CN102879316A - Device and method for testing feedback ions of low-light-level image intensifier component - Google Patents
Device and method for testing feedback ions of low-light-level image intensifier component Download PDFInfo
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- CN102879316A CN102879316A CN2012104050602A CN201210405060A CN102879316A CN 102879316 A CN102879316 A CN 102879316A CN 2012104050602 A CN2012104050602 A CN 2012104050602A CN 201210405060 A CN201210405060 A CN 201210405060A CN 102879316 A CN102879316 A CN 102879316A
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Abstract
The invention discloses a device and a method for testing feedback ions of a low-light-level image intensifier component and belongs to the field of photoelectronic imaging. The device comprises a focusing ultraviolet source, a vacuum chamber, the cathode-free low-light-level image intensifier component, an ion conduit, an ion detector and a shielding box. The method includes: the focusing ultraviolet source is incident to the surface of a microchannel plate through an ultraviolet window, excitation electrons enable the low-light-level image intensifier component to be operated, the feedback ions generated in the low-light-level image intensifier component enter the ion detector via the ion conduit and an isolation grid mesh, output signals are inputted to a multichannel pulse amplitude analyzer after being magnified by a charge amplifier, ion pulse signals are separated from noise signals by means of pulse-amplitude analysis so as to obtain a feedback ion pulse signal amplitude value, and the signal amplitude value serving as a threshold value is inputted into a single-channel spectrometer so that ion pulse counting is achieved. The device is capable of realizing ultra-weak ion current detection in the complicated electromagnetic environment and used for measurement of the ion barrier characteristic of an ion barrier film in a low-light-level image intensifier.
Description
Technical field
The present invention relates to a kind of gleam image intensifier assembly feedback ion proving installation and method thereof, is a kind of atomic weak ion current pick-up unit that can realize under the complex electromagnetic environment, can be used in the ion feedback preventing film ion gas barrier feature measurement in the micro-optic device.
Background technology
During image tube work, residual gas molecule is formed gaseous ion at the microchannel plate output terminal by the ionization of high density electron cloud in the pipe, and be fed to the microchannel plate input end along microchannel plate, closely paste under district's electric field acceleration effect at input end, bombard at a high speed photocathode, make the photocathode electron emission, cause signal to noise ratio (S/N ratio) to reduce, form ion burn at video screen; The bombardment of high-speed ion also can make GaAs photocathode surface C s-O layer sustain damage, and sensitivity sharply descends, and cathode life is significantly shortened.For addressing this problem, on the microchannel plate input face, all cover one deck dielectric film, in order to stop gaseous ion by penetrating in the passage, reach the purpose of protection photocathode, this layer film is referred to as ion feedback preventing film.It is reported that MCP can make the image tube mission life reach more than 10000 hours after covering ion feedback preventing film.
For high performance ion feedback preventing film, need to have high electron penetration rate and ion barrier rate, the factor analysis such as the performance of rete and the manufacture craft of rete, composition of the film, need a kind of device that can directly measure ion feedback preventing film ion gas barrier characteristic for this reason, film performance is quantitatively detected, for preparation high-quality rete provides foundation.The thickness of ion feedback preventing film only has several nanometers, and the existence of substrate must be arranged in the time of making, so can not be with the independent ion gas barrier feature measurement that carries out of rete; Feed back ion current less than 10 the low-light image tube as can be known from theoretical analysis and software simulation emulation acquired results
-15A can't obtain so to hang down the ion gun of ion current under the prior art condition, it is infeasible adopting the ion gun measurement.There are not at present report and the product of dependence test equipment to occur both at home and abroad.
Summary of the invention:
Technical matters to be solved by this invention provides a kind of gleam image intensifier assembly feedback ion proving installation and method thereof, and it can Reality simulation image tube duty, realizes the measurement of ion feedback preventing film ion gas barrier characteristic.
