CN102839345B - Preparation method for PbZr0.52Ti0.48O3 intelligent coating and PbZr0.52Ti0.48O3 intelligent coating - Google Patents
Preparation method for PbZr0.52Ti0.48O3 intelligent coating and PbZr0.52Ti0.48O3 intelligent coating Download PDFInfo
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- CN102839345B CN102839345B CN201210364873.1A CN201210364873A CN102839345B CN 102839345 B CN102839345 B CN 102839345B CN 201210364873 A CN201210364873 A CN 201210364873A CN 102839345 B CN102839345 B CN 102839345B
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Abstract
The embodiment of the invention discloses a preparation method of a PbZr0.52Ti0.48O3 intelligent coating. The preparation method comprises the following steps: forming an insulating layer on the surface of a substrate; forming a PbZr0.52Ti0.48O3 sensing layer on the surface of the insulating layer; carrying out polarization treatment on the PbZr0.52Ti0.48O3 sensing layer, so as to lead the PbZr0.52Ti0.48O3 sensing layer has piezoelectric effect. The acquired PbZr0.52Ti0.48O3 sensing layer has the function of a piezoelectric sensor, and is capable of monitoring and feeding back the abrasion status of the substrate surface in real time, so that the sensor needs not to be adhered, thereby the problem that the degree of adhesion between the sensor and the substrate is poor is avoided; and moreover, the insulating layer is provided between the PbZr0.52Ti0.48O3 sensing layer and the substrate, and a piezoelectric signal generated by the PbZr0.52Ti0.48O3 sensing layer to the substrate surface abrasion is very weak, thus the the piezoelectric signal generated by the PbZr0.52Ti0.48O3 sensing layer can be prevented from entering the substrate by insulating layer, thereby the piezoelectric signal loss by the substrate is avoided, the acquiring capability for the piezoelectric signal is enhanced, and the sensitivity for real-time monitoring and feeding back the abrasion status of the substrate surface is improved.
Description
Technical field
The present invention relates to technical field of surface coating, more particularly, relate to a kind of PbZr
0.52ti
0.48o
3the preparation method of smart coat and PbZr
0.52ti
0.48o
3smart coat.
Background technology
Existing piece surface is under arms time, if its dynamic damage cannot perception, cannot control the state of wear of piece surface.
The test of current piece surface fatigue wear is the basis for estimation as assessment piece surface state of wear mainly with the variation of the factors such as vibrations, frictional coefficient, temperature.When the actual value of selected factor of judgment has exceeded default threshold value, illustrate that piece surface lost efficacy, then inefficacy part is carried out to fracture analysis, by experience or classical theory, oppositely infer failure mechanism.But this failure behaviour and mechanism research take " judging " afterwards as master, can not judge the borderline failure state of piece surface, therefore cannot set up capable of dynamic, monitor and control the control mechanism that piece surface lost efficacy.
Because smart sensor can be monitored the state of wear of piece surface in real time, therefore, intelligent sensing unit be set on piece surface just become people's first-selection.
Current conventional a kind of intelligent sensing unit is piezoelectric transducer, and described piezoelectric transducer is to utilize the piezoelectric effect of piezoelectric to prepare.At piezoelectric transducer, be applied in the process of mechanical means, piezoelectric transducer need to be being pasted on equipment (or part).
But, due to complex structure or the work under bad environment of some mechanical means, make the conjugation of described piezoelectric transducer and equipment room poor, caused the accuracy of detection of piezoelectric transducer poor, the problem even coming off.
Summary of the invention
In view of this, the invention provides a kind of PbZr
0.52ti
0.48o
3the preparation method of smart coat and PbZr
0.52ti
0.48o
3smart coat, this PbZr
0.52ti
0.48o
3the preparation method of smart coat can greatly improve the bonding strength between sensor and equipment base, and then avoids the accuracy of detection of piezoelectric transducer poor, the problem even coming off.。
For achieving the above object, the invention provides following technical scheme:
A kind of PbZr
0.52ti
0.48o
3the preparation method of smart coat, comprising:
On a substrate surface, form insulation layer;
On described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer;
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer has piezoelectric effect.
Preferably, describedly on a substrate surface, form insulation layer, comprising:
By Supersonic Plasma Spraying technique, on described substrate surface, form insulation layer.
