CN102787346B - Plasma cleaning process before clean and environment-friendly plated film - Google Patents
Plasma cleaning process before clean and environment-friendly plated film Download PDFInfo
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- CN102787346B CN102787346B CN201210270427.4A CN201210270427A CN102787346B CN 102787346 B CN102787346 B CN 102787346B CN 201210270427 A CN201210270427 A CN 201210270427A CN 102787346 B CN102787346 B CN 102787346B
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- 238000004140 cleaning Methods 0.000 title claims abstract description 107
- 238000000034 method Methods 0.000 title claims abstract description 70
- 230000008569 process Effects 0.000 title claims abstract description 65
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 claims abstract description 28
- 239000003792 electrolyte Substances 0.000 claims abstract description 20
- 230000002000 scavenging effect Effects 0.000 claims abstract description 17
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000004202 carbamide Substances 0.000 claims abstract description 16
- 238000004090 dissolution Methods 0.000 claims abstract description 16
- 229910000030 sodium bicarbonate Inorganic materials 0.000 claims abstract description 14
- 235000017557 sodium bicarbonate Nutrition 0.000 claims abstract description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 13
- 239000010439 graphite Substances 0.000 claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 239000008151 electrolyte solution Substances 0.000 claims description 10
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 claims description 7
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 claims description 7
- 239000004141 Sodium laurylsulphate Substances 0.000 claims description 7
- 235000019333 sodium laurylsulphate Nutrition 0.000 claims description 7
- 229910052938 sodium sulfate Inorganic materials 0.000 claims description 7
- 235000011152 sodium sulphate Nutrition 0.000 claims description 7
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 5
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052921 ammonium sulfate Inorganic materials 0.000 claims description 4
- 235000011130 ammonium sulphate Nutrition 0.000 claims description 4
- WCTAGTRAWPDFQO-UHFFFAOYSA-K trisodium;hydrogen carbonate;carbonate Chemical compound [Na+].[Na+].[Na+].OC([O-])=O.[O-]C([O-])=O WCTAGTRAWPDFQO-UHFFFAOYSA-K 0.000 claims 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract description 16
- 229910000029 sodium carbonate Inorganic materials 0.000 abstract description 8
- 239000002253 acid Substances 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 2
- -1 highly basic Substances 0.000 abstract description 2
- 238000003754 machining Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 18
- 238000005868 electrolysis reaction Methods 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 10
- 238000007747 plating Methods 0.000 description 10
- 238000005406 washing Methods 0.000 description 9
- 239000010935 stainless steel Substances 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000005070 sampling Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000002313 adhesive film Substances 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- HXFVOUUOTHJFPX-UHFFFAOYSA-N alumane;zinc Chemical compound [AlH3].[Zn] HXFVOUUOTHJFPX-UHFFFAOYSA-N 0.000 description 1
- 238000007630 basic procedure Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011538 cleaning material Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210270427.4A CN102787346B (en) | 2012-07-31 | 2012-07-31 | Plasma cleaning process before clean and environment-friendly plated film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210270427.4A CN102787346B (en) | 2012-07-31 | 2012-07-31 | Plasma cleaning process before clean and environment-friendly plated film |
Publications (2)
Publication Number | Publication Date |
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CN102787346A CN102787346A (en) | 2012-11-21 |
CN102787346B true CN102787346B (en) | 2015-12-02 |
Family
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CN201210270427.4A Expired - Fee Related CN102787346B (en) | 2012-07-31 | 2012-07-31 | Plasma cleaning process before clean and environment-friendly plated film |