Technical scheme of the present invention is a kind of gleam image intensifier assembly of design feedback ion proving installation, comprise focus on ultraviolet source, vacuum chamber, without negative electrode gleam image intensifier assembly, ion conduit, ion detector, shielding box; Described vacuum chamber is provided with the ultraviolet window, internal vacuum chamber aim at the ion conduit without negative electrode gleam image intensifier assembly oblique upper; Described shielding box is built-in with electric field isolation aperture plate, diaphragm and ion detector, and described ion detector is connected with charge amplifier; Described charge amplifier is connected with multichannel pulse scope-analyzer, single-channel spectrometer respectively; Described without ion conduit, electric field isolation net and diaphragm are set in the middle of negative electrode gleam image intensifier assembly and the ion detector.It is adjustable wherein to focus on the ultraviolet source spot size; Described ion conduit and shielding box seamless link; The ion conduit outlet covers on the diaphragm fully along the axis direction projection.
Invent a kind of gleam image intensifier assembly feedback ion method of testing, ultraviolet light after the focusing, namely focusing on ultraviolet source incides without the surface of the microchannel plate in the negative electrode gleam image intensifier assembly by the ultraviolet window, the electronics that inspires makes without the work of negative electrode gleam image intensifier assembly, without the feedback ion that produces in the negative electrode gleam image intensifier assembly after accelerating, through the ion conduit, the electric field isolation aperture plate enters ion detector, output signal is input to multichannel pulse scope-analyzer after charge amplifier amplifies, by pulse amplitude analysis the ion pulse signal is separated with noise signal, it is interval to obtain feeding back ion pulse signal amplitude value, then the signal amplitude lower limit is input to as threshold value and realizes the ion pulse counting in the single-channel spectrometer; Wherein, excitation source adopts the adjustable focusing ultraviolet source of spot size.
Described ion conduit and measured surface have the inclination angle of 30 degree～40 degree.This device is used for surveying the feedback ion current of gleam image intensifier assembly.
Principle of work of the present invention and beneficial effect are as follows: of the present inventionly be installed in the vacuum chamber without negative electrode gleam image intensifier assembly and ion detection assembly, be provided with the ultraviolet incidence window on the vacuum chamber top; Adopt ultraviolet source directly to excite in the gleam image intensifier assembly microchannel plate surface to send secondary electron and form the microchannel plate input current, substituted photocathode, for the feedback ion provides the operation passage, enable to incide on the ion detector.
The ion detection apparatus is in shielding box, and shielding box adopts metal material to make, and can realize electromagnetic screen, can effectively shield ultraviolet light again, avoids the interior Multi reflection ultraviolet light of direct incident uv and vacuum chamber to incide on the ion detector; The shielding box lower end connects the ion conduit, the entrance of ion conduit is aimed at without negative electrode gleam image intensifier assembly upper surface with the inclination angle of 30 degree～40 degree and is guaranteed not cover upper surface, avoid blocking ultraviolet light beam, the ion conduit adopts the dielectric material of absorbing ultraviolet to make, the ultraviolet light intensity of gleam image intensifier surface reflection can be reduced, provide an operation passage for ion simultaneously; Between ion conduit and ion detector, be provided with the electric field isolation net, in order to eliminate the ion accelerating field to the impact of ion detector normal operating conditions; Between electric field isolation net and ion detector, be provided with diaphragm, the ultraviolet light intensity by the incident of ion conduit is further reduced, produce photocurrent thereby reduced to greatest extent the ultraviolet excitation ion detector.
The measuring method generation current pulse to the ion detector that is ion incidence, and send into charge amplifier and amplify; Exist many group high-voltage power supplies in the measurement mechanism, turbomolecular pump also keeps duty during test, remaining ultraviolet light can produce secondary electron by the excited ion detector, there is the intrinsic digit rate of calculating mentally in ion detector itself, above-mentioned multiple disturbing factor all can affect the detection of atomic weak ion current, connected multichannel pulse scope-analyzer in the charge amplifier rear end for this reason, in order to the charge amplifier output signal is carried out pulse amplitude analysis, find the critical point of ion signal pulse and noise spike, thereby judge the amplitude characteristic of ion signal pulse; In the situation of a large amount of pulse signal inputs, the less ion signal pulse meeting of relative populations produces the situation of dropout because of the impact of multichannel pulse scope-analyzer operating rate, thereby affect the measuring accuracy of ion signal pulse, connect simultaneously a single-channel spectrometer in the charge amplifier rear end, obtain the threshold voltage of ion pulse according to the pulse amplitude analysis result, thereby the nothing that realizes the ion signal pulse at single-channel spectrometer is lost count measurement, has greatly improved measuring accuracy.
