CN102914277A - Photoelectric sensor for measuring angular displacement of rotating shaft and measurement method thereof - Google Patents
Photoelectric sensor for measuring angular displacement of rotating shaft and measurement method thereof Download PDFInfo
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- CN102914277A CN102914277A CN2012103953946A CN201210395394A CN102914277A CN 102914277 A CN102914277 A CN 102914277A CN 2012103953946 A CN2012103953946 A CN 2012103953946A CN 201210395394 A CN201210395394 A CN 201210395394A CN 102914277 A CN102914277 A CN 102914277A
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Abstract
The invention discloses a photoelectric sensor for measuring angular displacement of a rotating shaft and a measurement method thereof. The photoelectric sensor comprises a parallel illumination unit and a detecting unit; the detecting unit comprises a circular light shielding baffle uniformly provided with light transmitting seams along the circumference, a circular fixing board uniformly fixed with linear array CCDs (Charge Coupled Devices) along the circumference, and a circuit board electrically connected with each linear array CCD; the annular light shielding baffle is connected with one end of the rotating shaft, and rotates along with the rotating shaft; the circular fixing board and the circuit board pass through the rotating shaft and then are fixed on the shell; the N linear array CCDs are arranged on the circular fixing board; the effective original positions of the linear array CCDs are uniformly arranged on 360 degrees/N halving lines of the circular fixing board; a light sensitive diode is arranged on the halving line of the effective original position of the first linear array CCD; the N linear array CCDs are used for forming a CCD circumference array; and the angular displacement is measured in a manner of light transmission under a parallel light field. In the condition of meeting high-precision measurement, the mechanical machining difficulty of a sensor can be reduced, and the data processing difficulty is greatly reduced.
Description
Technical field
The invention belongs to the photoelectric measurement technical field, be specifically related to a kind of photoelectric sensor and measuring method thereof for measuring rotating shaft angular travel.
Background technology
Along with the needs of development and the economic construction of science and technology, the angle displacement measurement sensor has obtained using very widely at numerous areas such as industry, science and technology, Aero-Space.In numerous angle displacement measurement sensors, photoelectric sensor is the extremely blue or green a kind of measurement mechanism of narrowing of every field always.
At present, adopt the photoelectric sensor that is consisted of by single line array CCD that small size angular displacement is measured some local people.Line array CCD is a kind of semiconductor devices, and the small photoactive substance of implanting on it is known as the CCD pixel, and it can be converted to digital signal to optical image; The CCD driving circuit produces the corresponding time sequential pulse that drives and comes the driven CCD imaging, and its process is divided into light integration phase and charge transfer phase; In the light integration phase, storage grid and not conducting of shift register in the CCD are worked respectively, the storage grid carry out the light integration and (namely produce the charge signal corresponding with illumination, when between CCD pixel and the light source shelter being arranged, the quantity of electric charge of finishing the light integration on the corresponding pixel just seldom even not is dark current signals), shift register is shifting the upper charge signal that once moves on to herein and output after conversion to output terminal under the driving pulse effect; At charge transfer phase, storage grid and shift register conducting are transferred to the charge signal of each CCD pixel in the shift register by sequence number; After charge signal on the line array CCD was exported according to certain sequential, line array CCD began next periodic light integration again.For single line array CCD, effective pixel total length W0 of line array CCD and line-scanning period T are fixing in its pixel imaging process.
The measuring principle of the above-mentioned photoelectric sensor that is made of single line array CCD is as follows: the directional light that laser generator sends incides on the testee surface, forms hot spot and is radiated on the pixel of line array CCD, and corresponding electric signal is exported in imaging on the CCD pixel; When testee rotates, launching spot deflects, and the pixel position on the line array CCD that shines changes thereupon, and signal processing circuit reads the number of the pixel that hot spot shines, and multiply by single CCD pixel dimension, after conversion, can obtain the value of angular displacement that testee rotates.The measuring accuracy of this measuring method depends on installation and the processing dimension of each pixel in the line array CCD, can affect its measurement result if the installation of interior each pixel of line array CCD and processing dimension there are differences; And above-mentioned photoelectric sensor can not be used for rotating shaft angular travel is by a relatively large margin measured.
