CN102867888A - Method for preparing thin film solar cell on mobile phone casing - Google Patents
Method for preparing thin film solar cell on mobile phone casing Download PDFInfo
- Publication number
- CN102867888A CN102867888A CN2011101981716A CN201110198171A CN102867888A CN 102867888 A CN102867888 A CN 102867888A CN 2011101981716 A CN2011101981716 A CN 2011101981716A CN 201110198171 A CN201110198171 A CN 201110198171A CN 102867888 A CN102867888 A CN 102867888A
- Authority
- CN
- China
- Prior art keywords
- film
- plating
- mode
- handset shell
- adopt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a method for preparing a thin film solar cell on a mobile phone casing. The method mainly comprises the processing steps of: forming a back casing, plating an aluminum film, etching the aluminum film, plating a non-crystal silicon PIN (Personal identification number) junction, etching the PIN junction, plating a transparent conductive electrode, etching the transparent conductive electrode, and plating an anti-reflection film, wherein the back casing forming step adopts a traditional plastic forming method to integrate an output electrode and a bypass diode with the casing; the aluminum film plating step mainly adopts vacuum film plating modes, such as evaporation film plating mode or sputter film plating mode; the non-crystal silicon PIN junction adopts a PECVD (Plasma-enhanced chemical vapor deposition) film plating mode; the transparent conductive electrode adopts the sputter film plating mode; all the three etching processing steps adopt a laser scribing mode; and the anti-reflection film adopts the sputter film plating mode. By utilizing the method disclosed by the invention, a solar cell structure capable of complementing electric energy for a mobile phone cell can be produced in large scale, and the standby time of the mobile phone can be prolonged.
Description
Technical field
The invention belongs to solar cell and make the field, be particularly useful for a kind of in the process of mobile phone shell on the back body manufacturing thin-film solar cells with the formation compensating circuit.
Background technology
Utilizing solar cell as the charger of mobile phone, is one of numerous application on the living conditions of present solar cell, can be convenient for carrying and need not worry away from electrical network, can't find suitable socket etc., also needn't change continually battery, very convenient.
Yet because the restriction of conversion efficiency of solar cell, solar mobile phone charging device often volume is larger, and is more and more less with respect to volume, the increasing small and exquisite portable mobile phone of function, and solar charger has some heavinesses that seem to carry inconvenience.
In order to solve above problem, utilize the advantage and the characteristics that can directly be plated on the phone housing of the thin-film solar cells low light level, can produce a kind of very convenient compensating circuit that can prolonging service method of mobile phone battery, thereby reduce the time and the number of times that need charging, make the performance of mobile phone more convenient.This patent makes this design be achieved production, thereby can come into operation for existing production procedure is adjusted.
Summary of the invention
Goal of the invention: the present invention is by the integration to existing equipment and process conditions, plates amorphous silicon thin-film solar cell at the mobile phone shell on the back, and making it can putting into production use.
Technical scheme: described technical scheme comprises that the shell on the back body is shaped, and aluminizer is carved the aluminium film, plating amorphous silicon PIN knot, carve the PIN knot, the plating transparent conductive electrode is carved transparent conductive electrode, plating anti-reflection film operation is when wherein said shell on the back body is shaped, with extraction electrode and bypass diode and its formation integral structure; Adopt evaporation mode to be coated with the aluminium film, in order to form its back electrode; Adopt the PECVD mode to plate the PIN knot, in order to form photoelectric conversion unit; Adopt the sputter mode to plate transparent conductive electrode, in order to form the Window layer of solar cell; Adopt the sputter mode to plate anti-reflection film, in order to increase the utilization ratio of light; Line technique in three roads all adopts the laser line.
One of them preferred version is that described bypass diode partly is embedded in the housing, and part is exposed to outside, is beneficial to heat radiation.
