CN102916030A - Organic electroluminescence display element and manufacturing method thereof - Google Patents
Organic electroluminescence display element and manufacturing method thereof Download PDFInfo
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- CN102916030A CN102916030A CN2011102254117A CN201110225411A CN102916030A CN 102916030 A CN102916030 A CN 102916030A CN 2011102254117 A CN2011102254117 A CN 2011102254117A CN 201110225411 A CN201110225411 A CN 201110225411A CN 102916030 A CN102916030 A CN 102916030A
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Abstract
The invention relates to an organic electroluminescence display element and a manufacturing method thereof. An auxiliary electrode is formed between a substrate and a second electrode of an organic electroluminescence display element, and then the electrodes of the organic electroluminescence display element and the auxiliary electrode are connected, so that the brightness uniformity of the large-area organic electroluminescence display element is improved, the quality of a product using the element is improved, and the economic effect is good in the aspect of manufacturing.
Description
Technical field
The invention relates to a kind of organic electro-luminescent display unit with and manufacture method, particularly relevant for a kind of luminance uniformity that improves the large tracts of land organic electro-luminescent display unit by improving simply structure, not only can improve the quality of the product that utilizes this element, and the good organic electro-luminescent display unit of manufacture view economic effect with and manufacture method.
Background technology
Recently, care to flat panel displaying element uprises gradually, has liquid crystal indicator (Liquid Crystal Display), Plasmia indicating panel (Plasma Display Panel), field to cause generation display apparatus (Field Emission Display), electroluminescence (Electroluminescence: be designated hereinafter simply as " EL ") display element etc. as this panel display apparatus.
Wherein, the EL display element is self-emission device, has reaction speed fast, and the advantage that luminous efficiency, brightness and visual angle are large according to the material of luminescent layer, roughly is divided into inorganic EL display element and organic EL display element.It is larger that organic EL display element that inorganic EL display element and what is called are called organic electro-luminescent display unit or OLED (Organic Light Emitting Diode or Display) is compared power consumption, high brightness can't be obtained, and the shades of colour light of red (R), green (G), blue (B) can not be sent.On the contrary, the low voltage drive that organic electro-luminescent display unit can be about 10V, simultaneously, reaction speed is fast, can obtain high brightness, and, can send the shades of colour light such as red, green, blue, therefore be suitable for most flat panel displaying element of future generation.
Fig. 1 is that expression is according to an example of the upper light emitting-type (top emission type) of one OELD in the various formations of the organic electro-luminescent display unit of prior art and thin-film transistor, as shown in the figure, possesses the unit picture element 60 that is configured in respectively by the defined zone of intersection of gate lines G L and data wire DL, when supplying with grid impulse, 60 couples of gate lines G L of unit picture element accept data-signal from data wire DL, and to should data-signal, organic electro-luminescent display unit be luminous and show image.And, the integrated formation display element of unit picture element zone.
In addition, described unit picture element 60 possess OLED unit, gate lines G L and data wire DL that the second electrode is connected to driving voltage source VDD and, be connected in reference element GND, and be connected to the unit drives section 62 of the first electrode of OLED unit.Unit drives section 62 possess switch with thin-film transistor (Thin Film Transistor: be designated hereinafter simply as " TFT ") T1, drive with TFTT2, capacitor C.
Described switch TFTT1, the data-signal that will be supplied to data wire DL when gate lines G L supply grid impulse then is unlocked supplies to node N.The data-signal that is fed into node N is supplemented with money in the time of capacitor C, is fed into the gate electrode that drives with TFTT2.
Described driving is supplied to the magnitude of current I of OLED unit with TFTT2 according to the data-signal control that is supplied to gate electrode from driving voltage source VDD, thereby adjusts the luminous quantity of OLED unit.And, even switch is closed with TFTT1, also keep data-signal by capacitor C, drive and supply with electric current I with TFTT2 from driving voltage source VDD to the OLED unit until supply with the data-signal of next frame, thereby keep the luminous of OLED unit.
Fig. 2 is the sectional view of regional area of the unit picture element of detailed presentation graphs 1.According to this, existing organic electro-luminescent display unit possesses: switch TFTT1 (with reference to Fig. 1); Drive and use TFTT2, gate electrode 24 to be connected in the drain electrode that switch is used TFT; OLED power supply, OLED electrode 12 are connected in the drain electrode 28 that drives with TFTT2.
Described switch possesses with TFT: the gate electrode that is connected in gate lines G L (with reference to Fig. 1); Be connected in the source electrode of data wire DL (with reference to Fig. 1); Be connected in the drain electrode that drives with the gate electrode 24 of TFTT2.
Described driving possesses with TFTT2: be connected in the gate electrode 24 that switch is used the drain electrode of TFT; Be connected in the source electrode 26 of reference element GND; Be connected in the drain electrode 28 of the first electrode 12 of OLED unit; Between source electrode 26 and drain electrode, form the active layer 38 of raceway groove.Describe described driving in detail with TFTT2, comprising: the gate electrode 24 that together forms with gate line; The source electrode 26 and the drain electrode 28 that together form with data wire; Barrier utmost point dielectric film 36 is overlapping with gate electrode 24, forms the active layer 38 of raceway groove between source electrode 26 and drain electrode 28; The ohmic contact layer 40 that is used for the surface resistance of attenuating active layer 38 and source electrode 26 and drain electrode 28.Also comprise contact hole 34, it is in order to protect the first electrode 12 of OLED unit and contacting of drain electrode 28, and break-through diaphragm 30 exposes drain electrode 28.
Described OLED unit possesses: organic luminous layer 10; The first electrode 12 and the second electrode 14, it is insulated film 6 insulation, is formed on bottom and the top of organic luminous layer 10.
Described the second electrode 4 lamination tin indium oxides (ITO:Indium Tin Oxide), the transparent conductivity materials such as indium zinc oxide (IZO:Indium Zinc Oxide), perhaps the vitrina individual layer such as Al, AlLi, Mg, Ca, Ag, MgAg or one consist of with the upper strata.Supply with the driving signal that is used for emitting electric charge from driving voltage source VDD (with reference to Fig. 1) at this second electrode 4.
