CN102829182B - Sealing device for joint of moving pipe and fixed flat plate - Google Patents
Sealing device for joint of moving pipe and fixed flat plate Download PDFInfo
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- CN102829182B CN102829182B CN201210283209.4A CN201210283209A CN102829182B CN 102829182 B CN102829182 B CN 102829182B CN 201210283209 A CN201210283209 A CN 201210283209A CN 102829182 B CN102829182 B CN 102829182B
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- shaft sleeve
- pipe fitting
- fixed flat
- flat planar
- motion pipe
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Abstract
The invention relates to a sealing device and discloses the sealing device for a joint of a moving pipe and a fixed flat plate. The moving pipe can rotate and/or vertically slide relative to the fixed flat plate; the sealing device comprises an upper shaft sleeve and a lower shaft sleeve; the upper shaft sleeve and the lower shaft sleeve are respectively sleeved on a pipe wall of the moving pipe; the lower end of the lower shaft sleeve is connected with the fixed flat plate; an upper part of the lower shaft sleeve is located in a lower part of the upper shaft sleeve; and the upper end of the upper shaft sleeve is connected with the moving pipe. According to the sealing device provided by the invention, the upper shaft sleeve and the lower shaft sleeve are used for sealing the joint of the moving pipe and the fixed flat plate, so that the liquid jetted from the moving pipe is prevented from entering into other chambers through the joint and the smooth motion of the moving pipe is ensured; furthermore, a ball fixing frame and a ball are arranged in a clearance between an inner wall of the upper part of the upper shaft sleeve and an outer wall of the lower part of the lower shaft sleeve; and the verticality of the moving pipe and the fixed flat plate is effectively ensured.
Description
Technical field
The present invention relates to a kind of seal arrangement, particularly relate to a kind of seal arrangement for motion pipe fitting that is rotatable and/or that slide up and down and fixed flat planar joint.
Background technique
At present, need the motion pipe fitting that not only can rotate but also can slide is installed in plurality of devices, as the spray arm in the cleaning equipment processing chamber of Wafer Cleaning.According to the requirement of different process, motion pipe fitting operationally can carry out rotating and/or sliding up and down relative to its fixed flat planar, thus needs between motion pipe fitting and fixed flat planar to leave certain gap to ensure smooth motion.But the liquid sprayed in pipe fitting often has part enters into other chamber by the gap between motion pipe fitting and fixed flat planar, affects the normal operation of other chamber.Therefore, effective sealing is carried out to the joint of motion pipe fitting and fixed flat planar and is very important, but seal arrangement is not set in existing equipment to prevent the fluid seepage of such joint.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention how to provide a kind of seal arrangement for motion pipe fitting and fixed flat planar joint, to enter other chamber and cause affecting to overcome the liquid that sprays in motion pipe fitting the drawback that other chambers normally run from this joint.
(2) technological scheme
In order to solve the problems of the technologies described above, a kind of seal arrangement for motion pipe fitting and fixed flat planar joint provided by the invention, described motion pipe fitting can rotate relative to fixed flat planar and/or slide up and down, described seal arrangement comprises Upper shaft sleeve and Lower shaft sleeve, and described Upper shaft sleeve and Lower shaft sleeve are enclosed within the tube wall of described motion pipe fitting respectively; Lower shaft sleeve lower end is connected with described fixed flat planar, and Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom; Upper shaft sleeve upper end is connected with described motion pipe fitting.
Wherein, described Lower shaft sleeve lower end is with the edge of radially projection, and described edge is connected with fixed flat planar.
Wherein, gap is provided with between the outer wall on described Lower shaft sleeve top and the inwall of described Upper shaft sleeve bottom.
Wherein, be provided with ball fixing frame in the gap between the outer wall on described Lower shaft sleeve top and the inwall of described Upper shaft sleeve bottom, in described ball fixing frame, be provided with ball.
Wherein, described ball fixing frame is located on the outer wall on described Lower shaft sleeve top.
