CN102840425B - Supporting leg device - Google Patents
Supporting leg device Download PDFInfo
- Publication number
- CN102840425B CN102840425B CN201210277887.XA CN201210277887A CN102840425B CN 102840425 B CN102840425 B CN 102840425B CN 201210277887 A CN201210277887 A CN 201210277887A CN 102840425 B CN102840425 B CN 102840425B
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- Prior art keywords
- feet
- nut
- support ring
- slide slot
- support
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The invention discloses a supporting leg device, which comprises a supporting leg body, a supporting leg nut and a supporting ring, wherein the supporting leg body is located on the upper surface of the supporting ring, the supporting leg nut penetrates through the lower surface of the supporting ring and is fastened with the supporting leg body through a fastener, and the supporting ring is clamped by the supporting leg body and the supporting leg nut. The supporting leg body, provided by the invention, has the advantages of simple structure, easy implementation and incapability of being limited by a device structure, the device space is saved, the position is adjusted along the ring according to requirements, and the vice of single installation manner of the supporting leg in the prior art is overcome.
Description
Technical field
The present invention relates to semiconductor wafer technology field, particularly a kind of support feet, relates in particular to a kind of support feet for semiconductor wafer technical process.
Background technology
The feet of prior art is all semi open model, can only regulate the longitudinal separation of feet to the center of circle, and this feet only need be opened accordingly and can realize heart groove on annulus, but has in actual applications certain limitation.Such as, at semicon industry, according to the structure of equipment itself, the activity space of manipulator is subject to certain restrictions, may be because the installation site of feet is improper while getting sheet, and cause manipulator to occur the situation of colliding.In this case, do not changing feet size, if expand manipulator enter hand scope, thereby can avoid above-mentioned situation to occur, also can save the space of equipment itself simultaneously.Fig. 1 is that prior art is removed the structure chart after one of them feet body, as shown in Figure 1, the feet body 1 of prior art can only by heart groove 3 is regulated feet body 1 to distance of center circle from, can not make it to make feet body 1 along support ring 2 adjusting positions according to the structural requirement of equipment itself, regulate like this form single.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention is, for the deficiencies in the prior art, provide a kind of structure simple, easily realize, can not limited by device structure, save the device space, can be as required along the open support feet of annulus adjusting position.
(2) technical scheme
A kind of support feet, comprise: feet body, feet nut and support ring, described feet body is positioned at support ring upper surface, described feet nut is fastening by securing member through support ring lower surface and described feet body, and described feet body and feet nut clamp described support ring.
Better, described feet body comprises: the described feet body of adjusting of offering at described feet body upper surface is to the microscler circular hole of the distance in the described support ring center of circle, the slide slot that feet body is slided of offering at described feet body lower surface, described slide slot is communicated with described microscler circular hole; Described feet body also comprises the diagonal face of supporting wafers and prevents the slotted eye of manipulator collision.
Better, feet nut comprises: the screwed hole of the fastening described feet body of offering at described feet nut upper surface, feet nut described in described screwed hole up/down perforation, described feet nut also comprises: the projecting block and the baffle plate that slide piece, fixing described support ring that snap in described slide slot, width between described width and the slide slot inwall that slides piece is identical, and the upper surface of described baffle plate and the lower surface of described support ring fit tightly.
Better, described support ring comprises: two donuts that cover connects.
Better, described feet nut projecting block is provided with two arc surfaces, and the inner headed faces between the donut that described two arc surfaces and described two covers connect contact, and distance between the width of described projecting block and described two donuts equates.
Better, the upper surface that slides piece and the slide slot that described in, snap in slide slot leave gap.
Better, described feet body and feet nut are at least 3.
Better, described securing member is bolt.
(3) beneficial effect
Support feet of the present invention realization simple in structure, easy, can not limited by device structure, save the device space, can be as required along annulus adjusting position, to overcome the defect of feet unicity mounting means in prior art.
