CN102877119B - A kind of zone melting furnace seed crystal liner - Google Patents
A kind of zone melting furnace seed crystal liner Download PDFInfo
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- CN102877119B CN102877119B CN201210349314.3A CN201210349314A CN102877119B CN 102877119 B CN102877119 B CN 102877119B CN 201210349314 A CN201210349314 A CN 201210349314A CN 102877119 B CN102877119 B CN 102877119B
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Abstract
The present invention relates to nonmetallic producing apparatus, aim to provide a kind of zone melting furnace seed crystal liner.This device comprises the outer shaft of inner hollow and interior axle, and described zone melting furnace seed crystal liner also comprises seed crystal backstay and seed crystal tail rod; Seed crystal tail rod is placed in outer shaft upper end endoporus, and is fixed on interior axle upper end, and the top and bottom of seed crystal tail rod are equipped with the perforate of concentric, and upper end tapping is provided with seed crystal backstay, and lower end tapping is provided with interior axle; Seed crystal clamping device is fixed in described seed crystal backstay upper end.The invention provides the seed crystal liner for zone melting single-crystal stove that a kind of structure is simple, reliable and stable, its Rigidity and strength is better, and seed crystal and the good right alignment of outer shaft can be ensured in whole crystal pulling process, make seed crystal and monocrystalline lifting and rotary motion steady, can provide safeguard for the stable growth of large diameter zone melting stove monocrystalline.
Description
Technical field
The invention relates to nonmetallic producing apparatus, particularly a kind of zone melting furnace seed crystal liner.
Background technology
Zone melting method (FZ) manufacture order crystal silicon is a kind of novel method for monocrystal growth being different from Czochralski furnace (CZ), it utilizes high-frequency induction heating coil by local melting for highly purified polycrystal, the magnetic supporting power that melting zone relies on the surface tension of molten silicon and heater coil to provide and be in suspended state, then utilizes seed crystal that molten silicon is drawn into monocrystalline from the below in melting zone.Owing to not having crucible to pollute, the purity of monocrystalline silicon of zone melting furnace growth is high, good uniformity, low microdefect, and its excellent electric property is applicable to making high back-pressure, big current, powerful power electronic devices very much.In the national key sciemtifec and technical spheres such as the energy, environmental protection, information and communication, production, material, traffic, power electronic devices all plays an important role.Zone-melted silicon single crystal is mainly used in and manufactures thyristor and rectifier cell, MOSFET and related device thereof and superpower device, and the fields such as information, household electrical appliances, automobile, industry can be contained in its market.Along with the develop rapidly of power electronic devices, the specification of quality to silicon single-crystal such as high back-pressure, big current semiconductor device is more and more higher: purity is high, diameter is large, the radial good uniformity of dislocation-free, absence of vortices defect and resistivity etc.
In zone melting single-crystal stove production process, lower shaft movement mechanism plays the effect of seeding, single crystal growing, rotation, plays particularly important effect to single crystal growing.Lower shaft movement mechanism is divided into interior axle and outer shaft, and interior axle can be elevated relative to outer shaft, plays the effect of seed crystal seeding.In traditional minor diameter zone melting furnace, because interior axle stroke is shorter, interior axle upper end generally there is no seed crystal guiding mechanism.In the production of large diameter zone melting stove, interior axle stroke is longer, reach more than 500mm, in the seed crystal seeding stage, seed crystal needs to rise to coil position and completes seeding, and now seed crystal jib-length is longer, and general rotating speed is very fast, monocrystalline quality is large, and the right alignment of the stability of motion of seed crystal and seed crystal and outer shaft is all difficult to ensure, traditional structure cannot meet the zone melting furnace growth requirement of more than 5 inches.
Summary of the invention
Main purpose of the present invention is to overcome deficiency of the prior art, the zone melting furnace seed crystal liner provide that a kind of Rigidity and strength is good, the right alignment of seed crystal and outer shaft is good, ensureing the stability of motion of seed crystal and monocrystalline.For solving the problems of the technologies described above, solution of the present invention is:
There is provided a kind of zone melting furnace seed crystal liner, comprise the outer shaft of inner hollow and interior axle, described zone melting furnace seed crystal liner also comprises seed crystal backstay and seed crystal tail rod; Seed crystal tail rod is placed in outer shaft upper end endoporus, and is fixed on interior axle upper end, and the top and bottom of seed crystal tail rod are equipped with the perforate of concentric, and upper end tapping is provided with seed crystal backstay, and lower end tapping is provided with interior axle; Seed crystal clamping device is fixed in described seed crystal backstay upper end.
