CN102882314A - Cooling structure for ultraprecise linear motor - Google Patents

Abstract

The invention relates to a cooling structure for an ultraprecise linear motor and belongs to the technical field of linear motors. The cooling structure solves the problem of proneness to heat exchange with environment caused by high side temperature of two-side surface-mounted cooling structures of existing linear motors. The cooling structure comprises a winding supporting portion, a winding and a heat conductive portion, wherein the winding is fixed on the surface of the winding supporting portion, the heat conductive portion is arranged on the surface on the outer side and fixedly connected with the winding supporting portion, the heat conductive portion is a copper foil ring which fits the outer profile of the winding and is sleeved and fixed on the surface on the outer side of the winding, or the heat conductive portion is a copper foil heat conductive ring formed by arraying multiple copper foil sections in a dispersed manner, the copper coil heat conductive ring fits the outer profile of the winding, and each copper coil section is fixed on the surface on the outer side of the winding. The cooling structure for the ultraprecise linear motor is suitable for cooling of linear motors.

Description

The cooling structure of ultraprecise linear electric motors

Technical field

The present invention relates to a kind of cooling structure of ultraprecise linear electric motors, belong to the techniques of linear motor field.

Background technology

The ultraprecise linear electric motors are the actuators that ensure the operation of ultraprecise servo system.Along with the development of nanometer technology and biotechnology, pushing force density and the thrust required precision of ultraprecise linear electric motors progressively improved, brought thus the increase of motor winding current density, copper loss increases thereupon.Because the ultraprecise positional servosystem adopts laser displacement sensor at present, therefore, temperature uniformity to ambient temperature has higher requirement, and the ultraprecise servo system is because integration density is higher, in running, the ultraprecise linear electric motors that adopt are difficult to avoid and can dispel the heat to external world, and adopt the ultraprecise positional servosystem of laser displacement sensor to require various parts and environment heat exchange to trend towards zero.Present most linear electric motors are difficult to reach this requirement.

The water-cooling structure that at present the ultraprecise linear electric motors has been proposed:

Linear electric motors are in order to reduce force oscillation, adopted the non iron-core structure, with cogging force and the reluctance force of eliminating conventional motor, if but have identical pushing force density, the winding institute galvanization density of motor certainly will will be higher than linear electric motors unshakable in one's determination, and copper loss certainly will increase.Reliability service and minimizing motor in order to ensure motor dispel the heat to external world, a kind of bilateral surface-mount type cooling structure has been proposed as shown in Figure 9, its winding is fixed by supporting construction A, lower surface is installed water cooling plate B thereon again, come winding is realized cooling, C represents water-cooled water inlet among the figure, and D represents water-cooled delivery port.

The result that this bilateral surface-mount type cooling structure is carried out experiment test shows that the side temperature rise of motor is higher.Upper and lower two water cooling plate B that it adopts only suppress comparatively obvious to the temperature rise of the upper and lower surface of electric motor primary, and the higher temperatures liter of its side will produce heat exchange with environment.

Summary of the invention

Of the present invention is side temperature rise for the bilateral surface-mount type cooling structure that solves existing linear electric motors, easily with the problem of environment generation heat exchange, provides a kind of cooling structure of ultraprecise linear electric motors.

The cooling structure of ultraprecise linear electric motors of the present invention, it comprises winding support portion and winding, and winding is fixed on the winding abutment surfaces, and it also comprises heat-conducting part, and this heat-conducting part is arranged on the outer surface of winding and with the winding support portion and is fixedly connected with.

Described heat-conducting part is the Copper Foil circle, and the lateral profile of this Copper Foil circle and winding adapts, and is fixed by socket on the outer surface of winding.

The Copper Foil heat conduction circle of described heat-conducting part for being disperseed by a plurality of Copper Foil segmentations to arrange and form, the lateral profile of this Copper Foil heat conduction circle and winding adapts, and each Copper Foil segmentation all is fixed on the outer surface of winding.

Have a plurality of Copper Foil preformed grooves on the winding support portion, each Copper Foil preformed groove is used for fixing a Copper Foil segmentation.

