CN210155340U - Energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics - Google Patents
Energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics Download PDFInfo
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- CN210155340U CN210155340U CN201822129911.0U CN201822129911U CN210155340U CN 210155340 U CN210155340 U CN 210155340U CN 201822129911 U CN201822129911 U CN 201822129911U CN 210155340 U CN210155340 U CN 210155340U
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Abstract
The utility model discloses an energy analysis ware based on energy ion pierces through characteristic measurement particle beam particle composition, it includes three metal diaphragm, all sets up a detector behind every metal diaphragm, high energy ion beam I1Respectively incident to the metal membranes, respectively outputting ion beams penetrating through the first metal membrane after passing through the three metal membranes, ion beams penetrating through the second metal membrane and ion beams penetrating through the third metal membrane, ion beams penetrating through the first metal membrane, ion beams penetrating through the second metal membrane and ion beams penetrating through the third metal membrane, respectively inputting to the detector, and respectively outputting and receiving current I penetrating through the metal membranesIThe detector receives the transmissionCurrent of metal diaphragm IIIThe detector receives a current I passing through the metal diaphragmIII. The advantages are that: according to the different penetration characteristics of the particles in different types and different thicknesses of metal films, the metal films are flexibly selected for particle component detection.
Description
Technical Field
The invention belongs to an energy analyzer, and particularly relates to an energy analyzer for measuring ion beam particle components based on energy ion penetration characteristics.
Background
In industrial and physical experiments, the measurement of particle components with different energies in various ion source extracted beams is mainly carried out in an electrostatic analyzer and a magnetic analyzer by utilizing the principle that charged ions with different energies have different deflection orbit radii in a uniform electric field and a magnetic field, or the measurement is carried out by utilizing the Doppler Effect (Doppler Effect) of the characteristic spectrum (Ha) of the extracted particles with different energies. Electrostatic and magnetic analyzers have complex, precise spatial structures and have high requirements on the outgassing rates of the circuitry and coil systems of the electromagnets placed in the vacuum chamber, the detectors are inconvenient to replace, and require complex calibration, which is costly. Spectrometers that utilize the doppler effect of the characteristic spectrum of the particles in the extracted beam for measurement are more expensive and require careful care. The invention utilizes the different penetration efficiency of ions with different energies in the metal diaphragm to carry out measurement, has fewer parts and simple structure, is easy to prepare the metal diaphragm, is convenient to replace, and has lower cost compared with the electromagnetic measurement and the spectral measurement.
Disclosure of Invention
The invention aims to provide an energy analyzer for measuring particle components of a particle beam based on energy ion penetration characteristics.
The technical scheme of the invention is as follows: an energy analyzer for measuring particle components of particle beams based on energy ion penetration characteristics comprises a first metal diaphragm, a second metal diaphragm and a third metal diaphragm, wherein a detector is arranged behind the first metal diaphragm, the second metal diaphragm and the third metal diaphragm, and a high-energy ion beam I1Respectively incident to the first metal diaphragm, the second metal diaphragm and the third metal diaphragm, respectively outputting ion beams penetrating through the first metal diaphragm after passing through the first metal diaphragm, the second metal diaphragm and the third metal diaphragm, respectively inputting the ion beams penetrating through the second metal diaphragm and the ion beams penetrating through the third metal diaphragm, respectively inputting the ion beams penetrating through the first metal diaphragm, the ion beams penetrating through the second metal diaphragm and the ion beams penetrating through the third metal diaphragm to the detector, and respectively outputting and receiving current I penetrating through the metal diaphragmsIThe detector receives a current I passing through the metal diaphragmIIThe detector receives a current I passing through the metal diaphragmIII。
The thickness of the first metal membrane is La。
The thickness of the second metal membrane is Lb。
The thickness of the third metal membrane is Lc。
The detector is a Faraday cylinder.
The detector is an electron multiplier tube.
The detector is a micro-channel plate.
The invention has the beneficial effects that: the metal film can be flexibly selected for detecting the particle components according to the different penetration characteristics of the particles in the metal films with different types and thicknesses.