As further improvement, the lower end of described seed crystal backstay is right cylinder, and upper end is the cone with gradient, and seed crystal clamping device is provided with the conical bore with this cone same slope, is fixed by holding screw.
As further improvement, outside the upper end of described seed crystal tail rod, be provided with protection cup.
As further improvement, described seed crystal tail rod lower end perforate is fixed by holding screw and interior axle upper end cylindrical.
As further improvement, described seed crystal tail rod is provided with ventilating pit.
As further improvement, described seed crystal tail rod is cylindrical bar, is provided with the shaft shoulder in the middle part of it.
As further improvement, outside, described seed crystal tail rod lower end is provided with at least 2 seed crystal guide rings.
As further improvement, the outer circular edge of described seed crystal guide ring has at least 2 minor grooves.
As further improvement, spacer is adopted to isolate between described seed crystal guide ring, seed crystal guide ring topmost is closely attached to the shaft shoulder end face of seed crystal tail rod, and seed crystal guide ring lower surface is bottom provided with dividing plate, and dividing plate is fixed by the snap ring be located on seed crystal tail rod.
As further improvement, described seed crystal tail rod shaft shoulder cylindrical, spacer cylindrical, dividing plate cylindrical are less than seed crystal guide ring cylindrical, have the gap of 0.03 ~ 0.10mm between seed crystal guide ring cylindrical and outer shaft endoporus, seed crystal tail rod shaft shoulder cylindrical, spacer cylindrical, dividing plate cylindrical have the gap of 0.30 ~ 1.2mm with outer shaft endoporus respectively.
Compared with prior art, the invention has the beneficial effects as follows:
The invention provides the seed crystal liner for zone melting single-crystal stove that a kind of structure is simple, reliable and stable, its Rigidity and strength is better, and seed crystal and the good right alignment of outer shaft can be ensured in whole crystal pulling process, make seed crystal and monocrystalline lifting and rotary motion steady, can provide safeguard for the stable growth of large diameter zone melting stove monocrystalline.
Accompanying drawing explanation
Fig. 1 is sectional view of the present invention.
Fig. 2 is the schematic diagram of the seed crystal guide ring in the present invention.
Reference numeral in figure is: axle in 1; 2 dividing plates; 3 spacers; 4 seed crystal guide rings; 5 seed crystal tail rods; 6 protection cups; 7 seed crystal backstays; 8 outer shafts; 9 seed crystal clamping devices.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is described in further detail:
Zone melting furnace seed crystal liner in Fig. 1 comprises outer shaft 8, interior axle 1, seed crystal guide ring 4, seed crystal backstay 7 and seed crystal tail rod 5.
Outer shaft 8 is cylindrical, hollow axle, seed crystal tail rod 5 is placed in outer shaft 8 upper end endoporus, and be fixed on interior axle 1 upper end, the top and bottom of seed crystal tail rod 5 are equipped with the perforate of concentric, upper end tapping is provided with seed crystal backstay 7, and lower end tapping is fixed by holding screw and interior axle 1 upper end cylindrical.Be provided with protection cup 6 outside the upper end of described seed crystal tail rod 5, the unforeseen circumstancess such as anti-leak-stopping silicon are to the damage of outer shaft 8 inwall and seed crystal liner.Described seed crystal tail rod 5 is provided with ventilating pit, and lower axle system can be made to arrive highest attainable vacuum smoothly.Described seed crystal tail rod 5 is cylindrical bar, is provided with the shaft shoulder in the middle part of it.Described outer shaft 8 upper end endoporus need through meticulous mill processing, and surfaceness is not less than 0.8, controls within 0.05mm with outer shaft 8 outer circles.
