CN102867699A - Microswitch and manufacturing method thereof - Google Patents

Microswitch and manufacturing method thereof Download PDF

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CN102867699A
CN102867699A CN201110191193XA CN201110191193A CN102867699A CN 102867699 A CN102867699 A CN 102867699A CN 201110191193X A CN201110191193X A CN 201110191193XA CN 201110191193 A CN201110191193 A CN 201110191193A CN 102867699 A CN102867699 A CN 102867699A
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electrodes
driving
electrode
driving electrodes
switch
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CN102867699B (en
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杨凯
戴新国
郑昆德
蔡文凯
许志浩
王裕民
沈祥辉
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Foxconn Kunshan Computer Connector Co Ltd
Hon Hai Precision Industry Co Ltd
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Foxconn Kunshan Computer Connector Co Ltd
Hon Hai Precision Industry Co Ltd
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Abstract

The invention discloses a microswitch. The microswitch comprises two driving electrodes, two switch electrodes, a power supply and an insulated elastic support, wherein the power supply is electrically connected with the two switch electrodes, the elastic support consists of a substrate, an inclination part and a cantilever, the inclination part extends from the substrate in an inclined manner, and the cantilever extends from the inclination part and is parallel to the substrate, each driving electrode consists of an upper driving electrode and a lower driving electrode corresponding to the upper driving electrode, each switch electrode consists of an upper switch electrode and a lower switch electrode which correspond to each other, the upper switch electrodes and the upper driving electrodes are fixedly arranged on the cantilever, the lower switch electrodes and the lower driving electrodes are fixedly arranged on the substrate, and at least one of the two driving electrodes has magnetism. The microswitch is provided with the driving electrode with magnetism, so that the driving voltage for providing static power can be reduced.

Description

微开关及其制造方法Micro switch and method of manufacturing the same

【技术领域】【Technical field】

本发明涉及一种微开关,尤其涉及一种静电力与磁力共同驱动的微开关。 The invention relates to a micro switch, in particular to a micro switch driven jointly by electrostatic force and magnetic force.

【背景技术】【Background technique】

中国专利公开第1310854号公开了一种微开关,其包括一对驱动电极、一对开关电极及电性连接驱动电极的直流电源,直流电源提供的静电力控制驱动电极,以实现两开关的断开与闭合。但是,仅靠静电力作为驱动力,需要的驱动电压较大,而微开关所能承受的电流又较小,两者不易权衡。 Chinese Patent Publication No. 1310854 discloses a micro switch, which includes a pair of drive electrodes, a pair of switch electrodes, and a DC power supply electrically connected to the drive electrodes. The electrostatic force provided by the DC power supply controls the drive electrodes to realize the switching of the two switches. open and close. However, only relying on electrostatic force as the driving force requires a large driving voltage, while the current that the micro-switch can withstand is small, and it is not easy to balance the two.

所以,有必要设计一种微开关以克服前述之不足。 Therefore, it is necessary to design a micro switch to overcome the aforementioned deficiencies.

【发明内容】【Content of invention】

本发明所要解决的技术问题是提供一种微开关,其可以减小驱动电压。 The technical problem to be solved by the present invention is to provide a micro switch, which can reduce the driving voltage.

为解决上述技术问题,本发明提供的一种技术方法为:一种微开关,其包括两个驱动电极、两个开关电极、电性连接两开关电极的电源及绝缘的弹性支架,弹性支架包括基板、自基板倾斜延伸的倾斜部及自倾斜部延伸且平行于基板的悬臂,驱动电极包括上驱动电极及与之对应的下驱动电极,开关电极包括对应的上、下开关电极,上开关电极及上驱动电极固定于悬臂,下开关电极及下驱动电极则固定于基板,所述两驱动电极中至少一个具有磁性。 In order to solve the above-mentioned technical problem, a kind of technical method that the present invention provides is: a kind of micro switch, it comprises two drive electrodes, two switch electrodes, the power supply that electrically connects two switch electrodes and the elastic support of insulation, and elastic support comprises The substrate, the inclined portion extending obliquely from the substrate, and the cantilever extending from the inclined portion and parallel to the substrate, the driving electrodes include upper driving electrodes and corresponding lower driving electrodes, the switching electrodes include corresponding upper and lower switching electrodes, and the upper switching electrodes The upper driving electrode and the upper driving electrode are fixed on the cantilever, the lower switch electrode and the lower driving electrode are fixed on the substrate, and at least one of the two driving electrodes is magnetic.