Proving installation provided by the invention and method can realize film and the measurement of feeding back ion current without the film microchannel plate, thereby realize the measurement of ion feedback preventing film ion gas barrier characteristic.
Description of drawings
The invention will be further described below in conjunction with the drawings and the specific embodiments
Fig. 1 is gleam image intensifier assembly feedback ion proving installation synoptic diagram of the present invention
Fig. 2 is signal pulse amplitude analysis result of the present invention
Fig. 3 is the signal pulse amplitude analysis result after amplifying along the y axle
1-focuses on ultraviolet source among the figure, 2-ultraviolet window, and the 3-vacuum chamber, 4-is without negative electrode gleam image intensifier assembly, 5-electric field isolation aperture plate, 6-diaphragm, 7-ion conduit, 8-ion detector, the 9-shielding box, 10-charge amplifier, 11-multichannel pulse scope-analyzer, 12-single-channel spectrometer.
Embodiment
Fig. 1 is gleam image intensifier assembly feedback ion proving installation synoptic diagram of the present invention, and the below is described further apparatus of the present invention.
Apparatus of the present invention comprise focus on ultraviolet source 1, top the vacuum chamber 3 of ultraviolet window 2 is set, without negative electrode gleam image intensifier assembly 4, with ion incidence mouth place the ion conduit 7 of seamless link and shielding box 9, charge amplifier 10, multichannel pulse scope-analyzer 11, the single-channel spectrometer 12 of built-in electric field isolation aperture plate 5, diaphragm 6 and ion detector 8 are arranged; The entrance of ion conduit is aimed at without negative electrode gleam image intensifier assembly upper surface with certain inclination angle, inclination angle of 30 degree～40 degree and is guaranteed not cover upper surface; Ion detector is connected with charge amplifier; Single-channel spectrometer is connected with charge amplifier with multichannel pulse scope-analyzer and is connected; Gleam image intensifier assembly, ion detection assembly all are placed in the vacuum chamber, and wherein the ion conduit outlet covers on the diaphragm fully along the axis direction projection.
During measurement, the ultraviolet hot spot focuses on without negative electrode gleam image intensifier assembly upper surface, the ultraviolet excitation microchannel plate produces secondary electron as the incident electron of microchannel plate, these electronics are after the microchannel plate multiplication, the nearly space of pasting forms the high density electron cloud behind its output terminal and gleam image intensifier assembly, and remaining gas molecule forms ion in the bombardment assembly, ion is after the microchannel plate operating voltage is accelerated, feed back to the microchannel plate input end and form the feedback ion, the feedback ion is under the effect of ion accelerating field, be incident to ion detector, thereby form the current impulse that ion excitation forms, can record atomic weak ion current to this current impulse counting.
But the ultraviolet excitation ion detector, the ion detector that exist high-voltage power supply, turbomolecular pump, remnants in measurement mechanism are calculated mentally the influence factors such as digit rate, thereby produce a large amount of disturbing pulses, affect the detection of atomic weak ion current, by analysis as can be known, the general amplitude of disturbing pulse signal is lower.Fig. 2 is the result that the charge amplifier output signal is done pulse amplitude analysis, exists a large amount of disturbing pulse signals in the low amplitude interval.
In the situation of a large amount of pulse signal inputs, the less ion signal pulse meeting of relative populations produces the situation of dropout because of the impact of multichannel pulse scope-analyzer operating rate, thereby affects the measuring accuracy of ion signal pulse.For solving ion signal pulse missing problem, connected multichannel pulse scope-analyzer in the charge amplifier rear end, in order to the charge amplifier output signal is carried out pulse amplitude analysis, find the critical point of ion signal pulse and noise spike, thereby judge the amplitude characteristic of ion signal pulse, Fig. 3 is that Fig. 2 pulse amplitude analysis result's y axle amplifies the result, and as can be seen from Figure 3, in the present embodiment disturbing pulse and ion signal pulse has obvious critical point in 65 roads.Connect simultaneously a single-channel spectrometer in the charge amplifier rear end, the road number that produces critical point is amounted to into magnitude of voltage as the threshold voltage of single-channel spectrometer, filtering the disturbing pulse counting, thereby the nothing that has realized the ion signal pulse is lost count measurement, greatly improved measuring accuracy, thereby realized gleam image intensifier assembly feedback ion test purpose, measured thereby can carry out high-precision quantitative to the ion gas barrier characteristic of ion feedback preventing film in the micro-optic device, its performance has been carried out objective evaluation.
