CN102829182A - Sealing device for joint of moving pipe and fixed flat plate - Google Patents
Sealing device for joint of moving pipe and fixed flat plate Download PDFInfo
- Publication number
- CN102829182A CN102829182A CN2012102832094A CN201210283209A CN102829182A CN 102829182 A CN102829182 A CN 102829182A CN 2012102832094 A CN2012102832094 A CN 2012102832094A CN 201210283209 A CN201210283209 A CN 201210283209A CN 102829182 A CN102829182 A CN 102829182A
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- Prior art keywords
- shaft sleeve
- pipe fitting
- fixed flat
- flat planar
- motion pipe
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Abstract
The invention relates to a sealing device and discloses the sealing device for a joint of a moving pipe and a fixed flat plate. The moving pipe can rotate and/or vertically slide relative to the fixed flat plate; the sealing device comprises an upper shaft sleeve and a lower shaft sleeve; the upper shaft sleeve and the lower shaft sleeve are respectively sleeved on a pipe wall of the moving pipe; the lower end of the lower shaft sleeve is connected with the fixed flat plate; an upper part of the lower shaft sleeve is located in a lower part of the upper shaft sleeve; and the upper end of the upper shaft sleeve is connected with the moving pipe. According to the sealing device provided by the invention, the upper shaft sleeve and the lower shaft sleeve are used for sealing the joint of the moving pipe and the fixed flat plate, so that the liquid jetted from the moving pipe is prevented from entering into other chambers through the joint and the smooth motion of the moving pipe is ensured; furthermore, a ball fixing frame and a ball are arranged in a clearance between an inner wall of the upper part of the upper shaft sleeve and an outer wall of the lower part of the lower shaft sleeve; and the verticality of the moving pipe and the fixed flat plate is effectively ensured.
Description
Technical field
The present invention relates to a kind of seal arrangement, particularly relate to and a kind ofly be used for rotatable and/or the motion pipe fitting that slides up and down and the seal arrangement of fixed flat planar joint.
Background technique
At present, in plurality of devices, need the motion pipe fitting that not only can rotate but also can slide is installed, as be used for the spray arm of the cleaning equipment processing chamber of silicon chip cleaning.According to the requirement of different process, the motion pipe fitting when work relatively its fixed flat planar be rotated and/or slide up and down, thereby need leave certain clearance between motion pipe fitting and the fixed flat planar and guarantee smooth motion.Yet the liquid that sprays in the pipe fitting often has the chamber that partly enters into other through the gap between motion pipe fitting and the fixed flat planar, influences the normal operation of other chamber.Therefore, the joint of motion pipe fitting and fixed flat planar effectively sealed be very important, but in the existing equipment fluid seepage that seal arrangement prevents such joint is not set.
Summary of the invention
The technical problem that (one) will solve
The technical problem that the present invention will solve is how a kind of seal arrangement that is used for motion pipe fitting and fixed flat planar joint is provided, and gets into the drawback that other chamber causes influencing the normal operation of other chambers to overcome the liquid that sprays in the motion pipe fitting from this joint.
(2) technological scheme
In order to solve the problems of the technologies described above; A kind of seal arrangement that is used for motion pipe fitting and fixed flat planar joint provided by the invention; But said motion pipe fitting relative fixed flat board rotates and/or slides up and down; Said seal arrangement comprises Upper shaft sleeve and Lower shaft sleeve, and said Upper shaft sleeve and Lower shaft sleeve are enclosed within respectively on the tube wall of said motion pipe fitting; The Lower shaft sleeve lower end is connected with said fixed flat planar, and Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom; The Upper shaft sleeve upper end is connected with said motion pipe fitting.
Wherein, said Lower shaft sleeve lower end has the radially edge of projection, and said edge is connected with fixed flat planar.
Wherein, be provided with the gap between the inwall of the outer wall on said Lower shaft sleeve top and said Upper shaft sleeve bottom.
Wherein, be provided with the ball fixing frame in the gap between the inwall of the outer wall on said Lower shaft sleeve top and said Upper shaft sleeve bottom, be provided with ball in the said ball fixing frame.
Wherein, said ball fixing frame is located on the outer wall on said Lower shaft sleeve top.