Wherein, described ball fixing frame is provided with and is set to multiple in the outer wall circumference on described Lower shaft sleeve top, and multiple described ball fixing frame is distributed in the outer wall circumference on described Lower shaft sleeve top.
Wherein, described ball fixing frame is set to three.
Wherein, the joint of described Upper shaft sleeve upper end and described motion pipe fitting is provided with seal ring.
Wherein, described seal ring is set to multiple.
Wherein, described Upper shaft sleeve upper end is made up of dismountable left and right part.
(3) beneficial effect
A kind of seal arrangement for motion pipe fitting and fixed flat planar joint that technique scheme provides, Upper shaft sleeve and the joint of Lower shaft sleeve to motion pipe fitting and fixed flat planar is adopted to close, Lower shaft sleeve lower end is connected with fixed flat planar, Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom, Upper shaft sleeve upper end is connected with motion pipe fitting, avoid the liquid sprayed in motion pipe fitting to enter other chamber from this joint on the one hand, ensure the smooth motion of motion pipe fitting on the other hand; Further, Lower shaft sleeve lower end is with the edge of radially projection, and this edge is connected with fixed flat planar, can guarantee the sealing of Lower shaft sleeve and fixed flat planar, reveals from the gap of Lower shaft sleeve and fixed flat planar joint to prevent the liquid in motion pipe fitting; Further, in the gap of Upper shaft sleeve and Lower shaft sleeve, increase ball, make, while maintenance motion pipe fitting normally rotates and/or normally slides up and down, effectively to ensure the perpendicularity of motion pipe fitting and fixed flat planar and produce a small amount of dust granules.
Accompanying drawing explanation
Fig. 1 is the sectional drawing of a kind of seal arrangement for motion pipe fitting and fixed flat planar joint of the present invention;
Fig. 2 is the External view of a kind of seal arrangement for motion pipe fitting and fixed flat planar joint of the present invention;
Fig. 3 is the plan view of Lower shaft sleeve in the present invention;
Fig. 4 is the erection drawing of Upper shaft sleeve in the present invention.
Wherein, 1, motion pipe fitting; 2, fixed flat planar; 3, Upper shaft sleeve; 31, Upper shaft sleeve upper end; 32, Upper shaft sleeve bottom; 311, left half; 312, right half; 4, Lower shaft sleeve; 41, Lower shaft sleeve top; 42, Lower shaft sleeve lower end; 5, ball fixing frame; 6, seal ring.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
As Fig. 1 and Fig. 2, the seal arrangement for motion pipe fitting and fixed flat planar joint that the embodiment of the present invention provides, this motion pipe fitting 1 can rotate relative to fixed flat planar 2 and/or slide up and down, sealing device comprises Upper shaft sleeve 3 and Lower shaft sleeve 4, and this Upper shaft sleeve 3 and Lower shaft sleeve 4 are enclosed within the tube wall of motion pipe fitting 1 respectively; Lower shaft sleeve lower end 42 is connected with fixed flat planar 2, and Lower shaft sleeve top 41 is positioned at the inside of Upper shaft sleeve bottom 32; Upper shaft sleeve upper end 31 is connected with motion pipe fitting 1.The present invention adopts Upper shaft sleeve 3 and the joint of Lower shaft sleeve 4 to motion pipe fitting 1 and fixed flat planar 2 to close, and avoids the liquid of ejection in motion pipe fitting 1 to enter other chamber from this joint on the one hand, ensures the smooth motion of motion pipe fitting 1 on the other hand.
In order to ensure Lower shaft sleeve 4 sealing with fixed flat planar 2, to prevent the liquid in motion pipe fitting 1 from revealing from Lower shaft sleeve 4 and the gap of fixed flat planar 2 joint, Lower shaft sleeve lower end 42 is with the edge of radially projection, and this edge is connected with fixed flat planar.In order to make the liquid sprayed from motion body 1 more away from the joint of motion body 1 with fixed flat planar 2, to reach better sealing effect, Upper shaft sleeve bottom 32 wants large compared with the diameter of Upper shaft sleeve upper end 31, and the liquid sprayed from motion pipe fitting 1 is thrown away along wider bottom 31.