Have relatively high expectations in measuring accuracy, and the angular displacement of surveying is the place of rotating shaft angular travel, people adopt photoelectric encoder to measure usually; Photoelectric encoder has the advantages such as good stability, measuring accuracy is high, dynamic is good, but the shortcoming of photoelectric encoder maximum is the raising along with the encoder output bit number, the corresponding increase of the volume of code-wheel, its mechanical processing difficulty and processing cost are also along with increase, and its data intractability is also along with significantly improving simultaneously.
Summary of the invention
The objective of the invention is for a kind of photoelectric sensor and measuring method thereof for measuring rotating shaft angular travel, with in the situation that satisfy high-acruracy survey, reduce its mechanical processing difficulty, significantly reduce the data intractability.
Basic conception of the present invention is: utilize a plurality of line array CCDs to consist of a CCD circumference array, adopt directional light after the match the form of printing opacity realize the measurement of angular displacement.Its fundamental measurement principle is: allow the line array CCD uniform motion, the scanning testee, under assurance speed prerequisite at the uniform velocity, according to formula S=V*t, V=W0/T, the measurement relevant with displacement is transformed on the measurement of time, utilizes the mode of high-frequency clock pulse interpolation to go to realize the measurement of rotating shaft angular travel.
Photoelectric sensor for measuring rotating shaft angular travel of the present invention, comprise parallel light illuminating unit and detecting unit, described detecting unit comprise along even circumferential offer the printing opacity slit circular shading baffle, be fixed with the circular fixed head of line array CCD, the circuit board that is electrically connected with each line array CCD along even circumferential, circular shading baffle is parallel with circular fixed head, and the quantity of the line array CCD of fixing on the quantity in the printing opacity slit of offering on the circular shading baffle and the circular fixed head equates; Described circular shading baffle is connected to an end of rotating shaft, and together rotates with rotating shaft, and described circular fixed head and circuit board pass rotating shaft and be fixed on the shell; Be furnished with N line array CCD along even circumferential on the circular fixed head, and N is the even number more than or equal to six, effective reference position of each line array CCD all is located on the 360 °/N mean line of circular fixed head, form the CCD circumference array, be provided with a photodiode that is electrically connected and is used for the printing opacity number of slots that the record rotating shaft turns over circuit board in effective reference position mean line of first line array CCD, consist of optoelectronic switch; Each line array CCD and photodiode all can obtain the irradiation of the directional light that passes over from the printing opacity slit; Rotating shaft is rotated the printing opacity slit that drives on the circular shading baffle and is rotated, the directional light that parallel light illuminating unit sends passes the printing opacity slit and forms independently parallel beam, CCD driving circuit on the circuit board drives each line array CCD according to order of placement 1/N CCD line-scanning period of staggering successively, each line array CCD is exported its printing opacity slit that detects constantly successively, the high-frequency clock pulse number of the mistiming that this printing opacity slit drives initial time with corresponding line array CCD constantly by interpolation represents, the high-frequency clock pulse number of this interpolation obtains the value of angular displacement of rotating shaft in conjunction with the counted number of pulses of photodiode after angular transition.
Further, described circular shading baffle offers ten printing opacity slits at 36 ° at interval along even circumferential, be furnished with ten line array CCDs along even circumferential on the described circular fixed head, effective reference position of each line array CCD forms the CCD circumference array along being located on 36 ° of mean lines of circular fixed head clockwise.
Further, in order to form a high-quality parallel light field, save simultaneously cost, described parallel light illuminating unit comprises the laser parallel light source, the little convex lens consistent with the parallel laser light source size, large convex lens and light source shell, described laser parallel light source is connected to an end of light source shell and stretches in the light source shell, little convex lens are connected in the light source shell with convex lens are parallel greatly, little convex lens have common focus with large convex lens, the directional light that the laser parallel light source sends is injected little convex lens, reflect post-concentration in the focus place through little convex lens, inject large convex lens from focus again, after large convex lens refraction, form parallel light field, the edge of circular shading baffle can block directional light fully, and directional light can only pass from the printing opacity slit.
