CN102866128A - High-sensitivity unmarked coupling optical microfluidic ring laser sensor - Google Patents
High-sensitivity unmarked coupling optical microfluidic ring laser sensor Download PDFInfo
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- CN102866128A CN102866128A CN2012103690419A CN201210369041A CN102866128A CN 102866128 A CN102866128 A CN 102866128A CN 2012103690419 A CN2012103690419 A CN 2012103690419A CN 201210369041 A CN201210369041 A CN 201210369041A CN 102866128 A CN102866128 A CN 102866128A
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Abstract
The invention belongs to the technical field of optical sensing and particularly relates to a high-sensitivity unmarked coupling optical microfluidic ring laser sensor. The laser sensor consists of a cylindrical ring laser and a thin-walled optical microfluidic quartz tube ring resonator by means of parallel and tight coupling, and vernier effect of a coupling whispering gallery mode micro-cavity structure is used for breaking through single-cavity theoretical detection limit, so that ultrahigh sensitivity is achieved. The high-sensitivity unmarked coupling optical microfluidic ring laser sensor is high in sensitivity and suitable for detection of water-phase samples and micro samples and has the advantages of simple preparation process, low cost and the like.
Description
Technical field
The invention belongs to the optical sensing technical field, be specifically related to a kind of unmarked coupling light miniflow ring laser sensor.
Background technology
In the past few years, the miniflow index sensor receives increasing concern, and it is having important application aspect bio-sensing, chemical analysis, environmental monitoring and the medical development.In the framework of numerous miniflows, annular miniflow resonator cavity is regarded as the most promising index sensor because it has higher sensitivity.Annular miniflow resonator sensor is combined Whispering-gallery-mode with a microfluidic channel, thereby has simplified sensing system, has improved sensing capabilities.Fluid sample and resonance mode evanescent field interaction will cause the resonant wavelength drift.But there is theoretical limit in the sensitivity of miniflow loop sensor, normally limited hundreds of nanometer/refractive index unit (nm/RIU).In order to break the sensitivity limit of theoretic miniflow ring laser sensor, people have introduced active Echo Wall sensing scheme, and zlasing mode is jumped or the spectral modulation envelope of the annular resonance cavity system of monitoring coupling carries out sensing by measuring.Can improve the Whispering-gallery-mode sensor performance with the method, break through refractive index and survey theoretical limit.We have proposed to use kapillary to form the concept of liquid core passage on the basis of coupling miniflow ring laser among the present invention, have realized the water detection, and sensitivity can reach 2510nm/RIU,, enlargement factor has 355.This sensor is comprised of a ring-like laser cavity and a thin-walled quartz capillary, and this configuration is highly suitable for carrying out the biological and chemical analysis in aqueous solution.This technology provides a platform alternative, low-cost and that easily produce for high sensitivity refractive index sensing system.
Summary of the invention
The object of the present invention is to provide a kind of highly sensitively, detection limit is low, measures fast lower-cost coupling miniflow ring laser sensor.
The present invention is on the basis of coupling miniflow ring laser, proposed to use kapillary to form the concept of liquid core passage, utilize the coupler structure to break through the theoretical detection limit in single chamber, and utilize thin-walled capillary liquid core passage successfully to realize the detection of aqueous sample, has high sensitivity, low detection limit, the advantages such as Quick Measurement and low cost.
The coupling miniflow ring laser sensor that the present invention proposes, connected successively by following part and to constitute: a cylinder ring laser cylinder 1, a thin-walled kapillary 2, shown in Fig. 1 (a), be fixed on the substrate after the two close-coupled, and connecting respectively the kapillary two ends with catheter, fluid sample 3 is transported in the kapillary by flexible pipe.The present invention require cylindrical annular laser instrument 1 optical mode will with thin-walled kapillary 2 in resonant optical mode be complementary, to the material of cylindrical annular laser instrument and pump mode without specific (special) requirements, can be solid state laser (as the pmma material of mixing dyestuff consists of) or liquid laser (consisting of as passing into dye solution in the thin-walled kapillary), pump mode can be electric pump or optical pumping; To thin-walled kapillary 2, require laser spectrum can realize therein resonance, so its material to be transparent in the laser spectrum scope, commonly used such as quartz capillary; Be to realize the distribution of mould field in the liquid core of kapillary interior resonance, require capillary wall thickness to be controlled between 500 nanometers to 5 micron; In order to control whole device size and the requirement of satisfying spectrometer resolution, require cylinder ring laser and thin-walled quartz ampoule diameter between 10 microns to 500 microns.