Be provided with gap between the outer wall on Lower shaft sleeve top 41 and the inwall of Upper shaft sleeve bottom 32, motion pipe fitting 1 resistance suffered when rotating and/or sliding up and down can be reduced in this gap.Further, in order to normally rotate at maintenance motion pipe fitting 1 and/or while normally sliding up and down, the perpendicularity of effective guarantee campaign pipe fitting 1 and fixed flat planar 2 also produces a small amount of dust granules, this a small amount of dust granules can not cause adverse effect to the motion of motion pipe fitting 1, as Fig. 1 and Fig. 3, be provided with ball fixing frame 5 in gap between the outer wall of the present embodiment on Lower shaft sleeve top 41 and the inwall of Upper shaft sleeve bottom 32, in this ball fixing frame 5, be provided with ball.Preferably, ball fixing frame 5 is located on the outer wall on Lower shaft sleeve top 41, so that processing.Ball fixing frame 5 is provided with multiple in the top 41 outer wall circumference of Lower shaft sleeve 4, can be uniformly distributed or non-uniform Distribution, preferably be uniformly distributed, to improve the stability that motion pipe fitting 1 moves.More preferably, this ball fixing frame 5 is provided with three in the outer wall circumference on Lower shaft sleeve top 41.In addition, this ball fixing frame 5 also can be arranged along annular in the external wall of upper portion circumference of Upper shaft sleeve 3, and then arranges multiple fixed grating for installing ball in this annular ball fixing frame 5.
In order to improve the sealing of Upper shaft sleeve 3 and motion pipe fitting 1 joint, the present embodiment is provided with seal ring 6 at Upper shaft sleeve 3 and the joint of motion pipe fitting 1.Sealing circle 6 can be set to multiple.Preferably, seal ring 6 is set to three.As shown in Figure 4, Upper shaft sleeve upper end 31 is made up of dismountable left and right part 311,312, and is connected by screw, its objective is in order to improve seal ring 6 impacting force and facilitate installation and the replacing of seal ring 6.
A kind of main efficacy results produced for the seal arrangement of motion pipe fitting and fixed flat planar joint that technique scheme provides is:
1, Upper shaft sleeve and the joint of Lower shaft sleeve to motion pipe fitting and fixed flat planar is adopted to close, Lower shaft sleeve lower end is connected with fixed flat planar, Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom, Upper shaft sleeve upper end is connected with motion pipe fitting, avoid the liquid sprayed in motion pipe fitting to enter other chamber from this joint on the one hand, ensure the smooth motion of motion pipe fitting on the other hand;
2, Lower shaft sleeve lower end is with the edge of radially projection, and this edge is connected with fixed flat planar, can guarantee the sealing of Lower shaft sleeve and fixed flat planar, reveals from the gap of Lower shaft sleeve and fixed flat planar joint to prevent the liquid in motion pipe fitting;
3, in the gap of Upper shaft sleeve and Lower shaft sleeve, ball is increased, make while maintenance motion pipe fitting normally rotates and/or normally slides up and down, effectively can ensure the perpendicularity of motion pipe fitting and fixed flat planar and produce a small amount of dust granules, this small amount of dust granules can not cause adverse effect to the motion of motion pipe fitting.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and replacement, these improve and replace and also should be considered as protection scope of the present invention.
Claims (10)
1. the seal arrangement for motion pipe fitting and fixed flat planar joint, described motion pipe fitting can rotate relative to fixed flat planar and/or slide up and down, it is characterized in that, described seal arrangement comprises Upper shaft sleeve and Lower shaft sleeve, and described Upper shaft sleeve and Lower shaft sleeve are enclosed within the tube wall of described motion pipe fitting respectively; Lower shaft sleeve lower end is connected with described fixed flat planar, and Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom; Upper shaft sleeve upper end is connected with described motion pipe fitting; Upper shaft sleeve bottom wants large compared with the diameter of Upper shaft sleeve upper end, is provided for the liquid sprayed from motion pipe fitting and throws away along wider bottom.