The method that adopts the angular displacement of above-mentioned photoelectric sensor countershaft to measure comprises:
Step 1: the directional light that allows parallel light illuminating unit send passes the printing opacity slit and forms independently parallel beam, and rotating shaft is rotated the printing opacity slit that drives on the circular shading baffle and rotated, the printing opacity number of slots that the photodiode record turns over;
Step 2: from first line array CCD, the CCD driving circuit on the circuit board periodically drives each line array CCD and works successively according to each line array CCD order of placement 1/N CCD line-scanning period of staggering successively;
Step 3: the ccd signal Acquisition Circuit on the circuit board gathers the driving initial time of each line array CCD and printing opacity slit that each line array CCD detects constantly successively according to the order of placement of each line array CCD, if detected two printing opacity slits on certain line array CCD, then corresponding moment is the printing opacity slit moment of this line array CCD take the printing opacity slit that occurs first;
Step 4: the high-frequency clock pulse interpolation is used with the mistiming of the driving initial time of this line array CCD constantly in the printing opacity slit that the signal processing module on the circuit board detects line array CCD successively by the order of placement of each line array CCD, and the on-off times of record photodiode forms counted number of pulses, and the counted number of pulses of the high-frequency clock pulse number of interpolation and photodiode is exported to angular transition module on the circuit board;
Step 5: the angular transition module on the circuit board carries out the high-frequency clock pulse number of interpolation and the counted number of pulses of photodiode to obtain the rotating shaft angular travel value after the corresponding conversion.
The present invention compared with prior art has following advantage:
The circular shading baffle that (1) will have a printing opacity slit is connected to an end of rotating shaft and together rotates with rotating shaft, each line array CCD is evenly arranged on the circular fixed head, circular fixed head and circuit board are passed rotating shaft to be fixed on the shell, utilize less laser parallel light source, little convex lens and large convex lens to cooperate, produce directional light, consisted of the physical construction of sensor, its difficulty of processing is lower than the code-wheel difficulty of processing of photoelectric encoder, and cost is also lower simultaneously.
(2) adopt the CCD driving circuit that each line array CCD was driven according to order of placement 1/N CCD line-scanning period of staggering successively, allow each line array CCD export successively its printing opacity slit that detects constantly, each line array CCD maintains static, rotating the circular shading baffle of drive by rotating shaft rotates, driving the printing opacity slit rotates, being equivalent to realize is not needing in the power-actuated situation, a line array CCD is with the motor pattern of constant speed V=W0/T along circular motion, under the prerequisite that does not reduce transmission speed, each line array CCD serial output (is namely exported according to the order of placement of line array CCD successively, only export the signal that a line array CCD detects) at every turn, participate in the sensor of measurement for the more line array CCD of needs, the data acquisition and processing (DAP) difficulty decrease of its subsequent conditioning circuit.
(3) N line array CCD 1/N line-scanning period of staggering drives, and is equivalent to N line array CCD one-period is divided into N the reading moment, so that can obtain the individual different positional information of N in one-period; Improved the resolving power of this sensor measurement, its effect is equivalent to the driving frequency of an original line array CCD has been improved N doubly.
The printing opacity slit moment of (4) line array CCD being exported is successively used the high-frequency clock pulse interpolation with the mistiming that corresponding line array CCD drives initial time, counted number of pulses in conjunction with photodiode, can measure rotating shaft angular travel by a relatively large margin, can realize the measurement of Static and dynamic angle of rotor displacement; Simultaneously can not go to consider the size of single pixel in the line array CCD, avoid between the pixel because the difference of bringing on installation and the processing dimension has improved measuring accuracy.
Description of drawings
Fig. 1 is line array CCD uniform speed scanning measuring principle figure.
Fig. 2 is structural representation of the present invention.
Fig. 3 is the distribution plan of photodiode and each line array CCD on the circular fixed head among the present invention.
Fig. 4 is the structural representation of circular shading baffle among the present invention.
Fig. 5 is CCD circumference array measuring principle figure of the present invention.
Fig. 6 is schematic block circuit diagram of the present invention.
Fig. 7 is the process flow diagram of the present invention when measuring.
