CN102901845A - Zero compensation testing device of piezoresistive acceleration sensor - Google Patents
Zero compensation testing device of piezoresistive acceleration sensor Download PDFInfo
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- CN102901845A CN102901845A CN2012104091922A CN201210409192A CN102901845A CN 102901845 A CN102901845 A CN 102901845A CN 2012104091922 A CN2012104091922 A CN 2012104091922A CN 201210409192 A CN201210409192 A CN 201210409192A CN 102901845 A CN102901845 A CN 102901845A
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Abstract
The invention relates to a zero compensation testing device of a piezoresistive acceleration sensor, and the zero compensation testing device comprises an input module (INP), a programmed control voltage source (PVS), a return circuit switch (SW), a differential amplifier (DA), a data acquisition unit (ADC), a main control unit (MCU), a switching network (MUX1), a switching network (MUX2), a fixing compensation unit (R), an adjustable compensation unit (DPOT) and a display unit (DIS). The zero compensation testing device of the piezoresistive acceleration sensor has the advantages that fixed and adjustable compensation return circuits are used simultaneously, the requirement on hardware configuration of compensation return circuits of a sensor can be reduced relative to single-circuit compensation, and the compensation condition of a tested sensor reaching the specified level output state is obtained accurately and quickly at the same time.
Description
Technical field:
The present invention relates to piezoresistance type acceleration sensor zero compensation field tests, be particularly useful for using in the situation to piezoresistance type acceleration sensor zero-bit output requirement condition harshness.
Background technology:
Piezoresistance type acceleration sensor is take the semiconductor pressure resistance effect as the basis, make voltage dependent resistor (VDR) by semiconductor technology at the beam that is connected with mass, when being subject to external acceleration inertial force, the mass displacement drives brace summer deformation, in resistance, produce STRESS VARIATION at electricity, because semi-conductive piezoresistive effect, voltage dependent resistor (VDR) changes, utilize suitable peripheral circuit that but this variation is converted to measuring-signal such as the formal outputs such as voltage, electric current, just can set up output signal and by the relation between the measuring acceleration through demarcating, thus acceleration measurement.
Piezoresistance type acceleration sensor inner pressure sensitive electric resistance structure requires four arm resistance resistances of electric bridge identical take Wheatstone bridge as main, and brachium pontis is in equilibrium state, and sensor is output as zero when static state like this.In fact owing to reasons such as processes error, encapsulation stress, temperature variation, the sensor internal electric bridge no longer is in absolute equilibrium state, thus quiescent voltage output and non-vanishing.Before piezoresistance type acceleration sensor is used, if quiescent output voltage is done more greatly and not the zeroing compensation, excessive quiescent output voltage can cause backend amplifier to shift to an earlier date saturated output before useful signal arrives in sensor application, can't realize acceleration analysis, cause the sensor application failure.
Returning to zero before piezoresistance type acceleration sensor is used becomes requisite work, and at present correlative study is also carried out successively, and delivers technical paper and publish thesis.As a kind of piezoresistance type acceleration sensor high precision adjusting zero method namely set forth in " the high precision zeroing design in the piezoresistive transducer test macro " literary composition that is published in " measuring technology journal " the 18th volume supplementary issue in 2004, the zeroing design of introducing in the literary composition has been adopted secondary to amplify and has been processed, at first preliminary differential amplification is done in output to piezoresistive transducer, then preliminary amplifying signal is done the method that output is regulated, this method has just caused the amplifier output saturation to cause the situation generation that can't return to zero not to the processing of returning to zero of sensor self Static output when the first order is amplified thereby can not eliminate because the output of sensor self zero-bit is excessive.
Summary of the invention:
Purpose of the present invention is exactly in order to solve the problem of sensor self Static output zeroing, and compensating coefficient when the test piezoresistance type acceleration sensor is output as zero provides the device of the solid state that piezoresistance type acceleration sensor self Static output regulates.
