CN102921198A - Defoaming device for stripping developing solution KOH/NaOH - Google Patents
Defoaming device for stripping developing solution KOH/NaOH Download PDFInfo
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- CN102921198A CN102921198A CN2012104677356A CN201210467735A CN102921198A CN 102921198 A CN102921198 A CN 102921198A CN 2012104677356 A CN2012104677356 A CN 2012104677356A CN 201210467735 A CN201210467735 A CN 201210467735A CN 102921198 A CN102921198 A CN 102921198A
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Abstract
The invention relates to a defoaming device for stripping developing solution KOH/NaOH. An air drafting pipe and a plurality of liquid medicine spraying parts are arranged above a substrate transmission box; a transmission idler pulley is arranged below the substrate transmission box; a net-shaped heating pipe is arranged below the transmission idler pulley; net-shaped defoaming cotton is arranged on the lower surface of the heating pipe; a liquid medicine draining port is arranged at the bottom of the box body; channel openings for connecting a previous process and a following process and transmitting a glass substrate are arranged on two sides of the substrate transmission box; a liquid medicine reflowing port on a liquid medicine groove is positioned below a liquid medicine level; a new liquid medicine spraying part is arranged above the liquid medicine in the liquid medicine groove; the liquid medicine draining port is connected with the liquid medicine groove by a pipeline; a liquid outlet of the liquid medicine groove is connected with a spraying pump by the pipeline; and a liquid supplying pipeline is connected with the spraying parts of the substrate transmission box, so that a complete liquid supplying system is formed. By adopting the defoaming device, most of foams produced in a production pprocess can be removed, cooperation is brought to a production technology, and the liquid medicine is prevented from polluting, so that normal production can be ensured, and quality of products can be improved.
Description
Technical field
The present invention relates to defoaming device, be particularly related to the defoaming device of a kind of stripping developer solution KOH/NaOH, the foam that produces when producing as stripper solution and developer solution mainly for the solution of KOH and NaOH, the foam that perhaps some liquids produce in other production processes, carry out a series of transformations at production line, foam is broken automatically by the method for physics, and to reach the purpose of eliminating foam, this device can be in use to the field that much needs froth breaking.
Background technology
At LCD, in TFT and the TP processing industry, commonly use KOH or NaOH solution as stripper solution and imaging liquid, this inorganic alkaline liquid produces foam easily in the production process of production line, when concentration reaches 3%-5%(g/L), when temperature is 45 ℃-50 ℃, the reaction of liquid and to wash away the foam that causes very many, and be not easy to eliminate, caused very large inconvenience to production.
Debubbling method commonly used has the use defoamer, and increasing is bled and foam overflow is drained, but defoamer pollutes the product in the production easily, so can not add; The air draft of will bleeding strengthens, a part of foam can be taken away, form negative pressure, accelerate vanishing of foam, but owing to will maintain certain temperature (such as 50 ℃) in producing, the increasing of bleeding equally also can be taken heat away, causes fluid temperature to descend, do not meet the requirement of production technology, therefore the rate of air sucked in required of using is limited, and foam is very many again, does not reach needed de-bubble effect; The third method is to allow foam flow to dipper, increase by a baffle plate in the dipper, foam exceeds the baffle plate top edge and overflows, because foam is too many, medicinal liquid flow is larger, so it is very limited to flow to the foam of dipper, a lot of foams also rest in the casing of production line, therefore effect is also not obvious, so be badly in need of a kind of more effective froth breaking scheme.
Summary of the invention
The objective of the invention is for the deficiencies in the prior art, provide a kind of netted heating tube and netted froth breaking cotton and cold liquid medicine jet shower device, make every effort to guarantee that the foam overwhelming majority that produces in the production process is all eliminated, cooperate with production technology, and do not pollute liquid, thereby guarantee normally carrying out of production, improve product quality.