Preferably, the making material of described insulation layer is aluminum oxide.
Preferably, describedly on described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer, comprising:
By Supersonic Plasma Spraying technique, on described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer.
Preferably, described method also comprises:
At described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface.
Preferably, at described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface, comprising:
By Supersonic Plasma Spraying technique at described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface.
Preferably, described method also comprises:
At described PbZr
0.52ti
0.48o
3on the surface of sensing layer upper surface, form the first electrode, at described PbZr
0.52ti
0.48o
3the edge of sensing layer lower surface forms the second electrode, and described the first electrode and the second electrode form described PbZr
0.52ti
0.48o
3the electric current leadout electrode of smart coat;
Dry.
Preferably, form insulation layer on a substrate surface before, also comprise:
Described substrate surface is carried out to pre-treatment, obtain coarse substrate surface.
A kind of PbZr
0.52ti
0.48o
3smart coat, comprising:
Substrate, the substrate that described substrate is arbitrary shape;
Insulation layer, described insulation layer covers on described substrate surface;
PbZr
0.52ti
0.48o
3sensing layer, described PbZr
0.52ti
0.48o
3sensing layer covers on described surface of insulating layer.
Preferably, described PbZr
0.52ti
0.48o
3smart coat also comprises:
Wearing layer, described wearing layer covers described PbZr
0.52ti
0.48o
3on sensing layer surface.
Preferably, described PbZr
0.52ti
0.48o
3smart coat also comprises:
The first electrode, described the first electrode is arranged on described PbZr
0.52ti
0.48o
3on the surface of sensing layer upper surface;
The second electrode, described the second electrode is at described PbZr
0.52ti
0.48o
3the edge of sensing layer lower surface.
A kind of PbZr providing due to the application
0.52ti
0.48o
3the preparation method of smart coat, is included on a substrate surface and forms insulation layer, on described surface of insulating layer, forms PbZr
0.52ti
0.48o
3sensing layer, to described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer has piezoelectric effect.The PbZr obtaining
0.52ti
0.48o
3smart coat has the function of piezoelectric transducer, can the state of wear of substrate surface be monitored in real time, be fed back, and therefore without pasting sensor, avoids the poor problem of degree of adhesion between sensor and substrate again.And, described PbZr
0.52ti
0.48o
3between sensing layer and substrate, be provided with insulation layer, and PbZr
0.52ti
0.48o
3the sensing layer piezoelectric signal that wearing and tearing produce to substrate surface is very faint, and described insulation layer can stop PbZr
0.52ti
0.48o
3the piezoelectric signal that sensing layer produces enters substrate, avoids the loss of substrate to piezoelectric signal, strengthens the capacity gauge to piezoelectric signal, improves the sensitivity that the state of wear of substrate surface is monitored in real time, fed back.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
A kind of PbZr that Fig. 1 provides for the embodiment of the present invention
0.52ti
0.48o
3smart coat preparation method's schematic flow sheet;
The another kind of PbZr that Fig. 2 provides for the embodiment of the present invention
0.52ti
0.48o
3smart coat preparation method's schematic flow sheet;
Another PbZr that Fig. 3 provides for the embodiment of the present invention
0.52ti
0.48o
3smart coat preparation method's schematic flow sheet;
Another PbZr that Fig. 4 provides for the embodiment of the present invention
0.52ti
0.48o
3smart coat preparation method's schematic flow sheet;
Another PbZr that Fig. 5 provides for the embodiment of the present invention
0.52ti
0.48o
3smart coat preparation method's schematic flow sheet;
Another PbZr that Fig. 6 provides for the embodiment of the present invention
0.52ti
0.48o
3smart coat preparation method's schematic flow sheet;
Another PbZr that Fig. 7 provides for the embodiment of the present invention
0.52ti
0.48o
3smart coat preparation method's schematic flow sheet;
A kind of PbZr that Fig. 8 embodiment of the present invention provides
0.52ti
0.48o
3the schematic diagram of smart coat;
The another kind of PbZr that Fig. 9 embodiment of the present invention provides
0.52ti
0.48o
3the schematic diagram of smart coat.