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CN (1) | CN102787346B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103498166A (en) * | 2013-09-24 | 2014-01-08 | 重庆市科学技术研究院 | Liquid phase plasma surface cleaning method for tungsten-rhenium wire |
CN105386068A (en) * | 2015-10-14 | 2016-03-09 | 重庆低回科技有限公司 | Liquid phase plasma rust-removal, decontamination and surface modification method |
CN105543876B (en) * | 2015-12-09 | 2019-01-04 | 重庆市科学技术研究院 | The injecting type liquid phase plasma derusting decontamination of environmental protection and energy saving and surface modifying method |
CN111389815A (en) * | 2020-04-24 | 2020-07-10 | 中科九微科技有限公司 | Cleaning equipment and method for cleaning thin film type vacuum gauge sediment removing device |
CN113560276A (en) * | 2021-05-26 | 2021-10-29 | 苏州安洁科技股份有限公司 | Method for repairing appearance defects of surface film layer of product |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1244216A1 (en) * | 1983-01-11 | 1986-07-15 | Всесоюзный Ордена Трудового Красного Знамени Научно-Исследовательский Институт Сельскохозяйственного Машиностроения Им.В.П.Горячкина | Method of cleaning metal parts |
DE4023466C1 (en) * | 1990-07-24 | 1991-06-27 | Hoesch Stahl Ag, 4600 Dortmund, De | Electrical coating of steel strip - using zinc on zinc-nickel alloy then treating strip as anode in electrolyte soln. |
EP0657564A1 (en) * | 1993-12-09 | 1995-06-14 | Dario Felisari | Process for cleaning and conditioning the surface of an electrolytically oxidizable metal alloy by hyperanodizing said surface |
CN1376216A (en) * | 1999-07-30 | 2002-10-23 | 丹尼拉·维塔列维奇·雅可夫 | An improved process and apparatus for cleaning and/or coating metal surfaces using electro-plasma technology |
CN1962963A (en) * | 2006-10-31 | 2007-05-16 | 锦西化工机械(集团)有限责任公司 | Method for removing iron dross on the surface of stainless steel by using electrolysis technology |
CN101591798A (en) * | 2008-06-01 | 2009-12-02 | 比亚迪股份有限公司 | A kind of metalwork and surface treatment method thereof |
CN101824645A (en) * | 2010-05-14 | 2010-09-08 | 河海大学常州校区 | Method for eliminating oxide skins on stainless steel surface by micro-arc |
CN101845662A (en) * | 2009-03-27 | 2010-09-29 | 比亚迪股份有限公司 | Magnesium alloy surface treating method and magnesium alloy polished by same |
CN102337580A (en) * | 2011-09-21 | 2012-02-01 | 合肥金盟工贸有限公司 | Ion liquid polishing solution for electrochemically polishing magnesium alloy and preparation method thereof |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1399710A (en) * | 1972-11-08 | 1975-07-02 | Electricity Council | Electrolytic cleaning of metal surfaces |
-
2012
- 2012-07-31 CN CN201210270427.4A patent/CN102787346B/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1244216A1 (en) * | 1983-01-11 | 1986-07-15 | Всесоюзный Ордена Трудового Красного Знамени Научно-Исследовательский Институт Сельскохозяйственного Машиностроения Им.В.П.Горячкина | Method of cleaning metal parts |
DE4023466C1 (en) * | 1990-07-24 | 1991-06-27 | Hoesch Stahl Ag, 4600 Dortmund, De | Electrical coating of steel strip - using zinc on zinc-nickel alloy then treating strip as anode in electrolyte soln. |
EP0657564A1 (en) * | 1993-12-09 | 1995-06-14 | Dario Felisari | Process for cleaning and conditioning the surface of an electrolytically oxidizable metal alloy by hyperanodizing said surface |
CN1376216A (en) * | 1999-07-30 | 2002-10-23 | 丹尼拉·维塔列维奇·雅可夫 | An improved process and apparatus for cleaning and/or coating metal surfaces using electro-plasma technology |
CN1962963A (en) * | 2006-10-31 | 2007-05-16 | 锦西化工机械(集团)有限责任公司 | Method for removing iron dross on the surface of stainless steel by using electrolysis technology |
CN101591798A (en) * | 2008-06-01 | 2009-12-02 | 比亚迪股份有限公司 | A kind of metalwork and surface treatment method thereof |
CN101845662A (en) * | 2009-03-27 | 2010-09-29 | 比亚迪股份有限公司 | Magnesium alloy surface treating method and magnesium alloy polished by same |
CN101824645A (en) * | 2010-05-14 | 2010-09-08 | 河海大学常州校区 | Method for eliminating oxide skins on stainless steel surface by micro-arc |
CN102337580A (en) * | 2011-09-21 | 2012-02-01 | 合肥金盟工贸有限公司 | Ion liquid polishing solution for electrochemically polishing magnesium alloy and preparation method thereof |
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CN102787346A (en) | 2012-11-21 |
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