A plurality of Copper Foil segmentations of described composition Copper Foil heat conduction circle are equidistantly arranged.

Described Copper Foil segmentation can also be the segmentation of C shape Copper Foil, and the sidewall outer surface relative with open side of this C shape Copper Foil segmentation and the outer surface of winding are fixed.

Described heat-conducting part, winding support portion and winding adopt structure glue to be adhesively fixed each other.

Advantage of the present invention is: the present invention is not changing in the existing structure situation of motor, by increasing the form of Copper Foil, increased the thermally conductive pathways of winding thermal source to cooling structure, coldplate is effectively cooled off thermal source, it not only suppresses to switch in the winding temperature rise raising motor winding close, has realized the further raising of motor thrust, simultaneously, Copper Foil has been blocked thermal source by the path of motor side towards extraneous release heat, has suppressed the heat exchange of motor with the external world.Therefore, adopt this structure can improve the pushing force density of ultraprecise linear electric motors in linear electric motors, and do not change the motor ambient temperature, detecting for the exact position of motor provides necessary condition.

The present invention is under the prerequisite that does not change motor volume, and the method by increasing the heat conduction branch road has realized the winding side surface is carried out the function of heat shielding with winding side heat Directed cooling plate as much as possible.

Description of drawings

Fig. 1 is the structural representation of embodiment of the present invention two;

Fig. 2 is the fixed relationship schematic diagram of Copper Foil circle and winding in the execution mode two;

Fig. 3 is the structural representation of embodiment of the present invention three;

Fig. 4 is the fixed relationship schematic diagram of Copper Foil heat conduction circle and winding in the execution mode three;

Fig. 5 is the structural representation of embodiment of the present invention six;

Fig. 6 is the fixed relationship schematic diagram of Copper Foil heat conduction circle and winding in the execution mode six;

Fig. 7 is the heat supply network network distribution map in conventional DC linear electric motors cross section;

Fig. 8 is the heat supply network network distribution map of adopting the DC linear electric motor cross section of cooling structure of the present invention;

Fig. 9 is the schematic diagram of the bilateral surface-mount type cooling structure of existing linear electric motors.

Embodiment

Embodiment one: present embodiment is described below in conjunction with Fig. 1 to Fig. 6, the cooling structure of the described ultraprecise linear electric motors of present embodiment, it comprises winding support portion 1 and winding 2, winding 2 is fixed on 1 surface, winding support portion, it also comprises heat-conducting part, and this heat-conducting part is arranged on the outer surface of winding 2 and with winding support portion 1 and is fixedly connected with.

Embodiment two: present embodiment is described below in conjunction with Fig. 1 and Fig. 2, present embodiment is further specifying execution mode one, described heat-conducting part is Copper Foil circle 31, and this Copper Foil circle 31 adapts with the lateral profile of winding 2, and is fixed by socket on the outer surface of winding 2.

In the present embodiment, added one deck Copper Foil circle 31 in the side of winding 2, can adopt respectively structure glue to cling, fix between this Copper Foil circle 31 and winding 2 and the winding support portion 1, the bonded adhesives between Copper Foil circle 31 and the winding 2 is paid the utmost attention to high conductive structure glue.In addition, in when assembling, the upper and lower surface of Copper Foil circle 31 will guarantee to contact fully with lower water cooling plate with upper water cooling plate, can adopt high-heat-conductivity glue to fill therebetween, with the surface of guaranteeing Copper Foil circle 31 and the high efficiency heat exchange of water cooling plate.

The bonded adhesives that winding 2 and Copper Foil circle are 31 will adopt type of insulation, to guarantee motor winding External Insulation, improves the reliability of motor.

Embodiment three: present embodiment is described below in conjunction with Fig. 3 and Fig. 4, present embodiment is further specifying execution mode one, the Copper Foil heat conduction circle 32 of described heat-conducting part for being disperseed by a plurality of Copper Foil segmentations to arrange and form, this Copper Foil heat conduction circle 32 adapts with the lateral profile of winding 2, and each Copper Foil segmentation all is fixed on the outer surface of winding 2.