Drawings
FIG. 1 is a schematic diagram of an energy analyzer for measuring particle components of a particle beam based on energy ion penetration characteristics according to the present invention.
In the figure, 1 a high energy ion beam I, 2 a first metal membrane (thickness L)a) 3 second metal diaphragm (thickness L)b) 4 third metal diaphragm (thickness L)c) Ion beam of 5 passing through the first metal diaphragm, ion beam of 6 passing through the second metal diaphragm, ion beam of 7 passing through the third metal diaphragm, current I passing through the first metal diaphragm received by the detectors of 8 and 9I10 the detector receives the current I passing through the second metal diaphragm II11 the detector receives the current I passing through the third metal diaphragmIII。
Detailed Description
The invention is described in further detail below with reference to the figures and the embodiments.
The invention is designed by utilizing the penetration efficiency characteristic of high-energy ions to the metal diaphragm. H with energy of one electron electric quantity generated by H ion source as E, E/2 and E/3+(E)，H+(E/2) and H+(E/3) three charged ion beams through a tungsten (W) metal diaphragm as an example, as a function of penetration efficiency (f)ij) And ion energy EiAnd thickness L of tungsten metal diaphragmjIn this regard, the specific function can be written as:
fij＝f(Ei,Lj)
wherein i is 1,2, 3. Subscripts 1,2 and 3 represent ion energies of E, E/2 and E/3, respectively; j is a, b, c. The subscripts a, b and c each represent a thickness La，LbAnd LcThe metal film of (2).
Assuming H contained in the ion source beam+(E)，H+(E/2) and H+(E/3) the ion beam current is I1，I2And I3Namely, the total extracted beam current of the ion source is as follows: i ═ I1+I2+I3And the extracted beams are respectively hit at the thickness of La，LbAnd LcOn the W metal diaphragms 2,3 and 4, the ion current transmitted and received by the detector behind the three metal diaphragms is I respectivelyI，IIIAnd IIII. The expression for this process can be expressed as:
through the above expression, it can be obtained that the currents respectively obtained by detecting the three detectors passing through the three diaphragms are:
the intensity of the transmitted beam current passing through the first W film with the thickness of La is as follows: i isI＝f1aI1+f2aI2+f3aI3I.e. the total extracted ion beam I has a medium current intensity of I1，I2And I3H of (A) to (B)+(E)，H+(E/2) and H+(E/3) ion penetration thickness LaThe flow intensity of W after the metal film is f1aI1，f2aI2And f3aI3(ii) a In the same way, IIIAnd IIIIThen the flow intensity is I1，I2And I3H of (A) to (B)+(E)，H+(E/2) and H+(E/3) ion Beam penetration thickness LbAnd LcThe bleed strength after W metal film of (1)IIAnd IIII. By solving the equation of linear three-way equation, I in ion source extraction beam I can be obtained1、I2And I3In a content of, i.e., H+(E)，H+(E/2) and H+(E/3) the content of ions in the extracted beam.
The invention is primarily intended for analyzing the beam composition of high energy ion beams extracted from an ion source. Taking a hydrogen ion source as an example, three kinds of charged ions are generated during the discharge of the ion source, and after the ions pass through an accelerator, the monoatomic ions of the ions have full energy (E), half energy (E/2) and one third energy (E/3), which can be expressed as: h+(E)， H+(E/2) and H+(E/3). The expression for energy E is: e ═ eU, where E is the electron charge and U is the accelerator voltage. Etching ion source, cutting ion beam, and heating and diagnosis on Tokamak deviceThe beam components of the extracted ion beam of neutral beams and diagnostic beams used, and accelerators used in high-energy particle physics experiments are important reference indicators for the performance of ion sources.