Embodiment
For above-mentioned purpose of the present invention, feature and advantage can be become apparent more, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
A lot of details have been set forth in the following description so that fully understand the present invention, but the present invention can also adopt other to be different from alternate manner described here and implement, those skilled in the art can do similar popularization without prejudice to intension of the present invention in the situation that, and therefore the present invention is not subject to the restriction of following public specific embodiment.
The embodiment of the invention discloses a kind of PbZr
0.52ti
0.48o
3the preparation method of smart coat, as shown in Figure 1, comprising:
On a substrate surface, form insulation layer.
Described substrate is metal base, be preferably 45# steel, be that described substrate can be the moving parts of steam turbines, compressor, pump, also can be the parts such as gear, axle, wrist pin (part need through high frequency or flame surface quenching), and can be foundry goods; Or described substrate is copper substrate or aluminium substrate, to adapt to the parts of other applications.
On described surface of insulating layer, form PbZr
0.2ti
0.8o
3sensing layer.
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer has piezoelectric effect, described PbZr
0.52ti
0.48o
3sensing layer can be to substrate surface and PbZr
0.52ti
0.48o
3the damage of sensing layer self produces electrical signal.
A kind of PbZr providing due to the application
0.52ti
0.48o
3the preparation method of smart coat, is included on a substrate surface and forms insulation layer, on described surface of insulating layer, forms PbZr
0.52ti
0.48o
3sensing layer, to described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer has piezoelectric effect.The PbZr obtaining
0.52ti
0.48o
3smart coat has the function of piezoelectric transducer, can the state of wear of substrate surface be monitored in real time, be fed back, and therefore without pasting sensor, avoids the poor problem of degree of adhesion between sensor and substrate again.And, described PbZr
0.52ti
0.48o
3between sensing layer and substrate, be provided with insulation layer, and PbZr
0.52ti
0.48o
3the sensing layer piezoelectric signal that wearing and tearing produce to substrate surface is very faint, and described insulation layer can stop PbZr
0.52ti
0.48o
3the piezoelectric signal that sensing layer produces enters substrate, avoids the loss of substrate to piezoelectric signal, strengthens the capacity gauge to piezoelectric signal, improves the sensitivity that the state of wear of substrate surface is monitored in real time, fed back.
And, due to described PbZr
0.52ti
0.48o
3smart coat has the effect of piezoelectric transducer, when collecting substrate surface micro-fracture, and described PbZr
0.52ti
0.48o
3the electric current that smart coat sends can be used as characteristic signal and completes the judgement to substrate surface borderline failure state, to the judgment model of substrate surface state, be the continuous judgment model of the multiselect formula of " complete ... more complete ... not lose efficacy ... borderline failure ... to lose efficacy ", can complete in real time, the online and dynamically grasp of the inefficacy evolution process to substrate surface.
Another embodiment of the present invention discloses another kind of PbZr
0.52ti
0.48o
3the preparation method of smart coat, as shown in Figure 2, comprising:
On a 45# steel base surface, form insulation layer, on described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer, described PbZr
0.52ti
0.48o
3the thickness of sensing layer is below 150 μ m, preferred, described PbZr
0.52ti
0.48o
3the thickness of sensing layer is 100 μ m or less, to make, in the occasion that component thickness is had to particular requirement, using described PbZr
0.52ti
0.48o
3the element of smart coat becomes possibility.
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer becomes the coating with piezoelectric effect.
Further embodiment of this invention discloses another PbZr
0.52ti
0.48o
3the preparation method of smart coat, as shown in Figure 3, comprising:
By Supersonic Plasma Spraying technique, on a substrate surface, form insulation layer, the making material of described insulation layer is aluminum oxide.
Concrete, in the present embodiment, the Supersonic Plasma Spraying technique of described formation insulation layer, comprising:
Spray voltage is 100V~130V, is preferably 120V; Spraying current is 370A ~ 400A, is preferably 385A; Spray power is 30kW ~ 50kW, is preferably 40kW; Spray distance is 100mm ~ 120mm, is preferably 110mm.
By Supersonic Plasma Spraying technique, on described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer.
Concrete, in the present embodiment, described formation PbZr
0.52ti
0.48o
3the Supersonic Plasma Spraying technique of sensing layer, comprising:
Spray voltage is 115V ~ 135V, is preferably 120V; Spraying current is 360A ~ 400A, is preferably 365A; Spray power is 35kW ~ 55kW, is preferably 46kW; Spray distance is 90mm ~ 110mm, is preferably 100mm.
