CN102794689B - Electromagnetic drive type active stress disc - Google Patents
Electromagnetic drive type active stress disc Download PDFInfo
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- CN102794689B CN102794689B CN201210266684.0A CN201210266684A CN102794689B CN 102794689 B CN102794689 B CN 102794689B CN 201210266684 A CN201210266684 A CN 201210266684A CN 102794689 B CN102794689 B CN 102794689B
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- electromagnetic drive
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Abstract
The invention discloses an electromagnetic drive type active stress disc which comprises a rotation shaft and a chassis fixedly connected with the rotation shaft, wherein a surface-shaped adjusting device capable of changing the chassis shape through non-contact electromagnetic force is arranged between the rotation shaft and the chassis. The electromagnetic drive type active stress disc disclosed by the invention has the advantages of simple structure, low cost, high control precision, strong adaptability and the like, is easy to control, and can solve the winding problem without using a slip ring.
Description
Technical field
The present invention is mainly concerned with optical precision optical machinery technical field, is specifically related to a kind of active strain disc that utilizes non-contact electromagnetic power to control distortion.
Background technology
Aspherical mirror is occupying more and more consequence in optical system now, yet the processing of aspherical mirror is difficult to solution always, and traditional ring is thrown technology and cannot be processed at all, and small tool polishing efficiency is low, and very easily introduces medium-high frequency composition, affects quality of optical imaging.In order to solve this difficult problem, first the large mirror of Steward observatory of U.S. Arizona university laboratory utilizes strain disc polishing technology to complete the processing of a collection of large aspherical mirror, and the units such as domestic Photoelectric Technology Inst., Chinese Academy of Sciences and Chinese Academy Of Sciences Country Observatory Nanjing Astronomical Optics Technology Research Institute have also successively carried out the research of strain disc polishing technology.Without exception, the strain disc of above-mentioned unit all adopts servomotor to pull the mode of card distortion, controls complexity, and cost is high, and must use slip ring to solve the problem of strain disc time rotational coiling.
Summary of the invention
The technical problem to be solved in the present invention is: the technical problem existing for prior art, the invention provides a kind of simple in structure, with low cost, be easy to control, control accuracy is high, strong adaptability, do not need to arrange initiatively strain disc of electromagnetic drive type that slip ring just can solve coiling problem.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
Electromagnetic drive type is a strain disc initiatively, comprises rotating shaft and the chassis affixed with rotating shaft, is provided with the face shape adjusting device that changes chassis shape by non-contact electromagnetic power between described rotating shaft and chassis.
As a further improvement on the present invention:
Described shape adjusting device comprises a plurality of electromagnet and a plurality of suction disc, and described a plurality of electromagnet are circumferentially evenly arranged around the shaft, and are fixedly installed; Described a plurality of suction disc is evenly arranged along the periphery on described chassis, and is fixed on chassis.
The quantity of described electromagnet is consistent with the quantity of suction disc and be equipped with more than 12.
Described rotating shaft is outer is connected to a polygon fixed leg by bearing holder (housing, cover), and the limit number of described polygon fixed leg is consistent with the quantity of electromagnet, and an electromagnet is installed respectively on each limit of polygon fixed leg.
Described chassis comprises chassis main body and is layed in the polishing glue of chassis main body lower surface.
Described polishing glue ringwise or polygon.
The machined surface of described polishing glue is provided with the groove being criss-cross arranged.
Described shape adjusting device also comprises the face shape Control Component regulating according to the real-time shape on described chassis.
Described shape Control Component comprises controller, data collecting card, magnet driver, dc source, leading sensor processor and a plurality of displacement transducer, described a plurality of displacement transducer is divided into each limit of polygon fixed leg or the top of each electromagnet and detects the displacement of suction disc, described leading sensor processor is connected with displacement transducer and gathers displacement signal and send displacement signal to controller by data collecting card, described controller is adjusted the pwm signal dutycycle of magnet driver according to displacement signal, described magnet driver is adjusted the drive current of electromagnet according to the variation of pwm signal dutycycle.