The lower end of seed crystal backstay 7 is right cylinder, and upper end is the cone with gradient, and seed crystal clamping device 9 is provided with the conical bore with this cone same slope, by holding screw, seed crystal clamping device 9 is fixed on seed crystal backstay 7 upper end.The gradient cooperation adapted makes seed crystal backstay 7 and seed crystal clamping device 9 self-centering, facilitates seed crystal to clamp the installation of clamping device 9.
In Fig. 2, outside, seed crystal tail rod 5 lower end is provided with at least 2 ~ 5 seed crystal guide rings 4, adopts multiple guide ring, can when when seed crystal seeding, part seed crystal liner stretches out outer shaft 8, ensure to be no less than a guide ring in addition in outer shaft 8, play guide effect better.The outer circular edge of described seed crystal guide ring 4 has at least 2 minor grooves, and minor groove can prevent the phenomenon causing seed crystal guide ring 4 and outer shaft 8 stuck because expanding with heat and contract with cold, and also can play ventilating pit effect simultaneously.Seed crystal guide ring 4 adopts seed crystal tail rod 5 shaft shoulder end face, spacer 3, dividing plate 2 to fit tightly location, and between seed crystal guide ring 4, adopt spacer 3 to isolate, seed crystal guide ring 4 topmost is closely attached to the shaft shoulder end face of seed crystal tail rod 5, seed crystal guide ring 4 lower surface is bottom provided with dividing plate 2, and dividing plate 2 is fixed by the snap ring be located on seed crystal tail rod 5.Described seed crystal tail rod 5 shaft shoulder cylindrical, spacer 3 cylindrical, dividing plate 2 cylindrical are less than seed crystal guide ring 4 cylindrical, the gap of 0.03 ~ 0.10mm is had between seed crystal guide ring 4 cylindrical and outer shaft 8 endoporus, can ensure that seed crystal guide ring 4 can be elevated smoothly in outer shaft 8, and seed crystal tail rod 5 shaft shoulder cylindrical, spacer 3 cylindrical, dividing plate 2 cylindrical there is the gap of 0.30 ~ 1.2mm with outer shaft 8 endoporus respectively.Material due to seed crystal tail rod 5, spacer 3, dividing plate 2 is stainless steel, its intensity, good rigidity.And seed crystal guide ring 4 material is tetrafluoroethylene, tetrafluoroethylene have low-friction coefficient, wear-resisting, resistance to chemical attack, self-lubricating good, be not hydrolyzed, the premium properties such as not hardening, can play and reduce friction, self-lubricating, is not easy the effect of scratch outer shaft 8 inwall.But tetrafluoroethylene has the poor shortcoming of intensity, rigidity, in the present invention, slightly little seed crystal tail rod 5 shaft shoulder of external diameter, spacer 3, dividing plate 2 is adopted to fit tightly seed crystal guide ring 4, control seed crystal guide ring 4 overhanging portion in more among a small circle, make the seed crystal liner Rigidity and strength in the present invention better, the right alignment of crystal seed and outer shaft 8 is good, ensures the stability of motion of seed crystal and monocrystalline.
In zone melting single-crystal stove production process, be arranged on by seed crystal on interior axle 1, interior axle 1 can be elevated relative to outer shaft 8, plays the effect of seeding.Seed crystal tail rod 5 is provided with multiple seed crystal guide ring 4, when seed crystal seeding, even if part seed crystal liner stretches out outer shaft 8, can ensures to be no less than a seed crystal guide ring 4 in addition in outer shaft 8, play guide effect better.Fixed by seed crystal eventually through seed crystal clamping device 9, the cone match matched by seed crystal backstay 7 and seed crystal clamping device 9, can realize the self-centering of seed crystal, facilitates the dismounting of seed crystal clamping device 9.
Certainly, this kind of zone melting furnace seed crystal liner is not limited in above-mentioned specific embodiment, and under enlightenment of the present invention, no matter do any change in its shape or structure, every have the technical scheme identical or similar with the present invention, all within its protection domain.