Fig. 8 is the transformational relation figure that carries out angular transition among the present invention.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 1, fundamental measurement principle of the present invention is: allow the line array CCD uniform motion, the scanning testee, under assurance speed prerequisite at the uniform velocity, according to displacement formula S=V*t, the measurement relevant with displacement is transformed on the measurement of time, utilizes the mode of high-frequency clock pulse interpolation to go to realize the measurement of rotating shaft angular travel.If the space has one with the line array CCD of speed V uniform motion, above line array CCD, there is one with respect to the object of line array CCD with arbitrary speed v motion, wherein V＞＞v, line array CCD and testee consist of moving coordinate system S ', the earth consists of a rest frame S, being provided with equidistant at S is the observation station of W0, the time interval that the line array CCD reference position arrives observation station is fixing T, so have: V=W0/T, suppose i cycle, the displacement of the relative line array CCD reference position of testee is Xi, now interpolation is carried out with n high-frequency clock pulse in effective pixel total length W0 of line array CCD, soon T represents then have with the time span of n high-frequency clock pulse: W0=V*n*Pt, and a time clock size is so:
This shows, by conversion, each time clock has the concept in space, and what also just is illustrated as can be carried out the reason that space displacement is measured with the time pulse.With this high-frequency clock pulse the initial pulse of line array CCD and the rising edge of testee electric signal are carried out interpolation, then have the displacement of the relative line array CCD reference position of testee to be:
Wherein Ti is that line array CCD arrives the observation station time and arrives the poor of observation station time with the object that arbitrary speed v moves.
Basic conception of the present invention is: utilize a plurality of line array CCDs to consist of a CCD circumference array, adopt directional light after the match the form of printing opacity realize the measurement of angular displacement.
Such as Fig. 2, Fig. 3, Fig. 4, the photoelectric sensor that is used for measuring rotating shaft angular travel shown in Figure 6, comprise parallel light illuminating unit and detecting unit.
Parallel light illuminating unit comprise laser parallel light source 14, with laser parallel light source 14 little convex lens 13 of the same size, large convex lens 9 and light source shell 10, the bright dipping bore of laser parallel light source 14 is that φ 40, wavelength are that 550nm, power are 2～4W, the diameter of little convex lens 13 is that φ 40, focal distance f 1 are 35～50mm, the diameter of large convex lens 9 is φ 120, and focal distance f 2 is 100～120mm; Laser parallel light source 14 is connected to an end of light source shell 10 by fastening nut 15 and stretches in the light source shell 10, the end edge of little convex lens 13 and large convex lens 9 all adopts lens set collar 12 to encase, the end is fixedly connected in the light source shell 10 by gib screw 11, little convex lens 13 are parallel to each other with large convex lens 9 and have common focal point F, the directional light that laser parallel light source 14 sends is injected little convex lens 13, reflect post-concentrations in the focal point F place through little convex lens 13, inject large convex lens 9 from focal point F again, after large convex lens 9 refractions, form parallel light field.
Detecting unit comprises circular shading baffle 8, circular fixed head 6 and circuit board 4.
Circular fixed head 6 adopts the glass-epoxy material, diameter 150mm, thickness is 5mm approximately, circular fixed head 6 is fixed with ten line array CCDs that are electrically connected with circuit board 4 along even circumferential, the model of line array CCD adopts TCD1501 (also can be other model in TCD15 series or the TCD17 series), effective reference position of each line array CCD (being the reference position of pixel in the line array CCD) all is located on 36 ° of mean lines of circular fixed head along clockwise mode, form the CCD circumference array, because the pixel of line array CCD partly is the intermediate glass window position, therefore when arranging, there are five line array CCDs outer, it is numbered CCD1, CCD3, CCD5, CCD7, CCD9, corresponding 36 ° of angles of circumference, its effective pixel length just is W0; Other five line array CCDs are inner, it is numbered CCD2, CCD4, CCD6, CCD8, CCD10, corresponding 36 ° of angles of circumference, its effective pixel length is W1, is provided with a photodiode 24 that is electrically connected with circuit board 4 in effective reference position mean line of first line array CCD (being CCD1); Distance on the circular fixed head 6 between the center of circle of the position of fixing line array CCD and photodiode 24 and circular fixed head 6 is all less than the radius of a circle in printing opacity slit 81 (being the equal irradiation that can obtain the directional light that passes over from printing opacity slit 81 of each line array CCD and photodiode).
