CN102757856A - Online recovery method for waste mortar produced in silicon wafer cutting - Google Patents
Online recovery method for waste mortar produced in silicon wafer cutting Download PDFInfo
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- CN102757856A CN102757856A CN201210266679XA CN201210266679A CN102757856A CN 102757856 A CN102757856 A CN 102757856A CN 201210266679X A CN201210266679X A CN 201210266679XA CN 201210266679 A CN201210266679 A CN 201210266679A CN 102757856 A CN102757856 A CN 102757856A
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Abstract
The invention discloses an online recovery method for waste mortar produced in silicon wafer cutting. The recovery method includes adding cutting fluids and performing first centrifugal sedimentation and adding the cutting fluids into a first filter cake, performing second centrifugal sedimentation and adding the cutting fluids into a second filter cake, and performing third centrifugal sedimentation, adding filter additives, performing tube type membrane filtration, vacuum distillation and mix. According to the online recovery method for waste mortar produced in silicon wafer cutting, the discharge of pollutants is reduced, the recovery cost is reduced, the method is a pure physical method in which water cannot be used, and the method accords with current environment protection ideas of energy conservation and emission reduction.
Description
Technical field
The invention discloses a kind of silicon chip cutting and produce the online recovery method of the pure physics of waste mortar.
Background technology
Along with reshuffling and the lasting decline of profit of solar silicon wafers cutting industry; Silicon chip cutting enterprise mustn't control material consumption to reduce production costs; The most feasible way is exactly that silicon carbide micro-powder in the three big auxiliary materials and polyoxyethylene glycol cutting liquid are carried out regenerated using, and the regeneration recycling through mortar can make and be sliced into this remarkable reduction.So following 3 ~ 5 years, the online recovery technology of physics method mortar will receive pursuing energetically of the domestic factory of cutting into slices, the market share of the online recovery of physics method also will have significantly and rise, and final renewable resource replace newborn resource to become to take as the leading factor major part.
Existing recovery method is a kind of off-line way of recycling, in removal process, adopts alkali to carry out chemical process with the removal of sila matter, and alkali and chemistry of silicones reaction can produce water glass, needs to remove water glass with a large amount of water cleanings, to obtain the higher silit of purity; Clean with a large amount of water, not only cause the serious waste of water resources, and contained PEG and water glass is macromolecule organic in the water; Cause COD content height in the water; The degraded difficulty, the metallic impurity in the silit need after pickling, could remove in addition, and metallic impurity just change heavy metal into after the pickling; It is soluble in water that water cleans the back heavy metal, causes the heavy metal contamination of water.
Summary of the invention
The objective of the invention is to overcome the deficiency that exists in the prior art, the silicon chip cutting that a kind of non-secondary pollution is provided, can reduce cost recovery produces the online recovery method of waste mortar.
According to technical scheme provided by the invention, said a kind of silicon chip cutting produces the online recovery method of waste mortar and comprises the steps:
A, after adding cutting liquid in the waste mortar, stirring; Form first mixed mortar; The proportion of first mixed mortar is formulated to 1.33 ~ 1.6 grams per milliliters; The proportion of first mixed mortar has been allocated post-heating to 20 ~ 80 ℃, is input to settling centrifuge after the heating of first mixed mortar and carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 ~ 4800 rev/mins; Obtain first filter cake and first suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
Stir after adding cutting liquid in b, first filter cake that step a is obtained; Form second mixed mortar; The proportion of second mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of second mixed mortar has been allocated post-heating to 20 ~ 80 ℃, is input to settling centrifuge after the heating of second mixed mortar and carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 ~ 4800 rev/mins; Obtain second filter cake and second suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
Stir after adding cutting liquid in c, second filter cake that step b is obtained; Form the 3rd mixed mortar; The proportion of the 3rd mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of three mixed mortars has been allocated post-heating to 20 ~ 80 ℃, is input to settling centrifuge after the heating of the 3rd mixed mortar and carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 ~ 4800 rev/mins; Obtain the 3rd filter cake and the 3rd suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
D, first suspension-s, second suspension-s and the 3rd suspension-s are mixed, obtain mixing suspension, in mixing suspension, add filtration adjuvant and stir, after stirring the mixing suspension that has added filtration adjuvant is heated to 20 ~ 80 ℃; The weight of said filtration adjuvant is 0.3% ~ 1% of mixing suspension weight, and filtration adjuvant is gac and diatomaceous mixture, and gac and diatomaceous weight ratio are (0.5 ~ 3): (0.5 ~ 3);
E, the mixing suspension after the step e heating is input to tubular membrane filters, the filter membrane aperture is 0.05 ~ 2 micron;
F, the suspension-s input vacuum distillation plant that will pass through after step e tubular membrane is filtered carry out distillation dehydration, and the vacuum distilling temperature is controlled at 70 ~ 150 ℃, obtains reuse liquid;
G, get the 3rd filter cake mixing and stirring that reuse liquid that step f obtains and step c obtain, obtain the reuse mortar, the cutting liquid that reuse mortar deduction step a, step b and step c are added calculates and can continue the qualified mortar that uses.