Described displacement transducer is the one end away from chassis near suction disc.
Compared with prior art, the invention has the advantages that:
Electromagnetic drive type of the present invention is the strain disc multi-motions such as moving and planetary motion that can do rotation movement, flat turn under the drive of machine tool chief axis initiatively, face type adjusting device changes the shape on chassis by non-contact electromagnetic power, than tradition, adopt servomotor to pull the mode of distortion, do not need to arrange slip ring and just can solve coiling problem, reduced cost, it adopts electromagnetic force control to have and is easy to control, control accuracy is high, low cost and other advantages.
Accompanying drawing explanation
Fig. 1 is plan structure schematic diagram of the present invention.
Fig. 2 is the mounting structure schematic diagram of electromagnet, suction disc and displacement transducer in the present invention.
Fig. 3 is that in Fig. 2, A-A analyses and observe structure for amplifying schematic diagram.
Fig. 4 is the perspective view of electromagnet, suction disc and displacement transducer in the present invention.
Fig. 5 is the perspective view of polygon fixed leg in the present invention.
Fig. 6 is the perspective view of Application Example of the present invention.
Fig. 7 is the structural representation of annular polishing glue in the present invention.
Fig. 8 is the structural representation of polygon polishing glue in the present invention.
Fig. 9 is the distortion schematic diagram on chassis in the present invention.
Figure 10 is the schematic diagram of Control Component in the present invention.
Marginal data:
1, rotating shaft; 11, bearing; 12, polygon fixed leg; 121, lightening hole; 122, shoulder block; 13, connecting plate; 14, locking nut; 15, the shaft shoulder; 16, upper cover plate; 17, lower cover; 2, chassis; 21, chassis main body; 22, polishing glue; 221, groove; 3, Control Component; 31, controller; 32, data collecting card; 33, magnet driver; 34, dc source; 35, leading sensor processor; 36, real-time control software; 37, displacement transducer; 4, electromagnet; 5, suction disc.
The specific embodiment
Below with reference to the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 to Figure 10 shows initiatively a kind of embodiment of strain disc of electromagnetic drive type of the present invention, comprise rotating shaft 1 and discoid chassis 2,2 centers, chassis are provided with one section of projecting shaft, projecting shaft is connected with the bottom of rotating shaft 1 by shaft coupling, the top of rotating shaft 1 is provided with the shaft coupling for connecting machine tool main shaft, between rotating shaft 1 and chassis 2, be provided with the face shape adjusting device that changes chassis 2 shapes by non-contact electromagnetic power, this face shape adjusting device comprises a plurality of electromagnet 4 and a plurality of suction disc 5, a plurality of electromagnet 41 are circumferentially evenly arranged around the shaft, and are fixedly installed; A plurality of suction discs 5 are evenly arranged along the periphery on described chassis 2, and are fixed on chassis 2.The large I of drive current that changes each electromagnet 4 changes the size to suction disc 5 attractions, and then can change the deflection on chassis 2.This strain disc can be under the drive of machine tool chief axis, the multi-motions such as moving and planetary motion do rotation movement, flat turn, and electromagnet 4 maintains static, do not need to arrange slip ring and just can solve coiling problem, reduced cost, it adopts mode of electromagnetic force control also to have and is easy to control, control accuracy is high, low cost and other advantages.This strain disc can adapt to the low order aberrations such as the out of focus, astigmatism, coma in aspherical mirror aperture, strong adaptability.