Described the first electrode 12 is connected with the drain electrode 28 that drives with TFTT2 by drain contact hole 34, is formed on each OLED unit area.Supply with the driving signal that is used for emitting electric charge at this first electrode 12 from driving with the drain electrode 28 of TFTT2.
Described organic luminous layer 10 lamination electron injecting layer 10a, electron transfer layer 10b, luminescent layer 10c, hole transmission layer 10d and hole injection layer 10e and form.Supply with electric charge at this organic luminous layer 10 from the first electrode 12 and the second electrode 4.Thus, as shown in Figure 3, in the second electrode 4 emission holes, the hole that is launched moves to luminescent layer 10c through hole injection layer 10e and hole transmission layer 10d, at the first electrode 12 electron emissions, the electronics that is launched moves to luminescent layer 10c through electron injecting layer 10a and electron transfer layer 10b, and hole and electronics be again combination in luminescent layer 10c, thereby organic luminous layer 10 sends visible light.At this moment, the visible light that sends passes through the what is called second outward transmission of electrode 4 of transparency electrode, and is presented at organic electro-luminescent display unit with image.
And, in order to increase from the visible light of the second electrode 4 emission of organic electro-luminescent display unit, the first electrode 12 use comprise the outstanding aluminium of reflection characteristic (Al) and aluminium neodymium (Al-Nd) etc. aluminum-based metal, Cr or Cr alloy etc. more than one.
But, at existing small size organic electro-luminescent display unit, described structure does not become problem yet, but the situation of the large tracts of land organic electro-luminescent display unit of developing recently, as shown in Figure 4, when electric current flowed between zone and central area to the periphery from the second electrode 4, electric current was from inflow to arriving when remote, because the resistance of the second electrode produces voltage drop, therefore there is the very large problem of difference of the brightness of periphery and core.That is, large-area organic electro-luminescent display unit, the periphery that causes because of the resistance of the second electrode and the brightness of core poor, the rapid variation of luminance uniformity is so need to solve panel construction or the driver element of the difference of brightness.
Summary of the invention
The present invention proposes for solving described existing issue point, its purpose is, a kind of uniformity for the brightness that improves large-area organic electro-luminescent display unit is provided, between the second electrode of substrate and organic electroluminescent device, form after the auxiliary electrode, connect the electrode of organic electro-luminescent display unit and auxiliary electrode organic electro-luminescent display unit structure with and manufacture method.
In order to reach described purpose, organic electro-luminescent display unit according to the preferred embodiment of the invention comprises: substrate for display device, and it is by a kind of formation that is selected from glass, metal or the plastics; Organic electro-luminescent display unit drives and uses thin-film transistor, and it is formed on above the described substrate; Display element zone, it is formed by unit picture element and unit picture element group, and described unit picture element is defined by the intersection of the data wire of thin-film transistor and gate line on described substrate; Organic electro-luminescent display unit the first electrode, it is formed on the top of described thin-film transistor; The ORGANIC ELECTROLUMINESCENCE DISPLAYS auxiliary electrode, it is formed on the described substrate; The auxiliary electrode peristome, it is that a part of exposing described auxiliary electrode forms; Barrier film, it is formed on the peristome of described auxiliary electrode; Organic luminous layer, it is formed on described the first electrode; Organic electro-luminescent display unit the second electrode, it is formed on the described organic luminous layer, organic electro-luminescent display unit is as required at the upper formation conductive layer of described the second electrode and make it to become the part of the second electrode, described the second electrode or described conductive layer utilize described barrier film to be connected in auxiliary electrode, thereby lower the resistance of described the second electrode.
And described auxiliary electrode is to form with a transistorized part or to connect up independently to form to drive between the second electrode of substrate and organic electro-luminescent display unit.
And one part of pixel or pixel that described peristome is formed in the unit picture element in display element zone are whole.
And described barrier film is formed the inverted trapezoidal (turbination) that at least a portion around the barrier film broadens gradually from the lower end to the upper end.
And, described barrier film is formed the inverted trapezoidal (turbination) of structure more than 2 layers, or in structure more than 2 layers, upper layer formed and overhang shape (T font) and replace inverted trapezoidal (turbination).
And described barrier film forms more than one at least at the peristome of each auxiliary electrode.
And described the second electrode is to be connected with auxiliary electrode by sputtering method or chemical vapour deposition technique, does not need conductive layer.
And, when described the second electrode forms by heat deposition, form conductive layer and be connected with auxiliary electrode by sputtering method or chemical vapour deposition technique.
And when described the second electrode formed by heat deposition, the inclination substrate made the second electrode deposition and makes it film forming in the space of the sky of barrier film, and is connected with auxiliary electrode.
The manufacture method of organic electro-luminescent display unit according to the preferred embodiment of the invention, comprise: 1) form the substrate for display device that formed by a kind of material that is selected from glass, metal or the plastics and, be formed at organic electro-luminescent display unit on the described substrate and drive step with thin-film transistor; 2) be formed on the organic electro-luminescent display unit on described thin-film transistor top with the step of the first electrode; 3) form the organic electro-luminescent display unit auxiliary electrode at described substrate, and expose the step that local auxiliary electrode forms peristome; 4) form the step of barrier film at the peristome of described auxiliary electrode; 5) form the step of organic luminous layer at described the first electrode; 6) in the step of described organic luminous layer formation organic electro-luminescent display unit with the second electrode; 7) as required, form the step that conductive layer makes it to become the part of the second electrode at described the second electrode.
