CN102759799A - Laser beam shaping method and device - Google Patents
Laser beam shaping method and device Download PDFInfo
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- CN102759799A CN102759799A CN201110115535XA CN201110115535A CN102759799A CN 102759799 A CN102759799 A CN 102759799A CN 201110115535X A CN201110115535X A CN 201110115535XA CN 201110115535 A CN201110115535 A CN 201110115535A CN 102759799 A CN102759799 A CN 102759799A
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Abstract
The invention discloses a laser beam shaping method and device, wherein the laser beam shaping method comprises the following steps of: providing a laser beam; reflecting the laser beam to an optical device with a focusing characteristic through an optical reflector to ensure that the laser beam focuses to obtain a light spot; and enabling the optical reflector to move at a preset track within preset time to obtain a spot array with a preset shape and/or a power density with preset size and distribution. According to the laser beam shaping method and device provided by the embodiment of the invention, the shape and/or the power density with the preset size and distribution of a spot array are changed according to the movement track and the movement speed of the optical reflector in real time.
Description
Technical field
The present invention relates to a kind of laser beam shaping method and laser beam integer type device.
Background technology
The laser beam integer is to change an incoming laser beam that is approximately Gaussian distribution accurately into and have almost the laser beam of distribute power arbitrarily, like circular or rectangular uniform beam, or other complicacies light beam of distribute power arbitrarily almost.Application comprises LASER HEAT TREATMENT (cut, boring, welding, remelting, sclerosis apply etc.), the flash annealing of machinery and electron device, laser direct-writing head, optical signalling processing etc.Traditional laser beam integer be through with laser beam irradiation on diffraction optical device, through diffraction output required form, array and corresponding power density size and the hot spot that distributes, and shine workpiece to be machined surface or inner through the subsequent optical device.
But; Can not the satisfy the demand application scenario of real time altering light spot shape and/or distribute power of traditional laser beam integer optical device; For example, for different workpiece working motion direction, need process with distributing with light spot shape and/or power density size that direction of motion changes; Such as synthetic material, need select different light spot shapes and/or power density size to process again according to unlike material with distributing for unlike material and thickness material stack.
Traditionally through increase a plurality of diffraction optical device groups mechanically changing method improve above-mentioned situation, still, still can't change and the shape and power density size and distribution of material properties real time altering hot spot according to the direction of motion of for example processing object.
Summary of the invention
The present invention is intended to one of solve the problems of the technologies described above at least.
For this reason, one object of the present invention is to propose a kind of laser beam shaping method, and this laser beam shaping method can change the shape and/or the power density of spot array as required in real time.
Another object of the present invention is to propose a kind of laser beam integer type device, this laser beam integer type device can change the shape and/or the power density of spot array as required in real time.
In order to achieve the above object, the laser beam shaping method according to first aspect present invention embodiment may further comprise the steps: laser beam is provided; Laser beam is reflexed on the optical device with focus characteristics so that the focusing of said laser beam obtains hot spot through reflective optical device; Said reflective optical device is moved with spot array and/or the predetermined size and the power density that distributes that obtains reservation shape with desired trajectory in presumptive area.
Laser beam shaping method according to the above embodiment of the present invention; Can be according to the direction of relative movement and the material properties of processing object; Adjust the movement locus and the movement velocity of reflective optical device in real time, and then change the shape and/or the power density of spot array.
In addition, laser beam shaping method according to the above embodiment of the present invention can also have following additional technical feature:
Laser beam shaping method according to an embodiment of the invention can also comprise through diffraction optical device said laser beam is diffracted on the said reflective optical device so that the light beam that incides on the said reflective optical device has predetermined beam shape.
The spot array of said reservation shape is a kind of in circle, rectangle, ellipse, linear and their combination in any.
Said reflective optical device can comprise first catoptron and second catoptron; Wherein first driving mechanism drives said first mirror motion with first desired trajectory; Second driving mechanism drives second mirror motion with second desired trajectory; Said first catoptron reflexes to said second catoptron with said laser beam, and said second catoptron reflexes to said laser beam on the said optical device with focus characteristics.
Said reflective optical device can also be merely a catoptron, and said catoptron is installed on the motion platform to be driven by said motion platform with said desired trajectory motion.Wherein, said motion platform is the piezoelectric ceramics motion platform.
Said optical device with focus characteristics can be focus lamp, and preferably, said focus lamp is the f-theta mirror.