When one of them preferred version was coated with the aluminium film for the employing evaporation mode, the anchor clamps when its housing can adopt conventional handset shell plated film were hung up housing and realize public rotation function in coating process.When wherein adopting the evaporation plating aluminium shell on the back, do not need the area of plated film to use film to hide, in order to avoid be plated to.
When one of them preferred version is tied for adopting the PECVD mode to plate PIN, can utilize existing plating PECVD equipment, and increase additional clamp above the parallel electrode plate at it.The PIN that plates knot can be individual layer or lamination, also can be non-crystallite lamination or amorphous silicon/amorphous germanium silicon lamination.
Wherein another preferred version is that aluminizer can adopt sputter coating, accurately controls coating film thickness.
Wherein said each sputtering process is all the horizontal continuous coating, adopts plate jig.
One of them preferred version is that described each road crossed process adopts laser scribing, can utilize sputter and PECVD clamp directly to carry out the batch line.To simplify technique.When wherein ruling for the aluminium film, guarantee that extraction electrode is positioned within two the complete grizzly bars in side, prevent two grizzly bars of cross-over connection, form two sub-battery unit homopolarities and be conducted.
Useful achievement: present design is integrated for existing various device, and increase some new designs, make it under the condition of existing equipment and technology, make it to be conveniently used in the solar cell compensation film manufacture of solar cells of mobile phone shell on the back body.Because it uses most integration based on existing production technology, makes this application not need too many R﹠D costs, substantially can directly carry out the Transformation Application of production line.The anchor clamps that design in this programme, not only can realize the quantification production of each road filming process, and can directly be used in laser scribe process, need between each procedure, repeatedly not go up lower clamp, simplified technical process, reduced the artificial pollution in the operating process and saved artificial.
Description of drawings
Accompanying drawing 1 is a kind of method flow diagram in handset shell preparation thin-film solar cells
Accompanying drawing 2 is a kind of anchor clamps front view for preparing the method for thin-film solar cells at handset shell
Accompanying drawing 3 is a kind of chuck side view for preparing the method for thin-film solar cells at handset shell
Accompanying drawing 4 is a kind of anchor clamps clip front view for preparing the method for thin-film solar cells at handset shell
Accompanying drawing 5 is a kind of anchor clamps clip end view for preparing the method for thin-film solar cells at handset shell
1, anchor clamps 2, spring 3, pillar
Embodiment:
Described technical scheme comprises that mainly the shell on the back body is shaped, and aluminizer is carved the aluminium film, plating amorphous silicon PIN knot, carve the PIN knot, the plating transparent conductive electrode is carved transparent conductive electrode, plating anti-reflection film operation is when wherein said shell on the back body is shaped, with extraction electrode and bypass diode and its formation integral structure; Adopt evaporation mode to be coated with the aluminium film, in order to form its back electrode; Adopt the PECVD mode to plate the PIN knot, in order to form photoelectric conversion unit; Adopt the sputter mode to plate transparent conductive electrode, in order to form the Window layer of solar cell; Adopt the sputter mode to plate anti-reflection film, in order to increase the utilization ratio of light; Line technique in three roads all can adopt the laser line.
Be the process chart for preparing the method for thin-film solar cells on the whole handset shell such as accompanying drawing 1, flow process 1 is shaped for handset shell, in this technical process, extraction electrode and bypass diode and handset shell is combined into one.Flow process 2 be aluminizer as back electrode, wherein the plated film mode can adopt evaporation coating, evaporation coating can adopt the equipment of tradition plating mobile phone shell membrane, the place that only need to will need not be plated to the aluminium film when plated film hides.The plated film mode also can be the sputtering type plated film, can adopt horizontal continuous lines, in batches handset shell is carried out plated film with the anchor clamps such as design in the accompanying drawing 2,3.Flow process 3 adopts laser scoring for carving the aluminium film, in order to realize batch production, mobile phone shell can be contained in the anchor clamps of design and carry out batch groove, when last process employing sputter coating, has also saved the operation of unloading handset shell from anchor clamps.Should be noted that in technical process extraction electrode will lay respectively in the complete grizzly bar in side, must not be across two grizzly bars.Flow process 4 is plating PIN knot, and need to use handset shell the hanger shown in accompanying drawing 2,3 to install this moment, then respectively it is connected to the clip in the accompanying drawing 4,5 and carries out plated film on the parallel electrode plate.Flow process 5 is for carving the PIN knot, and this process is with to carve the aluminium film similar.Flow process 6 is sputter plating transparent conductive electrode, and device therefor is continuous coating equipment, and is horizontal, adopts the anchor clamps dolly batch production of design in the accompanying drawing 2,3.Flow process 7 is for carving transparent conductive electrode, and with 3,5 phase classes, flow process 8 is for the plating anti-reflection film, with flow process 6 phase classes.