In the present embodiment, electromagnet 4 and suction disc 5 are equipped with 12, 12 even intervals of suction disc 5 are connected in the week on chassis 2 along (while specifically implementing, along chassis, 2 circumferential edge is along being provided with a plurality of even spaced apart screwed holes, three screwed holes are one group, each suction disc 5 is affixed by screw and one group of screwed hole), in rotating shaft 1, by pair of bearings 11, be arranged with a polygon fixed leg 12, because strain disc work in-process need to bear larger axial load, therefore bearing 11 adopts angular contact bearing, stuck in order to prevent from being heated, two bearings 11 adopt the fixing Back-to-back installation in two ends, as shown in Figure 3, two bearing 11 inner rings are fixing by the shaft shoulder 15 in locking nut 14 and rotating shaft 1, outer ring is by shoulder block 122 location that arrange on polygon fixed leg 12, upper cover plate 16 is set and lower cover 17 is fixed, upper cover plate 16 and lower cover 17 also have the effect of isolation dust simultaneously.In addition, on polygon fixed leg 12, be also provided with a plurality of lightening holes 121.The polygon fixed leg 12 of the present embodiment is dodecagon post, the limit of the shell of each electromagnet 4 by connecting plate 13 and polygon fixed leg 12 is connected and synchronizes rotation with polygon fixed leg 12, electromagnet 4, connecting plate 13 adopts screw fastening to be connected with polygon fixed leg 12 threes, between electromagnet 4 and suction disc 5, leave certain air gap, both are cylindric by relative end face, and concentric with chassis 2, when mounted, by the mounting hole arranging on connecting plate 13, regulate air gap value, the size of this air gap value is selected according to electromagnet 4 suction sizes, generally can be controlled in 1mm left and right.
In concrete application, the quantity of electromagnet 4 and suction disc 5 also can be other value, and concrete quantity is definite according to the size of chassis 2 diameters, and the diameter on chassis 2 is larger, and installable electromagnet 4 and suction disc 5 quantity are more, and control accuracy is also higher.Generally speaking, the effective diameter on chassis 2 is 1/5 ~ 1/2 of aspherical mirror bore to be processed.As shown in Figure 9, when suction disc 5 is subject to the pressure of 70KPa, if chassis 2 is the aluminium dish of diameter 250mm, thickness 6mm, its distortion is about 0.00307m.
In the present embodiment, chassis 2 comprises chassis main body 21 and the polishing glue 22 that is layed in chassis main body 21 lower surfaces, and chassis main body 21 is alumiaum article, and it is in the form of annular discs, and has larger diameter, and its working (machining) efficiency is high.Polishing glue 22 be shaped as the aspheric face of receiving recently to be processed, can at utmost guarantee the laminating of chassis 2 and mirror shape, the shape of chassis main body 21 is also the aspheric face of receiving recently to be processed, can guarantee that like this polishing glue 22 thickness of everywhere all equate.Polishing glue 22, according to processing request Rational choice, can be used diamond pellet sheet, hard abrasive band etc. in the fine grinding stage, in the polishing stage, can use polishing pitch, polyurethane etc.Polishing glue 22 also can be made into different shapes, for example, annular or polygon as shown in Figure 8 as shown in Figure 7, difform polishing glue 22 modification capabilities are different, can repair different face shape errors.Meanwhile, on the machined surface of polishing glue 22, be provided with the groove 221 being criss-cross arranged.
In the present embodiment, as shown in figure 10, Control Component 3 comprises controller 31, data collecting card 32, magnet driver 33, dc source 34, leading sensor processor 35, real-time control software 36 and a plurality of displacement transducer 37, the quantity of displacement transducer 37 is consistent with the quantity of electromagnet 4, the bottom of each electromagnet 4 is equiped with a displacement transducer 37, after installing, the displacement signal of suction disc 5 is arranged and is gathered at displacement transducer 37 and suction disc 5 intervals, dc source 34 is given electromagnet 4 and 35 power supplies of leading sensor processor, electromagnet 4 drives by magnet driver 33, leading sensor processor 35 gathers the displacement signal of displacement transducer 37, and be delivered to controller 31 by data collecting card 32, 36 pairs of these displacement signals of controller 31 operation real-time control softwares carry out analyzing and processing and according to the pwm signal dutycycle of result regulating magnet driver 33, and then control the size of electromagnet 4 coil currents (drive current), realize the object of controlling electromagnet 4 attraction sizes.The attraction of 4 pairs of suction discs 5 of electromagnet is different, size of gaps is between the two also different, displacement transducer 37 by real-time measurement feedback to controller 31, controller 31 is constantly adjusted the pwm signal dutycycle of magnet driver 33, control in real time the size of electromagnet 4 drive currents, and then change 4 pairs of suction discs of electromagnet, 5 attractions sizes, realize to chassis 2 deflections precisely, control reliably.