另一种技术方案为:一种微开关的制造方法,其特征在于包括以下步骤:(1)将导磁金属粉末注入模具中;(2)控制导磁金属粉末沿模具排布;(3)采用射出成型,将热塑性塑料注入模具型腔;(4)脱模,形成弹性支架,导磁金属粉在弹性支架上表面形成薄层,即形成上述上、下驱动电极及上、下开关电极;(5)对上、下驱动电极及上、下开关电极进行电镀处理;(6)对上、下驱动电极进行磁化处理。 Another technical solution is: a method for manufacturing a micro switch, which is characterized by comprising the following steps: (1) injecting magnetically conductive metal powder into a mold; (2) controlling the arrangement of magnetically conductive metal powder along the mold; (3) Injection molding is used to inject thermoplastics into the mold cavity; (4) demoulding to form an elastic bracket, and the magnetically conductive metal powder forms a thin layer on the upper surface of the elastic bracket, that is, the above-mentioned upper and lower driving electrodes and upper and lower switching electrodes are formed; (5) Perform electroplating treatment on the upper and lower driving electrodes and upper and lower switching electrodes; (6) Perform magnetization treatment on the upper and lower driving electrodes.

与现有技术相比,本发明微开关有如下有益效果:微开关设有具有磁性的驱动电极,减少了提供静电力的驱动电压。 Compared with the prior art, the micro-switch of the present invention has the following beneficial effects: the micro-switch is provided with a magnetic driving electrode, which reduces the driving voltage for providing electrostatic force.

【附图说明】【Description of drawings】

图1是本发明微开关的立体图; Fig. 1 is the perspective view of microswitch of the present invention;

图2是图1的侧视图。 FIG. 2 is a side view of FIG. 1 .

【具体实施方式】【Detailed ways】

图1及图2为符合本发明的微开关100。 1 and 2 illustrate a microswitch 100 according to the present invention.

请参看图1,微开关100包括两个驱动电极10、两个开关电极20、电性连接两驱动电极的直流电源30及弹性支架40。 Referring to FIG. 1 , the microswitch 100 includes two driving electrodes 10 , two switching electrodes 20 , a DC power supply 30 electrically connected to the two driving electrodes, and an elastic support 40 .

请参看图1及图2,塑胶支架40由绝缘材料制成,采用射出成型,其包括基板41、自基板41倾斜延伸的倾斜部42及自倾斜部延伸且与基板平行的悬臂43,悬臂43具有自由末端431,且悬臂可在外力作用下向基板弹性移动。基板41呈平板状,悬臂则位于基板中间,且大致为基板的1/3宽度,倾斜部42自基板一端的中间延伸形成。 Please refer to Fig. 1 and Fig. 2, the plastic support 40 is made of insulating material, adopts injection molding, and it comprises base plate 41, the inclined part 42 that extends obliquely from base plate 41 and the cantilever 43 that extends from inclined part and is parallel to the base plate, cantilever 43 It has a free end 431, and the cantilever can elastically move toward the substrate under the action of external force. The base plate 41 is in the shape of a flat plate. The cantilever is located in the middle of the base plate and is approximately 1/3 of the width of the base plate. The inclined portion 42 extends from the middle of one end of the base plate.

开关电极20包括对应的上开关电极21及下开关电极22,驱动电极10包括对应的上驱动电极11及下驱动电极12。上开关电极21及上驱动电极11固定于悬臂43上侧,下开关电极22及下驱动电极12固定于基板41上侧。驱动电极10靠近倾斜部42,开关电极20则远离倾斜部42。特别地,上驱动电极11与上开关电极21同时成型而连为一体,且上开关电极21一端与悬臂的自由末端431平齐。下驱动电极11呈U字形,恰好包围倾斜部42的末端。 The switching electrodes 20 include corresponding upper switching electrodes 21 and lower switching electrodes 22 , and the driving electrodes 10 include corresponding upper driving electrodes 11 and lower driving electrodes 12 . The upper switching electrode 21 and the upper driving electrode 11 are fixed on the upper side of the cantilever 43 , and the lower switching electrode 22 and the lower driving electrode 12 are fixed on the upper side of the substrate 41 . The driving electrode 10 is close to the inclined portion 42 , and the switch electrode 20 is away from the inclined portion 42 . In particular, the upper driving electrode 11 and the upper switching electrode 21 are molded at the same time to be integrated, and one end of the upper switching electrode 21 is flush with the free end 431 of the cantilever. The lower driving electrode 11 is U-shaped and just surrounds the end of the inclined portion 42 .