The principle of the invention is as follows: single microfluidic sensor principle of work is fluid sample and resonance mode evanescent field interaction, will cause the resonant wavelength drift, and coupling Whispering-gallery-mode microcavity spectrum can be modulated, and its modulation is that cursor effect causes.When two slightly different Whispering-gallery-mode annulus of size intercoupled, the resonance spectrum significant change that is caused by interference formed modulation envelope.When only having a refractive index to change response in two resonator cavitys, the amount of movement of modulation envelope displacement just equals the resonant wavelength amount of movement and takes advantage of an amplification factor M.The M factor represents with FSR/ FSR, and FSR and FSR are respectively the Free Spectral Ranges of two rings and theirs is poor.As seen FSR is less, and then the M factor is larger.Therefore, can improve the Whispering-gallery-mode sensor performance with the method, break through refractive index and survey theoretical limit.We have proposed to use kapillary to form the concept of liquid core passage on the basis of coupling miniflow ring laser among the present invention, because the thin-walled kapillary can be realized the distribution of resonant mode field in the liquid core, thereby has realized the water detection, sensitivity can reach 2510nm/RIU,, amplification factor M reaches 355.
Description of drawings
Fig. 1 (a) coupling miniflow laser sensor schematic cross-section, (b) coupling miniflow laser sensor structure vertical view.
Fig. 2 (a) experiment (b) is integrated in 1.5cm with coupling miniflow laser sensor structural representation
1.0cm the coupling miniflow laser sensor pictorial diagram on the silicon chip: upper illustration is that wall thickness is the quartz ampoule sectional view of 1 μ m, and lower illustration is the sensitive zones of coupling miniflow laser sensor.
Modulation envelope was along with refractive index increases and blue shift (d when the glucose solution of Fig. 3 (a) variable concentrations passed through coupling miniflow laser sensor
1～0.9 μ m), direction of arrow indication envelope moving direction.(b) modulated spectrum envelope enlarged drawing, red curve are the Lorentz fit envelope of spectrum.(c) the envelope center concerns with variations in refractive index, and it is 2510 nm/RIU that linear fit obtains sensitivity.
The fluctuation in time of Fig. 4 different refractivity lower envelope center.
Fig. 5 (a) is along with hydrofluorite corrosion capillary tube inner wall, and mind-set short wavelength direction moves in the spectral envelope.(b) relation of the thickness that reduces of linear fit envelope centre wavelength and capillary tube inner wall obtains sensitivity 0.15nm/nm.
Number in the figure: 1 is active ring-like laser instrument, and 2 is the thin-walled quartz ampoule, and 3 is sample solution, D
1Be active ring laser external diameter, d
1Be active ring laser active layer thickness, D
2Be miniflow quartz ampoule external diameter, d
2Be wall thickness of quartz tube.
Embodiment
Further describe the present invention below by instantiation:
Embodiment: utilize different glucose solution to carry out body refractive index sensitivity measure and carry out the detection of mass surface density with the method for utilizing the hydrofluorite corrosion.
1. sample making and setting parameter: at first, draw the organic-inorganic hybrid glass material membrane (refractive index n=1.52) of one deck doping rhodamine B dyestuff at commercial glass optical fiber (diameter is in 125 μ m), under 140 ° of C, carry out thermal treatment in 3 hours film is solidified.Prepare so active layer thickness (d
1~ 1 μ m) the ring-like laser instrument of cylinder.Second step, the ring-like laser instrument parallel stacks of cylinder is placed on a quartz capillary (Polymicro science and technology limited Company) (external diameter 126 μ m, internal diameter 75 μ m, n=1.45), kapillary links to each other with teflon pipe, transports fluid sample by the pipeline that connects.Placing them at last on silicon plate or the glass substrate two ends fixes.The hydrofluorite of variable concentrations is expelled in the kapillary syringe pump speed 10 μ L/min.Hydrofluorite corrosion capillary wall makes it to reduce to several microns, erodes to 1 μ m in our experiment.The sample pictorial diagram as shown in Figure 2.