Wherein, said ball fixing frame is made as a plurality ofly upwards being provided with in the outer wall week on said Lower shaft sleeve top, and outer wall week that a plurality of said ball fixing frames are distributed in said Lower shaft sleeve top upwards.
Wherein, said ball fixing frame is made as three.
Wherein, the joint of said Upper shaft sleeve upper end and said motion pipe fitting is provided with seal ring.
Wherein, said seal ring is made as a plurality of.
Wherein, form by dismountable left and right part on the said Upper shaft sleeve.
(3) beneficial effect
A kind of seal arrangement that is used for motion pipe fitting and fixed flat planar joint that technique scheme provided; Adopt Upper shaft sleeve and Lower shaft sleeve that the joint of motion pipe fitting and fixed flat planar is sealed; The Lower shaft sleeve lower end is connected with fixed flat planar, and Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom, and the Upper shaft sleeve upper end is connected with the motion pipe fitting; The liquid of avoiding on the one hand spraying in the motion pipe fitting gets into other chamber from this joint, guarantees the smooth motion of motion pipe fitting on the other hand; Further, the Lower shaft sleeve lower end has the radially edge of projection, and this edge is connected with fixed flat planar, can guarantee the sealing of Lower shaft sleeve and fixed flat planar, reveals from the gap of Lower shaft sleeve and fixed flat planar joint to prevent the liquid in the motion pipe fitting; Further, in the gap of Upper shaft sleeve and Lower shaft sleeve, increase ball, make when keeping the normal rotation of motion pipe fitting and/or normally sliding up and down, can effectively guarantee the perpendicularity of motion pipe fitting and fixed flat planar and produce a spot of dust granules.
Description of drawings
Fig. 1 is a kind of sectional drawing that is used for the seal arrangement of motion pipe fitting and fixed flat planar joint of the present invention;
Fig. 2 is a kind of External view that is used for the seal arrangement of motion pipe fitting and fixed flat planar joint of the present invention;
Fig. 3 is the plan view of Lower shaft sleeve among the present invention;
Fig. 4 is the erection drawing of Upper shaft sleeve among the present invention.
Wherein, 1, motion pipe fitting; 2, fixed flat planar; 3, Upper shaft sleeve; 31, Upper shaft sleeve upper end; 32, Upper shaft sleeve bottom; 311, left half; 312, right half; 4, Lower shaft sleeve; 41, Lower shaft sleeve top; 42, Lower shaft sleeve lower end; 5, ball fixing frame; 6, seal ring.
Embodiment
Below in conjunction with accompanying drawing and embodiment, specific embodiments of the invention describes in further detail.Following examples are used to explain the present invention, but are not used for limiting scope of the present invention.
Like Fig. 1 and Fig. 2; The seal arrangement that is used for motion pipe fitting and fixed flat planar joint that the embodiment of the invention provides; But this motion pipe fitting 1 relative fixed dull and stereotyped 2 is rotated and/or is slided up and down; The sealing device comprises Upper shaft sleeve 3 and Lower shaft sleeve 4, and this Upper shaft sleeve 3 is enclosed within respectively on the tube wall of motion pipe fitting 1 with Lower shaft sleeve 4; Lower shaft sleeve lower end 42 is connected with fixed flat planar 2, and Lower shaft sleeve top 41 is positioned at the inside of Upper shaft sleeve bottom 32; Upper shaft sleeve upper end 31 is connected with motion pipe fitting 1.The present invention adopts the Upper shaft sleeve 3 and the joint of 4 pairs of motion pipe fittings of Lower shaft sleeve 1 and fixed flat planar 2 to seal, and avoids the liquid of ejection in the motion pipe fitting 1 to get into other chamber from this joint on the one hand, guarantees the smooth motion of motion pipe fitting 1 on the other hand.
In order to ensure the sealing of Lower shaft sleeve 4 with fixed flat planar 2, to reveal from the gap of Lower shaft sleeve 4 and fixed flat planar 2 joints to prevent the liquid in the motion pipe fitting 1, Lower shaft sleeve lower end 42 has the radially edge of projection, and this edge is connected with fixed flat planar.In order to make liquid from 1 ejection of motion body more away from the joint of motion body 1 with fixed flat planar 2; To reach better sealing effect; Upper shaft sleeve bottom 32 wants big than the diameter of Upper shaft sleeve upper end 31, makes that the bottom 31 from the liquid of motion pipe fitting 1 ejection along broad throws away.