Brief description of the drawings
Fig. 1 is that prior art is removed the structure chart after one of them feet body;
Fig. 2 is the profile of support feet of the present invention;
Fig. 3 is the structural representation of feet body of the present invention;
Fig. 4 is the structural representation of feet nut of the present invention;
Fig. 5 is the structural representation of support ring of the present invention;
Fig. 6 is that support feet of the present invention uses schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for illustrating the present invention, but are not used for limiting the scope of the invention.
As shown in Figure 2, the invention provides a kind of support feet, comprise: feet body 100, feet nut 200 and support ring 300, described feet body 100 is positioned at support ring 300 upper surfaces, described feet nut 200 is fastening by securing member 400 through support ring 300 lower surfaces and described feet body 100, and described feet body 100 and feet nut 200 clamp described support ring 300.Described securing member 400 is bolt.
As shown in Figure 3, described feet body 100 comprises: the described feet body 100 of adjusting of offering at described feet body 100 upper surfaces is to the microscler circular hole 101 of the distance in described support ring 300 centers of circle, the slide slot 102 that feet body 100 is slided of offering at described feet body 100 lower surfaces, described slide slot 102 is communicated with described microscler circular hole 101; Described feet body 100 also comprises the diagonal face 103 of supporting wafers 4 and prevents the slotted eye 104 of manipulator collision.
As shown in Figure 4, feet nut 200 comprises: the screwed hole 203 of the fastening described feet body 100 of offering at described feet nut 200 upper surfaces, feet nut 200 described in described screwed hole 203 up/down perforations, described feet nut 200 also comprises: snap in the projecting block 201 and the baffle plate 204 that slide piece 202, fixing described support ring 300 of described slide slot 102, described in to slide width between width and slide slot 102 inwalls of piece 202 identical.The lower surface of the upper surface of described baffle plate 204 and described support ring 300 fits tightly.
As shown in Figure 5, described support ring 300 comprises: two donuts that cover connects.Described feet nut projecting block 201 is provided with two arc surfaces, and the inner headed faces between the donut that described two arc surfaces and described two covers connect contact, and distance between the width of described projecting block 201 and described two donuts equates.Described feet body 100 diagonal Mian103 centers are relative with described support ring 300 centers of circle.The described upper surface that slides piece 202 and the slide slot 102 that snaps in slide slot 102 leaves gap.Described feet body 100 and feet nut 200 are at least 3.
As shown in Figure 6, operation principle is: in feet installation process, described feet body 100 is placed on support ring 300 upper surfaces, feet nut 200 passes from the lower surface of support ring 300, baffle plate 204 on feet nut 200 is fitted tightly with the lower surface of support ring 300, now sliding in the slide slot 102 that piece 202 fallen into feet body 100 on feet nut 200, and the projecting block 201 on feet nut 200 has snapped between two connecting rings of support ring 300, movable support pin nut 200 is to installation site, adjust feet body 100 to distance of center circle from, securing member 400 is through feet body 100 and feet nut 200 fixing, because sliding between piece 202 upper surfaces on slide slot 102 bottom surfaces on feet body 100 and feet nut 200 left certain gap, so can make feet body 100, feet nut 200 and support ring 300 are connected firmly.If very close to each other, the bottom surface of feet body 100 slide slots 102 can contact with the upper surface of feet nut 200, and now the baffle plate 204 of feet nut 200 can not be close to support ring 300, and therefore securing member 400 loses fixing meaning.
Support feet of the present invention, the single installation site that can effectively solve feet on the one hand, make it change installation site along annulus as required, thereby be not subject to the restriction of this body structure of equipment, on the other hand, because manipulator enters hand between two supporting bodies 100, the present invention has changed feet body 100 installation sites, leave the maximum hand space of entering to manipulator, under the size of identical feet body 100, can reduce the size of equipment.