For realizing purpose of the present invention, following technical solution has been proposed:
A kind of piezoresistance type acceleration sensor zero compensation proving installation is characterized in that: be comprised of load module INP, program-controlled voltage source PVS, circuit switching SW, differential amplifier DA, data acquisition unit ADC, master controller MCU, switching network MUX1, switching network MUX2, fixed compensation unit R, adjustable compensation cells D POT and display unit DIS;
Load module INP arranges tested working sensor magnitude of voltage and presets the output voltage required value, and deposits respectively inner two registers of master controller MCU in;
The differential amplifier input end is connected with the sensor output terminal, and output voltage is sent into data acquisition unit ADC during with the sensor original state;
Data acquisition unit ADC accepts differential amplifier DA output voltage, and exports to master controller MCU;
Master controller MCU accepts on the one hand the working sensor magnitude of voltage of load module INP input and presets the output voltage required value, accepts the data of data acquisition unit ADC input on the other hand; Master controller MCU exports 6 road signals, and one the road to program-controlled voltage source, a road to circuit switching SW, a road to display unit DIS, a road to switching network MUX1, a road to switching network MUX2, a road to adjustable compensation cells D POT;
Program-controlled voltage source PVS accepts the input voltage value of master controller MCU and powers to tested sensor by circuit switching;
Circuit switching SW accept on the one hand master controller MCU instruction, link to each other with the end of program-controlled voltage source PVS and an end of tested sensor in addition;
Switching network MUX1 and switching network MUX2 accept respectively the instruction of master controller MCU, and their end links to each other with fixed compensation unit R and adjustable compensation cells D POT respectively, the other end links to each other with the sensor corresponding output port respectively;
The fixed compensation unit R links to each other with the sensor corresponding output port by switching network MUX1 or switching network MUX2;
The instruction that master controller MCU is accepted in the adjustable compensation unit is regulated and is linked to each other with the sensor corresponding port by switching network MUX1 or switching network MUX2;
Display unit DIS receives the information of master controller MCU and shows compensating coefficient.
The technical solution adopted in the present invention specific works process comprises four parts:
1, presets under the operating voltage, gather initial voltage.The operating voltage that presets is provided to tested sensor, be that the differential amplifier DA of G obtains the quiescent output voltage V0 under the sensor original state by gain, this voltage is sent into master controller MCU after being gathered by data acquisition unit ADC, judges by software whether the quiescent output voltage V0 under the original state satisfies default zero-bit output requirement in controller inside.
2. judge whether to introduce equalizing network.By the judgement of master controller inside to quiescent output voltage V0 value under the original state, determine the equalizing network connection status.Preset the requirement of zero-bit output voltage when V0 satisfies, tested sensor does not connect equalizing network, when V0 does not satisfy default zero-bit output requirement, makes tested sensor connect corresponding equalizing network by main control computer control MUX state.
3. the equalizing network connection status determines.Quiescent output voltage value V0 is connected in output voltage anodal port by main controller controls switching network MUX1 and MUX2 state with the fixed compensation loop greater than zero under initial state, and the adjustable compensation loop is connected in output voltage negative pole port; Otherwise quiescent output voltage value V0 is connected in output voltage anodal port by main controller controls switching network MUX1 and MUX2 state with the adjustable compensation loop less than zero under initial state, and the fixed compensation loop is connected in output voltage negative pole port;
4. software control adjustable compensation loop state reaches output compensation requirement.Be connected with the real-time quiescent output voltage V of tested sensor in fixed compensation loop and adjustable compensation loop, through differential amplifier DA, data acquisition unit ADC real-time Transmission is to master controller MCU and preset the zero-bit output voltage values relatively, do not satisfy when in real time output of sensor and to preset when requiring, master controller MCU adjusts by software control adjustable compensation loop state, relatively judge at Real-time Collection, until satisfying, tested sensor quiescent output voltage presets the requirement of zero-bit output voltage, the output zeroing stops, and master controller MCU control display unit shows the corresponding fixed compensation loop of tested sensor and adjustable compensation loop state.
Advantage of the present invention:
The present invention compared with prior art, its remarkable advantage is:
1, by software programmable power supply to be set be piezoresistance type acceleration sensor power supply in the present invention, can test multiple operating voltage lower sensor zeroing compensation requirement.
2, the present invention adopts fixed compensation network and adjustable compensation network and usefulness, finishes the piezoresistance type acceleration sensor zero compensation by the mode that software control adjustable compensation network returns to zero.Compensate than single channel, the present invention can reduce the requirement of sensor compensation loop hardware configuration, obtain simultaneously tested sensor compensation condition, can in the sensor dynamic application, solidify its zero-bit output by this compensation condition easily, improve the stability of sensor application.
3, the present invention directly returns to zero to piezoresistance type acceleration sensor self Static output, and than other indirect compensation loops, it is more effective, directly perceived that tested transducer zeroing is adjusted state.