In order to achieve the above object; Laser beam integer type device according to second aspect present invention embodiment comprises: be used to send LASER Light Source, the reflective optical device of laser beam, the optical device with focus characteristics and driving mechanism; Wherein said reflective optical device is used for said laser beam reflexed on the said optical device with focus characteristics and obtains hot spot so that said laser beam focuses on through said optical device with focus characteristics, and said driving mechanism is used to drive in the inherent at the fixed time predetermined zone of said reflective optical device with spot array and/or the predetermined size and the power density that distribute of desired trajectory motion to obtain reservation shape.
Laser beam integer type device according to the above embodiment of the present invention; Can be according to the direction of relative movement and the material properties of processing object; Adjust the movement locus and the movement velocity of reflective optical device in real time, and then change the shape and/or the power density of spot array.And the laser beam integer type device of the embodiment of the invention is simple in structure, is easy to make, and production cost is low.
In addition, the laser beam integer type device according to the embodiment of the invention can also have following additional technical feature:
Laser beam integer type device according to the embodiment of the invention can also comprise diffraction optical device, and said diffraction optical device is used for said laser beam is diffracted on the said reflective optical device so that the laser beam that incides on the said reflective optical device has predetermined beam shape.
Said reflective optical device can comprise first catoptron and second catoptron; Said driving mechanism comprises first driving mechanism and second driving mechanism; Wherein first driving mechanism drives said first mirror motion with first desired trajectory; Said second driving mechanism drives second mirror motion with second desired trajectory; Said first catoptron reflexes to said second catoptron with said laser beam, and said second catoptron reflexes to said laser beam on the said optical device with focus characteristics.Wherein, said first and second driving mechanisms are motor.
Said reflective optical device can also be catoptron, and said driving mechanism is a motion platform, and said catoptron is installed on the said motion platform to be driven by said motion platform with said desired trajectory motion.Wherein, said motion platform is the piezoelectric ceramics platform.
Said optical device with focus characteristics can be focus lamp, and preferably, said focus lamp is the f-theta mirror.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize through practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 is the synoptic diagram of laser beam integer type device according to an embodiment of the invention;
Fig. 2 is the synoptic diagram of laser beam integer type device in accordance with another embodiment of the present invention;
Fig. 3 is the synoptic diagram of the laser beam integer type device of another embodiment according to the present invention;
Fig. 4 is the line spot array that obtains through the laser beam integer type device integer according to the embodiment of the invention;
Fig. 5 is the oval-shaped spot array that obtains through the laser beam integer type device integer according to the embodiment of the invention;
Fig. 6 is the rectangular light spot array that obtains through the laser beam integer type device integer according to the embodiment of the invention;
Fig. 7 is the spot array that forms through the discrete circular light spot array combination that the laser beam integer type device integer according to the embodiment of the invention obtains;
Fig. 8 is the circular light spot array that obtains through the laser beam integer type device integer according to the embodiment of the invention; With
Fig. 9 is the schematic flow sheet according to the laser beam shaping method of the embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention; It will be appreciated that; The orientation of indications such as term " " center ", " vertically ", " laterally ", " on ", D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward " or position relation are for based on orientation shown in the drawings or position relation; only be to describe with simplifying for the ease of describing the present invention; rather than the device or the element of indication or hint indication must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " only are used to describe purpose, and can not be interpreted as indication or hint relative importance.
In description of the invention, need to prove that only if clear and definite regulation and qualification are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be to be fixedly connected, also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can link to each other indirectly through intermediary, can be the connection of two element internals.For those of ordinary skill in the art, can concrete condition understand above-mentioned term concrete implication in the present invention.
Laser beam shaping device according to the embodiment of the invention is described with reference to the drawings below.
Shown in Fig. 1-3, comprise according to the laser beam shaping device of the embodiment of the invention: be used to send LASER Light Source (not shown), the reflective optical device 2 of laser beam, optical device 3 and driving mechanism 4 with focus characteristics.
Particularly, reflective optical device 2 is used for the laser beam that LASER Light Source sends is reflexed to the optical device 3 with focus characteristics, obtains hot spot so that said laser beam focuses on through the optical device 3 with focus characteristics.Driving mechanism 4 is used to drive in the inherent at the fixed time predetermined zone of reflective optical device 2 with spot array and/or the predetermined size and the power density that distribute of desired trajectory motion to obtain reservation shape.