In other words, the present invention is a kind of organic electro-luminescent display unit, wherein, comprising:
Substrate for display device, it is by a kind of formation that is selected from glass, metal or the plastics;
Organic electro-luminescent display unit drives and uses thin-film transistor, and it is formed on above the described substrate;
Display element zone, it is formed by unit picture element and unit picture element group, and described unit picture element is by the data wire of thin-film transistor with gate line intersects and definition on described substrate;
Organic electro-luminescent display unit the first electrode, it is formed on the top of described thin-film transistor;
The organic electro-luminescent display unit auxiliary electrode, it is formed on the described substrate;
The auxiliary electrode peristome, it is that a part of exposing described auxiliary electrode forms;
Barrier film, it is formed on the peristome of described auxiliary electrode;
Organic luminous layer, it is formed on described the first electrode;
Organic electro-luminescent display unit the second electrode, it is formed on the described organic luminous layer,
Organic electro-luminescent display unit is only formed by described the second electrode or possesses conductive layer, described conductive layer be formed on the top of described the second electrode or below make it to become the part of the second electrode, described the second electrode or described conductive layer utilize described barrier film to be connected in auxiliary electrode, thereby lower the resistance of described the second electrode.
Organic electro-luminescent display unit of the present invention, wherein,
Described auxiliary electrode is formed to form to drive with a transistorized part or with independently wiring between the second electrode of substrate and organic electro-luminescent display unit.
Organic electro-luminescent display unit of the present invention, wherein,
Luminous (upper luminous: Top-Emission) during shape when described organic electroluminescence display device and method of manufacturing same being made into the front, reflecting plate and the auxiliary electrode of a part that consists of the front light emitting element structure are independently formed, or make the part of reflecting plate or all be connected as auxiliary electrode and with described the second electrode.
Organic electro-luminescent display unit of the present invention, wherein,
The light reflectance of described reflecting plate is more than 50%.
Organic electro-luminescent display unit of the present invention, wherein,
In order to reduce the impact that causes because of the parasitic capacitance that between described auxiliary electrode and the first electrode, produces, between described auxiliary electrode and described the first electrode, form interlayer dielectric.
Organic electro-luminescent display unit of the present invention, wherein,
The thickness of described interlayer dielectric is more than the 0.2 μ m, and light transmission is more than 50%.
Organic electro-luminescent display unit of the present invention, wherein,
Described auxiliary electrode or the reflecting plate of doing the auxiliary electrode effect are formed by the single metal material such as Cu, Al, Ag, Au, Nd, Co, Ni, Mo, Cr, Ti, Pt or its alloy.
Organic electro-luminescent display unit of the present invention, wherein,
The surface resistance of described auxiliary electrode is 0.01～50 Ω/sq, and the surface resistance of the second electrode of main resistor is 0.1～10 Ω/sq.
Organic electro-luminescent display unit of the present invention, wherein,
When described the second electrode was connected with auxiliary electrode, surface resistance was below the 1k Ω.
Organic electro-luminescent display unit of the present invention, wherein,
When described single the second electrode or described the second electrode of comprising described conductive layer are made cathodic process, at least comprise that the above work function of one deck meets the electrode layer of electron transport material, have the second electrode structure when described single the second electrode or described the second electrode of comprising described conductive layer are made anodize, described the second electrode structure comprises that the above work function of one deck at least meets the electrode layer of hole mobile material.
Organic electro-luminescent display unit of the present invention, wherein,
A part or pixel that described peristome and barrier film are formed in the whole pixel in display element zone are whole.
Organic electro-luminescent display unit of the present invention, wherein,
Peristome at described each auxiliary electrode forms an above barrier film at least, at this moment, by increasing by the second electrode of barrier film and the connecting portion area of auxiliary electrode, reduces the surface resistance of claim 9 and improves contact probability.
Organic electro-luminescent display unit of the present invention, wherein,
Described peristome and barrier film are formed on the non-luminous region of organic electro-luminescent display unit.
Organic electro-luminescent display unit of the present invention, wherein,
When described organic electro-luminescent display unit is made front luminous (upper luminous) shape, configure described peristome and barrier film with upper substrate or for the protection of the top protection of organic electro-luminescent display unit with the bottom of the non-outgoing area of unit at organic electro-luminescent display unit.
Organic electro-luminescent display unit of the present invention, wherein,
Described barrier film forms from the barrier film lower end that a part contacts with auxiliary electrode and broadens gradually to the barrier film upper end.
Organic electro-luminescent display unit of the present invention, wherein,
The upper side angulation of the outer inclination face of described barrier film and the outer inclination face of substrate surface or described barrier film and described barrier film is below 80 degree.
Organic electro-luminescent display unit of the present invention, wherein,
Described barrier film is formed the inverted trapezoidal (turbination) of structure more than 2 layers, or in structure more than 2 layers, upper layer formed and overhang shape (T font) and replace inverted trapezoidal (turbination).
Organic electro-luminescent display unit of the present invention, wherein,
(stepcoverage: STEP COVERAGE) good vacuum film formation equipment comes film forming, directly connects the second electrode and auxiliary electrode thereby need not conductive layer described the second electrode to be utilized the filming property such as sputtering method (Sputtering) or chemical vapour deposition technique (CVD).
Organic electro-luminescent display unit of the present invention, wherein,
When not being connected with auxiliary electrode after described the second electrode forms by heat deposition etc., utilize sputter or chemical vapour deposition (CVD) equal vacuum film-forming apparatus formation conductive layer at the second electrode, thus indirect joint the second electrode and auxiliary electrode.
Organic electro-luminescent display unit of the present invention, wherein,
When described the second electrode formed by heat deposition, the inclination substrate made the second electrode deposition and makes it film forming in the space of the sky of barrier film, and makes it to be connected with auxiliary electrode.
Organic electro-luminescent display unit of the present invention, wherein,
When described organic electro-luminescent display unit being made front luminous (upper luminous) shape, the light transmission of the second electrode or add that the light transmission of the multi-layered electrode of the second electrode and conductive layer is more than 20%.
Organic electro-luminescent display unit of the present invention, wherein,
In order to prevent moisture or oxygen from the external penetration of described organic electro-luminescent display unit to described peristome and described diaphragm portion and cause organic electro-luminescent display unit deteriorated; after connecting described auxiliary electrode and described the second electrode, form in the above inoranic membrane or organic film or protect organic electro-luminescent display unit by the single or multilayer film that inoranic membrane and organic film form.