Described PbZr
0.52ti
0.48o
3between sensing layer and alumina insulating layer, there is micro metallurgic bonding, described PbZr
0.52ti
0.48o
3between sensing layer and alumina insulating layer, there is very strong conjugation.And between alumina insulating layer and substrate, also there is a very strong conjugation.Accordingly, described PbZr
0.52ti
0.48o
3combination meeting between sensing layer and substrate is more firm.
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer possesses piezoelectric effect, specifically comprises:
By described PbZr
0.52ti
0.48o
3sensing layer is put into polarized electric field, and polarization temperature is that 170 ℃ ~ 210 ℃, polarized electric field intensity are 2.3KV/mm ~ 2.5KV/mm, to described PbZr
0.52ti
0.48o
3sensing layer polarization is processed, and continues 15min ~ 25min.Preferably, above-mentioned polarization temperature is controlled at 190 ℃, and polarized electric field intensity is 2.4KV/mm, and the polarization time is 20min.
Described PbZr
0.52ti
0.48o
3smart coat has the function of piezoelectric transducer, can the state of wear of substrate surface be monitored in real time, be fed back, and therefore without pasting sensor, avoids the poor problem of degree of adhesion between sensor and substrate again.And, described PbZr
0.52ti
0.48o
3between sensing layer and substrate, be provided with insulation layer, and PbZr
0.52ti
0.48o
3the sensing layer piezoelectric signal that wearing and tearing produce to substrate surface is very faint, and described insulation layer can stop PbZr
0.52ti
0.48o
3the piezoelectric signal that sensing layer produces enters substrate, avoids the loss of substrate to piezoelectric signal, strengthens the capacity gauge to piezoelectric signal, improves the sensitivity that the state of wear of substrate surface is monitored in real time, fed back.
It should be noted that, Supersonic Plasma Spraying technique belongs to the one in hot-spraying techniques, is the important process of preparation table finishing coat.In Supersonic Plasma Spraying technological process, can produce the plasma flame stream of comparatively high temps, various spray material can be heated to molten state.Not only can prepare high-quality metal and alloy coat, can also prepare dystectic pottery and metal-ceramic coating, thereby greatly improve the wear resistance of coating.
Further embodiment of this invention discloses another PbZr
0.52ti
0.48o
3the preparation method of smart coat, as shown in Figure 4, comprising:
On a substrate surface, form insulation layer.
Described substrate is metal base, be preferably 45# steel, be that described substrate can be the moving parts of steam turbines, compressor, pump, also can be the parts such as gear, axle, wrist pin (part need through high frequency or flame surface quenching), and can be foundry goods; Or described substrate is copper substrate or aluminium substrate, to adapt to the parts of other applications.
On described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer.
At described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface.
The making material of described wearing layer is FeCrBSi alloy, by Supersonic Plasma Spraying technique, forms, and wherein, spray voltage is 110V ~ 130V, is preferably 120V; Spraying current is 410A ~ 430A, is preferably 420A; Spray power is 35kW ~ 55kW, is preferably 45kW; Spray distance is 90mm ~ 100mm, is preferably 95mm.
Described FeCrBSi alloy low price, with PbZr
0.52ti
0.48o
3the conjugation of sensing layer is good, and wear resistance is good, and the described making material using described FeCrBSi alloy as wearing layer can further increase the wear resistance of piece surface and difficult drop-off.
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer has piezoelectric effect, described PbZr
0.52ti
0.48o
3sensing layer can produce electrical signal to the damage of wearing layer.
Due to described PbZr
0.52ti
0.48o
3smart coat has the effect of piezoelectric transducer, when collecting Parts Surface Coating (wearing layer) micro-fracture, and described PbZr
0.52ti
0.48o
3the electric current that smart coat sends can be used as characteristic signal and completes the judgement to coating borderline failure state, to the judgment model of coating state, be the continuous judgment model of the multiselect formula of " complete ... more complete ... not lose efficacy ... borderline failure ... to lose efficacy ", can complete in real time, the online and dynamically grasp of the inefficacy evolution process to coating.