Describe the laser beam integer type device of the specific embodiment of the invention in detail below in conjunction with Fig. 1 to Fig. 8.
As shown in Figure 1, the laser beam integer type device comprises reflective optical device 2, focusing optics 3 and driving mechanism 4 according to an embodiment of the invention.More specifically; Reflective optical device 2 comprises first catoptron 21 and second catoptron 22; Driving mechanism 4 comprises that first driving mechanism 41 and second driving mechanism, 42, the first driving mechanisms 41 are used to drive first catoptron 21, for example drives first catoptron 21 and rotates; Second driving mechanism 42 is used to drive second catoptron 22, for example drives second catoptron 22 and rotates.
In an example of the present invention, first driving mechanism 41 and second driving mechanism 42 can be motor, and focusing optics 3 can be focus lamp, and preferably, said condensing lens is the f-theta mirror.
The laser beam 1 of incident reflexes to second catoptron, 22, the second catoptrons 22 through first catoptron 21 and laser beam 1 is reflexed on the focus lamp 3 again, and focus lamp 3 focuses on laser beam 1 on the rapidoprint 5 and forms hot spot.Can control first driving mechanism 41 through the method for programming or three-dimensionally moves with first desired trajectory with driving first catoptron, 21 two dimensions; Likewise; Can control second driving mechanism 42 through the method for programming or three-dimensionally moves with second desired trajectory with driving second catoptron, 22 two dimensions; Because the motion of first catoptron 21 and second catoptron 22 causes its reflection angle constantly to change, the position of therefore dropping on the hot spot on the rapidoprint 5 constantly changes.
Thus; Laser beam 1 is in a very short time Δ T and acceptable shape area A; Obtaining corresponding laser pulse number equably on each distinguishable location point or the line on the rapidoprint 5; So, in time Δ T and regional A, the synthetic shape on all distinguishable location points or the line promptly is the shape of laser facula array.
On the basis of the above, through controlling the energy of each point or row laser pulse, just can in time Δ T and regional A, obtain synthetic arbitrarily laser power density size and distribution.For example, through the movement velocity of controlling and driving mechanism 4, make it in regional, form N hot spot, and in another zone, form M hot spot, thereby can change the size and the distribution of the power density of laser.
As shown in Figure 2, the laser beam integer type device comprises reflective optical device 2, focusing optics 3 and driving mechanism 4 in accordance with another embodiment of the present invention.Particularly, reflective optical device 2 is a catoptron, and Drive Structure 4 is a motion platform, and focusing optics 3 is a focus lamp, and catoptron 2 is installed on the motion platform 4.Preferably, motion platform 4 can be the piezoelectric ceramics motion platform, and focus lamp 3 can be the f-theta mirror.
Thus; Laser beam 1 is in a very short time Δ T and acceptable shape area A; Obtaining corresponding laser pulse number equably on each distinguishable location point or the line on the rapidoprint 5; So, in time Δ T and regional A, the synthetic shape on all distinguishable location points or the line promptly is the shape of laser facula array.
On the basis of the above, through controlling the energy of each point or row laser pulse, just can in time Δ T and regional A, obtain synthetic arbitrarily laser power density size and distribution.For example, through the movement velocity of controlling and driving mechanism 4, make it in regional, form N hot spot, and in another zone, form M hot spot, thereby can change the size and the distribution of the power density of laser.
As shown in Figure 3, the laser beam integer type device of another embodiment comprises according to the present invention: reflective optical device 2, focusing optics 3, driving mechanism 4 and diffraction optical device 6.Particularly, reflective optical device 2 can be catoptron, and Drive Structure 4 can be motion platform, and focusing optics 3 can be focus lamp, and catoptron 2 is installed on the motion platform.Preferably, motion platform is the piezoelectric ceramics motion platform, and focus lamp is the f-theta mirror.
Similar with embodiment 1 and embodiment 2; Laser beam 1 is in a very short time Δ T and acceptable shape area A; Obtaining corresponding laser pulse number equably on each distinguishable location point or the line on the rapidoprint 5; So, in time Δ T and regional A, the synthetic shape on all distinguishable location points or the line promptly is the shape of laser facula array.On the basis of the above, through controlling the energy of each point or row laser pulse, just can in time Δ T and regional A, obtain synthetic arbitrarily laser power density size and distribution.For example, through the movement velocity of controlling and driving mechanism 4, make it in regional, form N hot spot, and in another zone, form M hot spot, thereby can change the size and the distribution of the power density of laser.