The present invention realizes by such technical scheme: the defoaming device of stripping developer solution KOH/NaOH, comprise substrate transmission case and dipper in the production line, it is characterized in that, substrate transmission case top is equipped with exhaust column and some liquids spray, the below of liquid spray is delivery roller, the delivery roller below is provided with netted heating tube, be that netted froth breaking is cotton below the netted heating tube, substrate transmission case bottom is provided with the liquid floss hole, there is the access portal that glass substrate transmits that is used for that connects the front and back operation two sides of substrate transmission case, liquid refluxing opening on the dipper places under the liquid liquid level, and the spray that adds new cold liquid is equipped with in the top of dipper liquid;
The liquid floss hole of substrate transmission case bottom is by the pipeline communication dipper, and the liquid outlet of dipper is connected with spray pump by pipeline, and spray pump sprays by the liquid that feed liquid pipeline connects the production line body, forms a complete liquid-supplying system;
The foam that the defoaming device of use stripping developer solution KOH/NaOH produces stripping developer solution KOH/NaOH in the production process carries out the method for froth breaking, comprises the steps:
A) selecting KOH or NaOH is the stripping developer solution, and the stripping developer solution washes away the glass substrate that operates on the roller by the liquid spray;
B) on the glass substrate photoresist is arranged, stripping developer solution and photoresist react and wash away from glass substrate and flow down, produce a lot of foams, participate under reacted stripping developer solution and the foam stream, drop on the netted heating tube, break when bubble moment contact heating-up temperature is the netted heating tube of 80～180 degree;
When c) participating in reacted stripping developer solution and remaining foam by the netted froth breaking cotton below the netted heating tube, utilize the cotton interior curve structure of netted froth breaking, increase the friction of flow path, increase bubble and netted froth breaking cotton under liquid and the bubble flow, make a part of lather collapse, another part foam is trapped in the net of netted froth breaking cotton, through above under continuing to flow through the washing away of the stripping developer solution of netted heating tube high-temperature heating, the part foam is broken thereupon;
D) take air and aqueous vapor in the substrate transmission case away by exhaust column, the part bubble is taken away, cause negative pressure in the casing, to the generation acceleration of breaking of foam;
E) the stripping developer solution flows back to dipper by pipeline, it is cotton to have filled netted froth breaking in the pipeline, continue to increase the flow path that impels lather collapse, the outlet of liquid return duct places below the stripping developer solution liquid level, and minimizing produces new bubble too soon because of lower Flow Velocity;
F) on dipper, the new liquid spray that adds new stripping developer solution is housed, spray the umbrella shape that is shaped as of stripping developer solution, to increase the area of medicine liquid spray, the temperature of new stripping developer solution is 0～20 degree, remaining foam can swim in the dipper upper epidermis, breaks because of the cold and hot temperature difference behind the cold liquid that the foam contacting of heat sprays out, and has finished de-bubble process last in the whole system.
Advantage of the present invention: carry out the effect that a series of physics transformation reaches physical defoaming by develop at stripping production substrate transmission case and dipper, defoaming device can guarantee that the foam overwhelming majority that produces in the production process all vanishes, production technology is cooperated, and do not pollute liquid, thereby guarantee normally carrying out of production, improve product quality.
Description of drawings
Fig. 1 is that the defoaming device of stripping developer solution KOH/NaOH is used schematic diagram;
Fig. 2 is substrate transmission case schematic diagram in the defoaming device of stripping developer solution KOH/NaOH.
Among the figure: 1. substrate transmission case, 2. glass substrate, 3. liquid spray, 4. exhaust column, 5. delivery roller, 6. access portal, 7. liquid floss hole, 8. netted heating tube, 9. netted froth breaking is cotton, 10. liquid bubble, 11. netted froth breakings are cotton, and 12. new liquids spray, 13. dipper, 14. the medicine supplying pipe road, 15. spray pumps, 16. bubbles.
The specific embodiment
For a more clear understanding of the present invention, describe in conjunction with the accompanying drawings and embodiments the present invention in detail:
Shown in Fig. 1-2, the defoaming device of stripping developer solution KOH/NaOH, comprise substrate transmission case 1, substrate transmission case 1 is one section stripping developing apparatus casing in the normal productive process, substrate transmission case 1 top is equipped with some liquid sprays 3 and exhaust column 4, the below of liquid spray 3 is one group of delivery roller 5, delivery roller 5 belows are provided with netted heating tube 8, be netted froth breaking cotton 9 below the netted heating tube 8, substrate transmission case 1 bottom is provided with liquid floss hole 7, and two sides of substrate transmission case 1 are provided with the access portal 6 that transmits for glass substrate 2;
The liquid floss hole 7 of substrate transmission case 1 bottom is by the refluxing opening of pipeline communication dipper 13, the liquid outlet of dipper 13 is connected with spray pump 15 inlets by pipeline, the liquid outlet of spray pump 15 is connected with medicine supplying pipe road 14, thereby liquid is sprayed from the liquid that dipper delivers into substrate transmission case 1 top, finish the overall process of production and froth breaking.