And, described PbZr
0.52ti
0.48o
3between sensing layer and substrate, be provided with insulation layer, and PbZr
0.52ti
0.48o
3the sensing layer piezoelectric signal that wearing and tearing produce to substrate surface is very faint, and described insulation layer can stop PbZr
0.52ti
0.48o
3the piezoelectric signal that sensing layer produces enters substrate, avoids the loss of substrate to piezoelectric signal, strengthens the capacity gauge to piezoelectric signal, improves the sensitivity that the state of wear of substrate surface is monitored in real time, fed back.
Further embodiment of this invention discloses another PbZr
0.52ti
0.48o
3the preparation method of smart coat, as shown in Figure 5, comprising:
On a substrate surface, form insulation layer;
On described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer;
At described PbZr
0.52ti
0.48o
3on sensing layer surface, form the first electrode, at described PbZr
0.52ti
0.48o
3the edge of sensing layer lower surface forms the second electrode, and described the first electrode and the second electrode form described PbZr
0.52ti
0.48o
3the electric current leadout electrode of smart coat;
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer has piezoelectric effect, described PbZr
0.52ti
0.48o
3sensing layer can produce electrical signal to the damage of coating;
Dry, in drying course, bake out temperature is 100 ℃ ~ 150 ℃, is preferably 120 ℃, and drying time, more than 20min, is preferably 25min;
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer becomes the coating with piezoelectric effect.
Wherein, described the first electrode and the second electrode are described PbZr
0.52ti
0.48o
3the leadout electrode of the electric current that smart coat produces coating damage.
Concrete, due to described PbZr
0.52ti
0.48o
3the current value that smart coat produces is less, and described the first electrode is preferably gold electrode, to improve electroconductibility, reduces the loss of electric current.Described the first electrode is formed on described PbZr by coating processes
0.52ti
0.48o
3on smart coat surface, in order to make the thickness of described gold electrode more even, preferably divide to apply for three times to form described gold electrode.
And, described PbZr
0.52ti
0.48o
3between sensing layer and substrate, be provided with insulation layer, and PbZr
0.52ti
0.48o
3the sensing layer piezoelectric signal that wearing and tearing produce to substrate surface is very faint, and described insulation layer can stop PbZr
0.52ti
0.48o
3the piezoelectric signal that sensing layer produces enters substrate, avoids the loss of substrate to piezoelectric signal, strengthens the capacity gauge to piezoelectric signal, improves the sensitivity that the state of wear of substrate surface is monitored in real time, fed back.
It should be noted that, described the first electrode can also be selected silver electrode or aluminium electrode according to the actual requirements, and concrete material does not do any restriction, in the present embodiment in order to obtain more excellent conductive capability, therefore select gold electrode.And described the first electrode is arranged on the non-abrading section of described coating, with the impact of avoiding wearing and tearing on described the first electrode due to base coating.
Further embodiment of this invention discloses another PbZr
0.52ti
0.48o
3the preparation method of smart coat, as shown in Figure 6, comprising:
One substrate is provided, and described substrate surface is carried out to pre-treatment, obtain coarse substrate surface;
On described substrate surface, form insulation layer;
On described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer;
At described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface;
At described PbZr
0.52ti
0.48o
3on sensing layer surface, form the first electrode, at described PbZr
0.52ti
0.48o
3the edge of sensing layer lower surface forms the second electrode;
Dry, in described drying course, bake out temperature is 120 ℃, and drying time is 22min;
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer becomes the coating with piezoelectric effect.
Concrete, described substrate surface is carried out to pretreated process, comprising:
Adopt blasting craft to process described substrate surface, in described blasting craft, take brown corundum as sand material, the granularity of described brown corundum is 15 order ~ 30 orders, is preferably 20 orders, sandblast air pressure is 0.5MPa ~ 1MPa, be preferably 0.8MPa, sandblast angle is 30 ° ~ 60 °, is preferably 45 °, sandblast distance is 130mm ~ 160mm, is preferably 145mm.
Described preprocessing process can increase the roughness of substrate, makes the conjugation between described insulation layer and substrate higher.
Further embodiment of this invention discloses another PbZr
0.52ti
0.48o
3the preparation method of smart coat, as shown in Figure 7, comprising:
Substrate is provided, and described substrate is carried out to quench treatment, to improve the hardness of described substrate, and make the hardness of described substrate reach HRC55 left and right.