2. as claimed in claim 1 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, described Lower shaft sleeve lower end is with the edge of radially projection, and described edge is connected with fixed flat planar.
3., as claimed in claim 1 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, between the outer wall on described Lower shaft sleeve top and the inwall of described Upper shaft sleeve bottom, be provided with gap.
4. as claimed in claim 3 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, be provided with ball fixing frame in gap between the outer wall on described Lower shaft sleeve top and the inwall of described Upper shaft sleeve bottom, in described ball fixing frame, be provided with ball.
5., as claimed in claim 4 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, described ball fixing frame is located on the outer wall on described Lower shaft sleeve top.
6., as claimed in claim 4 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, described ball fixing frame is set to multiple, and multiple described ball fixing frame is distributed in the outer wall circumference on described Lower shaft sleeve top.
7., as claimed in claim 6 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, described ball fixing frame is set to three.
8., as claimed in claim 1 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, the joint of described Upper shaft sleeve upper end and described motion pipe fitting is provided with seal ring.
9., as claimed in claim 8 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, described seal ring is set to multiple.
10., as claimed in claim 1 for the seal arrangement of motion pipe fitting and fixed flat planar joint, it is characterized in that, described Upper shaft sleeve upper end is made up of dismountable left and right part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210283209.4A CN102829182B (en) | 2012-08-09 | 2012-08-09 | Sealing device for joint of moving pipe and fixed flat plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210283209.4A CN102829182B (en) | 2012-08-09 | 2012-08-09 | Sealing device for joint of moving pipe and fixed flat plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102829182A CN102829182A (en) | 2012-12-19 |
| CN102829182B true CN102829182B (en) | 2015-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210283209.4A Active CN102829182B (en) | 2012-08-09 | 2012-08-09 | Sealing device for joint of moving pipe and fixed flat plate |
Country Status (1)
| Country | Link |
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| CN (1) | CN102829182B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87101792A (en) * | 1986-03-21 | 1987-10-21 | 阿金泰克股份公司 | Seal arrangement |
| US5950381A (en) * | 1996-05-25 | 1999-09-14 | Alcatel | Device for passing a lengthy object through an opening in a wall |
| CN2716621Y (en) * | 2004-08-10 | 2005-08-10 | 周洪 | Rotating joint |
| EP2105643A2 (en) * | 2009-07-06 | 2009-09-30 | Enviro Seal Limited | Gas pipe slip boot |
| CA2663867A1 (en) * | 2008-04-25 | 2009-10-25 | Luis Gallardo | Anti-rotation pipe locator and holder |
| CN101663530A (en) * | 2007-02-12 | 2010-03-03 | 康蒂泰克化学技术有限公司 | Connecting arrangement for fluid lines |
| CN202791046U (en) * | 2012-08-09 | 2013-03-13 | 北京七星华创电子股份有限公司 | Sealing device used for joint of movable pipe fitting and fixed flat plate |
-
2012
- 2012-08-09 CN CN201210283209.4A patent/CN102829182B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87101792A (en) * | 1986-03-21 | 1987-10-21 | 阿金泰克股份公司 | Seal arrangement |
| US5950381A (en) * | 1996-05-25 | 1999-09-14 | Alcatel | Device for passing a lengthy object through an opening in a wall |
| CN2716621Y (en) * | 2004-08-10 | 2005-08-10 | 周洪 | Rotating joint |
| CN101663530A (en) * | 2007-02-12 | 2010-03-03 | 康蒂泰克化学技术有限公司 | Connecting arrangement for fluid lines |
| CA2663867A1 (en) * | 2008-04-25 | 2009-10-25 | Luis Gallardo | Anti-rotation pipe locator and holder |
| EP2105643A2 (en) * | 2009-07-06 | 2009-09-30 | Enviro Seal Limited | Gas pipe slip boot |
| CN202791046U (en) * | 2012-08-09 | 2013-03-13 | 北京七星华创电子股份有限公司 | Sealing device used for joint of movable pipe fitting and fixed flat plate |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102829182A (en) | 2012-12-19 |
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