Embodiment four: present embodiment has a plurality of Copper Foil preformed grooves for to the further specifying of execution mode three on the winding support portion 1, and each Copper Foil preformed groove is used for fixing a Copper Foil segmentation.

In the present embodiment, Copper Foil heat conduction circle 32 is cut into some sections, processes first the Copper Foil preformed groove on the contact-making surface of winding support portion 1 and winding 2, the structure glue by high heat conduction bonds together Copper Foil heat conduction circle 32 and winding 2 and winding support portion 1 equally,

Present embodiment has not only solved motor side problem of temperature rise, has solved simultaneously the problem of motor eddy-current damping power.

Embodiment five: present embodiment is for to the further specifying of execution mode three or four, and a plurality of Copper Foil segmentations of described composition Copper Foil heat conduction circle 32 are equidistantly arranged.

Embodiment six: present embodiment is described below in conjunction with Fig. 5 to Fig. 6, present embodiment is further specifying execution mode three, described Copper Foil is segmented into the segmentation of C shape Copper Foil, and the sidewall outer surface relative with open side of this C shape Copper Foil segmentation and the outer surface of winding 2 are fixed.

In the present embodiment Copper Foil segmental machining is become class C shape structure, on guaranteeing, in water cooling plate and lower water cooling plate and Copper Foil heat conduction circle 32 contacts area, effectively raise the Mechanical Structure Strength of electric motor primary.

Embodiment seven: present embodiment is described below in conjunction with Fig. 7 and Fig. 8, present embodiment is for to execution mode one, two, three, four, five or six further specify, and described heat-conducting part, winding support portion 1 adopt structure glue to be adhesively fixed with winding 2 each other.

Bonded adhesives between winding 2 and heat-conducting part will adopt type of insulation, to guarantee motor winding External Insulation, improves the reliability of motor.

Operation principle:

Result by linear electric motors temperature field finite element numerical is calculated can find out that the supporting construction between motor winding and the outside air is thinner, and the motor surface temperature rise is higher.

The linear electric motors that adopt cooling structure of the present invention are built the motor temperature field model, and the thermal source in model is winding, and its hot-fluid has 3 circulation paths:

1. hot-fluid Q ₁Produce the heat glue-line of upwards flowing through by winding, eventually to coldplate;

2. hot-fluid Q ₂By winding produce heat flow through to the right glue-line, polyether-ether-ketone PEEK, more upwards through glue-line eventually to coldplate;

3. hot-fluid Q ₃Produce heat flow through glue-line, PEEK left by winding, be divided into again two-way, the one road flows to surface, the PEEK left side carries out Natural Heat Convection, and the glue-line of flowing through on another road direction is eventually to coldplate.

According to above-mentioned analysis, calculate the each several part thermal resistance:

1,1. each several part thermal resistance calculation of hot-fluid branch road.

The winding heat transfer resistance R that makes progress _Ct:

$R_{\mathrm{ct}}=\frac{d_c}{k_c{A}_c}---\left(1\right)$

Wherein, k _cBe the winding conductive coefficient; A _cBe winding upper surface area, d _cBe winding 1/2 thickness.The glue-line heat transfer resistance R that makes progress above the winding _Cgt:

$R_{\mathrm{cgt}}=\frac{d_g}{k_g{A}_c}---\left(2\right)$

Wherein, k _cBe the winding conductive coefficient; A _cBe the winding upper surface area; d _gBondline thickness.

Coldplate thermal resistance R above the winding _Cw:

$R_{\mathrm{cw}}=\frac{1}{h_w{A}_c}---\left(3\right)$

Wherein, h _wBe the coldplate coefficient of heat transfer.

2,2. each several part thermal resistance calculation of hot-fluid branch road.

Winding is heat transfer resistance R to the right _Cr:

$R_{\mathrm{cr}}=\frac{l_c}{2k_c{A}_f}---\left(4\right)$

Wherein, A _fBe PEEK, winding lateralarea, l _cBe the winding width.