In the present embodiment, the displacement transducer 37 of each electromagnet 4 is fixedly installed in the upper end of its shell, displacement transducer 37 adopts high precision electro eddy current sensor, certainty of measurement can be accurate to 0.4 μ m, suction disc 5 is just in time detected away from the displacement of 2 one end, chassis (upper end) in its installation site, and detection sensitivity is high.Meanwhile, make the linear mid point that the distance between displacement transducer 37 and suction disc 5 is measurement, the data linearity now obtaining is best.
In concrete enforcement, the present invention completes process by following step.
Step 1, goes out to approach most the radius of a ball according to the minute surface calculation of parameter of aspherical mirror to be processed, and according to processing request, determines the diameter, polish abrasive, polishing glue 22 types on chassis 2 etc.
Step 2, calculates chassis 2 in the speed of service of diverse location according to aspheric face shape error.
Step 3, assembles chassis 2, and completes electrical wiring, debugs the performance of each electromagnet 4, and records relevant parameter.
Step 4, energising, makes chassis 2 pretensions (pretension amount calculates by aspherical degree), records the air gap value of each electromagnet 4 and the rule between electric current, and under rotation condition, records the air gap Changing Pattern between each electromagnet 4 and different suction disc 5.
Step 5, chassis 2 is moved under given path and speed, by chassis 2, the relative position on aspherical mirror calculates the now required face shape in chassis 2 to real-time control software 36, the difference of the face shape after this face shape and chassis 2 pretensions is the deflection on chassis 2, real-time control software 36 is controlled deformation device by deformation distribution to each electromagnetic force, displacement transducer 37 in real time by measurement feedback to controller 31, real-time control software 36 is constantly adjusted the pwm signal dutycycle of magnet driver 33 according to controller 31 parameters, thereby accurately controls size of current.
The above is only the preferred embodiment of the present invention, and protection scope of the present invention is also not only confined to above-described embodiment, and all technical schemes belonging under thinking of the present invention all belong to protection scope of the present invention.Should propose, for those skilled in the art, improvements and modifications without departing from the principles of the present invention, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (10)
1. electromagnetic drive type strain disc initiatively, comprise rotating shaft (1) and the chassis (2) affixed with rotating shaft (1), it is characterized in that: between described rotating shaft (1) and chassis (2), be provided with the face shape adjusting device that changes chassis (2) shape by non-contact electromagnetic power, described shape adjusting device comprises electromagnet (4), and described electromagnet (4) maintains static.
2. electromagnetic drive type according to claim 1 strain disc initiatively, it is characterized in that: described shape adjusting device comprises a plurality of electromagnet (4) and a plurality of suction disc (5), described a plurality of electromagnet (4) around the shaft (1) is circumferentially evenly arranged, and described electromagnet (4) is fixing by connecting plate (13) and polygon fixed leg (12); Described a plurality of suction disc (5) is evenly arranged along the periphery of described chassis (2), and is fixed on chassis (2).
3. electromagnetic drive type according to claim 2 strain disc initiatively, is characterized in that: the quantity of the quantity of described electromagnet (4) and suction disc (5) is consistent and be equipped with more than 12.