Be provided with the gap between the inwall of the outer wall on Lower shaft sleeve top 41 and Upper shaft sleeve bottom 32, motion pipe fitting 1 can be reduced at rotation and/or suffered resistance when sliding up and down in this gap.Further; For when keeping the 1 normal rotation of motion pipe fitting and/or normally sliding up and down; Effectively guarantee the perpendicularity of motion pipe fitting 1 and fixed flat planar 2 and produce a spot of dust granules, this a spot of dust granules can not cause adverse effect to the motion of motion pipe fitting 1, like Fig. 1 and Fig. 3; Present embodiment is provided with ball fixing frame 5 in the gap between the inwall of the outer wall on Lower shaft sleeve top 41 and Upper shaft sleeve bottom 32, is provided with ball in this ball fixing frame 5.Preferably, ball fixing frame 5 is located on the outer wall on Lower shaft sleeve top 41, so that processing.Ball fixing frame 5 upwards is provided with a plurality of in the 41 outer wall weeks of top of Lower shaft sleeve 4, can evenly distribute or non-uniform Distribution, is preferably even distribution, to improve the stability of motion pipe fitting 1 motion.More preferably, this ball fixing frame 5 upwards is provided with three in the outer wall week on Lower shaft sleeve top 41.In addition, this ball fixing frame 5 also can along the external wall of upper portion of Upper shaft sleeve 3 week upwards annular be provided with, and then in this annular ball fixing frame 5, a plurality of fixed gratings are set and are used to install ball.
In order to improve the sealing of Upper shaft sleeve 3 and motion pipe fitting 1 joint, present embodiment is provided with seal ring 6 in the joint of Upper shaft sleeve 3 and motion pipe fitting 1.Sealing circle 6 can be made as a plurality of.Preferably, seal ring 6 is made as three.As shown in Figure 4, Upper shaft sleeve upper end 31 is made up of dismountable left and right part 311,312, and is connected by screw, its objective is for improve seal ring 6 impacting force and make things convenient for the installation and the replacing of seal ring 6.
A kind of main effect that seal arrangement produced that is used for motion pipe fitting and fixed flat planar joint that technique scheme provided is:
1, adopt Upper shaft sleeve and Lower shaft sleeve that the joint of motion pipe fitting and fixed flat planar is sealed; The Lower shaft sleeve lower end is connected with fixed flat planar; Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom; The Upper shaft sleeve upper end is connected with the motion pipe fitting, and the liquid of avoiding on the one hand spraying in the motion pipe fitting gets into other chamber from this joint, guarantees the smooth motion of motion pipe fitting on the other hand;
2, the Lower shaft sleeve lower end has the radially edge of projection, and this edge is connected with fixed flat planar, can guarantee the sealing of Lower shaft sleeve and fixed flat planar, reveals from the gap of Lower shaft sleeve and fixed flat planar joint to prevent the liquid in the motion pipe fitting;
3, in the gap of Upper shaft sleeve and Lower shaft sleeve, increase ball; Make when keeping the normal rotation of motion pipe fitting and/or normally sliding up and down; Can effectively guarantee the perpendicularity of motion pipe fitting and fixed flat planar and produce a spot of dust granules, this a spot of dust granules can not cause adverse effect to the motion of motion pipe fitting.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from know-why of the present invention; Can also make some improvement and replacement, these improvement and replacement also should be regarded as protection scope of the present invention.
Claims (10)
1. seal arrangement that is used for motion pipe fitting and fixed flat planar joint; But said motion pipe fitting relative fixed flat board rotates and/or slides up and down; It is characterized in that said seal arrangement comprises Upper shaft sleeve and Lower shaft sleeve, said Upper shaft sleeve and Lower shaft sleeve are enclosed within respectively on the tube wall of said motion pipe fitting; The Lower shaft sleeve lower end is connected with said fixed flat planar, and Lower shaft sleeve top is positioned at the inside of Upper shaft sleeve bottom; The Upper shaft sleeve upper end is connected with said motion pipe fitting.
2. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 1 is characterized in that said Lower shaft sleeve lower end has the radially edge of projection, and said edge is connected with fixed flat planar.
3. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 1 is characterized in that, is provided with the gap between the inwall of the outer wall on said Lower shaft sleeve top and said Upper shaft sleeve bottom.
4. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 3; It is characterized in that; Be provided with the ball fixing frame in the gap between the inwall of the outer wall on said Lower shaft sleeve top and said Upper shaft sleeve bottom, be provided with ball in the said ball fixing frame.
5. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 4 is characterized in that said ball fixing frame is located on the outer wall on said Lower shaft sleeve top.
6. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 4 is characterized in that said ball fixing frame is made as a plurality of, and the outer wall week that a plurality of said ball fixing frames are distributed in said Lower shaft sleeve top makes progress.
7. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 6 is characterized in that said ball fixing frame is made as three.
8. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 1 is characterized in that, said Upper shaft sleeve upper end is provided with seal ring with the joint of said motion pipe fitting.
9. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 8 is characterized in that said seal ring is made as a plurality of.
10. the seal arrangement that is used for motion pipe fitting and fixed flat planar joint as claimed in claim 1 is characterized in that, said Upper shaft sleeve upper end is made up of dismountable left and right part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210283209.4A CN102829182B (en) | 2012-08-09 | 2012-08-09 | Sealing device for joint of moving pipe and fixed flat plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210283209.4A CN102829182B (en) | 2012-08-09 | 2012-08-09 | Sealing device for joint of moving pipe and fixed flat plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102829182A true CN102829182A (en) | 2012-12-19 |
| CN102829182B CN102829182B (en) | 2015-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210283209.4A Active CN102829182B (en) | 2012-08-09 | 2012-08-09 | Sealing device for joint of moving pipe and fixed flat plate |
Country Status (1)
| Country | Link |
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| CN (1) | CN102829182B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87101792A (en) * | 1986-03-21 | 1987-10-21 | 阿金泰克股份公司 | Seal arrangement |
| US5950381A (en) * | 1996-05-25 | 1999-09-14 | Alcatel | Device for passing a lengthy object through an opening in a wall |
| CN2716621Y (en) * | 2004-08-10 | 2005-08-10 | 周洪 | Rotating joint |
| EP2105643A2 (en) * | 2009-07-06 | 2009-09-30 | Enviro Seal Limited | Gas pipe slip boot |
| CA2663867A1 (en) * | 2008-04-25 | 2009-10-25 | Luis Gallardo | Anti-rotation pipe locator and holder |
| CN101663530A (en) * | 2007-02-12 | 2010-03-03 | 康蒂泰克化学技术有限公司 | Connecting arrangement for fluid lines |
| CN202791046U (en) * | 2012-08-09 | 2013-03-13 | 北京七星华创电子股份有限公司 | Sealing device used for joint of movable pipe fitting and fixed flat plate |
-
2012
- 2012-08-09 CN CN201210283209.4A patent/CN102829182B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87101792A (en) * | 1986-03-21 | 1987-10-21 | 阿金泰克股份公司 | Seal arrangement |
| US5950381A (en) * | 1996-05-25 | 1999-09-14 | Alcatel | Device for passing a lengthy object through an opening in a wall |
| CN2716621Y (en) * | 2004-08-10 | 2005-08-10 | 周洪 | Rotating joint |
| CN101663530A (en) * | 2007-02-12 | 2010-03-03 | 康蒂泰克化学技术有限公司 | Connecting arrangement for fluid lines |
| CA2663867A1 (en) * | 2008-04-25 | 2009-10-25 | Luis Gallardo | Anti-rotation pipe locator and holder |
| EP2105643A2 (en) * | 2009-07-06 | 2009-09-30 | Enviro Seal Limited | Gas pipe slip boot |
| CN202791046U (en) * | 2012-08-09 | 2013-03-13 | 北京七星华创电子股份有限公司 | Sealing device used for joint of movable pipe fitting and fixed flat plate |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102829182B (en) | 2015-01-21 |
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