CN102762954B - 改进的微机械共振器 - Google Patents

改进的微机械共振器 Download PDF

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Publication number
CN102762954B
CN102762954B CN201180010540.2A CN201180010540A CN102762954B CN 102762954 B CN102762954 B CN 102762954B CN 201180010540 A CN201180010540 A CN 201180010540A CN 102762954 B CN102762954 B CN 102762954B
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CN
China
Prior art keywords
resonator structure
resonator
given
frequency
characteristic
Prior art date
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Active
Application number
CN201180010540.2A
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English (en)
Chinese (zh)
Other versions
CN102762954A (zh
Inventor
维耶勒·卡亚卡里
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
VTI Technologies Oy
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Publication date
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Publication of CN102762954A publication Critical patent/CN102762954A/zh
Application granted granted Critical
Publication of CN102762954B publication Critical patent/CN102762954B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2484—Single-Ended Tuning Fork resonators with two fork tines, e.g. Y-beam cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2494—H-shaped, i.e. two tuning forks with common base
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
CN201180010540.2A 2010-02-22 2011-02-18 改进的微机械共振器 Active CN102762954B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20105168 2010-02-22
FI20105168A FI124103B (fi) 2010-02-22 2010-02-22 Parannettu mikromekaaninen resonaattori
PCT/FI2011/050152 WO2011101547A1 (en) 2010-02-22 2011-02-18 Improved micromechanical resonator

Publications (2)

Publication Number Publication Date
CN102762954A CN102762954A (zh) 2012-10-31
CN102762954B true CN102762954B (zh) 2015-11-25

Family

ID=41727715

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180010540.2A Active CN102762954B (zh) 2010-02-22 2011-02-18 改进的微机械共振器

Country Status (8)

Country Link
US (1) US8723611B2 (https=)
EP (1) EP2539999B1 (https=)
JP (1) JP5873811B2 (https=)
KR (1) KR101738869B1 (https=)
CN (1) CN102762954B (https=)
FI (1) FI124103B (https=)
TW (1) TWI511447B (https=)
WO (1) WO2011101547A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9300227B2 (en) * 2013-06-05 2016-03-29 Silicon Laboratories Inc. Monolithic body MEMS devices
CN104370272B (zh) * 2014-10-30 2016-07-06 无锡微奥科技有限公司 一种mems自对准高低梳齿及其制造方法
CN106932608B (zh) * 2015-12-25 2020-02-18 上海矽睿科技有限公司 加速度传感单元以及加速度计
US9966966B2 (en) 2016-01-20 2018-05-08 Uchicago Argonne, Llc Nonlinearity induced synchronization enhancement in mechanical oscillators
US10812046B2 (en) * 2018-02-07 2020-10-20 Murata Manufacturing Co., Ltd. Micromechanical resonator having reduced size

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3727151A (en) * 1972-04-17 1973-04-10 Bulova Watch Co Inc Integrated circuit for electronic timepieces
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US6874363B1 (en) * 2003-10-31 2005-04-05 Honeywell International, Inc. Trapped charge field bias vibrating beam accelerometer
US20050150297A1 (en) * 2004-01-13 2005-07-14 Farrokh Ayazi High-resolution in-plane tuning fork gyroscope and methods of fabrication
US20050242904A1 (en) * 2004-04-28 2005-11-03 Markus Lutz Method for adjusting the frequency of a MEMS resonator
US20090189481A1 (en) * 2008-01-24 2009-07-30 Vti Technologies Oy Micromechanical resonator

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1009018A (en) * 1911-08-15 1911-11-14 Bancroft G Braine Game-board.
GB1441192A (en) * 1973-03-29 1976-06-30 Seiko Instr & Electronics Oscillator
FR2452714A1 (fr) 1979-03-30 1980-10-24 Thomson Csf Accelerometre a ondes elastiques
JPS6316170Y2 (https=) * 1980-06-11 1988-05-09
JPH0540224A (ja) * 1990-07-26 1993-02-19 Fuji Photo Film Co Ltd 走査型顕微鏡
US5839062A (en) 1994-03-18 1998-11-17 The Regents Of The University Of California Mixing, modulation and demodulation via electromechanical resonators
JPH11271066A (ja) * 1998-01-21 1999-10-05 Denso Corp 角速度センサ
EP1217735B1 (en) * 2000-12-21 2007-11-14 ETA SA Manufacture Horlogère Suisse Time base comprising an integrated micromechanical tuning fork resonator
JP4219737B2 (ja) * 2003-05-30 2009-02-04 リバーエレテック株式会社 圧電振動子
ATE390759T1 (de) * 2005-06-09 2008-04-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit kleinen abmessungen
ATE421799T1 (de) * 2005-06-09 2009-02-15 Eta Sa Mft Horlogere Suisse Kompakter piezoelektrischer resonator
US20090160581A1 (en) * 2007-12-21 2009-06-25 Paul Merritt Hagelin Temperature Stable MEMS Resonator
JP4538503B2 (ja) 2008-01-18 2010-09-08 Ｏｋｉセミコンダクタ株式会社 共振器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3727151A (en) * 1972-04-17 1973-04-10 Bulova Watch Co Inc Integrated circuit for electronic timepieces
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US6874363B1 (en) * 2003-10-31 2005-04-05 Honeywell International, Inc. Trapped charge field bias vibrating beam accelerometer
US20050150297A1 (en) * 2004-01-13 2005-07-14 Farrokh Ayazi High-resolution in-plane tuning fork gyroscope and methods of fabrication
US20050242904A1 (en) * 2004-04-28 2005-11-03 Markus Lutz Method for adjusting the frequency of a MEMS resonator
US20090189481A1 (en) * 2008-01-24 2009-07-30 Vti Technologies Oy Micromechanical resonator

Also Published As

Publication number Publication date
JP2013520645A (ja) 2013-06-06
FI20105168A0 (fi) 2010-02-22
FI20105168L (fi) 2011-08-23
US8723611B2 (en) 2014-05-13
EP2539999A1 (en) 2013-01-02
KR101738869B1 (ko) 2017-05-23
JP5873811B2 (ja) 2016-03-01
WO2011101547A1 (en) 2011-08-25
TWI511447B (zh) 2015-12-01
KR20130006629A (ko) 2013-01-17
EP2539999A4 (en) 2018-01-10
FI124103B (fi) 2014-03-14
TW201203856A (en) 2012-01-16
US20110210800A1 (en) 2011-09-01
EP2539999B1 (en) 2019-06-19
CN102762954A (zh) 2012-10-31

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Free format text: CORRECT: APPLICANT; FROM: YTI HAMLIN OY TO: CUNTIAN ELECTRONICS CO., LTD.

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Effective date of registration: 20210331

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Address before: Wanta, Finland

Patentee before: MURATA ELECTRONICS OY

TR01 Transfer of patent right