As shown in FIG. 1, an energy analyzer for measuring particle components of a particle beam based on energy ion penetration characteristics includes a thickness LaOf a first metal membrane 2, having a thickness LbAnd a second metal membrane 3 of thickness LcA detector 8 (specifically, a Faraday cup, an electron multiplier tube, a microchannel plate, etc.) is arranged behind the third metal diaphragm 4, the first metal diaphragm 2, the second metal diaphragm 3 and the third metal diaphragm 4, and a high-energy ion beam I1Respectively incident to the first metal diaphragm 2, the second metal diaphragm 3 and the third metal diaphragm 4 with a thickness LaOf a first metal membrane 2, having a thickness LbAnd a second metal membrane 3 of thickness LcThe ion beam 5 penetrating through the first metal diaphragm, the ion beam 6 penetrating through the second metal diaphragm, the ion beam 7 penetrating through the third metal diaphragm, the ion beam 5 penetrating through the first metal diaphragm, the ion beam 6 penetrating through the second metal diaphragm, and the ion beam 7 penetrating through the third metal diaphragm are respectively input into a detector 8 and respectively output and receive the current I penetrating through the metal diaphragm 1IThe detector receives a current I passing through the metal diaphragm 2IIThe detector receives a current I passing through the metal diaphragm 3III。
And perfecting the specific operation process.
1. Placing the metal membranes 2,3 and 4 in a high-temperature vacuum furnace at 150 ℃ for baking for 24 hours to remove moisture in the metal membranes;
2. fixedly placing the metal membranes 2,3 and 4 on a plane vertical to the direction of the ion beam;
3. an ion detector 8 is arranged behind the metal diaphragms 2,3 and 4;
4. starting an ion source to enable ion beams to strike the first metal membrane 2, the second metal membrane 3 and the third metal membrane 4;
5. recording the degrees II, III and IIII of the detector 8;
6. and detecting currents II, III and IIII according to the penetration rate fij of the ion beam to the first metal membrane 2, the second metal membrane 3 and the third metal membrane 4 and the currents I1, I2 and I3 of current components H + (E), H + (E/2) and H + (E/3) in the extracted beam.
Claims (7)
1. An energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics, comprising: it includes first metal diaphragm (2), second metal diaphragm (3) and third metal diaphragm (4), all sets up one detector (8) behind first metal diaphragm (2), second metal diaphragm (3) and third metal diaphragm (4), and high energy ion beam I1Respectively incident to a first metal diaphragm (2), a second metal diaphragm (3) and a third metal diaphragm (4), respectively outputting an ion beam (5) penetrating through the first metal diaphragm after passing through the first metal diaphragm (2), the second metal diaphragm (3) and the third metal diaphragm (4), respectively outputting an ion beam (6) penetrating through the second metal diaphragm and an ion beam (7) penetrating through the third metal diaphragm, respectively inputting the ion beam (6) penetrating through the second metal diaphragm and the ion beam (7) penetrating through the third metal diaphragm to a detector (8) and respectively outputting and receiving a current I penetrating through the first metal diaphragm (2)IThe detector receives a current I which penetrates through the second metal diaphragm (3)IIThe detector receives the current I passing through the third metal diaphragm (4)III。
2. The energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics of claim 1, wherein: the thickness of the first metal diaphragm (2) is La。
3. The energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics of claim 1, wherein: the thickness of the second metal diaphragm (3) is Lb。
4. The energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics of claim 1, wherein: the thickness of the third metal diaphragm (4) isLc。
5. The energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics of claim 1, wherein: the detector (8) is a Faraday cylinder.
6. The energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics of claim 1, wherein: the detector (8) is an electron multiplier tube.
7. The energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics of claim 1, wherein: the detector (8) is a micro-channel plate.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111337970A (en) * | 2018-12-18 | 2020-06-26 | 核工业西南物理研究院 | Energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics |
| CN111948700A (en) * | 2020-09-17 | 2020-11-17 | 核工业西南物理研究院 | Sandwich type ion beam energy spectrum analyzer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111337970A (en) * | 2018-12-18 | 2020-06-26 | 核工业西南物理研究院 | Energy analyzer for measuring ion beam particle composition based on energy particle penetration characteristics |
| CN111948700A (en) * | 2020-09-17 | 2020-11-17 | 核工业西南物理研究院 | Sandwich type ion beam energy spectrum analyzer |
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