Described substrate surface is carried out to sandblasting with brown corundum, make described substrate surface there is certain roughness.
To PbZr
0.52ti
0.48o
3the autonomous granulation of powder, makes described PbZr
0.52ti
0.48o
3the particle diameter of powder is even, and described PbZr
0.52ti
0.48o
3the particle diameter of powder all reaches 40 μ m ~ 70 μ m.
Respectively by aluminum oxide and PbZr
0.52ti
0.48o
3powder is put into powder feeder, adjusts powder sending quantity, and making powder sending quantity is 30g/min, and the above-mentioned substrate surface through sandblasting is sprayed.
Concrete, first at described substrate surface spray aluminum oxide insulation layer.In described spraying process, spraying current is 385A, and spray voltage is 115V, and spray power is 42.1kW, and spraying main gas is argon gas, and the flow velocity of the main gas of described spraying is 3.0m
3/ h, and auxiliary using hydrogen as assist gas, and the flow velocity of described assist gas is 0.25m
3/ h, spray distance is 110mm, makes thickness of insulating layer be controlled at 30 μ m.
Then, on described surface of insulating layer, spray PbZr
0.52ti
0.48o
3sensing layer.In described spraying process, spraying current is 367A, and spray voltage is 123V, and spray power is 43.6kW, and spraying main gas is argon gas, and the flow velocity of the main gas of described spraying is 3.2m
3/ h, and auxiliary using hydrogen as assist gas, and the flow velocity of described assist gas is 0.3m
3/ h, spray distance is 100mm, makes PbZr
0.52ti
0.48o
3sensing layer gauge control is at 150 μ m.
After spraying finishes, check, remove the burr at edge, the defect such as cleaning dirty.Then with high resistant megger, check one by one, by too little resistance picking out, to guarantee PbZr
0.52ti
0.48o
3sensing layer can reach the polarization of standard.
By described PbZr
0.52ti
0.48o
3the electrode surface of sensing layer marks anodal and negative pole (generally, described PbZr
0.52ti
0.48o
3the upper surface of sensing layer is anodal, and the bonding surface of coating and insulation layer is negative pole, in addition, and can also be according to the corresponding adjustment of other particular cases).Filter or change transformer oil, to guarantee the clean of groove and polarization oil and polarising sheet that polarize.The charge pin of moving coil temperature adjusting apparatus is adjusted to polarization temperature spot, by adding thermal poling groove, makes oil temperature rise to needed polarization temperature.The time relay is adjusted to the time 15min that needs polarization.By the PbZr crossing by polarization preheating temperature
0.52ti
0.48o
3sensing layer is placed between the positive and negative electrode of polarization groove, shuts the door of polarization chamber.By logical rectifier part low-voltage power switch, after preheating several minutes, open high-voltage switch gear, now, the time relay starts timing.The magnitude of voltage raising slowly between positive and negative electrode, from 2500V, every 150V is one grade, until default value (5000V), the polarization time one arrives, and high-voltage switch gear disconnects automatically, after polarization finishes, the coating of formation is PbZr0.52Ti0.48O3 smart coat.
From polarization groove, take out PbZr
0.52ti
0.48o
3smart coat, and clean described PbZr with toluene or tetracol phenixin or kerosene
0.52ti
0.48o
3smart coat, wipes totally with cotton wool.
Further embodiment of this invention discloses a kind of PbZr
0.52ti
0.48o
3smart coat, as shown in Figure 8, comprising:
PbZr
0.52ti
0.48o
3sensing layer 3, described PbZr
0.52ti
0.48o
3it is upper that sensing layer 3 covers described insulation layer 2 surfaces, and described PbZr
0.52ti
0.48o
3sensing layer 3 has piezoelectric effect.
A kind of PbZr providing due to the application
0.52ti
0.48o
3in smart coat, described PbZr
0.52ti
0.48o
3sensing layer 3 has piezoelectric effect, described PbZr
0.52ti
0.48o
3smart coat has the effect of piezoelectric transducer, can be to substrate surface and PbZr
0.52ti
0.48o
3the state of wear of smart coat self is monitored in real time, is fed back, therefore without pasting sensor again.And, described PbZr
0.52ti
0.48o
3between sensing layer and substrate, be provided with insulation layer, and PbZr
0.52ti
0.48o
3the sensing layer piezoelectric signal that wearing and tearing produce to substrate surface is very faint, and described insulation layer can stop PbZr
0.52ti
0.48o
3the piezoelectric signal that sensing layer produces enters substrate, avoids the loss of substrate to piezoelectric signal, strengthens the capacity gauge to piezoelectric signal, improves the sensitivity that the state of wear of substrate surface is monitored in real time, fed back.