Organic electro-luminescent display unit of the present invention, wherein,
When described organic electro-luminescent display unit is made front luminous (upper luminous) shape, in order to prevent because of outer smooth contrast ratio variation, be formed for circular Polarizer or the multilayer film of offsetting outer light or improving contrast ratio in the second electrode outside.
The manufacture method of a kind of organic electro-luminescent display unit of the present invention wherein, comprising:
1) form the substrate for display device that formed by a kind of material that is selected from glass, metal or the plastics and, be formed at organic electro-luminescent display unit on the described substrate and drive step with thin-film transistor;
2) be formed on the organic electro-luminescent display unit on described thin-film transistor top with the step of the first electrode;
3) form the organic electro-luminescent display unit auxiliary electrode at described substrate, and expose the step that local auxiliary electrode forms peristome;
4) form the step of barrier film at the peristome of described auxiliary electrode;
5) form the step of organic luminous layer at described the first electrode;
6) in the step of described organic luminous layer formation organic electro-luminescent display unit with the second electrode;
7) as required, on described the second electrode or below formation conductive layer and making it become the step of the part of the second electrode.
Organic electro-luminescent display unit according to the present invention with and manufacture method because large-area organic electro-luminescent display unit also can be guaranteed uniform brightness, therefore have advantages of the quality that can improve the product that utilizes this element.And, therefore good in the manufacture view economic effect unlike possessed in addition panel construction or driver element in order to ensure brightness in the past, thus expectation can improve mass-produced effect.
Characteristics of the present invention and advantage are clearer and more definite by the following detailed description meeting with reference to accompanying drawing.Employed term or word shall not be construed as the implication on the common dictionary in this specification and claims scope, the inventor should be interpreted as implication and the concept of technological thought according to the invention according to can suitably defining the principle of the concept of term for the method with the best illustrates the invention of oneself.
Description of drawings
Fig. 1 is the expression equivalent circuit figure large according to the organic electro-luminescent display unit of prior art.
Fig. 2 is the sectional view of the regional area of expression organic electro-luminescent display unit shown in Figure 1.
Fig. 3 is for the figure of explanation according to the principle of luminosity of the organic electro-luminescent display unit of prior art.
Fig. 4 is that expression is according to the plane graph of the panel of the common organic electro-luminescent display unit making of the usefulness of prior art.
Fig. 5 is that expression is according to the sectional view of organic electro-luminescent display unit of the present invention.
Fig. 6 is the piece figure of the manufacture method of expression organic electro-luminescent display unit of the present invention.
Fig. 7 to Figure 12 is that expression is according to the engineering drawing of the manufacture method of organic electro-luminescent display unit of the present invention.
Figure 13 is the figure that represents the variant embodiment of barrier film at organic electro-luminescent display unit of the present invention.
Figure 14 is illustrated in front luminous (upper luminous) shape organic electro-luminescent display unit, forms the figure of the embodiment of reflecting plate below the first electrode.
Figure 15 is illustrated among Figure 14 of front luminous (upper luminous) shape organic electro-luminescent display unit the figure of reflecting plate as the embodiment of auxiliary electrode.
Figure 16 is the figure of the embodiment of the expression TFT configuring area that peristome and barrier film is formed on non-illuminating part.
Figure 17 is illustrated in the figure of embodiment that front luminous (upper luminous) shape organic electro-luminescent display unit is formed on peristome and barrier film the BM lower area of top non-outgoing area.
Figure 18 is that expression is according to the second electrode of barrier film angle and the table of the variation of the surface resistance between the auxiliary electrode.
Figure 19 is expression in order to prevent moisture or oxygen from the outside of organic electro-luminescent display unit to the side infiltration of peristome and barrier film and to cause organic electro-luminescent display unit deteriorated, forms the figure that the diaphragm portion diaphragm is protected the embodiment of organic electro-luminescent display unit.
Figure 20 is illustrated in the figure that Figure 19 replaces the diaphragm portion diaphragm that diaphragm portion protection is filmed and formed thickly embodiment
The explanation of Reference numeral
104: the second electrodes,
105: auxiliary electrode,
106: dielectric film,
107: barrier film,
108: conductive layer,
110: organic luminous layer,
112: the second electrodes,
200: reflecting plate,
201: interlayer dielectric,
220: the diaphragm portion diaphragm
Embodiment
Below, with reference to description of drawings organic electro-luminescent display unit according to the present invention take and manufacture method then as follows.At first should note in the accompanying drawings to identical composed component or the identical symbol of member mark.When explanation is of the present invention, omit specifying related known function or structure in order to prevent that main idea of the present invention from fogging.
Fig. 5 is the sectional view that represents according to organic electro-luminescent display unit of the present invention, and Fig. 6 is the manufacture method piece figure of presentation graphs 5, and Fig. 7 to 12 is that expression is according to the process chart of the manufacture method of organic electro-luminescent display unit of the present invention.
According to Fig. 5, the organic electro-luminescent display unit according to the embodiment of the invention possesses: switch TFTT1 (with reference to Fig. 1); Drive and use TFTT2, gate electrode 124 to be connected to the drain electrode that switch is used TFT; OLED unit, OLED the first electrode 112 are connected to the drain electrode 128 that drives with TFTT2.
Organic luminous layer 110 lamination electron injecting layer 110a, electron transfer layer 110b, luminescent layer 110c, hole transmission layer 110d and hole injection layer 110e and form.Supply with electric charge at this organic luminous layer 110 from the first electrode 112 and the second electrode 104.Thus, in the second electrode 104 emission holes, the hole that is launched moves to luminescent layer 110c through hole injection layer 110e and hole transmission layer 110d, at the first electrode 112 electron emissions, the electronics that is launched moves to luminescent layer 110c through electron injecting layer 110a and electron transfer layer 110b, hole and electronics be again combination in luminescent layer 110c, thereby organic luminous layer 110 sends visible light.At this moment, thus what is called second electrode 104 of the visible light that sends by transparency electrode outward the transmission image be presented at organic electro-luminescent display unit.