Be depicted as the spot array of the different shape that the laser beam integer type device integer of the embodiment of the invention obtains like Fig. 4 to 8.For example, the shape of spot array can be linear, oval, rectangle, discrete circle, or circular.Should understand; The foregoing description is merely schematic example; Be not limited to the present invention, the shape of the spot array that obtains through the laser beam integer type device integer of the embodiment of the invention can also be the combination in any of above-mentioned shape, perhaps is the irregularly shaped etc. of other.
The laser beam integer type device of the embodiment of the invention can be adjusted the movement locus and the movement velocity of reflective optical device in real time according to the direction of relative movement and the material properties of processing object, and then changes the shape and/or the power density of spot array.And laser beam integer type device of the present invention simple in structure is easy to make, and production cost is low.
The laser beam shaping method of describing according to the embodiment of the invention with reference to figure 9 below.It will be appreciated that; Laser beam shaping method according to the embodiment of the invention can utilize above-mentioned laser beam integer type device to realize; But the present invention is not limited to this, can realize through any suitable laser beam integer type device according to the laser beam shaping method of the embodiment of the invention.
As shown in Figure 9, the laser beam shaping method may further comprise the steps according to an embodiment of the invention:
Step S101 provides laser beam.
Step S102 reflexes to laser beam on the optical device with focus characteristics so that the focusing of said laser beam obtains hot spot through reflective optical device.
Step S103 makes said reflective optical device in presumptive area, move with spot array and/or the predetermined size and the power density that distributes that obtains reservation shape with desired trajectory in the given time.
The laser beam shaping method of the embodiment of the invention can be adjusted the movement locus and the movement velocity of reflective optical device in real time according to the direction of relative movement and the material properties of processing object, and then changes the shape and/or the power density of spot array.
For example; Can be according to concrete needs; Through the movement locus and the movement velocity of programming Control reflective optical device in advance; Thereby obtain the shape and/or the power density of required spot array, concrete programming is to understand known and easily to those skilled in the art, is not described in detail here.
In one embodiment of the invention; Before laser beam being reflexed on the optical device with focus characteristics; Can also said laser beam be diffracted on the said reflective optical device so that the light beam that incides on the said reflective optical device has predetermined beam shape through diffraction optical device; For example rectangle, ellipse etc., thus the integer effect improved.
In one embodiment of the invention; Reflective optical device can comprise first catoptron and second catoptron; First catoptron reflexes to second catoptron with said laser beam, and second catoptron reflexes to said laser beam on the said optical device with focus characteristics.Wherein, drive said first mirror motion with first desired trajectory, drive second mirror motion with second desired trajectory through second driving mechanism through first driving mechanism.
In another embodiment of the present invention, reflective optical device is a catoptron, and said catoptron is installed on the motion platform to be driven by said motion platform with said desired trajectory motion.
For example, said motion platform is preferably the piezoelectric ceramics motion platform, and said optical device with focus characteristics can be condensing lens, is preferably the f-heta mirror.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described embodiments of the invention; Those having ordinary skill in the art will appreciate that: under the situation that does not break away from principle of the present invention and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, zone of the present invention is limited claim and equivalent thereof.
Claims (16)
1. a laser beam shaping method is characterized in that, comprising:
Laser beam is provided;
Laser beam is reflexed on the optical device with focus characteristics so that the focusing of said laser beam obtains hot spot through reflective optical device; With
Said reflective optical device is moved with spot array and/or the predetermined size and the power density that distributes that obtains reservation shape with desired trajectory in presumptive area.
2. laser beam shaping method according to claim 1; It is characterized in that, also comprise through diffraction optical device said laser beam is diffracted on the said reflective optical device so that the light beam that incides on the said reflective optical device has predetermined beam shape.
3. laser beam shaping method according to claim 1 is characterized in that, the spot array of said reservation shape is a kind of in circle, rectangle, ellipse, linear and their combination in any.
4. according to each described laser beam shaping method among the claim 1-3; It is characterized in that; Said reflective optical device comprises first catoptron and second catoptron; Wherein first driving mechanism drives said first mirror motion with first desired trajectory; Second driving mechanism drives second mirror motion with second desired trajectory, and said first catoptron reflexes to said second catoptron with said laser beam, and said second catoptron reflexes to said laser beam on the said optical device with focus characteristics.