The foam that the defoaming device of use stripping developer solution KOH/NaOH produces stripping developer solution KOH/NaOH in the production process carries out the method for froth breaking, comprises the steps:
A) the stripping developer solution that adopts is KOH or NaOH, and the stripping developer solution washes away the glass substrate 2 that operates on the roller by liquid spray 3;
B) on the glass substrate 2 photoresist is arranged, stripping developer solution and photoresist react and wash away from glass substrate 2 and flow down, produce a lot of foams, under stripping developer solution and the foam stream, drop on the netted heating tube 8, break when bubble moment contact heating-up temperature is the netted heating tube of 80～180 degree;
C) stripping developer solution and remaining foam continue the netted froth breaking cotton 9 by netted heating tube 8 belows, the structure of cotton 9 interior curve of netted froth breaking, increased the flow path under stripping developer solution and the bubble flow, increased the friction of bubble and netted froth breaking cotton 9, made a part of lather collapse; Another part foam is rested in the net of netted froth breaking cotton 9, through above the washing away of high-temp liquid under continuing to flow, the part foam breaks thereupon;
D) take air and aqueous vapor in substrate transmission case 1 casing away by exhaust column 4, the part bubble is taken away, cause negative pressure in the casing, to the generation acceleration of breaking of foam;
E) liquid flows back to dipper 13 by pipeline, filled netted froth breaking cotton 9 in the pipeline, netted froth breaking cotton 9 continues to increase the flow path that impels lather collapse, and the outlet of liquid return duct places below the stripping developer solution liquid level, and minimizing produces new bubble too soon because of lower Flow Velocity;
F) on dipper 13, the new liquid spray 12 that adds new stripping developer solution is housed, spray the umbrella shape that is shaped as of liquid, to increase the area of medicine liquid spray, the temperature of new liquid is 0～20 degree,, remaining foam can swim in the dipper upper epidermis, break because of the cold and hot temperature difference behind the cold liquid that the foam contacting of heat sprays out, finished de-bubble process last in the whole system.
According to the above description, can reproduce the present invention in conjunction with known technology.
Claims (1)
1. the defoaming device of stripping developer solution KOH/NaOH, comprise substrate transmission case and dipper in the production line, it is characterized in that, substrate transmission case top is equipped with exhaust column and some liquids spray, the below of liquid spray is delivery roller, the delivery roller below is provided with netted heating tube, be that netted froth breaking is cotton below the netted heating tube, substrate transmission case bottom is provided with the liquid floss hole, there is the access portal that glass substrate transmits that is used for that connects the front and back operation two sides of substrate transmission case, liquid refluxing opening on the dipper places under the liquid liquid level, and the spray that adds new cold liquid is equipped with in the top of dipper liquid;
The liquid floss hole of substrate transmission case bottom is by the pipeline communication dipper, and the liquid outlet of dipper is connected with spray pump by pipeline, and spray pump sprays by the liquid that feed liquid pipeline connects the production line body, forms a complete liquid-supplying system;
The foam that the defoaming device of use stripping developer solution KOH/NaOH produces stripping developer solution KOH/NaOH in the production process carries out the method for froth breaking, comprises the steps:
A) selecting KOH or NaOH is the stripping developer solution, and the stripping developer solution washes away the glass substrate that operates on the roller by the liquid spray;
B) on the glass substrate photoresist is arranged, stripping developer solution and photoresist react and wash away from glass substrate and flow down, produce a lot of foams, participate under reacted stripping developer solution and the foam stream, drop on the netted heating tube, break when bubble moment contact heating-up temperature is the netted heating tube of 80～180 degree;
When c) participating in reacted stripping developer solution and remaining foam by the netted froth breaking cotton below the netted heating tube, utilize the cotton interior curve structure of netted froth breaking, increase the friction of flow path, increase bubble and netted froth breaking cotton under liquid and the bubble flow, make a part of lather collapse, another part foam is trapped in the net of netted froth breaking cotton, through above under continuing to flow through the washing away of the stripping developer solution of netted heating tube high-temperature heating, the part foam is broken thereupon;