上、下驱动电极11、12中至少一个经过磁化处理而具有磁性,在最佳实施例中,驱动电极10均是经过磁化处理。上开关电极21的末端位于下开关电极22的正上方,下开关电极两侧还设有一对接地电极23,接地电极23也固定于基板41的上侧。上、下驱动电极11、12分别连接直流电源30的两端。当接通直流电源时,上、下驱动电极11、12形成电容器,由于静电力的作用,两驱动电极具有相互吸引的趋势,加之上、下驱动电极之间相互吸引的磁力,导致悬臂43向下倾斜,最终使上开关电极21靠近下开关电极22,这样高频信号就可以从上开关电极21传输至下开关电极22;断开直流电源,静电力消失,由于弹性力大于磁力,悬臂43恢复原状,断开上、下开关电极。以上便实现了驱动电极控制开关的功能。在这里引入磁力,所需要用于闭合开关的静电力就变小了,亦即可减小用于驱动的直流电源的电压。这样也就避免了微开关负载电流、电压过大,出现击穿电极的现象。 At least one of the upper and lower driving electrodes 11, 12 is magnetically treated, and in a preferred embodiment, both driving electrodes 10 are magnetized. The end of the upper switch electrode 21 is located directly above the lower switch electrode 22 , and a pair of ground electrodes 23 are arranged on both sides of the lower switch electrode, and the ground electrodes 23 are also fixed on the upper side of the substrate 41 . The upper and lower driving electrodes 11 and 12 are respectively connected to two ends of the DC power supply 30 . When the DC power supply is turned on, the upper and lower driving electrodes 11, 12 form a capacitor. Due to the effect of electrostatic force, the two driving electrodes have a tendency to attract each other, and the magnetic force of mutual attraction between the upper and lower driving electrodes causes the cantilever 43 to Tilt down, and finally make the upper switch electrode 21 close to the lower switch electrode 22, so that the high-frequency signal can be transmitted from the upper switch electrode 21 to the lower switch electrode 22; disconnect the DC power supply, the electrostatic force disappears, because the elastic force is greater than the magnetic force, the cantilever 43 Return to the original state, disconnect the upper and lower switch electrodes. The above has realized the function of driving the electrode control switch. By introducing a magnetic force here, the electrostatic force required to close the switch becomes smaller, that is, the voltage of the DC power supply used for driving can be reduced. In this way, the phenomenon of breakdown of the electrodes due to excessive load current and voltage of the micro-switch is avoided.

开关电极20是由导磁金属材料制成的,一般为铁、钴、镍等金属。而驱动电极10具有磁性,其可以是导磁金属材料制成的,也可以是金属磁粉制成,若材料是金属磁粉制成,则省去了上述磁化的步骤。就工艺角度来说,各开关采用相同的材料(导磁金属材料),再对驱动电极进行磁化,制造过程会较为简单。 The switch electrodes 20 are made of magnetically permeable metal materials, generally iron, cobalt, nickel and other metals. The driving electrode 10 is magnetic, and it can be made of magnetically permeable metal material or metal magnetic powder. If the material is made of metal magnetic powder, the above step of magnetization is omitted. From the perspective of technology, each switch uses the same material (magnetic conductive metal material), and then magnetizes the driving electrodes, so the manufacturing process will be relatively simple.

下面介绍微开关100的制造方法,其主要包括以下几个步骤:(1)将导磁金属粉末注入模具中;(2)控制导磁金属粉末沿模具排布,磁铁吸附导磁金属粉末排布,以形成各开关电极,且驱动电极具有一定长度;(3)采用射出成型,将热塑性材料注入模具型腔;(4)脱模,形成弹性支架,导磁金属粉末在弹性支架上(即基板及悬臂上侧)形成薄层,形成上述上、下驱动电极及上、下开关电极;(5)对上、下驱动电极及上、下开关电极进行电镀处理;(6)对上、下驱动电极进行磁化处理。 The manufacturing method of the micro switch 100 is introduced below, which mainly includes the following steps: (1) injecting the magnetically conductive metal powder into the mold; (2) controlling the arrangement of the magnetically conductive metal powder along the mould, and the magnet absorbs the magnetically conductive metal powder to arrange , to form each switch electrode, and the driving electrode has a certain length; (3) Injection molding is used to inject thermoplastic material into the mold cavity; (4) Demolding to form an elastic bracket, and the magnetic conductive metal powder is on the elastic bracket (that is, the substrate and the upper side of the cantilever) to form a thin layer to form the upper and lower drive electrodes and the upper and lower switch electrodes; (5) electroplating the upper and lower drive electrodes and the upper and lower switch electrodes; (6) the upper and lower drive electrodes The electrodes are magnetized.