In order to reduce the diffraction phenomena of parallel rays, guarantee that the width that each line array CCD obtains article one bright fringes is no more than 0.15mm, binary conversion treatment by circuit allows effective width be controlled at about 0.1mm, in the parallel and interval 5mm of circular shading baffle 8 and circular fixed head 6; Hole and rotating shaft 1 clearance fit are got through in circular shading baffle 8 centers, and are fixedly connected in the rotating shaft 1 by baffle plate pad 20 and gland nut 19, together rotate with rotating shaft 1; Circular fixed head 6 and circuit board 4 pass rotating shaft 1 and are fixed on the shell 7 by dog screw 5, circular fixed head 6, circuit board 4 and shell 7 maintain static, rotating shaft 1 is supported on the axle sleeve 3 by bearing 23 and set nut 2, the end face of axle sleeve 3 offers a power circuit board 4 to the cable entry port 22 of outer lead, this axle sleeve 3 is connected with shell 7 by pan head screw 21, and shell 7 is connected with light source shell 10 by attachment screw 18, nut 16 and catch 17.
Such as Fig. 5, Fig. 6, Fig. 7, shown in Figure 8, adopt the angular displacement of above-mentioned photoelectric sensor countershaft to measure, comprise the steps:
1) directional light that allows laser parallel light source 14 send passes printing opacity slit 81 and forms independently parallel beam, rotating shaft 1 is rotated the printing opacity slit 81 that drives on the circular shading baffle 8 and is rotated, circular fixed head 6 and circuit board 4 do not rotate, the printing opacity number of slots that photodiode 24 records turn over, when having a printing opacity slit to turn over, photodiode 24 produces a switching signal (being pulse) and sends in the FPGA, and the counter in the FPGA carries out step-by-step counting, forms photodiode umber of pulse j.
2) FPGA periodically exports drive pulse signal control CCD driving circuit, order of placement according to ten line array CCDs begins to CCD2, CCD3 from CCD1 successively ... to CCD10, T/10 time of staggering drives them and works successively, enters the next circulation that drives after the CCD line-scanning period T; Suppose in a CCD line-scanning period T, testee (being that circular shading baffle is corresponding to rotating shaft) transfixion, corresponding printing opacity slit that has directional light to pass on each line array CCD, referring to Fig. 5, the CCD circumference array is launched along circumference from the CCD1 position, if the initial pulse signal of each line array CCD is burst pulse, the signal that testee detects the printing opacity slit is broad pulse, the measurement sequential chart of ten line array CCDs in this cycle T as shown in Figure 5, from CCD1 to CCD10, drive on the sequential and stagger respectively the T/10 time, at ten moment t1 that obtain respectively ten testee positions above the line array CCD, t2, t3 ... t9, t10; If testee rotates relative to the CCD circumference array, adopt measuring principle shown in Figure 1, can in one-period T, measure the angular displacement of ten testees.
3) FPGA control ccd signal Acquisition Circuit locks the driving initial time (being the rising edge moment of initial pulse) of each line array CCD successively according to the order of placement of ten line array CCDs, and gather successively constantly ti of printing opacity slit that corresponding line array CCD detects, if detected two printing opacity slits on certain line array CCD, then corresponding moment is the printing opacity slit moment ti of this line array CCD take the printing opacity slit that occurs first, in Fig. 3, be numbered CCD2, CCD4, CCD6, CCD8, the line array CCD of CCD10 may detect two printing opacity slits, then is as the criterion with the printing opacity slit moment corresponding to (i.e. that printing opacity slit little with each line array CCD angle that effective reference position is) that occurs first;
4) the printing opacity slit that line array CCD detected according to the order of placement of ten line array CCDs of FPGA constantly ti and the driving initial time of this line array CCD the interpolation of mistiming Ti usefulness high-frequency clock pulse (namely
), and read the photodiode umber of pulse j of counter records, by the order of placement of ten line array CCDs high-frequency clock pulse number with each line array CCD interpolation
J exports to DSP with the photodiode umber of pulse;
5) DSP receives this two data, and carries out following angular transition (being the angular displacement conversion):
In the rotating shaft rotation process, can obtain a part of wide-angle value A that rotating shaft is rotated, 36 ° of * of A=(j-1) (2) by photodiode umber of pulse j
In the process of carrying out the measurement of angle of another part circumference, the displacement that obtains on each line array CCD is straight-line displacement, should be converted into corresponding angle value, transformational relation as shown in Figure 8, the arc length that each line array CCD is corresponding is:
Wherein Wx refers to the effective pixel length corresponding to 36 ° of each line array CCDs of angle of circumference; Therefore, be numbered the Wx=W0 of the line array CCD of CCD1, CCD3, CCD5, CCD7, CCD9, be numbered the Wx=W1 of the line array CCD of CCD2, CCD4, CCD6, CCD8, CCD10; What the corresponding relation between each line array CCD Linear displacement angular displacement corresponding with circumference can be similar to is expressed as:
Xi is the straight-line displacement of each line array CCD from reference position to printing opacity slit correspondence position in the formula, and α is the corresponding angle value of this straight-line displacement.Corresponding relation for the linear displacement in the formula (3) and angular displacement also can obtain accurately angle by triangulo operation, and just the calculating relative complex in the DSP is a little.