Accompanying drawing 2,3 anchor clamps for design, rectangular through holes in the middle of the anchor clamps 1 is used for holding handset shell, its thickness and handset shell consistency of thickness, will there be two through holes this designing requirement handset shell side, make pillar 3 can see through the opposite side that through hole props up housing, can clamp handset shell, housing is out of shape because being subject to chucking power.Spring 2 is installed between pillar and the anchor clamps, makes pillar have certain elasticity, thereby can have certain bending that housing is enclosed within on the pillar easily.
Accompanying drawing 4,5 is clip, this is special being used for the instrument of clamp on parallel electrode plate for plating PIN knot design, can roll with sheet metal simply, the benefit of this design is to make the anchor clamps can be general between each flow process, and needn't in each flow process, distinguish up and down handset shell, thus not only make the integration of existing equipment become possibility to realize this design, and each road technique is simplified, saved manually, reduced the possibility of polluting.
The below will come with concrete example this patent scheme is illustrated, and make it to become more clear.
Embodiment one;
Present embodiment is chosen in bar phone shell on the back face made membrane solar cell this patent scheme is described.At first carry out the handset shell forming process, in this procedure, extraction electrode and bypass diode are pressed desired location and integral body of handset shell formation, side at handset shell arranges two through holes, it can be functional aperture, also can be hole for subsequent use, its diameter is larger than the clamp posts diameter.Handset shell is wrapped with plastic film, only stayed the back side of housing to be plated.Handset shell is hung on the free-standing hanger that evaporates in the vacuum chamber, carries out the evaporation plating aluminium film.After technique is finished, take off handset shell, remove the film that encases housing, with on the handset shell in the anchor clamps such as accompanying drawing design, during upper anchor clamps, the pillar slight curvature can be inserted in two holes of handset shell side, prop up internally the another side of housing, thereby clip handset shell.The appropriate location that the anchor clamps of upper full handset shell is put on the platform of laser is fixed, and then carves the aluminium membrane process.When carving the aluminium film, guarantee that extraction electrode and handset shell are mutually concordant and be positioned at the complete grizzly bar inside of of each side, both sides with the contacted position of aluminium film.The anchor clamps of finishing groove technique are taken off, and among the PECVD equipment of packing into, the one-side Clamping Apparatus of plated film is not close to parallel electrode plate, with clip anchor clamps and parallel electrode plate is fixed together, and then shuts door for vacuum chamber and carries out PIN knot and be coated with.Plated the PIN knot, open in the vacuum chamber, release the parallel electrode plate dolly, take down clip after the cooling, shift out anchor clamps and carve PIN technique at corresponding laser platform, anchor clamps are sent into continous way sputter transparent conductive electrode membrane process after finishing technique, in this operation, only need to keep flat anchor clamps into entering the sheet chamber, to be coated facing to sputtering target, drive system will automatically be sent to anchor clamps in the coating chamber and after technique is finished from slice chamber slice.The anchor clamps that plated the transparent conductive electrode film are taken out the laser platform of sending into corresponding technique carry out groove, and then carry out one-time continuous formula sputter plating counnter attack rete, namely finish technique, can take off handset shell from anchor clamps.