Description of drawings:
Accompanying drawing 1 is test philosophy block diagram of the present invention;
Accompanying drawing 2 is structural drawing of the present invention;
Embodiment:
Below in conjunction with accompanying drawing most preferred embodiment of the present invention is described in further detail:
The invention provides a kind of piezoresistance type acceleration sensor zero compensation proving installation, summarized several functional units that the method relates generally in the accompanying drawing 1: load module INP arranges tested working sensor magnitude of voltage and presets the quiescent output voltage required value, deposits respectively inner two registers of master controller MCU in;
The output of master controller MCU control program-controlled voltage source is consistent with the setting sensor operational voltage value, and powers to tested sensor by circuit switching;
Differential amplifier DA input end is connected with the sensor output terminal, and quiescent output voltage is sent into data acquisition unit ADC during with the sensor original state;
Data acquisition unit ADC gathers differential amplifier DA output voltage, sends into master controller MCU with ASC II code form;
Master controller MCU is according to gathering voltage and preset voltage comparative result control multi-channel gating device MUX1 and multi-channel gating device MUX2 state, and fixed compensation unit and adjustable compensation unit are connected in the sensor corresponding output port;
The tested sensor output voltage of data acquisition unit ADC Real-time Collection is also sent into master controller MCU and is compared;
Master controller MCU is by the real-time comparative result of voltage, and software control is according to comparative structure control adjustable compensation location mode, until gather the requirement of voltage conforms preset voltage, master controller MCU control display unit shows compensating coefficient.
Wherein master controller MCU is that the system core consists of, MCU inside has comprised processor module (205a), IO control module (205b), register (205c) and input receiver module (205d) as shown in Figure 2, collection signal is stored except being used for, software is processed and judge, also be used for simultaneously compensating unit, switching network MUX, circuit switching SW and the control of display unit DIS state; Fixed compensation unit R and adjustable compensation cells D POT are connected to tested sensor output terminal, are used for the Static output Compensation Regulation.
The specific implementation of method of testing 2 is described as follows by reference to the accompanying drawings:
After test macro powers on, at first by the tested piezoresistance type acceleration sensor operational voltage value Vcc of external input device (200) input, send into master controller MCU(205) interior input receiver module (205d), then by master controller MCU(205) in processor module (205a) according to input requirements, control its I/O control module (205b) and output control signals to programmable power supply PVS(202), make it export tested working sensor voltage vcc.By the tested piezoresistance type acceleration sensor of external input device (200) input quiescent output voltage claimed range Vref under the regulation operating voltage, this initial conditions is by master controller MCU(205 again) in input receiver module (205d) receive and send into internal register (205c) by processor module (205a).The positive and negative port of tested probe power, sensor are exported positive and negative port connect respectively at the outside corresponding connectivity port of system (100,101,102,103), then by master controller MCU(205) control I/O control module (205b) finishes control differential amplifier DA(203 successively) gain G 1 and circuit switching SW(201) setting of conducting state.Circuit switching SW(201) after the conducting, programmable power supply PVS(202) provides operating voltage to tested sensor, tested sensor quiescent output voltage initial value V0 is through differential amplifier DA(203) after the sampling G doubly be enlarged into V1 and exported by output terminal 3 and send into data acquisition unit ADC(204), data acquisition unit ADC(204) the magnitude of voltage V1 after will gathering sends into master controller MCU(205), process reduction in master controller inside by software and obtain V0=V1/G, and at processor module V0 and preset voltage Vref are compared, again judge that by software whether the tested sensor rear initial static output voltage that powers on satisfies and preset the Static output requirement, satisfied then by master controller MCU(205) finish successively display unit DIS(210 by I/O control module (205b)) test result shows and circuit switching SW(201) off-state control, finish test result and show and the measured device power operation.If do not satisfy, again judge that by software whether magnitude of voltage V0 is greater than 0V, if V0 is greater than 0V, then by master controller MCU(205) by I/O control module (205b) gauge tap S3(208) be in conducting state, the fixed compensation unit that be made of fixed resistance this moment is connected to tested sensor output plus terminal interface (102) and locates, the adjustable compensation cells D POT(206 that is made of digital regulation resistance) be connected to tested sensor output negative terminal interface (103) and locate.If V0 is less than 0V, then by master controller MCU(205) by I/O control module (205b) gauge tap S2(209) switch on off operating mode and gauge tap S3(208) be in conducting state, the fixed compensation unit that be made of fixed resistance this moment is connected to tested sensor output plus terminal interface (102) and locates, the adjustable compensation cells D POT(206 that is made of digital regulation resistance) be connected to tested sensor output negative terminal interface (103) and locate.Digital regulation resistance DPOT(206) resistance and precision set are by I/O control module (205b) control in the master controller MCU.