Due to described PbZr
0.52ti
0.48o
3smart coat has the effect of piezoelectric transducer, when collecting substrate surface micro-fracture, and described PbZr
0.52ti
0.48o
3the electric current that smart coat sends can be used as characteristic signal and completes the judgement to substrate surface borderline failure state, to the judgment model of substrate surface state, be the continuous judgment model of the multiselect formula of " complete ... more complete ... not lose efficacy ... borderline failure ... to lose efficacy ", can complete in real time, the online and dynamically grasp of the inefficacy evolution process to substrate surface.
In addition, described PbZr
0.52ti
0.48o
3smart coat also comprises:
The first electrode 4, described the first electrode 4 is arranged on described PbZr
0.52ti
0.48o
3on the surface of sensing layer 3 upper surfaces;
The second electrode 5, described the second electrode 5 is arranged on described PbZr
0.52ti
0.48o
3the edge of sensing layer 3 lower surfaces.
Described the first electrode and the second electrode are described PbZr
0.52ti
0.48o
3the leadout electrode of the electric current that smart coat produces coating damage.In addition, described the first electrode and the second electrode also need connecting lead wire, so that described electric current is derived.
Preferably, described the first electrode 4 and the second electrode 5 are gold electrode, to improve electroconductibility, reduce the loss of electric current.And described the first electrode 4 is arranged on the non-abrading section of described coating, with the impact of avoiding wearing and tearing on described the first electrode due to base coating.
Further embodiment of this invention discloses another PbZr
0.52ti
0.48o
3smart coat, as shown in Figure 9, comprising:
PbZr
0.52ti
0.48o
3sensing layer 13, described PbZr
0.52ti
0.48o
3it is upper that sensing layer 13 covers described insulation layer 12 surfaces, and, described PbZr
0.52ti
0.48o
3sensing layer 3 has the function of piezoelectric transducer;
Wearing layer 14, described wearing layer 14 covers described PbZr
0.52ti
0.48o
3on sensing layer 13 surfaces.
Described wearing layer 14 is preferably FeCrBSi alloy layer, and described FeCrBSi alloy low price, with PbZr
0.52ti
0.48o
3the conjugation of sensing layer is good, and wear resistance is good, and the described making material using described FeCrBSi alloy as wearing layer can further increase the wear resistance of piece surface and difficult drop-off.And, due to described PbZr
0.52ti
0.48o
3smart coat has the effect of piezoelectric transducer, and wearing layer 14 is as the outermost coating of part (can abrasive damage layer), when collecting Parts Surface Coating (wearing layer) micro-fracture, and described PbZr
0.52ti
0.48o
3the electric current that smart coat sends can be used as characteristic signal and completes the judgement to coating borderline failure state, to the judgment model of coating state, be the continuous judgment model of the multiselect formula of " complete ... more complete ... not lose efficacy ... borderline failure ... to lose efficacy ", can complete in real time, the online and dynamically grasp of the inefficacy evolution process to coating.And described PbZr
0.52ti
0.48o
3between sensing layer and substrate, be provided with insulation layer, and PbZr
0.52ti
0.48o
3the sensing layer piezoelectric signal that wearing and tearing produce to substrate surface is very faint, and described insulation layer can stop PbZr
0.52ti
0.48o
3the piezoelectric signal that sensing layer produces enters substrate, avoids the loss of substrate to piezoelectric signal, strengthens the capacity gauge to piezoelectric signal, improves the sensitivity that the state of wear of substrate surface is monitored in real time, fed back.
The first electrode 15, described the first electrode 15 is arranged on described PbZr
0.52ti
0.48o
3sensing layer 13 surfaces are upper, and are positioned at the non-abrading section of described coating, with the impact of avoiding wearing and tearing on described the first electrode 15 due to base coating.
The second electrode 16, described the second electrode 16 is arranged on described PbZr
0.52ti
0.48o
3the edge of sensing layer 13 lower surfaces.
