CN102902009B - 具有光子晶体的单纤三向复用器 - Google Patents
具有光子晶体的单纤三向复用器 Download PDFInfo
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- CN102902009B CN102902009B CN201210418418.5A CN201210418418A CN102902009B CN 102902009 B CN102902009 B CN 102902009B CN 201210418418 A CN201210418418 A CN 201210418418A CN 102902009 B CN102902009 B CN 102902009B
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- 239000004038 photonic crystal Substances 0.000 title claims abstract description 33
- 239000000835 fiber Substances 0.000 title claims abstract description 25
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 238000005530 etching Methods 0.000 claims abstract description 11
- 230000008878 coupling Effects 0.000 claims description 16
- 238000010168 coupling process Methods 0.000 claims description 16
- 238000005859 coupling reaction Methods 0.000 claims description 16
- 239000002070 nanowire Substances 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 15
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 2
- 230000000295 complement effect Effects 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 17
- 239000013078 crystal Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
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CN201210418418.5A CN102902009B (zh) | 2012-10-26 | 2012-10-26 | 具有光子晶体的单纤三向复用器 |
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CN201210418418.5A CN102902009B (zh) | 2012-10-26 | 2012-10-26 | 具有光子晶体的单纤三向复用器 |
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CN102902009A CN102902009A (zh) | 2013-01-30 |
CN102902009B true CN102902009B (zh) | 2015-05-27 |
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CN201210418418.5A Active CN102902009B (zh) | 2012-10-26 | 2012-10-26 | 具有光子晶体的单纤三向复用器 |
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Families Citing this family (1)
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CN110646883B (zh) * | 2019-09-30 | 2021-04-13 | 华东师范大学重庆研究院 | 一种三通硅基分束器芯片及其制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100535695C (zh) * | 2006-09-28 | 2009-09-02 | 中国科学院半导体研究所 | 混合集成单纤三向器 |
CN101526648A (zh) * | 2009-04-07 | 2009-09-09 | 大连理工大学 | 基于平面光波导集成的单纤三向波分器 |
CN102062898A (zh) * | 2010-11-19 | 2011-05-18 | 浙江工业大学 | 基于光纤到户应用的光子晶体三重波分复用器 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100538413C (zh) * | 2007-03-13 | 2009-09-09 | 浙江大学 | 基于光子晶体和多模干涉耦合器混合型的偏振分束器 |
CN102736184B (zh) * | 2012-07-05 | 2015-05-20 | 浙江大学 | 一种偏振不敏感阵列波导光栅波分复用器件 |
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- 2012-10-26 CN CN201210418418.5A patent/CN102902009B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100535695C (zh) * | 2006-09-28 | 2009-09-02 | 中国科学院半导体研究所 | 混合集成单纤三向器 |
CN101526648A (zh) * | 2009-04-07 | 2009-09-09 | 大连理工大学 | 基于平面光波导集成的单纤三向波分器 |
CN102062898A (zh) * | 2010-11-19 | 2011-05-18 | 浙江工业大学 | 基于光纤到户应用的光子晶体三重波分复用器 |
Non-Patent Citations (2)
Title |
---|
Passive Components Based on Two-dimensional Photonic Crystals;T. N. Bakhvalova et al;《Progress In Electromagnetics Research Symposium Proceedings, Moscow, Russia》;20120823;第1143-1147页 * |
Proposal for Compact Optical Triplexer Filter Using 2-D Photonic Crystals;Tien-Tsorng Shih et al;《IEEE PHOTONICS TECHNOLOGY LETTERS》;20090101;第21卷(第1期);第18-20页 * |
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CN102902009A (zh) | 2013-01-30 |
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Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Nantong Xinwei Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Effective date of registration: 20240529 Address after: 200050 No. 865, Changning Road, Shanghai, Changning District Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Country or region after: China Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: Nantong Xinwei Research Institute Country or region before: China Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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