Original handset shell filming equipment and manufacture of solar cells equipment are adopted in the technological process of this embodiment basically, it is carried out simple syndication, and almost general anchor clamps in each procedure have been designed, make the scheme conversion at handset shell plating thin-film solar cells compensating circuit neither need to drop into substantial contribution research and development new technology, do not need a large amount of research and development new production equipment that upgrade yet, in the situation that increases the minute quantity cost, integrate existing equipment technique, can make mobile phone have this new function and become a reality, provide great convenience to the user.
Embodiment two
Present embodiment is chosen in bar phone shell on the back face made membrane solar cell this patent scheme is described.At first carry out the handset shell forming process, in this procedure, extraction electrode and bypass diode are pressed desired location and integral body of handset shell formation, side at handset shell arranges two through holes, it can be functional aperture, also can be hole for subsequent use, its diameter is larger than the clamp posts diameter.With on the handset shell in the anchor clamps such as accompanying drawing design, during upper anchor clamps, the pillar slight curvature can be inserted in two holes of handset shell side, prop up internally the another side of housing, thereby clip handset shell.Then it is sent into continous way sputtering aluminum film line, in this operation, only need to keep flat anchor clamps into entering the sheet chamber, to be coated facing to sputtering target, drive system will automatically be sent to anchor clamps in the coating chamber and after technique is finished from slice chamber slice.After finishing technique, will fix from the appropriate location that slice chamber anchor clamps out are put on the platform of laser, then carve the aluminium membrane process.When carving the aluminium film, guarantee that extraction electrode and handset shell are mutually concordant and be positioned at the complete grizzly bar inside of of each side, both sides with the contacted position of aluminium film.The anchor clamps of finishing groove technique are taken off, and among the PECVD equipment of packing into, the one-side Clamping Apparatus of plated film is not close to parallel electrode plate, with clip anchor clamps and parallel electrode plate is fixed together, and then shuts door for vacuum chamber and carries out PIN knot and be coated with.Plated the PIN knot, open in the vacuum chamber, release the parallel electrode plate dolly, take down clip after the cooling, shift out anchor clamps and carve PIN technique at corresponding laser platform, after finishing technique anchor clamps are sent into continous way sputter transparent conductive electrode membrane process, its operation is taken out the laser platform of sending into corresponding technique with the anchor clamps that plated the transparent conductive electrode film and is carried out groove with the aluminizer operation, and then carries out one-time continuous formula sputter plating counnter attack rete, namely finish technique, can take off handset shell from anchor clamps.
This embodiment makes aluminizer into the sputtering type continuous lines by evaporation coating on the basis of embodiment 1, saved at handset shell and pasted film, upper lower clamp and the time of removing pad pasting, further reduced manual operation, saving of work and time has also reduced pollution, guarantees product quality.Simultaneously, also more meet the requirement of automated production flow process.
It may be noted that handset shell specified in this patent, have more than and be limited to simple mobile phone housing, with similar other small sized personal electrical equipment of mobile phone, such as MP3, MP4, e-book and so on, all applicable to this patent scheme, all among the range of application of this programme.
This patent scheme provides a kind of method for preparing thin-film solar cells at handset shell; the method of this scheme of specific implementation and approach also have a lot; the above only is the preferred implementation of this patent scheme; should be understood that; for those skilled in the art; under the prerequisite that does not break away from this patent scheme principle, can also make some improvements and modifications, these improvements and modifications also should be considered as the protection range of patent scheme.In the present embodiment not clear and definite each part all available prior art realized.
Claims (10)
1. one kind prepares the method for thin-film solar cells at handset shell, comprises that mainly the shell on the back body is shaped, and aluminizer is carved the aluminium film, and plating amorphous silicon PIN knot is carved the PIN knot, and the plating transparent conductive electrode is carved transparent conductive electrode, and plating anti-reflection film operation is characterized in that:
When described shell on the back body is shaped, with extraction electrode and bypass diode and its formation integral structure;
Adopt evaporation mode to be coated with the aluminium film, in order to form its back electrode;
Adopt the PECVD mode to plate the PIN knot, in order to form photoelectric conversion unit;
Adopt the sputter mode to plate transparent conductive electrode, in order to form the Window layer of solar cell;
Adopt the sputter mode to plate anti-reflection film, in order to increase the utilization ratio of light.