Described the first electrode and the second electrode are described PbZr
0.52ti
0.48o
3the leadout electrode of the electric current that smart coat produces coating damage.In addition, described the first electrode and the second electrode also need connecting lead wire, so that described electric current is derived.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the present invention.To the multiple modification of these embodiment, will be apparent for those skilled in the art, General Principle as defined herein can, in the situation that not departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (8)
1. a PbZr
0.52ti
0.48o
3the preparation method of smart coat, is characterized in that, comprising:
On a substrate surface, form insulation layer;
By Supersonic Plasma Spraying technique, on described surface of insulating layer, form PbZr
0.52ti
0.48o
3sensing layer;
To described PbZr
0.52ti
0.48o
3the sensing layer processing that polarizes, makes described PbZr
0.52ti
0.48o
3sensing layer has piezoelectric effect;
At described PbZr
0.52ti
0.48o
3on the surface of sensing layer upper surface, form the first electrode, at described PbZr
0.52ti
0.48o
3the edge of sensing layer lower surface forms the second electrode, and described the first electrode and the second electrode form described PbZr
0.52ti
0.48o
3the electric current leadout electrode of smart coat;
Dry.
2. method according to claim 1, is characterized in that, describedly on a substrate surface, forms insulation layer, comprising:
By Supersonic Plasma Spraying technique, on described substrate surface, form insulation layer.
3. method according to claim 1, is characterized in that, the making material of described insulation layer is aluminum oxide.
4. method according to claim 1, is characterized in that, also comprises:
At described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface.
5. method according to claim 4, is characterized in that, at described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface, comprising:
By Supersonic Plasma Spraying technique at described PbZr
0.52ti
0.48o
3sensing layer forms wearing layer on surface.
6. method according to claim 1, is characterized in that, before forming insulation layer, also comprises on a substrate surface:
Described substrate surface is carried out to pre-treatment, obtain coarse substrate surface.
7. a PbZr
0.52ti
0.48o
3smart coat, is characterized in that, comprising:
Substrate, the substrate that described substrate is arbitrary shape;
Insulation layer, described insulation layer covers on described substrate surface;
PbZr
0.52ti
0.48o
3sensing layer, described PbZr
0.52ti
0.48o
3sensing layer covers on described surface of insulating layer;
The first electrode, described the first electrode is arranged on described PbZr
0.52ti
0.48o
3on the surface of sensing layer upper surface;
The second electrode, described the second electrode is at described PbZr
0.52ti
0.48o
3the edge of sensing layer lower surface.
8. PbZr according to claim 7
0.52ti
0.48o
3smart coat, is characterized in that, also comprises:
Wearing layer, described wearing layer covers described PbZr
0.52ti
0.48o
3on sensing layer surface.
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CN1566024A (en) * | 2000-06-21 | 2005-01-19 | 精工爱普生株式会社 | Ceramic film and method of manufacturing the same, semiconductor device, and piezoelectric device |
CN101154568A (en) * | 2006-09-29 | 2008-04-02 | 海力士半导体有限公司 | Method for fabricating capacitor in semiconductor device |
CN101627484A (en) * | 2007-03-02 | 2010-01-13 | 埃普科斯股份有限公司 | Piezo-electric material, multi-layer actuator and method for producing a piezo-electric component |
CN101894843A (en) * | 2010-06-04 | 2010-11-24 | 清华大学 | Ferroelectric dynamic random access memory based on lead zirconate titanate memory medium and preparation method thereof |
CN102060529A (en) * | 2011-01-22 | 2011-05-18 | 浙江大学 | Nano Ag particle-Pb(Zr0.52Ti0.48)O3 filtration type composite ceramic film and preparation method thereof |
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CN1566024A (en) * | 2000-06-21 | 2005-01-19 | 精工爱普生株式会社 | Ceramic film and method of manufacturing the same, semiconductor device, and piezoelectric device |
CN101154568A (en) * | 2006-09-29 | 2008-04-02 | 海力士半导体有限公司 | Method for fabricating capacitor in semiconductor device |
CN101627484A (en) * | 2007-03-02 | 2010-01-13 | 埃普科斯股份有限公司 | Piezo-electric material, multi-layer actuator and method for producing a piezo-electric component |
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