Claims (6)
1. a zone melting furnace seed crystal liner, comprises the outer shaft of inner hollow and interior axle, it is characterized in that, described zone melting furnace seed crystal liner also comprises seed crystal backstay and seed crystal tail rod; Seed crystal tail rod is placed in outer shaft upper end endoporus, and is fixed on interior axle upper end, and the top and bottom of seed crystal tail rod are equipped with the perforate of concentric, and upper end tapping is provided with seed crystal backstay, and lower end tapping is provided with interior axle; Seed crystal clamping device is fixed in described seed crystal backstay upper end;
Described seed crystal tail rod is cylindrical bar, is provided with the shaft shoulder in the middle part of it, and outside, lower end is provided with at least 2 seed crystal guide rings; The outer circular edge of described seed crystal guide ring has at least 2 minor grooves, spacer is adopted to isolate between seed crystal guide ring, seed crystal guide ring topmost is closely attached to the shaft shoulder end face of seed crystal tail rod, seed crystal guide ring lower surface is bottom provided with dividing plate, and dividing plate is fixed by the snap ring be located on seed crystal tail rod.
2. a kind of zone melting furnace seed crystal liner according to claim 1, it is characterized in that, the lower end of described seed crystal backstay is right cylinder, and upper end is the cone with gradient, and seed crystal clamping device is provided with the conical bore with this cone same slope, fixed by holding screw.
3. a kind of zone melting furnace seed crystal liner according to claim 1, is characterized in that, be provided with protection cup outside the upper end of described seed crystal tail rod.
4. a kind of zone melting furnace seed crystal liner according to claim 1, is characterized in that, described seed crystal tail rod lower end perforate is fixed by holding screw and interior axle upper end cylindrical.
5. a kind of zone melting furnace seed crystal liner according to claim 1, it is characterized in that, described seed crystal tail rod is provided with ventilating pit.
6. a kind of zone melting furnace seed crystal liner according to claim 1, it is characterized in that, described seed crystal tail rod shaft shoulder cylindrical, spacer cylindrical, dividing plate cylindrical are less than seed crystal guide ring cylindrical, have the gap of 0.03 ~ 0.10mm between seed crystal guide ring cylindrical and outer shaft endoporus, seed crystal tail rod shaft shoulder cylindrical, spacer cylindrical, dividing plate cylindrical have the gap of 0.30 ~ 1.2mm with outer shaft endoporus respectively.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210349314.3A CN102877119B (en) | 2012-09-19 | 2012-09-19 | A kind of zone melting furnace seed crystal liner |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210349314.3A CN102877119B (en) | 2012-09-19 | 2012-09-19 | A kind of zone melting furnace seed crystal liner |
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| CN102877119A CN102877119A (en) | 2013-01-16 |
| CN102877119B true CN102877119B (en) | 2015-08-05 |
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| CN113550000B (en) * | 2020-04-26 | 2024-03-22 | 内蒙古中环晶体材料有限公司 | Single crystal furnace positioning mechanism for automatically stabilizing seed crystal, single crystal furnace system and stabilizing method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2476566Y (en) * | 2001-04-06 | 2002-02-13 | 北京有色金属研究总院 | Seed rod device |
| CN101768773A (en) * | 2008-12-26 | 2010-07-07 | 北京有色金属研究总院 | Method and device for improving stability of single crystal when in running of zone-melting single crystal furnace |
| CN202849586U (en) * | 2012-09-19 | 2013-04-03 | 浙江晶盛机电股份有限公司 | Seed crystal guidance device for zone melting furnace |
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2012
- 2012-09-19 CN CN201210349314.3A patent/CN102877119B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2476566Y (en) * | 2001-04-06 | 2002-02-13 | 北京有色金属研究总院 | Seed rod device |
| CN101768773A (en) * | 2008-12-26 | 2010-07-07 | 北京有色金属研究总院 | Method and device for improving stability of single crystal when in running of zone-melting single crystal furnace |
| CN202849586U (en) * | 2012-09-19 | 2013-04-03 | 浙江晶盛机电股份有限公司 | Seed crystal guidance device for zone melting furnace |
Non-Patent Citations (1)
| Title |
|---|
| Fz115型区熔炉的设计及特点;陈应斗;《有色设备》;19970830(第4期);第12页3.1.2下传动机构 * |
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