D) take air and aqueous vapor in the substrate transmission case away by exhaust column, the part bubble is taken away, cause negative pressure in the casing, to the generation acceleration of breaking of foam;
E) the stripping developer solution flows back to dipper by pipeline, has filled netted froth breaking cotton in the pipeline, continues to increase the flow path that impels lather collapse, and the outlet of liquid return duct places below the stripping developer solution liquid level, and minimizing produces new bubble because lower Flow Velocity is too fast;
F) on dipper, the new liquid spray that adds new stripping developer solution is housed, spray the umbrella shape that is shaped as of stripping developer solution, to increase the area of medicine liquid spray, the temperature of new stripping developer solution is 0～20 degree, remaining foam can swim in the dipper upper epidermis, breaks because of the cold and hot temperature difference behind the cold liquid that the foam contacting of heat sprays out, and has finished de-bubble process last in the whole system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210467735.6A CN102921198B (en) | 2012-11-19 | 2012-11-19 | Defoaming device for stripping developing solution KOH/NaOH |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210467735.6A CN102921198B (en) | 2012-11-19 | 2012-11-19 | Defoaming device for stripping developing solution KOH/NaOH |
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| CN102921198A true CN102921198A (en) | 2013-02-13 |
| CN102921198B CN102921198B (en) | 2014-08-20 |
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| CN201210467735.6A Expired - Fee Related CN102921198B (en) | 2012-11-19 | 2012-11-19 | Defoaming device for stripping developing solution KOH/NaOH |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106200282A (en) * | 2016-08-29 | 2016-12-07 | 广西钦州天山微电子有限公司 | The unclean bubble elimination device of a kind of LCD demoulding and method |
| CN107505805A (en) * | 2017-09-19 | 2017-12-22 | 青岛海信电器股份有限公司 | A kind of water tank, water-cooling heat radiating system and projector |
| CN108261998A (en) * | 2018-04-10 | 2018-07-10 | 湖南铭煌科技发展有限公司 | A kind of defoaming device applied to polycarboxylic acid water reducer macromer |
| CN110561631A (en) * | 2018-06-06 | 2019-12-13 | 隆基绿能科技股份有限公司 | Cutting fluid supply device and method |
| CN113373054A (en) * | 2021-05-26 | 2021-09-10 | 重庆大学附属肿瘤医院 | Cancer cell diffusion preference simulation device |
| CN114681957A (en) * | 2020-12-30 | 2022-07-01 | 内蒙古伊利实业集团股份有限公司 | Spraying type defoaming device and defoaming method for dairy product processing |
Citations (5)
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|---|---|---|---|---|
| JPS572042A (en) * | 1980-06-04 | 1982-01-07 | Mitsubishi Electric Corp | Developing device of positive type resist |
| EP0464504A2 (en) * | 1990-06-22 | 1992-01-08 | Fuji Photo Film Co., Ltd. | Defoaming device for aeration system in a photographic developing machine |
| CN201260903Y (en) * | 2008-06-12 | 2009-06-24 | 欧阳智友 | Full automatic foam-eliminating machine |
| CN102430270A (en) * | 2011-09-15 | 2012-05-02 | 湖北建浩科技有限公司 | Vacuum de-foaming box capable of clearing foam |
| CN102641610A (en) * | 2012-05-07 | 2012-08-22 | 齐齐哈尔科诺科技有限公司 | Foam elimination device for vacuum oil purification |
-
2012
- 2012-11-19 CN CN201210467735.6A patent/CN102921198B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS572042A (en) * | 1980-06-04 | 1982-01-07 | Mitsubishi Electric Corp | Developing device of positive type resist |
| EP0464504A2 (en) * | 1990-06-22 | 1992-01-08 | Fuji Photo Film Co., Ltd. | Defoaming device for aeration system in a photographic developing machine |
| CN201260903Y (en) * | 2008-06-12 | 2009-06-24 | 欧阳智友 | Full automatic foam-eliminating machine |
| CN102430270A (en) * | 2011-09-15 | 2012-05-02 | 湖北建浩科技有限公司 | Vacuum de-foaming box capable of clearing foam |
| CN102641610A (en) * | 2012-05-07 | 2012-08-22 | 齐齐哈尔科诺科技有限公司 | Foam elimination device for vacuum oil purification |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106200282A (en) * | 2016-08-29 | 2016-12-07 | 广西钦州天山微电子有限公司 | The unclean bubble elimination device of a kind of LCD demoulding and method |
| CN107505805A (en) * | 2017-09-19 | 2017-12-22 | 青岛海信电器股份有限公司 | A kind of water tank, water-cooling heat radiating system and projector |
| CN108261998A (en) * | 2018-04-10 | 2018-07-10 | 湖南铭煌科技发展有限公司 | A kind of defoaming device applied to polycarboxylic acid water reducer macromer |
| CN110561631A (en) * | 2018-06-06 | 2019-12-13 | 隆基绿能科技股份有限公司 | Cutting fluid supply device and method |
| CN114681957A (en) * | 2020-12-30 | 2022-07-01 | 内蒙古伊利实业集团股份有限公司 | Spraying type defoaming device and defoaming method for dairy product processing |
| CN113373054A (en) * | 2021-05-26 | 2021-09-10 | 重庆大学附属肿瘤医院 | Cancer cell diffusion preference simulation device |
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| Publication number | Publication date |
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| CN102921198B (en) | 2014-08-20 |
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Granted publication date: 20140820 Termination date: 20151119 |