Described switch possesses gate electrode, source electrode and drain electrode with TFT, described gate electrode is connected in gate lines G L (with reference to Fig. 1), described source electrode is connected in data wire DL (with reference to Fig. 1), and described drain electrode is connected in the gate electrode 124 that drives with TFTT2.
Described driving possesses gate electrode 124, source electrode 126, drain electrode 128 and active layer 138 with TFTT2, described gate electrode 124 is connected in the drain electrode that switch is used TFT, described source electrode 126 is connected in reference element GND (with reference to Fig. 1), drain electrode 128 is connected in the first electrode 112 of OLED unit, active layer 138, it forms raceway groove between source electrode 126 and drain electrode 128.Describe described driving TFTT2 in detail, then possess gate electrode 124, source electrode 126 and drain electrode 128, active layer 138, ohmic contact layer 140, described gate electrode 124 forms with gate line, described source electrode 126 forms with data wire, active layer 138 is stacked across gate insulating film 136 and described gate electrode 124, and between source electrode 126 and drain electrode 128, forming raceway groove, ohmic contact layer 140 is used for the surface resistance of attenuating and described active layer 138, source electrode 126 and drain electrode 128.
For the first electrode 112 of described OLED unit and contacting of drain electrode 128, comprise drain contact hole 134, this drain contact hole break-through diaphragm 130 and expose described drain electrode 128.Described driving is with the upper auxiliary electrode 105 that forms of TFTT2, by conductive layer 108 described later and the second electrode 104 contacts and acceptance driving signal.And, on described auxiliary electrode 105, further form barrier film 107.Carry described barrier film 107 and firstly appear out from the part of described auxiliary electrode 105 before and form peristome 105a, form barrier film 107 in described peristome 105a side.At this moment, the peristome 105a of described auxiliary electrode can be formed on local pixel or the whole pixel in the unit picture element in display element zone.Described barrier film 107 broadens gradually and is formed obliquely from its area of lower end to upper end with described auxiliary electrode 105 contacts, forms empty space when stacked organic luminous layer 110 and between the barrier film.Thus in when deposition, guarantee the space that do not covered by organic luminous layer at the one-tenth mem stage of the organic luminous layer that disperses with linear pattern, thereby prevent because the film forming auxiliary electrode of organic luminous layer also covers fully.
Top at described auxiliary electrode 105 and the second electrode 104 is formed with conductive layer 108, and described conductive layer 108 is formations that auxiliary electrode 105 and the second electrode 104 are switched on mutually, is filled in by described and switches on every film formed space.Described conductive layer 108 utilizes the outstanding sputtering method (Sputtering) of the step coverage (step coverage) of film or chemical vapour deposition technique (CVD) or inclination angle sedimentation to be filled in the space.
Described OLED unit possesses organic luminous layer 110; The first electrode 112 and the second electrode 104, it is formed on the top and the bottom of described organic luminous layer 110 by dielectric film 106 insulation.
Described the second electrode 104 is formed by the transparent conductivity material.Described the second electrode 104 is supplied with the driving signal that is used for the emission hole from driving voltage source VDD (with reference to Fig. 1).
Described the first electrode 112 is connected with the drain electrode 128 that drives with TFTT2 by drain contact hole 134, is formed on the zone of each described OLED unit.And, described the first electrode 112 is supplied with the driving signal that is used for electron emission from driving with the drain electrode 128 of TFTT2.
Organic luminous layer 110 is stacked electron injecting layer 110a, electron transfer layer 110b, luminescent layer 110c, hole transmission layer 110d and hole injection layer 110e and form.And, described organic luminous layer 110 supplied with from the first electrode 112 and the second electrode 104 drives signals, then from the hole of the second electrode 104 emissions and from the electronics of the first electrode 112 emissions in luminescent layer 110c again in conjunction with sending visible light.At this moment, thus what is called second electrode 104 of the visible light that sends by transparency electrode outward the transmission image be presented at organic electro-luminescent display unit.As mentioned above, connect auxiliary electrode and OLED the second electrode by conductive layer, thus by auxiliary electrode, the resistance decreasing of the second electrode and voltage drop, therefore can be in the whole zone of display element transmission current equably, can improve luminance uniformity thus.
On the one hand, described barrier film 107 is be used to preventing that organic luminous layer 110 is deposited on the means on the described auxiliary electrode 105, when described the first electrode 112 deposition organic luminous layer 110, do not form barrier film and organic luminous layer is coated on after the auxiliary electrode, only remove the organic luminous layer of coating on the auxiliary electrode by etching etc., thereby expose local auxiliary electrode.Namely, as mentioned above, described barrier film 107 is be used to the means that prevent from covering fully organic luminous layer, for described organic luminous layer is not contacted with auxiliary electrode, utilize the organic film that waits engraving method removal counterpart by radium-shine or chemical, thereby can replace the barrier film engineering, but, in the etching engineering, can cause the deteriorated of organic film or loss, or engineering finishes afterwards because the possibility that pollutant can remain in the film is large, therefore the reliability of OLED is brought impact.
In addition, as preferred embodiment, the surface resistance of described auxiliary electrode 105 is 0.01～50 Ω/sq among the present invention, and the surface resistance of what is called second electrode of main electrode is 0.1～10M Ω/sq.
And, in the present invention, when described single the second electrode or described the second electrode of comprising described conductive layer are made cathodic process, at least comprise that the above work function of one deck meets the electrode layer of electron transport material, have the second electrode structure when described single the second electrode or described the second electrode of comprising described conductive layer are made anodize, described the second electrode structure comprises that the above work function of one deck at least meets the electrode layer of hole mobile material.
Below, the manufacture method of the organic electro-luminescent display unit of the present embodiment is described with reference to Fig. 6.
