need of a kind of more effective froth breaking scheme.
Summary of the invention
The object of the invention is for the deficiencies in the prior art, a kind of netted heating tube and netted froth breaking cotton and cold liquid medicine jet shower device are provided, make every effort to ensure that the foam overwhelming majority producing in production process is all eliminated, coordinate with production technology, and do not pollute liquid, thereby ensure normally carrying out of production, improve product quality.
The present invention realizes by such technical scheme: the defoaming device of stripping developer solution KOH/NaOH, comprise substrate transmission case and dipper in production line, it is characterized in that, substrate transmission case top is provided with exhaust column and some liquids spray, the below of liquid spray is delivery roller, delivery roller below is provided with netted heating tube, it below netted heating tube, is netted froth breaking cotton, substrate transmission case bottom is provided with liquid floss hole, there is the access portal transmitting for glass substrate that connects front and back operation two sides of substrate transmission case, liquid refluxing opening on dipper is placed under liquid liquid level, the spray that adds new cold liquid is equipped with in the top of dipper liquid,
The liquid floss hole of substrate transmission case bottom is by pipeline communication dipper, and the liquid outlet of dipper is connected with spray pump by pipeline, and spray pump connects the liquid spray of production line body by feed liquid pipeline, form a complete liquid-supplying system;
The foam that uses the defoaming device of stripping developer solution KOH/NaOH to produce stripping developer solution KOH/NaOH in production process carries out the method for froth breaking, comprises the steps:
A) selecting KOH or NaOH is stripping developer solution, and stripping developer solution is sprayed and washed away the glass substrate operating on roller by liquid;
B) on glass substrate, there is photoresist, stripping developer solution and photoresist react and wash away and flow down from glass substrate, produce a lot of foams, participate under reacted stripping developer solution and foam stream, drop on netted heating tube, when bubble moment contact heating-up temperature is the netted heating tube of 80～180 degrees Celsius, break;
C) participate in reacted stripping developer solution and the remaining foam netted froth breaking by netted heating tube below when cotton, utilize the cotton interior curve structure of netted froth breaking, the friction of flow path, increase bubble and netted froth breaking cotton that increase liquid and bubble flow down, make a part of lather collapse, another part foam is trapped in the net of netted froth breaking cotton, through washing away of the stripping developer solution through netted heating tube high-temperature heating under continuing to flow, then part foam is broken thereupon above;
D) take air and the aqueous vapor in substrate transmission case away by exhaust column, part bubble is taken away, cause negative pressure in casing, to the generation acceleration of breaking of foam;
E) stripping developer solution flows back to dipper by pipeline, in pipeline, fill netted froth breaking cotton, continue to increase the flow path that impels lather collapse, the outlet of liquid return duct is placed in below stripping developer solution liquid level, reduces and produces new bubble because lower Flow Velocity is too fast;
F) on dipper, the new liquid spray that adds new stripping developer solution is housed, spray the umbrella shape that is shaped as of stripping developer solution, to increase the area of medicine liquid spray, the temperature of new stripping developer solution is 0～20 degree Celsius, remaining foam can swim in dipper upper epidermis, after the cold liquid that the foam contacting of heat sprays out, breaks because of the cold and hot temperature difference, has completed de-bubble process last in whole system.
Advantage of the present invention: carry out a series of physics transformation to reach the effect of physical defoaming by developing to produce on substrate transmission case and dipper at stripping, defoaming device can ensure that the foam overwhelming majority producing in production process all vanishes, production technology is coordinated, and do not pollute liquid, thereby ensure normally carrying out of production, improve product quality.
Brief description of the drawings
Fig. 1 is the defoaming device application schematic diagram of stripping developer solution KOH/NaOH;
Fig. 2 is substrate transmission case schematic diagram in the defoaming device of stripping developer solution KOH/NaOH.
In figure: 1. substrate transmission case, 2. glass substrate, 3. liquid spray, 4. exhaust column, 5. delivery roller, 6. access portal, 7. liquid floss hole, 8. netted heating tube, 9. netted froth breaking cotton, 10. liquid bubble, 11. netted froth breaking cottons, 12. new liquid sprays, 13. dippers, 14. medicine supplying pipe roads, 15. spray pumps, 16. bubbles.