5. according to each described laser beam shaping method among the claim 1-3, it is characterized in that said reflective optical device is a catoptron, said catoptron is installed on the motion platform to be driven by said motion platform with said desired trajectory motion.
6. laser beam shaping method according to claim 5 is characterized in that, said motion platform is the piezoelectric ceramics motion platform.
7. laser beam shaping method according to claim 1 is characterized in that, said optical device with focus characteristics is a focus lamp.
8. laser beam shaping method according to claim 7 is characterized in that, said focus lamp is the f-theta mirror.
9. laser beam integer type device; It is characterized in that; Comprise: be used to send LASER Light Source, the reflective optical device of laser beam, optical device and driving mechanism with focus characteristics; Wherein said reflective optical device is used for said laser beam reflexed on the said optical device with focus characteristics and obtains hot spot so that said laser beam focuses on through said optical device with focus characteristics, and said driving mechanism is used to drive in the inherent at the fixed time predetermined zone of said reflective optical device with spot array and/or the predetermined size and the power density that distribute of desired trajectory motion to obtain reservation shape.
10. laser beam integer type device according to claim 9; It is characterized in that; Also comprise diffraction optical device, said diffraction optical device is used for said laser beam is diffracted on the said reflective optical device so that the laser beam that incides on the said reflective optical device has predetermined beam shape.
11. according to claim 9 or 10 described laser beam integer type devices; It is characterized in that; Said reflective optical device comprises first catoptron and second catoptron; Said driving mechanism comprises first driving mechanism and second driving mechanism, and wherein said first driving mechanism drives said first mirror motion with first desired trajectory, and said second driving mechanism drives second mirror motion with second desired trajectory; Said first catoptron reflexes to said second catoptron with said laser beam, and said second catoptron reflexes to said laser beam on the said optical device with focus characteristics.
12. laser beam integer type device according to claim 9 is characterized in that, said first and second driving mechanisms are motor.
13. according to claim 9 or 10 described laser beam integer type devices; It is characterized in that; Said reflective optical device comprises catoptron, and said driving mechanism is a motion platform, and said catoptron is installed on the said motion platform to be driven by said motion platform with said desired trajectory motion.
14. laser beam integer type device according to claim 13 is characterized in that, said motion platform is the piezoelectric ceramics motion platform.
15. laser beam integer type device according to claim 9 is characterized in that, said optical device with focus characteristics is a focus lamp.
16. laser beam integer type device according to claim 15 is characterized in that, said focus lamp is the f-theta mirror.
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| CN201110115535XA CN102759799A (en) | 2011-04-29 | 2011-04-29 | Laser beam shaping method and device |
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| CN201110115535XA CN102759799A (en) | 2011-04-29 | 2011-04-29 | Laser beam shaping method and device |
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| CN104148802A (en) * | 2014-08-04 | 2014-11-19 | 北京万恒镭特机电设备有限公司 | Beam forming device and method |
| CN107666981A (en) * | 2015-05-26 | 2018-02-06 | 施肯拉股份有限公司 | The method of the size and position of laser materials processing system and regulation laser spot |
| CN109745627A (en) * | 2017-11-02 | 2019-05-14 | 钱浙滨 | A kind of human body laser irradiating method and device |
| CN110421265A (en) * | 2019-07-01 | 2019-11-08 | 中国科学院上海光学精密机械研究所 | A kind of method and apparatus using femtosecond laser processing different shape sub-wavelength period structure |
| CN113409228A (en) * | 2021-08-20 | 2021-09-17 | 武汉锐科光纤激光技术股份有限公司 | Method, device and system for shaping light beam, storage medium and electronic device |
| CN115533345A (en) * | 2022-11-24 | 2022-12-30 | 济南邦德激光股份有限公司 | Laser cutting system |
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| CN104148802A (en) * | 2014-08-04 | 2014-11-19 | 北京万恒镭特机电设备有限公司 | Beam forming device and method |
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| CN113409228B (en) * | 2021-08-20 | 2022-01-11 | 武汉锐科光纤激光技术股份有限公司 | Method, device and system for shaping light beam, storage medium and electronic device |
| CN115533345A (en) * | 2022-11-24 | 2022-12-30 | 济南邦德激光股份有限公司 | Laser cutting system |
| CN115533345B (en) * | 2022-11-24 | 2023-03-28 | 济南邦德激光股份有限公司 | Laser cutting system |
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Application publication date: 20121031 |