1) form the step S10 of auxiliary electrode at substrate, described substrate has by data wire and gate line and intersects and the electroluminescence cell zone that is defined;
2) form the step S20 of the first electrode in described unit area;
3) form the step S30 of barrier film at auxiliary electrode;
4) form the step S40 of organic luminous layer at described the first electrode;
5) form the step S50 of the second electrode at described organic luminous layer;
6) as required, at the upper formation conductive layer of described the second electrode, and the step S60 of connection auxiliary electrode and the second electrode.The auxiliary electrode of described step S10 is formed on ad-hoc location between substrate top and the second electrode according to engineering or board structure.At this moment, the barrier film formation step at described third step S30 forms along with barrier film is more and more wider towards the upper end area from the lower end, and forming in the barrier film bottom does not have absolutely empty of film forming organic luminous layer.
Among described the 5th step S50 and the 6th step S60, the second electrode and conductive layer form by a kind of method in the various film build methods such as the oblique deposition such as sputtering method (Sputtering) or chemical vapour deposition technique (CVD) or general sedimentation.In the present embodiment, the engineering later at TFT is formed on TFT top with auxiliary electrode 105, but also can form the optional position that maybe can be formed on TFT layer inside before making TFT, the formation auxiliary electrode finally is connected to the second electrode by suitable means afterwards or conductive layer gets final product.
With reference to Fig. 7 above manufacture method is described.Be formed with the switch that comprises gate electrode 124, gate insulating film 136, active layer 138, source electrode 126, drain electrode 128 and contact layer 140 TFT and driving TFTT2 at described substrate 122, deposition comprises the aluminum-based metal of aluminium (Al) and aluminium neodymium (Al-Nd) etc. on described substrate 122, then carry out patterning, thereby form the first electrode 112 that is connected with the drain electrode 128 of TFTT2 with driving by drain contact hole 134.Then, deposit auxiliary electrode 105 in described driving with TFTT2.At this, described auxiliary electrode 105 is preferred to use the material identical with described the first electrode 112.At this moment, described auxiliary electrode 105 is formed on to drive with predetermined space and uses TFTT2.
Then, with reference to Fig. 8, carry out patterning after the deposition auxiliary electrode 105, expose the part of auxiliary electrode 105 and the first electrode 112 that forms organic luminous layer 110 and the part of the auxiliary electrode 105 that forms barrier film 107 and form peristome 105a, formation dielectric film 106 under this state.At this moment, the one part of pixel or the pixel that are formed in the unit picture element in display element zone of the peristome 105a of described auxiliary electrode is whole.
Then, with reference to Fig. 9, form barrier film 107 at the auxiliary electrode 105 that is exposed.Described barrier film 107 forms from the lower surface form that its area broadens gradually towards top that contacts with auxiliary electrode 105.
Then, with reference to Figure 10, form organic luminous layer 110 at described substrate 122 deposition organic luminescent substances, then, as shown in figure 11, with the second electrode 104 lamination tin indium oxides (ITO:Indium Tin Oxide), the transparency materials such as indium zinc oxide (IZO:Indium Zinc Oxide), perhaps one of the vitrina such as Al, AlLi, Mg, Ca, Ag, MgAg consist of with the upper strata.At this moment, utilize described barrier film 107 in order to prevent described organic luminous layer 110 from covering fully above the auxiliary electrode 105.That is, described organic luminous layer 110 can't be deposited on the barrier film bottom in when deposition because rectilinear propagation is strong, and therefore, the form of the lower surface by described barrier film and the inclination of upper surface forms empty space between auxiliary electrode and organic luminous layer.
Described barrier film 107 is be used to preventing that organic luminous layer 110 is deposited on the means on the described auxiliary electrode 105, when described the first electrode deposition organic luminous layer 110, after being applied to organic luminous layer above the auxiliary electrode with the state that does not use barrier film, only remove the part by the etching engineering and coat organic luminous layer above the auxiliary electrode, then, expose the local space on the auxiliary electrode, and can connect by the second electrode 104 of next engineering.That is, as mentioned above, described barrier film 107 is be used to preventing that organic luminous layer from covering the means of auxiliary electrode fully, and available membrane replaces making described organic luminous layer not to be contacted with the etching engineering of auxiliary electrode.
Then, with reference to Figure 12, utilization is selected from a kind of method film forming conductive layer 108 on be formed with the second electrode 104 in sputtering method (Sputtering) or the chemical vapour deposition technique (CVD), the conductive layer 108 that is deposited infiltrates into by the formed space of barrier film and is applied to auxiliary electrode 105, thereby the second electrode is connected with auxiliary electrode.
Among Figure 12, utilize conductive layer 108 to connect auxiliary electrode and the second electrode, but, formation step at the second electrode 104 of Figure 11, utilize the outstanding sputtering method of spreadability or chemical vapour deposition technique to form second electrodes such as ITO, IZO, even then there is barrier film also can connect auxiliary electrode and the second electrode in the second electrode film forming step, the conductive layer that therefore can omit next step engineering forms engineering.That is, the film build method of the second electrode only when utilizing the methods such as the outstanding thermal evaporation of rectilinear propagation (thermal evaporation), could form the outstanding conductive layer that utilizes chemical vapour deposition technique or sputtering method etc. of spreadability on the second electrode.
In addition, Figure 13 is the figure of the variant embodiment of the described barrier film of expression, described barrier film is other structures that replace inverted trapezoidal (turbination) form broaden gradually to the upper end from the lower end, described barrier film can be constituted the inverted trapezoidal (turbination) of structure more than 2 layers, or in structure more than 2 layers, upper layer be formed and overhang (T word) shape.At this moment, in the structure, the material that the materials'use of each layer is identical makes exposure or exposure method difference and the adjustment etching speed, or the material that each layer usefulness is different formation more than 2 layers, thereby can make the barrier film of the sandwich construction with various shapes and angle.
Below, with reference to description of drawings other embodiment of the present invention.
Among Figure 14 for the present invention being applicable to front luminous (upper luminous) shape organic electro-luminescent display unit, reflecting plate 200 is formed at the bottom at the first electrode 112, light emission downwards from organic luminous layer 110 is reflected plate 200 reflections afterwards towards top, at this moment, the second electrode 104 and conductive layer are transparent or semitransparent.