Power on after rear its output port of quiescent output voltage original state is connected to corresponding equalizing network according to tested sensor, tested sensor quiescent output voltage is by differential amplifier DA(203), data acquisition unit ADC(204) Real-time Collection sends into master controller MCU inside and carries out software and process relatively, when Real-time Collection voltage does not satisfy the preset voltage requirement, I/O control module (205b) regulating and controlling adjustable compensation cells D POT(206 in the master controller MCU) resistance is exported operations such as gathering comparison, control, adjusting again in real time after the adjustment.When tested sensor when loading certain compensating coefficient, its quiescent output voltage satisfies the preset voltage requirement, by master controller MCU(205) finish successively display unit DIS(210 by I/O control module (205b)) test compensating coefficient this moment demonstration and circuit switching SW(201) off-state control, finish test result and show and the measured device power operation.
The present invention has adopted the mode to the compensation of tested piezoresistance type acceleration sensor self Static output, adopted the mode of fixed compensation unit and adjustable compensation unit and usefulness, this method can be reduced in small voltage output and regulate compensating the configuration requirement of hardware, and by the compensation condition that the master controller demonstration finally meets the demands, solidifying zero-bit output compensation condition when using for the piezoresistance type acceleration sensor dynamic impulsion provides support.This device can be expanded and be applied to all kinds of pressure drag structure transducer zeroing compensating tests.
Claims (1)
1. a piezoresistance type acceleration sensor zero compensation proving installation is characterized in that: be comprised of load module INP, program-controlled voltage source PVS, circuit switching SW, differential amplifier DA, data acquisition unit ADC, master controller MCU, switching network MUX1, switching network MUX2, fixed compensation unit R, adjustable compensation cells D POT and display unit DIS;
Load module INP arranges tested working sensor magnitude of voltage and presets the output voltage required value, and deposits respectively inner two registers of master controller MCU in;
The differential amplifier input end is connected with the sensor output terminal, and output voltage is sent into data acquisition unit ADC during with the sensor original state;
Data acquisition unit ADC accepts differential amplifier DA output voltage, and exports to master controller MCU;
Master controller MCU accepts on the one hand the working sensor magnitude of voltage of load module INP input and presets the output voltage required value, accepts the data of data acquisition unit ADC input on the other hand; Master controller MCU exports 6 road signals, and one the road to program-controlled voltage source, a road to circuit switching SW, a road to display unit DIS, a road to switching network MUX1, a road to switching network MUX2, a road to adjustable compensation cells D POT;
Program-controlled voltage source PVS accepts the input voltage value of master controller MCU and powers to tested sensor by circuit switching;
Circuit switching SW accept on the one hand master controller MCU instruction, link to each other with the end of program-controlled voltage source PVS and an end of tested sensor in addition;
Switching network MUX1 and switching network MUX2 accept respectively the instruction of master controller MCU, and their end links to each other with fixed compensation unit R and adjustable compensation cells D POT respectively, the other end links to each other with the sensor corresponding output port respectively;
The fixed compensation unit R links to each other with the sensor corresponding output port by switching network MUX1 or switching network MUX2;
The instruction that master controller MCU is accepted in the adjustable compensation unit is regulated and is linked to each other with the sensor corresponding port by switching network MUX1 or switching network MUX2;
Display unit DIS receives the information of master controller MCU and shows compensating coefficient.
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| CN2012104091922A CN102901845B (en) | 2012-10-24 | 2012-10-24 | Zero compensation testing device of piezoresistive acceleration sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103529372A (en) * | 2013-10-24 | 2014-01-22 | 华东光电集成器件研究所 | Automatic inspection system of piezoresistive MEMES acceleration sensor wafer |
| CN104793057A (en) * | 2015-04-28 | 2015-07-22 | 华东光电集成器件研究所 | Bridge-arm resistance test system for acceleration sensors |
| CN108776505A (en) * | 2018-06-13 | 2018-11-09 | 常州同惠电子股份有限公司 | A kind of high-precision forward adjustable current source circuit |
| CN113227954A (en) * | 2018-12-20 | 2021-08-06 | 深圳纽迪瑞科技开发有限公司 | Pressure sensing device, pressure sensing method and electronic terminal |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103529372A (en) * | 2013-10-24 | 2014-01-22 | 华东光电集成器件研究所 | Automatic inspection system of piezoresistive MEMES acceleration sensor wafer |
| CN104793057A (en) * | 2015-04-28 | 2015-07-22 | 华东光电集成器件研究所 | Bridge-arm resistance test system for acceleration sensors |
| CN108776505A (en) * | 2018-06-13 | 2018-11-09 | 常州同惠电子股份有限公司 | A kind of high-precision forward adjustable current source circuit |
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