The angular displacement that can be got rotating shaft by formula (1), (2), (3) simultaneous is:
W0, T determine according to the model of line array CCD in the formula (4), and be known parameters, Wx calculates according to model and the position of line array CCD, j,
For by measuring.When the line array CCD that is numbered CCD1, CCD3, CCD5, CCD7, CCD9 is carried out angular transition,
When the line array CCD that is numbered CCD2, CCD4, CCD6, CCD8, CCD10 is carried out angular transition,
Wherein W1 can be calculated by model and the position of these line array CCDs.
DSP calculates corresponding value of angular displacement rear overhang angle degree output circuit and exports to follow-up system.
In the present embodiment, the number (identical with the printing opacity number of slots on the circular shading baffle 8) of fixing line array CCD can be arranged as six, eight or 12 etc. as required on the circular fixed head 6, concrete number can according to actual needs, be determined such as the diameter of circular fixed head, the model of line array CCD etc.
Claims (4)
1. photoelectric sensor of be used for measuring rotating shaft angular travel, comprise parallel light illuminating unit and detecting unit, it is characterized in that: described detecting unit comprises the circular shading baffle (8) that offers the printing opacity slit along even circumferential, be fixed with the circular fixed head (6) of line array CCD along even circumferential, the circuit board (4) that is electrically connected with each line array CCD, circular shading baffle (8) is parallel with circular fixed head (6), and the quantity in the printing opacity slit of offering on the circular shading baffle (8) equates with the quantity of the upper line array CCD of fixing of circular fixed head (6); Described circular shading baffle (8) is connected to an end of rotating shaft (1), and together rotates with rotating shaft (1), and described circular fixed head (6) and circuit board (4) pass rotating shaft (1) and be fixed on the shell (7); Circular fixed head (6) is upper to be furnished with N line array CCD along even circumferential, and N is the even number more than or equal to six, effective reference position of each line array CCD all is located on the 360 °/N mean line of circular fixed head, form the CCD circumference array, be provided with one in effective reference position mean line of first line array CCD and be electrically connected with circuit board and for the photodiode (24) that records the printing opacity number of slots that rotating shaft turns over;
Rotating shaft is rotated the printing opacity slit that drives on the circular shading baffle and is rotated, the directional light that parallel light illuminating unit sends passes the printing opacity slit and forms independently parallel beam, CCD driving circuit on the circuit board drives each line array CCD according to order of placement 1/N CCD line-scanning period of staggering successively, each line array CCD is exported its printing opacity slit that detects constantly successively, the high-frequency clock pulse number of the mistiming that this printing opacity slit drives initial time with corresponding line array CCD constantly by interpolation represents, the high-frequency clock pulse number of this interpolation obtains the value of angular displacement of rotating shaft in conjunction with the counted number of pulses of photodiode after angular transition.
2. the photoelectric sensor for measuring rotating shaft angular travel according to claim 1, it is characterized in that: described circular shading baffle (8) offers ten printing opacity slits at 36 ° at interval along even circumferential, described circular fixed head (6) is upper to be furnished with ten line array CCDs along even circumferential, effective reference position of each line array CCD forms the CCD circumference array along being located on 36 ° of mean lines of circular fixed head clockwise.