It is pointed out that on the basis that does not break away from technological thought of the present invention the formed proving installation of any type of equivalent substitution and the method for carrying out all belong to protection scope of the present invention.
Claims (7)
1. gleam image intensifier assembly feedback ion proving installation is characterized in that: comprise focus on ultraviolet source (1), vacuum chamber (3), without negative electrode gleam image intensifier assembly (4), ion conduit (7), ion detector (8), shielding box (9); Described vacuum chamber (3) is provided with ultraviolet window (2), internal vacuum chamber aim at ion conduit (7) without negative electrode gleam image intensifier assembly (4) oblique upper; Described shielding box (9) is built-in with electric field isolation aperture plate (5), diaphragm (6) and ion detector (8), and described ion detector (8) is connected with charge amplifier (10); Described charge amplifier is connected with multichannel pulse scope-analyzer (11), single-channel spectrometer (12) respectively; Described without ion conduit (7), electric field isolation net (5) and diaphragm (6) are set in the middle of negative electrode gleam image intensifier assembly (4) and the ion detector (8).
2. by gleam image intensifier assembly feedback ion proving installation claimed in claim 1, it is characterized in that: described focusing ultraviolet source spot size is adjustable.
3. by gleam image intensifier assembly feedback ion proving installation claimed in claim 1, it is characterized in that: described ion conduit and shielding box seamless link.
4. by gleam image intensifier assembly feedback ion proving installation claimed in claim 2, it is characterized in that the ion conduit outlet covers on the diaphragm fully along the axis direction projection.
5. a gleam image intensifier assembly feeds back the ion method of testing, it is characterized in that: the ultraviolet light after the focusing, namely focusing on ultraviolet source (1) incides without the surface of the microchannel plate in the negative electrode gleam image intensifier assembly (4) by ultraviolet window (2), the electronics that inspires makes without the work of negative electrode gleam image intensifier assembly, without the feedback ion that produces in the negative electrode gleam image intensifier assembly after accelerating, through ion conduit (7), electric field isolation aperture plate (5) enters ion detector (8), output signal is input to multichannel pulse scope-analyzer (11) after charge amplifier (10) amplifies, by pulse amplitude analysis the ion pulse signal is separated with noise signal, it is interval to obtain feeding back ion pulse signal amplitude value, the signal amplitude lower limit is input to as threshold value realizes the ion pulse counting in the single-channel spectrometer (12); Wherein, excitation source adopts the adjustable focusing ultraviolet source of spot size.
6. by gleam image intensifier assembly feedback ion method of testing claimed in claim 5, it is characterized in that described ion conduit and measured surface have the inclination angle of 30 degree～40 degree.
7. by gleam image intensifier assembly feedback ion proving installation claimed in claim 1, it is characterized in that: this device is used for surveying the feedback ion current of gleam image intensifier assembly.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107665798A (en) * | 2016-07-28 | 2018-02-06 | 南京理工大学 | A kind of large area uniform surface electron source |
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| CN2704818Y (en) * | 2004-04-30 | 2005-06-15 | 长春理工大学 | Electronic impacting high-sensitivity sensors |
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| CN1502969A (en) * | 2002-10-18 | 2004-06-09 | ���ձ���Ŀ��������ʽ���� | Apparatus for measuring film thickness formed on object, apparatus and method for measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object |
| CN2704818Y (en) * | 2004-04-30 | 2005-06-15 | 长春理工大学 | Electronic impacting high-sensitivity sensors |
Non-Patent Citations (1)
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| 卢磊: "微弱离子流检测技术研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107665798A (en) * | 2016-07-28 | 2018-02-06 | 南京理工大学 | A kind of large area uniform surface electron source |
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Application publication date: 20130116 |