Winding right flank glue-line is heat transfer resistance R to the right _Cgr:

$R_{\mathrm{cgr}}=\frac{d_g}{k_g{A}_f}---\left(5\right)$

Wherein, d _gBe the film thickness between coldplate and winding, k _gConductive coefficient for glue.The winding right side PEEK heat transfer resistance R that makes progress _Pr:

$R_{\mathrm{pr}}=\frac{1}{k_p(\frac{A_{\mathrm{<figure-callout\; id="2"\; label="f\; l\; p"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">f</figure-callout>}}}{l_p}+\frac{A_{p2}}{d_c/2})}---\left(6\right)$

Wherein, A _P2Be winding right side PEEK material upper surface area, k _pBe PEEK conductive coefficient, l _P2Be winding stem stem 1/2 length.

The winding right side PEEK upper surface glue-line heat transfer resistance R that makes progress _Pgrt:

$R_{\mathrm{pgrt}}=\frac{d_g}{k_g{A}_{p2}}---\left(7\right)$

Winding right side cooled plate thermal resistance R _Cwr:

$R_{\mathrm{cwr}}=\frac{1}{h_w{A}_{p2}}---\left(8\right)$

Wherein, h _wCoefficient of heat transfer for coldplate B.

3,3. each several part thermal resistance calculation of hot-fluid branch road.

Winding is heat transfer resistance R left _Cl:

$R_{\mathrm{cl}}=R_{\mathrm{cr}}=\frac{l_c}{2k_c{A}_f}---\left(9\right)$

Winding left surface glue-line is heat transfer resistance R left _Cgl:

$R_{\mathrm{cgl}}=R_{\mathrm{cgr}}=\frac{d_g}{k_g{A}_f}---\left(10\right)$

The winding left side PEEK heat transfer resistance R that makes progress _Plt:

$R_{\mathrm{plt}}=\frac{1}{k_p(\frac{A_{\mathrm{<figure-callout\; id="1"\; label="f\; l\; p"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">f</figure-callout>}}}{l_p}+\frac{A_{p1}}{d_c/2})}---\left(11\right)$

Wherein, A _P1Be winding left side PEEK plate upper surface area, l _P1Be the winding support structure width.

The winding left side PEEK upper surface glue-line heat transfer resistance that makes progress:

$R_{\mathrm{pglt}}=\frac{d_g}{k_g{A}_{p1}}---\left(12\right)$

Winding left side cooled plate thermal resistance:

$R_{\mathrm{cwl}}=\frac{1}{h_w{A}_{p1}}---\left(13\right)$

Winding left side PEEK is heat transfer resistance left:

$R_{\mathrm{pll}}=\frac{l_{p1}}{k_p{A}_f}---\left(14\right)$

PEEK left side natural convection air heat radiation thermal resistance:

$R_{\mathrm{pn}}=\frac{1}{h_n{A}_f}---\left(15\right)$

Wherein, h _nBe the air natural coefficient of heat transfer.

Obtaining DC linear electric motor motor cross section heat supply network network as shown in Figure 7 by above-mentioned analysis distributes.Among the figure, q _CuBe copper loss in the winding zoning.

Heat supply network network distribution according to Fig. 7 obtains above-mentioned 3 hot-fluid circulation path thermal resistance R separately ₁, R ₂And R ₃:

R ₁＝R _ct+R _cgt+R _cw (15)

R ₂＝R _cr+R _cgr+R _pr+R _pgrt+R _cwr (16)

$R_3=R_{\mathrm{cl}}+R_{\mathrm{cgl}}+\frac{1}{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}+\frac{1}{R_{\mathrm{pll}}+R_{\mathrm{pn}}}}---\left(17\right)$

Thermal source and heat supply network network distribute under all known prerequisite, can calculate the heat flow Q on every hot road ₁, Q ₂And Q ₃Size.