Among Figure 15, luminous in the front identical with Fig. 9 (upper luminous) shape organic electro-luminescent display unit has used reflecting plate 200 as auxiliary electrode 105, and this compares with Figure 14 advantage simple in structure.In this structure, the reflecting plate of auxiliary electrode 105 200 is connected with the second electrode 104 by barrier film 107 and the second electrode contacts with the first electrode 112, so should form interlayer dielectric 201 between the first electrode and reflecting plate (auxiliary electrode).At this moment, because of the electric capacity (parasitic capacitance) in the first adjacent electrode 112 and 210 generations of the interlayer dielectric between the second electrode 104, interference phenomenon occurs between two electrode signals, should make thus interlayer dielectric 201 form to such an extent that thick its impact is suppressed for maximum, among the present invention, the thickness of described interlayer dielectric 201 is preferably 0.2, and is above.Though do not represent in Figure 15, the first electrode 112 and drain electrode 128 interconnect.
Employed reflecting plate 200 will reflect from the local light of organic luminous layer 110 emission among Figure 14 and Figure 15, so the reflectance of reflecting plate should be more than 50%, is preferably 80% and just can lowers to greatest extent light loss when above.And, in the structure of Figure 15, light from organic luminescent layer 110 emissions is emitted to top through interlayer dielectric 201 through interlayer dielectric 201 again after reflecting plate 200 reflections, so, the transmissivity of interlayer dielectric 201 should be more than 50%, is preferably the loss that could lower to greatest extent light more than 80%.
When forming peristome 105a and barrier film 107, as shown in figure 11, replacement is utilized the so-called TFT configuring area 211 of non-illuminating part by the so-called peristome 210 of the illuminating part of organic luminous layer 110, then can avoid being reduced by the aperture opening ratio of peristome and barrier film.
In addition, emission type organic electro luminescent display element in front, when upper substrate 215 formation have the C/F forming portion 216 of C/F (colored filter), as shown in figure 17, by the BM217 between C/F (black matrix") bottom configuration peristome and barrier film, thereby can make the area of C/F light out part maximum.In addition, when upper substrate replaces the C/F/ substrate merely to use in order to protect organic electro-luminescent display unit, also by preferentially configuring peristome and barrier film in the non-outgoing area lower end, can make the area of light out part maximum.
Figure 18 represents the state according to the top angulation surface resistance variation of the outer inclination face of the outer inclination face of barrier film and substrate surface or barrier film and barrier film, in order to obtain below the surface resistance 1k Ω between the second electrode 104 of the presently claimed invention and the auxiliary electrode 105, its angle should be below 80 ° as can be known.
In order to prevent moisture or oxygen from the outside of organic electro-luminescent display unit to peristome 105a and the infiltration of described barrier film 107 sides and to cause organic electro-luminescent display unit deteriorated; as shown in figure 19; preferably after connecting auxiliary electrode and described the second electrode, form in the above inoranic membrane or organic film or the diaphragm portion diaphragm 220 of the single or sandwich construction that formed by inoranic membrane and organic film is protected organic electro-luminescent display unit.And, as another example, as shown in figure 20, diaphragm portion protection can be filmed and 225 form thickly in order to cover barrier film 107 fully.
As mentioned above, organic electro-luminescent display unit and manufacture method thereof according to the embodiment of the invention, by driving the auxiliary electrode 105 that contacts with the second electrode 104 with configuration around the TFT, stream can be supplied to equably the whole area of OLED at the electric current of the second electrode 104 and the first electrode 112, can obtain uniform brightness at whole area thus.
And auxiliary electrode 105 of the present invention or the reflecting plate 200 of doing the auxiliary electrode effect can be formed by the single metal material such as Cu, Al, Ag, Au, Nd, Co, Ni, Mo, Cr, Ti, Pt or its alloy.And, in the present invention, when described organic electro-luminescent display unit is made front luminous (upper luminous) shape, in order to prevent because of outer smooth contrast ratio variation, can also be formed for rotatory polarization plate or the multilayer film of offsetting outer light or improving contrast ratio in the second electrode outside.
The present invention is not limited to described embodiment, can change applicable position and use, and within without departing from the spirit or scope of the invention, can carry out various modifications and distortion is apparent concerning belonging to the person skilled in the art of the present invention.Therefore, these variation or modification should belong in the claim scope of the present invention.
Claims (24)
1. an organic electro-luminescent display unit is characterized in that, comprising:
Substrate for display device, it is by a kind of formation that is selected from glass, metal or the plastics;
Organic electro-luminescent display unit drives and uses thin-film transistor, and it is formed on above the described substrate;
Display element zone, it is formed by unit picture element and unit picture element group, and described unit picture element is by the data wire of thin-film transistor with gate line intersects and definition on described substrate;
Organic electro-luminescent display unit the first electrode, it is formed on the top of described thin-film transistor;
The organic electro-luminescent display unit auxiliary electrode, it is formed on the described substrate;
The auxiliary electrode peristome, it is that a part of exposing described auxiliary electrode forms;
Barrier film, it is formed on the peristome of described auxiliary electrode;
Organic luminous layer, it is formed on described the first electrode;
Organic electro-luminescent display unit the second electrode, it is formed on the described organic luminous layer,
Organic electro-luminescent display unit is only formed by described the second electrode or possesses conductive layer, described conductive layer be formed on the top of described the second electrode or below make it to become the part of the second electrode, described the second electrode or described conductive layer utilize described barrier film to be connected in auxiliary electrode, thereby lower the resistance of described the second electrode.
2. organic electro-luminescent display unit according to claim 1 is characterized in that,
Described auxiliary electrode is formed to form to drive with a transistorized part or with independently wiring between the second electrode of substrate and organic electro-luminescent display unit.
3. organic electro-luminescent display unit according to claim 1 is characterized in that,
When described organic electroluminescence display device and method of manufacturing same is made into the luminous shape in front, reflecting plate and the auxiliary electrode of a part that consists of the front light emitting element structure are independently formed, or make the part of reflecting plate or all be connected as auxiliary electrode and with described the second electrode.