Claims (7)

1.一种微开关,其包括两个驱动电极、两个开关电极、电性连接两开关电极的电源及绝缘的弹性支架,弹性支架包括基板、自基板倾斜延伸的倾斜部及自倾斜部延伸且平行于基板的悬臂,驱动电极包括上驱动电极及与之对应的下驱动电极,开关电极包括对应的上、下开关电极,上开关电极及上驱动电极固定于悬臂,下开关电极及下驱动电极则固定于基板,其特征在于:所述两驱动电极中至少一个具有磁性。 1. A kind of micro switch, it comprises two drive electrodes, two switch electrodes, the power supply and the insulating elastic support that electrically connects two switch electrodes, elastic support comprises substrate, the inclined portion that extends obliquely from base plate and extends from inclined portion And parallel to the cantilever of the substrate, the driving electrodes include upper driving electrodes and corresponding lower driving electrodes, the switching electrodes include corresponding upper and lower switching electrodes, the upper switching electrodes and the upper driving electrodes are fixed on the cantilever, the lower switching electrodes and the lower driving electrodes The electrodes are fixed on the substrate, and it is characterized in that at least one of the two driving electrodes is magnetic. 2.如权利要求1所述的微开关,其特征在于:所述两驱动电极靠近倾斜部,两开关电极则远离倾斜部。 2. The micro switch according to claim 1, wherein the two driving electrodes are close to the inclined portion, and the two switching electrodes are away from the inclined portion. 3.如权利要求2所述的微开关,其特征在于:所述具有磁性的驱动电极是由金属磁粉制成。 3. The micro switch according to claim 2, wherein the magnetic driving electrodes are made of metal magnetic powder. 4.如权利要求2所述的微开关,其特征在于:所述具有磁性的驱动电极由导磁金属粉末制成,该驱动电极经磁化处理而具有磁性。 4. The micro switch according to claim 2, wherein the magnetic driving electrode is made of magnetically conductive metal powder, and the driving electrode is magnetized to be magnetic. 5.如权利要求3或4所述的微开关,其特征在于:所述弹性支架是采用射出成型。 5. The micro switch according to claim 3 or 4, characterized in that: said elastic bracket is formed by injection molding. 6.一种微开关的制造方法,其特征在于包括以下步骤: 6. A method for manufacturing a microswitch, characterized in that it may further comprise the steps: (1)将导磁金属粉末注入模具中; (1) Inject magnetically conductive metal powder into the mold; (2)控制导磁金属粉末沿模具排布; (2) Control the arrangement of magnetic metal powder along the mold; (3)采用射出成型,将热塑性塑料注入模具型腔; (3) Injection molding is used to inject thermoplastics into the mold cavity; (4)脱模,形成弹性支架,导磁金属粉在弹性支架上表面形成薄层,即形成上述上、下驱动电极及上、下开关电极; (4) Demoulding to form an elastic bracket, and the magnetically conductive metal powder forms a thin layer on the upper surface of the elastic bracket, that is, the above-mentioned upper and lower driving electrodes and upper and lower switching electrodes are formed; (5)对上、下驱动电极及上、下开关电极进行电镀处理; (5) Perform electroplating treatment on the upper and lower driving electrodes and the upper and lower switching electrodes; (6)对上、下驱动电极进行磁化处理。 (6) Magnetize the upper and lower drive electrodes. 7.如权利要求4所述的微开关的制造方法,其特征在于:所述导磁金属粉末是利用磁铁吸附来控制排布的。 7. The manufacturing method of the micro switch according to claim 4, characterized in that: the magnetically conductive metal powder is controlled and arranged by magnet adsorption.
CN201110191193.XA 2011-07-08 2011-07-08 Micro switch and manufacture method thereof Active CN102867699B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107749373A (en) * 2017-10-24 2018-03-02 上海交通大学 A kind of big controlled stroke micro actuator
CN116364483A (en) * 2023-06-02 2023-06-30 中国工程物理研究院电子工程研究所 High-impact quartz micro-switch

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US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
CN1118510A (en) * 1994-06-17 1996-03-13 阿苏拉布股份有限公司 Magnetic microcontactor and manufacturing method thereof
EP0861640A2 (en) * 1997-02-28 1998-09-02 Microtronic A/S A microelectric position sensor
CN1310854A (en) * 1997-08-22 2001-08-29 泰科电子后勤有限公司 Micromechanical electrostatic relay and method for the production thereof

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Publication number Priority date Publication date Assignee Title
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
CN1118510A (en) * 1994-06-17 1996-03-13 阿苏拉布股份有限公司 Magnetic microcontactor and manufacturing method thereof
EP0861640A2 (en) * 1997-02-28 1998-09-02 Microtronic A/S A microelectric position sensor
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107749373A (en) * 2017-10-24 2018-03-02 上海交通大学 A kind of big controlled stroke micro actuator
CN107749373B (en) * 2017-10-24 2019-06-14 上海交通大学 A large controllable stroke micro-actuator
CN116364483A (en) * 2023-06-02 2023-06-30 中国工程物理研究院电子工程研究所 High-impact quartz micro-switch
CN116364483B (en) * 2023-06-02 2023-08-01 中国工程物理研究院电子工程研究所 High-impact quartz micro-switch

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