$\left\{\begin{array}{c}{\mathrm{<figure-callout\; id="1"\; label="Q"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">Q</figure-callout>}}_1={\mathrm{<figure-callout\; id="1"\; label="q\; cu"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">q</figure-callout>}}_{\mathrm{cu}}\frac{1/{\mathrm{<figure-callout\; id="1"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">R</figure-callout>}}_1}{1/{\mathrm{<figure-callout\; id="1"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">R</figure-callout>}}_1+1/{\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">R</figure-callout>}}_2+1/R_3}\\ {\mathrm{<figure-callout\; id="2"\; label="Q"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">Q</figure-callout>}}_2={\mathrm{<figure-callout\; id="1"\; label="q\; cu"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">q</figure-callout>}}_{\mathrm{cu}}\frac{1/{\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">R</figure-callout>}}_2}{1/{\mathrm{<figure-callout\; id="1"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">R</figure-callout>}}_1+1/{\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">R</figure-callout>}}_2+1{/R}_3}\\ Q_3={\mathrm{<figure-callout\; id="1"\; label="q\; cu"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">q</figure-callout>}}_{\mathrm{cu}}\frac{1/R_3}{1/{\mathrm{<figure-callout\; id="1"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300022.png"\; state="\{\{state\}\}">R</figure-callout>}}_1+1/{\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">R</figure-callout>}}_2+1/R_3}\end{array}\right.---\left(18\right)$

On formula 18 bases, further calculate Q ₃₁And Q ₃₂:

$\left\{\begin{array}{c}{\mathrm{<figure-callout\; id="31"\; label="Q"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">Q</figure-callout>}}_{31}=Q_3\frac{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}}{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}+\frac{1}{R_{\mathrm{pll}}+{\mathrm{<figure-callout\; id="32"\; label="R\; pn\; Q"\; filenames="HDA00002290506300021.png,HDA00002290506300022.png"\; state="\{\{state\}\}">R</figure-callout>}}_{\mathrm{pn}}}}& \\ Q_{}{}_{32}=Q_3\frac{\frac{1}{R_{\mathrm{pll}}+R_{\mathrm{pn}}}}{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}+\frac{1}{R_{\mathrm{pll}}+R_{\mathrm{pn}}}}\end{array}\right.---\left(19\right)$

If ambient temperature T ₀, through type 19 obtains heat supply network network A point position temperature, i.e. PEEK material appearance temperature T among Fig. 7 _Op:

T _op＝T ₀+Q ₃₂R _pn (20)

3. the hot-fluid branch road is done the small size adjustment, not affect the motor electromagnetic characteristic as prerequisite, introduce new heat flow branch road, adopt the metal material of high heat conduction, such as copper, aluminium etc.Metallic copper thermal conductivity k _CuBe 400K/mk, 3. increase l in the glue-line left side at branch road _CuThe copper foil layer of thickness conducts to coldplate with this road heat flow, reduces the inflow of left PEEK plate heat flow, thereby suppresses its surface temperature rise.

3. the hot-fluid branch road is increased parallel branch:

The Copper Foil heat transfer resistance that makes progress:

$R_{\mathrm{cut}}=\frac{1}{k_{\mathrm{cu}}(\frac{A_f}{l_{\mathrm{cu}}/2}+\frac{A_{\mathrm{cu}}}{d_c/2})}---\left(21\right)$

Wherein, A _CuBe Copper Foil upper surface area, l _CuWidth for copper foil layer.

The Copper Foil upper surface glue-line heat transfer resistance that makes progress:

$R_{\mathrm{cug}}=\frac{d_g}{k_g{A}_{\mathrm{cu}}}---\left(22\right)$

Copper Foil top water cooling plate thermal resistance:

$R_{\mathrm{cuw}}=\frac{1}{h_w{A}_{\mathrm{cu}}}---\left(23\right)$

Copper Foil is heat transfer resistance left:

$R_{\mathrm{cul}}=\frac{l_{\mathrm{cu}}}{k_{\mathrm{cu}}{A}_f}---\left(24\right)$

At this moment, the heat supply network network distributes as shown in Figure 8, and branch road is thermal resistance R 3. ₃Become: add Copper Foil after heat networking and distribute:

$R_3=R_{\mathrm{cl}}+R_{\mathrm{cgl}}+\frac{1}{\frac{1}{{\mathrm{<figure-callout\; id="31"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">R</figure-callout>}}_{31}}+\frac{1}{R_{32}}}---\left(25\right)$