2. according to claim 1ly a kind ofly prepare the method for thin-film solar cells at handset shell, it is characterized in that described bypass diode only has part to be embedded in the housing, is beneficial to heat radiation.
3. a kind of method for preparing thin-film solar cells at handset shell according to claim 1, when it is characterized in that adopting evaporation mode to be coated with the aluminium film, anchor clamps when its housing can adopt conventional handset shell plated film are hung up housing and realize public rotation function in coating process.
4. reach according to claim 1 and claimed in claim 3ly a kind ofly prepare the method for thin-film solar cells at handset shell, when it is characterized in that adopting the evaporation plating aluminium shell on the back, do not need the area of plated film will use film to hide, in order to avoid be plated to.
5. according to claim 1ly a kind ofly prepare the method for thin-film solar cells at handset shell, when it is characterized in that adopting the PECVD mode to plate the PIN knot, can utilize existing plating PECVD equipment, and increase additional clamp above the parallel electrode plate at it.
6. according to claim 1ly a kind ofly prepare the method for thin-film solar cells at handset shell, it is characterized in that
When described shell on the back body is shaped, with extraction electrode and bypass diode and its formation integral structure;
Adopt the sputter mode to be coated with the aluminium film, in order to form back electrode;
Adopt the PECVD mode to plate the PIN knot, in order to form photoelectric conversion unit;
Adopt the sputter mode to plate transparent conductive electrode, in order to form the Window layer of solar cell;
Adopt the sputter mode to plate anti-reflection film, in order to increase the utilization ratio of light.
7. according to claim 6ly a kind ofly prepare the method for thin-film solar cells at handset shell, it is characterized in that described bypass diode partly is embedded in the housing, part is exposed to outside, is beneficial to heat radiation.
8. according to claim 6ly a kind ofly prepare the method for thin-film solar cells at handset shell, when it is characterized in that adopting the PECVD mode to plate the PIN knot, can utilize existing plating PECVD equipment, and increase additional clamp above the parallel electrode plate at it.
9. reach according to claim 1 and claimed in claim 6ly a kind ofly prepare the method for thin-film solar cells at handset shell, it is characterized in that described each sputtering process is all the horizontal continuous coating, adopt plate jig.
10. reach according to claim 1 and claimed in claim 6ly a kind ofly prepare the method for thin-film solar cells at handset shell, it is characterized in that described each road crossed process adopts laser scribing, can utilize sputter and PECVD clamp directly to carry out batch and rule.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101981716A CN102867888A (en) | 2011-07-06 | 2011-07-06 | Method for preparing thin film solar cell on mobile phone casing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101981716A CN102867888A (en) | 2011-07-06 | 2011-07-06 | Method for preparing thin film solar cell on mobile phone casing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102867888A true CN102867888A (en) | 2013-01-09 |
Family
ID=47446613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101981716A Pending CN102867888A (en) | 2011-07-06 | 2011-07-06 | Method for preparing thin film solar cell on mobile phone casing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102867888A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103401965A (en) * | 2013-08-06 | 2013-11-20 | 深圳市中远航科技有限公司 | Mobile phone case |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2444365Y (en) * | 2000-11-30 | 2001-08-22 | 上海昊鑫科技发展有限公司 | Handset with solar energy as power supply function |
| KR20010095677A (en) * | 2000-04-11 | 2001-11-07 | 임성묵 | Mobile phone with a solar cell |
