CN102873592B - 基于换能装置的表面光整加工装置 - Google Patents
基于换能装置的表面光整加工装置 Download PDFInfo
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- CN102873592B CN102873592B CN201210335489.9A CN201210335489A CN102873592B CN 102873592 B CN102873592 B CN 102873592B CN 201210335489 A CN201210335489 A CN 201210335489A CN 102873592 B CN102873592 B CN 102873592B
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- 230000002463 transducing effect Effects 0.000 title claims abstract description 61
- 230000007246 mechanism Effects 0.000 claims abstract description 14
- 230000005291 magnetic effect Effects 0.000 claims description 37
- 239000007788 liquid Substances 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 14
- 238000003754 machining Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 238000005498 polishing Methods 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 claims description 7
- 239000003302 ferromagnetic material Substances 0.000 claims description 6
- 239000006061 abrasive grain Substances 0.000 claims description 4
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- 239000003082 abrasive agent Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 238000002493 microarray Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
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CN201210335489.9A CN102873592B (zh) | 2012-09-11 | 2012-09-11 | 基于换能装置的表面光整加工装置 |
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CN201210335489.9A CN102873592B (zh) | 2012-09-11 | 2012-09-11 | 基于换能装置的表面光整加工装置 |
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CN102873592A CN102873592A (zh) | 2013-01-16 |
CN102873592B true CN102873592B (zh) | 2015-09-16 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI637811B (zh) * | 2012-10-25 | 2018-10-11 | 日商安瀚視特控股股份有限公司 | 玻璃基板之製造方法及玻璃基板硏磨用磁性流動體 |
CN103600276B (zh) * | 2013-05-20 | 2018-02-02 | 杨斌堂 | 可控变形软刀具 |
WO2015010680A2 (de) * | 2013-07-22 | 2015-01-29 | Zs-Handling Gmbh | Vorrichtung zur oberflächenbehandlung oder -bearbeitung |
CN103465112B (zh) * | 2013-09-03 | 2016-02-10 | 黑龙江科技大学 | 基于磁流变胶体或磁流变泡沫材料的柔性抛光方法和装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN200981191Y (zh) * | 2006-06-30 | 2007-11-28 | 西安工业大学 | 光学零件精磨抛光机 |
CN101224556A (zh) * | 2008-02-04 | 2008-07-23 | 东华大学 | 光学零件磁流变精密抛光系统和方法 |
CN101579833A (zh) * | 2009-06-05 | 2009-11-18 | 东华大学 | 高效率可控多磨头磁流变抛光装置 |
US7888929B2 (en) * | 2007-03-02 | 2011-02-15 | Cabot Microelectronics Corporation | Method and apparatus for measurement of magnetic permeability of a material |
CN201841443U (zh) * | 2010-10-14 | 2011-05-25 | 浙江工业大学 | 一种磁射流光整加工装置 |
CN102284890A (zh) * | 2011-09-26 | 2011-12-21 | 厦门大学 | 面形自适应回转轴对称光学元件抛光装置 |
CN202825443U (zh) * | 2012-09-11 | 2013-03-27 | 上海交通大学 | 表面光整处理换能加工装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US6561874B1 (en) * | 2000-11-22 | 2003-05-13 | Qed Technologies, Inc | Apparatus and method for abrasive jet finishing of deeply concave surfaces using magnetorheological fluid |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN200981191Y (zh) * | 2006-06-30 | 2007-11-28 | 西安工业大学 | 光学零件精磨抛光机 |
US7888929B2 (en) * | 2007-03-02 | 2011-02-15 | Cabot Microelectronics Corporation | Method and apparatus for measurement of magnetic permeability of a material |
CN101224556A (zh) * | 2008-02-04 | 2008-07-23 | 东华大学 | 光学零件磁流变精密抛光系统和方法 |
CN101579833A (zh) * | 2009-06-05 | 2009-11-18 | 东华大学 | 高效率可控多磨头磁流变抛光装置 |
CN201841443U (zh) * | 2010-10-14 | 2011-05-25 | 浙江工业大学 | 一种磁射流光整加工装置 |
CN102284890A (zh) * | 2011-09-26 | 2011-12-21 | 厦门大学 | 面形自适应回转轴对称光学元件抛光装置 |
CN202825443U (zh) * | 2012-09-11 | 2013-03-27 | 上海交通大学 | 表面光整处理换能加工装置 |
Non-Patent Citations (1)
Title |
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磁流变抛光液的研究;尤伟伟等;《光学精密工程》;20040625(第03期);全文 * |
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