4. electromagnetic drive type according to claim 3 strain disc initiatively, it is characterized in that: described rotating shaft (1) is outer is socketed with a polygon fixed leg (12) by bearing (11), the limit number of described polygon fixed leg (12) is consistent with the quantity of described electromagnet (4), and a described electromagnet (4) is installed respectively on each limit of polygon fixed leg (12).
5. electromagnetic drive type active strain disc according to claim 4, is characterized in that: described chassis (2) comprise chassis main body (21) and are layed in the polishing glue (22) of chassis main body (21) lower surface.
6. electromagnetic drive type according to claim 5 strain disc initiatively, is characterized in that: described polishing glue (22) ringwise or polygon.
7. electromagnetic drive type active strain disc according to claim 6, is characterized in that: the machined surface of described polishing glue (22) is provided with the groove (221) being criss-cross arranged.
8. according to the electromagnetic drive type active strain disc described in any one in claim 1 to 7, it is characterized in that: described shape adjusting device also comprises the face shape Control Component (3) regulating according to the real-time shape of described chassis (2).
9. electromagnetic drive type according to claim 8 strain disc initiatively, it is characterized in that: described shape Control Component (3) comprises controller (31), data collecting card (32), magnet driver (33), dc source (34), leading sensor processor (35) and a plurality of displacement transducer (37), described a plurality of displacement transducer (37) is divided into each limit of polygon fixed leg (12) or the top of each electromagnet (4) and detects the displacement of suction disc (5), described leading sensor processor (35) is connected with displacement transducer (37) and gathers displacement signal and send displacement signal to controller (31) by data collecting card (32), described controller (31) is adjusted the pwm signal dutycycle of magnet driver (33) according to displacement signal, described magnet driver (33) is adjusted the drive current of electromagnet (4) according to the variation of pwm signal dutycycle.
10. electromagnetic drive type active strain disc according to claim 9, is characterized in that: described displacement transducer (37) is the one end away from chassis (2) near suction disc (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210266684.0A CN102794689B (en) | 2012-07-30 | 2012-07-30 | Electromagnetic drive type active stress disc |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210266684.0A CN102794689B (en) | 2012-07-30 | 2012-07-30 | Electromagnetic drive type active stress disc |
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| CN102794689A CN102794689A (en) | 2012-11-28 |
| CN102794689B true CN102794689B (en) | 2014-09-17 |
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| CN201210266684.0A Active CN102794689B (en) | 2012-07-30 | 2012-07-30 | Electromagnetic drive type active stress disc |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103317413B (en) * | 2013-07-04 | 2016-03-30 | 北京理工大学 | Electromagnetism self-excited vibration ER effect composite polishing method and device |
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|---|---|---|---|---|
| CN1262639A (en) * | 1998-01-30 | 2000-08-09 | 微光学设计公司 | Method and apparatus for polishing ophthalmic lenses |
| CN101326031A (en) * | 2006-04-27 | 2008-12-17 | 埃西勒国际通用光学公司 | Optical surface surfacing tool |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61125762A (en) * | 1984-11-22 | 1986-06-13 | Olympus Optical Co Ltd | Tool grinding method |
| JP2002172550A (en) * | 2000-12-06 | 2002-06-18 | Nikon Corp | Polishing device, polishing method and workpiece obtained with use of the device or method |
| JP2006175572A (en) * | 2004-12-24 | 2006-07-06 | Canon Inc | Polishing tool and polishing method |
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2012
- 2012-07-30 CN CN201210266684.0A patent/CN102794689B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1262639A (en) * | 1998-01-30 | 2000-08-09 | 微光学设计公司 | Method and apparatus for polishing ophthalmic lenses |
| CN101326031A (en) * | 2006-04-27 | 2008-12-17 | 埃西勒国际通用光学公司 | Optical surface surfacing tool |
Non-Patent Citations (9)
| Title |
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| > * |
| < * |
| .2003,(第2期),第19-23页. * |
| JP昭61-125762A 1986.06.13 |
| JP特开2002-172550A 2002.06.18 |
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