Wherein, R ₃₁=R _Cut+ R _Cug+ R _Cuw, ${\mathrm{<figure-callout\; id="32"\; label="R"\; filenames="HDA00002290506300021.png,HDA00002290506300022.png"\; state="\{\{state\}\}">R</figure-callout>}}_{32}=R_{\mathrm{cul}}+\frac{1}{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}+\frac{1}{R_{\mathrm{pll}}+R_{\mathrm{pn}}}}.$

Q ₁, Q ₂And Q ₃Still adopt formula 18 to calculate, and branch road 3. in the heat flow on each hot road calculate and be shown below:

$\left\{\begin{array}{c}{Q}_{33}=Q_3\frac{1/{\mathrm{<figure-callout\; id="31"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">R</figure-callout>}}_{31}}{1/{\mathrm{<figure-callout\; id="31"\; label="R"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">R</figure-callout>}}_{31}+1/R_{32}}\\ {\mathrm{<figure-callout\; id="31"\; label="Q"\; filenames="HDA00002290506300011.png,HDA00002290506300012.png"\; state="\{\{state\}\}">Q</figure-callout>}}_{31}=(Q_3-Q_{33})\frac{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}}{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}+\frac{1}{R_{\mathrm{pll}}+{\mathrm{<figure-callout\; id="32"\; label="R\; pn\; Q"\; filenames="HDA00002290506300021.png,HDA00002290506300022.png"\; state="\{\{state\}\}">R</figure-callout>}}_{\mathrm{pn}}}}& \\ Q_{}{}_{32}=(Q_3-Q_{33})\frac{\frac{1}{R_{\mathrm{pll}}+R_{\mathrm{pn}}}}{\frac{1}{R_{\mathrm{plt}}+R_{\mathrm{glt}}+R_{\mathrm{cwl}}}+\frac{1}{R_{\mathrm{pll}}+R_{\mathrm{pn}}}}\end{array}\right.---\left(26\right)$

A point temperature is calculated according to formula 20.Can be with original cooling structure motor side surface temperature rise from 10 ℃ by result of calculation checking, even tens degrees centigrade be down in several degrees centigrade or 1 ℃, effectively suppresses the motor surface temperature rise.

Claims (7)

1. the cooling structure of ultraprecise linear electric motors, it comprises winding support portion (1) and winding (2), winding (2) is fixed on surface, winding support portion (1), it is characterized in that: it also comprises heat-conducting part, and this heat-conducting part is arranged on the outer surface of winding (2) and with winding support portion (1) and is fixedly connected with.

2. the cooling structure of ultraprecise linear electric motors according to claim 1, it is characterized in that: described heat-conducting part is Copper Foil circle (31), this Copper Foil circle (31) adapts with the lateral profile of winding (2), and is fixed by socket on the outer surface of winding (2).

3. the cooling structure of ultraprecise linear electric motors according to claim 1, it is characterized in that: the Copper Foil heat conduction circle (32) of described heat-conducting part for being disperseed by a plurality of Copper Foil segmentations to arrange and form, this Copper Foil heat conduction circle (32) adapts with the lateral profile of winding (2), and each Copper Foil segmentation all is fixed on the outer surface of winding (2).

4. the cooling structure of ultraprecise linear electric motors according to claim 3 is characterized in that: have a plurality of Copper Foil preformed grooves on winding support portion (1), each Copper Foil preformed groove is used for fixing a Copper Foil segmentation.

5. according to claim 3 or the cooling structure of 4 described ultraprecise linear electric motors, it is characterized in that: a plurality of Copper Foil segmentations of described composition Copper Foil heat conduction circle (32) are equidistantly arranged.

6. the cooling structure of ultraprecise linear electric motors according to claim 3, it is characterized in that: described Copper Foil is segmented into the segmentation of C shape Copper Foil, and the sidewall outer surface relative with open side of this C shape Copper Foil segmentation and the outer surface of winding (2) are fixed.

7. according to claim 1, the cooling structure of 2,3,4 or 6 described ultraprecise linear electric motors, it is characterized in that: described heat-conducting part, winding support portion (1) adopt structure glue to be adhesively fixed with winding (2) each other.

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