4. organic electro-luminescent display unit according to claim 3 is characterized in that,
The light reflectance of described reflecting plate is more than 50%.
5. organic electro-luminescent display unit according to claim 3 is characterized in that,
In order to reduce the impact that causes because of the parasitic capacitance that between described auxiliary electrode and the first electrode, produces, between described auxiliary electrode and described the first electrode, form interlayer dielectric.
6. organic electro-luminescent display unit according to claim 5 is characterized in that,
The thickness of described interlayer dielectric is more than the 0.2 μ m, and light transmission is more than 50%.
7. according to claim 1 or 3 described organic electro-luminescent display units, it is characterized in that,
Described auxiliary electrode or the reflecting plate of doing the auxiliary electrode effect are formed by the single metal material such as Cu, Al, Ag, Au, Nd, Co, Ni, Mo, Cr, Ti, Pt or its alloy.
8. organic electro-luminescent display unit according to claim 1 is characterized in that,
The surface resistance of described auxiliary electrode is 0.01～50 Ω/sq, and the surface resistance of the second electrode of main resistor is 0.1～10 Ω/sq.
9. organic electro-luminescent display unit according to claim 1 is characterized in that,
When described the second electrode was connected with auxiliary electrode, surface resistance was below the 1k Ω.
10. organic electro-luminescent display unit according to claim 1 is characterized in that,
When described single the second electrode or described the second electrode of comprising described conductive layer are made cathodic process, at least comprise that the above work function of one deck meets the electrode layer of electron transport material, have the second electrode structure when described single the second electrode or described the second electrode of comprising described conductive layer are made anodize, described the second electrode structure comprises that the above work function of one deck at least meets the electrode layer of hole mobile material.
11. organic electro-luminescent display unit according to claim 1 is characterized in that,
A part or pixel that described peristome and barrier film are formed in the whole pixel in display element zone are whole.
12. organic electro-luminescent display unit according to claim 1 is characterized in that,
Peristome at described each auxiliary electrode forms an above barrier film at least, at this moment, by increasing by the second electrode of barrier film and the connecting portion area of auxiliary electrode, reduces the surface resistance of claim 9 and improves contact probability.
13. according to claim 1,11,12 described organic electro-luminescent display units, it is characterized in that,
Described peristome and barrier film are formed on the non-luminous region of organic electro-luminescent display unit.
14. according to claim 1,11,12 described organic electro-luminescent display units, it is characterized in that,
When described organic electro-luminescent display unit is made the luminous shape in front, configure described peristome and barrier film with upper substrate or for the protection of the protection of the top of organic electro-luminescent display unit with the bottom of the non-outgoing area of unit at organic electro-luminescent display unit.
15. organic electro-luminescent display unit according to claim 1 is characterized in that,
Described barrier film forms from the barrier film lower end that a part contacts with auxiliary electrode and broadens gradually to the barrier film upper end.
16. according to claim 1,15 described organic electro-luminescent display units is characterized in that,
The upper side angulation of the outer inclination face of described barrier film and the outer inclination face of substrate surface or described barrier film and described barrier film is below 80 degree.
17. according to claim 1,15 described organic electro-luminescent display units is characterized in that,
Described barrier film is formed the inverted trapezoidal of structure more than 2 layers, or in structure more than 2 layers, upper layer formed and overhang shape and replace inverted trapezoidal.
18. organic electro-luminescent display unit according to claim 1 is characterized in that,
Utilize the good vacuum film formation equipment of filming property such as sputtering method or chemical vapour deposition technique to come film forming at described the second electrode, directly connect the second electrode and auxiliary electrode thereby need not conductive layer.
19. organic electro-luminescent display unit according to claim 1 is characterized in that,
When not being connected with auxiliary electrode after described the second electrode forms by heat deposition etc., utilize sputter or chemical vapour deposition (CVD) equal vacuum film-forming apparatus formation conductive layer at the second electrode, thus indirect joint the second electrode and auxiliary electrode.
20. organic electro-luminescent display unit according to claim 1 is characterized in that,
When described the second electrode formed by heat deposition, the inclination substrate made the second electrode deposition and makes it film forming in the space of the sky of barrier film, and makes it to be connected with auxiliary electrode.
21. organic electro-luminescent display unit according to claim 1 is characterized in that,
When described organic electro-luminescent display unit is made the luminous shape in front, the light transmission of the second electrode or add that the light transmission of the multi-layered electrode of the second electrode and conductive layer is more than 20%.
22. according to claim 1 or each the described organic electro-luminescent display unit in 11 or 12, it is characterized in that,
In order to prevent moisture or oxygen from the external penetration of described organic electro-luminescent display unit to described peristome and described diaphragm portion and cause organic electro-luminescent display unit deteriorated; after connecting described auxiliary electrode and described the second electrode, form in the above inoranic membrane or organic film or protect organic electro-luminescent display unit by the single or multilayer film that inoranic membrane and organic film form.
23. organic electro-luminescent display unit according to claim 1 is characterized in that,
When described organic electro-luminescent display unit is made the luminous shape in front, in order to prevent because of outer smooth contrast ratio variation, be formed for circular Polarizer or the multilayer film of offsetting outer light or improving contrast ratio in the second electrode outside.
24. the manufacture method of an organic electro-luminescent display unit is characterized in that, comprising:
1) form the substrate for display device that formed by a kind of material that is selected from glass, metal or the plastics and, be formed at organic electro-luminescent display unit on the described substrate and drive step with thin-film transistor;
2) be formed on the organic electro-luminescent display unit on described thin-film transistor top with the step of the first electrode;
3) form the organic electro-luminescent display unit auxiliary electrode at described substrate, and expose the step that local auxiliary electrode forms peristome;
4) form the step of barrier film at the peristome of described auxiliary electrode;
5) form the step of organic luminous layer at described the first electrode;
6) in the step of described organic luminous layer formation organic electro-luminescent display unit with the second electrode;
7) as required, on described the second electrode or below formation conductive layer and making it become the step of the part of the second electrode.
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