2. body refractive index detection performance test: the coupling miniflow laser sensor mode-locked laser pumping (pulse width 30Ps, repetition frequency 10Hz) of 532nm.Difference by the control pump spot position that varies in size produces desirable Echo Wall radial mode and be used for to be coupled in the ring-like laser instrument of cylinder.Outgoing spectrum multimode fiber-optic bundle is used for collecting and being transferred to spectrometer.Be the body refractive index sensitivity of measuring coupling miniflow laser sensor, the glucose solution of variable concentrations is with the 2 μ L/min kapillary of flowing through.Refractive index changes 0.00075RIU at every turn.Fig. 3 (a) has shown d
1The modulated laser spectrum of the coupling miniflow laser sensor of ~ 1 μ m is with the variation of refractive index, and we use Lorentz shape match spectrum envelope among Fig. 3 (b), and find its peak center wavelength value.Among Fig. 3 (c), centre wavelength is derived sensitivity 2510nm/RIU by linear fit.This result is in close proximity to the calculated value 2485nm/RIU of the ring-like lasing mode of 3 rank cylinders and quartz ampoule miniflow chamber, 1 rank Mode Coupling gained, enlargement factor M=355.In the experiment, even we notice that spectrum envelope moves obviously, the displacement of single mode of resonance is within spectral resolution (being 0.02nm) all, can determine like this enlargement factor very large (M〉200).
3. detection limit characterizes: as shown in Figure 3, for certain refractive index, the centre wavelength of envelope can be floated in time among a small circle, and this is to be caused by the unstable of pump power, and the stability of pump power is about 4%.Fig. 4 has described the repeatability that same sample is measured, and the standard deviation δ that obtains floating is 0.04nm.The equivalent noise detection limit is 1.6 * 10
-5Improving pump power stability is expected to realize less than 10
-7The detection limit of RIU.
4. surface quality detection performance test: use D in the sample preparation
2The quartz ampoule of=142 μ m consists of the coupler structure, 1% hydrofluoric acid aqueous solution passes through quartz ampoule with the flow velocity of 10 μ L/min, it is 1.4 μ m/hour that corresponding quartz ampoule inner wall thickness reduces speed, Fig. 5 (a) shows, along with the carrying out of corrosion, the modulation envelope center thinks that gradually short wavelength's direction moves, and Fig. 5 (b) is envelope center and wall thickness decrease linear fit, obtaining sensitivity is 0.15 nm/nm, and corresponding surface quality detection limit is 0.59 ng/mm
2, this moment, amplification factor M only was 22, by regulating D
1, D
2Realize that larger M can further reduce detection limit.
Claims (5)
1. the unmarked coupling light miniflow of high sensitivity ring laser sensor, it is characterized in that being connected successively by following part and consist of: a cylinder ring laser, a thin-walled kapillary, the parallel close-coupled of ring resonator, and connect respectively the quartz ampoule two ends with catheter.
2. unmarked coupling light miniflow ring laser sensor according to claim 1, it is characterized in that cylindrical annular laser instrument is by electric pump or optical pumping realization, its material is to mix the compound glass material of dyestuff, perhaps consists of by passing into the liquid core laser instrument that dye solution forms in the thin-walled quartz ampoule.
3. unmarked coupling light miniflow ring laser sensor according to claim 1 is characterized in that the thin-walled kapillary uses the capillary quartz ampoule, perhaps uses any ring-like kapillary that transparent material is made in the laser spectrum scope.
4. unmarked coupling light miniflow ring laser sensor according to claim 1 is characterized in that cylinder ring laser and thin-walled capillary diameter are between 10 microns to 500 microns.
5. unmarked coupling light miniflow ring laser sensor according to claim 3 is characterized in that thin-walled wall thickness of quartz tube scope is between 500 nanometers to 5 micron.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109186641A (en) * | 2018-08-01 | 2019-01-11 | 中国电子科技集团公司第十研究所 | A kind of method and fibre optical sensor manufacturing fibre optical sensor |
| CN113109296A (en) * | 2021-05-10 | 2021-07-13 | 南开大学 | Multi-channel microfluidic sensor based on multi-cavity coupling vernier effect |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109186641A (en) * | 2018-08-01 | 2019-01-11 | 中国电子科技集团公司第十研究所 | A kind of method and fibre optical sensor manufacturing fibre optical sensor |
| CN109186641B (en) * | 2018-08-01 | 2022-03-11 | 中国电子科技集团公司第十一研究所 | Method for manufacturing optical fiber sensor and optical fiber sensor |
| CN113109296A (en) * | 2021-05-10 | 2021-07-13 | 南开大学 | Multi-channel microfluidic sensor based on multi-cavity coupling vernier effect |
| CN113109296B (en) * | 2021-05-10 | 2022-10-28 | 南开大学 | Multi-channel microfluidic sensor based on multi-cavity coupling vernier effect |
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Application publication date: 20130109 |