| CN101308883A (en) * | 2008-07-03 | 2008-11-19 | 莆田市威特电子有限公司 | Weak-brightness non-crystal silicon solar cell manufacture method using laser etching transparent electrode |
| CN101355109A (en) * | 2007-07-26 | 2009-01-28 | 鸿富锦精密工业（深圳）有限公司 | Solar battery component and manufacturing equipment thereof |
| CN101582655A (en) * | 2008-05-16 | 2009-11-18 | 鸿富锦精密工业（深圳）有限公司 | Portable electronic device provided with solar battery |
-
2011
- 2011-07-06 CN CN2011101981716A patent/CN102867888A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010095677A (en) * | 2000-04-11 | 2001-11-07 | 임성묵 | Mobile phone with a solar cell |
| CN2444365Y (en) * | 2000-11-30 | 2001-08-22 | 上海昊鑫科技发展有限公司 | Handset with solar energy as power supply function |
| CN101355109A (en) * | 2007-07-26 | 2009-01-28 | 鸿富锦精密工业（深圳）有限公司 | Solar battery component and manufacturing equipment thereof |
| CN101582655A (en) * | 2008-05-16 | 2009-11-18 | 鸿富锦精密工业（深圳）有限公司 | Portable electronic device provided with solar battery |
| CN101308883A (en) * | 2008-07-03 | 2008-11-19 | 莆田市威特电子有限公司 | Weak-brightness non-crystal silicon solar cell manufacture method using laser etching transparent electrode |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103401965A (en) * | 2013-08-06 | 2013-11-20 | 深圳市中远航科技有限公司 | Mobile phone case |
| CN103401965B (en) * | 2013-08-06 | 2016-06-22 | 深圳市中远航科技有限公司 | A kind of cell-phone cover |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Dross et al. | Crystalline thin‐foil silicon solar cells: where crystalline quality meets thin‐film processing | |
| CN201699033U (en) | Two-sided illuminated crystalline silicon solar battery | |
| CN102864473B (en) | Preparation method of three-dimensional ordered macroporous silicon or germanium film | |
| CN102181935B (en) | Method and corrosive liquid for making texture surface of monocrystalline silicon | |
| CN101840953B (en) | Method for preparing surface hybrid modulation crystal silicon solar battery | |
| CN101840954A (en) | Method for preparing double-faced PN crystal silicon solar batteries by utilizing traditional technique | |
| CN103594529A (en) | MWT and passivation combined crystal silicon solar cell and manufacturing method thereof | |
| CN101431127B (en) | Production method of flexible amorphous silicon thin-film solar cell | |
| CN103383975A (en) | Two-sided passivation efficient heterojunction battery and manufacturing method thereof | |
| CN102364692A (en) | Double side light receiving crystalline silicon solar cell with fully-passivated structure and manufacturing method thereof | |
| CN103346212A (en) | Phosphorus diffusion method, P-type battery preparation method and N-type battery preparation method | |
| Soderstrom et al. | Light confinement in e‐beam evaporated thin film polycrystalline silicon solar cells | |
| CN102867888A (en) | Method for preparing thin film solar cell on mobile phone casing | |
| CN102254799B (en) | Method for preparing AZO antireflective film of solar cell | |
| CN104273941A (en) | Solar wireless charging table | |
| CN102903786A (en) | Novel ultra-shallow junction crystalline silicon solar cell | |
| CN204169327U (en) | Solar energy radio charging desk | |
| CN106876593B (en) | A kind of preparation method of the organic film with array structure | |
| CN203950794U (en) | Be applicable to the graphite boat silicon chip anchor point that flexible crystal silicon battery makes and the graphite boat sheet with this anchor point | |
| CN104269468A (en) | Method for manufacturing selective emitter solar cell | |
| CN204030684U (en) | Utilize solar power generation can accumulate and the sunglasses of charging | |
| CN204669303U (en) | Portable photovoltaic socket | |
| Wenham et al. | Simplified buried contact solar cell process | |
| CN201796924U (en) | Double-faced coated passivation battery | |
| Gao et al. | Inverted Pyramid Morphology Control by Acid Modification and Application for PERC Solar Cells |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130109 |