Above execution mode is only for illustrating the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (5)
1. a support feet, it is characterized in that, comprise: feet body, feet nut and support ring, described feet body is positioned at support ring upper surface, described feet nut is fastening by securing member through support ring lower surface and described feet body, and described feet body and feet nut clamp described support ring;
Wherein, described feet body comprises: the described feet body of adjusting of offering at described feet body upper surface is to the microscler circular hole of the distance in the described support ring center of circle, the slide slot that feet body is slided of offering at described feet body lower surface, described slide slot is communicated with described microscler circular hole; Described feet body also comprises the diagonal face of supporting wafers and prevents the slotted eye of manipulator collision;
Wherein, feet nut comprises: the screwed hole of the fastening described feet body of offering at described feet nut upper surface, feet nut described in described screwed hole up/down perforation, described feet nut also comprises: the projecting block and the baffle plate that slide piece, fixing described support ring that snap in described slide slot, width between described width and the slide slot inwall that slides piece is identical, and the upper surface of described baffle plate and the lower surface of described support ring fit tightly;
Wherein, the upper surface that slides piece and the slide slot that described in, snap in slide slot leave gap.
2. support feet as claimed in claim 1, is characterized in that, described support ring comprises: two donuts that cover connects.
3. support feet as claimed in claim 2, it is characterized in that, described feet nut projecting block is provided with two arc surfaces, inner headed faces between the donut that described two arc surfaces and described two covers connect contact, and distance between the width of described projecting block and described two donuts equates.
4. support feet as claimed in claim 1, is characterized in that, described feet body and feet nut are at least 3.
5. support feet as claimed in claim 1, is characterized in that, described securing member is bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210277887.XA CN102840425B (en) | 2012-08-06 | 2012-08-06 | Supporting leg device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210277887.XA CN102840425B (en) | 2012-08-06 | 2012-08-06 | Supporting leg device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102840425A CN102840425A (en) | 2012-12-26 |
| CN102840425B true CN102840425B (en) | 2014-06-25 |
Family
ID=47368045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210277887.XA Active CN102840425B (en) | 2012-08-06 | 2012-08-06 | Supporting leg device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102840425B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103811399B (en) * | 2014-03-04 | 2016-04-06 | 北京七星华创电子股份有限公司 | A kind of bracing or strutting arrangement of semiconductor crystal wafer |
| CN103943546B (en) * | 2014-04-28 | 2018-08-28 | 北京七星华创电子股份有限公司 | A kind of silicon chip support device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0750254A (en) * | 1993-08-06 | 1995-02-21 | Hitachi Cable Ltd | Manufacturing method and device of semiconductor epitaxial wafer |
| JP2004128271A (en) * | 2002-10-03 | 2004-04-22 | Toyo Tanso Kk | Susceptor |
| TWI381480B (en) * | 2008-03-20 | 2013-01-01 | Mjc Probe Inc | Wafer anchoring device and method of the same |
| CN102005403A (en) * | 2009-08-28 | 2011-04-06 | 中芯国际集成电路制造(上海)有限公司 | Wafer bearing device |
| CN202189772U (en) * | 2011-07-27 | 2012-04-11 | 宸轩科技有限公司 | Wafer fixing device |
| CN202791172U (en) * | 2012-08-06 | 2013-03-13 | 北京七星华创电子股份有限公司 | Supporting leg device |
-
2012
- 2012-08-06 CN CN201210277887.XA patent/CN102840425B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN102840425A (en) | 2012-12-26 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING GUIYUAN KEDIAN MICROELECTRONICS TECHNOLOGY Free format text: FORMER OWNER: QIXINGHUACHUANG ELECTRONIC CO., LTD., BEIJING Effective date: 20150120 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150120 Address after: 100015, No. 1 Jiuxianqiao East Road, Beijing, Chaoyang District (M2 electronic equipment factory) Patentee after: Beijing Si Yuan Electrical electronic technology limited liability company Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: Qixinghuachuang Electronic Co., Ltd., Beijing |