3. the photoelectric sensor for measuring rotating shaft angular travel according to claim 1 and 2, it is characterized in that: described parallel light illuminating unit comprises laser parallel light source (14), the little convex lens (13) consistent with the parallel laser light source size, large convex lens (9) and light source shell (10), described laser parallel light source (14) is connected to an end of light source shell (10) and stretches in the light source shell, little convex lens (13) are connected in the light source shell (10) with convex lens (9) are parallel greatly, little convex lens have common focus with large convex lens, the directional light that the laser parallel light source sends is injected little convex lens, reflect post-concentration in the focus place through little convex lens, inject large convex lens from focus again, after large convex lens refraction, form parallel light field.
4. adopt the method for measuring for the photoelectric sensor countershaft angular displacement of measuring rotating shaft angular travel claimed in claim 1, it is characterized in that, comprising:
Step 1: the directional light that allows parallel light illuminating unit send passes the printing opacity slit and forms independently parallel beam, and rotating shaft is rotated the printing opacity slit that drives on the circular shading baffle and rotated, the printing opacity number of slots that the photodiode record turns over;
Step 2: from first line array CCD, the CCD driving circuit on the circuit board periodically drives each line array CCD and works successively according to the order of placement of each line array CCD 1/N CCD line-scanning period of staggering successively;
Step 3: the ccd signal Acquisition Circuit on the circuit board gathers the driving initial time of each line array CCD and printing opacity slit that each line array CCD detects constantly successively according to the order of placement of each line array CCD, if detected two printing opacity slits on certain line array CCD, then corresponding moment is the printing opacity slit moment of this line array CCD take the printing opacity slit that occurs first;
Step 4: the high-frequency clock pulse interpolation is used with the mistiming of the driving initial time of this line array CCD constantly in the printing opacity slit that the signal processing module on the circuit board detects line array CCD successively according to the order of placement of each line array CCD, and the on-off times of record photodiode forms counted number of pulses, and the counted number of pulses of the high-frequency clock pulse number of interpolation and photodiode is exported to angular transition module on the circuit board;
Step 5: the angular transition module on the circuit board carries out the high-frequency clock pulse number of interpolation and the counted number of pulses of photodiode to obtain the rotating shaft angular travel value after the corresponding conversion.
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| CN104296694A (en) * | 2014-09-28 | 2015-01-21 | 中国科学院光电研究院 | Detection device and method for included angle of optical axis and mechanical rotary shaft of laser tracker |
| CN104296694B (en) * | 2014-09-28 | 2018-01-12 | 中国科学院光电研究院 | The detection means and method of a kind of laser tracker optical axis and mechanical rotating shaft angle |
| CN104316002A (en) * | 2014-10-10 | 2015-01-28 | 中国科学院光电研究院 | Laser tracker optical axis and mechanical rotating shaft translation detection device and method |
| CN104330100A (en) * | 2014-11-03 | 2015-02-04 | 镇江金海创科技有限公司 | Measuring device for determining angle position |
| CN104567953B (en) * | 2015-01-08 | 2017-08-29 | 佛山轻子精密测控技术有限公司 | A kind of new absolute rotary encoder and its measuring method |
| CN104567741A (en) * | 2015-01-08 | 2015-04-29 | 佛山轻子精密测控技术有限公司 | Novel angle displacement measuring device and measuring method thereof |
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| CN104567741B (en) * | 2015-01-08 | 2017-12-26 | 佛山轻子精密测控技术有限公司 | A kind of new angle displacement measuring device and its measuring method |
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| CN110132140A (en) * | 2019-06-06 | 2019-08-16 | 电子科技大学 | A kind of optical displacement detection sensor component |
| CN110132140B (en) * | 2019-06-06 | 2020-09-01 | 电子科技大学 | Optical displacement detection sensor assembly |
| CN110398223A (en) * | 2019-08-24 | 2019-11-01 | 南京信息职业技术学院 | Bicylindrical clearance type solar azimuth measurement method and system |
| CN110398223B (en) * | 2019-08-24 | 2023-11-28 | 南京信息职业技术学院 | Double-cylinder slit type solar azimuth measuring method and system |
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