Detailed description of the invention
For a more clear understanding of the present invention, describe in conjunction with the accompanying drawings and embodiments the present invention in detail:
As shown in Figure 1-2; the defoaming device of stripping developer solution KOH/NaOH; comprise substrate transmission case 1; substrate transmission case 1 is one section of stripping developing apparatus casing in normal productive process; substrate transmission case 1 top is provided with some liquid sprays 3 and exhaust column 4; the below of liquid spray 3 is one group of delivery roller 5; delivery roller 5 belows are provided with netted heating tube 8; netted heating tube 8 is netted froth breaking cotton 9 below; substrate transmission case 1 bottom is provided with liquid floss hole 7, and two sides of substrate transmission case 1 are provided with the access portal 6 transmitting for glass substrate 2;
The liquid floss hole 7 of substrate transmission case 1 bottom is by the refluxing opening of pipeline communication dipper 13, the liquid outlet of dipper 13 is connected with spray pump 15 inlets by pipeline, the liquid outlet of spray pump 15 is connected with medicine supplying pipe road 14, thereby liquid is delivered into the liquid spray of substrate transmission case 1 top from dipper, complete the overall process of production and froth breaking.
The foam that uses the defoaming device of stripping developer solution KOH/NaOH to produce stripping developer solution KOH/NaOH in production process carries out the method for froth breaking, comprises the steps:
A) the stripping developer solution adopting is KOH or NaOH, and stripping developer solution sprays 3 by liquid and washes away the glass substrate 2 operating on roller;
B) on glass substrate 2, there is photoresist, stripping developer solution and photoresist react and wash away and flow down from glass substrate 2, produce a lot of foams, under stripping developer solution and foam stream, drop on netted heating tube 8, when bubble moment contact heating-up temperature is the netted heating tube of 80～180 degrees Celsius, break;
C) stripping developer solution and remaining foam continue by the netted froth breaking cotton 9 of netted heating tube 8 belows, the structure of cotton 9 interior curve of netted froth breaking, increase the flow path that stripping developer solution and bubble flow down, increased the friction of bubble and netted froth breaking cotton 9, made a part of lather collapse; Another part foam is rested in the net of netted froth breaking cotton 9, and through washing away of the high-temp liquid under continuing to flow above, part foam breaks thereupon;
D) take air and the aqueous vapor in substrate transmission case 1 casing away by exhaust column 4, part bubble is taken away, cause negative pressure in casing, to the generation acceleration of breaking of foam;
E) liquid flows back to dipper 13 by pipeline, in pipeline, fill netted froth breaking cotton 9, netted froth breaking cotton 9 continues to increase the flow path that impels lather collapse, and the outlet of liquid return duct is placed in below stripping developer solution liquid level, reduces and produces new bubble because lower Flow Velocity is too fast;
F) on dipper 13, the new liquid spray 12 that adds new stripping developer solution is housed, spray the umbrella shape that is shaped as of liquid, to increase the area of medicine liquid spray, the temperature of new liquid is 0～20 degree Celsius, remaining foam can swim in dipper upper epidermis, after the cold liquid that the foam contacting of heat sprays out, breaks because of the cold and hot temperature difference, has completed de-bubble process last in whole system.
According to the above description, can reproduce the present invention in conjunction with known technology.
Claims (1)
1. the defoaming device of stripping developer solution KOH/NaOH, comprise substrate transmission case and dipper in production line, it is characterized in that, substrate transmission case top is provided with exhaust column and some liquids spray, the below of liquid spray is delivery roller, delivery roller below is provided with netted heating tube, it below netted heating tube, is netted froth breaking cotton, substrate transmission case bottom is provided with liquid floss hole, there is the access portal transmitting for glass substrate that connects front and back operation two sides of substrate transmission case, liquid refluxing opening on dipper is placed under liquid liquid level, the spray that adds new cold liquid is equipped with in the top of dipper liquid,
The liquid floss hole of substrate transmission case bottom is by pipeline communication dipper, and the liquid outlet of dipper is connected with spray pump by pipeline, and spray pump connects the liquid spray of production line body by feed liquid pipeline, form a complete liquid-supplying system;
The foam that uses the defoaming device of stripping developer solution KOH/NaOH to produce stripping developer solution KOH/NaOH in production process carries out the method for froth breaking, comprises the steps:
A) selecting KOH or NaOH is stripping developer solution, and stripping developer solution is sprayed and washed away the glass substrate operating on roller by liquid;
B) on glass substrate, there is photoresist, stripping developer solution and photoresist react and wash away and flow down from glass substrate, produce a lot of foams, participate under reacted stripping developer solution and foam stream, drop on netted heating tube, when bubble moment contact heating-up temperature is the netted heating tube of 80～180 degrees Celsius, break;
C) participate in reacted stripping developer solution and the remaining foam netted froth breaking by netted heating tube below when cotton, utilize the cotton interior curve structure of netted froth breaking, the friction of flow path, increase bubble and netted froth breaking cotton that increase liquid and bubble flow down, make a part of lather collapse, another part foam is trapped in the net of netted froth breaking cotton, through washing away of the stripping developer solution through netted heating tube high-temperature heating under continuing to flow, then part foam is broken thereupon above;
D) take air and the aqueous vapor in substrate transmission case away by exhaust column, part bubble is taken away, cause negative pressure in casing, to the generation acceleration of breaking of foam;
E) stripping developer solution flows back to dipper by pipeline, in pipeline, fill netted froth breaking cotton, continue to increase the flow path that impels lather collapse, the outlet of liquid return duct is placed in below stripping developer solution liquid level, reduces and produces new bubble because lower Flow Velocity is too fast;
F) on dipper, the new liquid spray that adds new stripping developer solution is housed, spray the umbrella shape that is shaped as of stripping developer solution, to increase the area of medicine liquid spray, the temperature of new stripping developer solution is 0～20 degree Celsius, remaining foam can swim in dipper upper epidermis, after the cold liquid that the foam contacting of heat sprays out, breaks because of the cold and hot temperature difference, has completed de-bubble process last in whole system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210467735.6A CN102921198B (en) | 2012-11-19 | 2012-11-19 | Defoaming device for stripping developing solution KOH/NaOH |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210467735.6A CN102921198B (en) | 2012-11-19 | 2012-11-19 | Defoaming device for stripping developing solution KOH/NaOH |
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| Publication Number | Publication Date |
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| CN102921198A CN102921198A (en) | 2013-02-13 |
| CN102921198B true CN102921198B (en) | 2014-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210467735.6A Expired - Fee Related CN102921198B (en) | 2012-11-19 | 2012-11-19 | Defoaming device for stripping developing solution KOH/NaOH |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106200282A (en) * | 2016-08-29 | 2016-12-07 | 广西钦州天山微电子有限公司 | The unclean bubble elimination device of a kind of LCD demoulding and method |
| CN111665678A (en) * | 2017-09-19 | 2020-09-15 | 海信视像科技股份有限公司 | Water-cooling heat dissipation system and projector |
| CN108261998A (en) * | 2018-04-10 | 2018-07-10 | 湖南铭煌科技发展有限公司 | A kind of defoaming device applied to polycarboxylic acid water reducer macromer |
| CN110561631A (en) * | 2018-06-06 | 2019-12-13 | 隆基绿能科技股份有限公司 | Cutting fluid supply device and method |
| CN114681957A (en) * | 2020-12-30 | 2022-07-01 | 内蒙古伊利实业集团股份有限公司 | Spraying type defoaming device and defoaming method for dairy product processing |
| CN113373054A (en) * | 2021-05-26 | 2021-09-10 | 重庆大学附属肿瘤医院 | Cancer cell diffusion preference simulation device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201260903Y (en) * | 2008-06-12 | 2009-06-24 | 欧阳智友 | Full automatic foam-eliminating machine |
| CN102430270A (en) * | 2011-09-15 | 2012-05-02 | 湖北建浩科技有限公司 | Vacuum de-foaming box capable of clearing foam |
| CN102641610A (en) * | 2012-05-07 | 2012-08-22 | 齐齐哈尔科诺科技有限公司 | Foam elimination device for vacuum oil purification |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS572042A (en) * | 1980-06-04 | 1982-01-07 | Mitsubishi Electric Corp | Developing device of positive type resist |
| JP2642222B2 (en) * | 1990-06-22 | 1997-08-20 | 富士写真フイルム株式会社 | Defoaming device for aeration |
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2012
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201260903Y (en) * | 2008-06-12 | 2009-06-24 | 欧阳智友 | Full automatic foam-eliminating machine |
| CN102430270A (en) * | 2011-09-15 | 2012-05-02 | 湖北建浩科技有限公司 | Vacuum de-foaming box capable of clearing foam |
| CN102641610A (en) * | 2012-05-07 | 2012-08-22 | 齐齐哈尔科诺科技有限公司 | Foam elimination device for vacuum oil purification |
Non-Patent Citations (1)
| Title |
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| JP昭57-2042A 1982.01.07 |
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Granted publication date: 20140820 Termination date: 20151119 |