The present invention utilizes the physics method that mortar is carried out reclaiming, following some advantage of having compared with original off-line recovery (chemical method):
1, reduced disposal of pollutants;
2, reduced cost recovery, method of the present invention is to accomplish not make the pure physical method of water;
3, the environmental protection concept that meets energy-saving and emission-reduction now.
Recovery method of the present invention adopts removal that pure physical method carries out impurity and separates; The foundation of this separation method mainly is to lean on proportion and the separation factor of material different and separate; Not making water during the course, can not cause second environmental pollution, is a kind of way of recycling of energy-conserving and environment-protective.
Embodiment
Below in conjunction with specific embodiment the present invention is described further.
Embodiment 1
A kind of silicon chip cutting produces the online recovery method of waste mortar and comprises the steps:
A, in model be: 1500#, density are: 1.60 ~ 1.67, volume is: stir after adding cutting liquid in the waste mortar of 10m3; Form first mixed mortar; The proportion of first mixed mortar is formulated to 1.33 ~ 1.6 grams per milliliters; The proportion of first mixed mortar has been allocated post-heating to 20 ℃, and first mixed mortar heating back is input to settling centrifuge with 50 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 rev/mins; Obtain first filter cake and first suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
B, after adding cutting liquid in first filter cake that step a obtains, stirring; Form second mixed mortar; The proportion of second mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of second mixed mortar has been allocated post-heating to 20 ℃, and second mixed mortar heating back is input to settling centrifuge with 50 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 rev/mins; Obtain second filter cake and second suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
C, after adding cutting liquid in second filter cake that step b obtains, stirring; Form the 3rd mixed mortar; The proportion of the 3rd mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of three mixed mortars has been allocated post-heating to 20 ℃, and the 3rd mixed mortar heating back is input to settling centrifuge with 50 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 rev/mins; Obtain the 3rd filter cake and the 3rd suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
D, first suspension-s, second suspension-s and the 3rd suspension-s are mixed, obtain mixing suspension, in mixing suspension, add filtration adjuvant and stir, after stirring the mixing suspension that has added filtration adjuvant is heated to 20 ℃; The weight of said filtration adjuvant is 0.3% of mixing suspension weight, and filtration adjuvant is gac and diatomaceous mixture, and gac and diatomaceous weight ratio are 0.5:3;
E, the mixing suspension after the step e heating is input to tubular membrane filters, the filter membrane aperture is 0.05 micron;
F, the suspension-s input vacuum distillation plant that will pass through after step e tubular membrane is filtered carry out distillation dehydration, and the vacuum distilling temperature is controlled at 70 ℃, obtains reuse liquid;
G, get the 3rd filter cake mixing and stirring that reuse liquid that step f obtains and step c obtain, obtain the reuse mortar, the cutting liquid that reuse mortar deduction step a, step b and step c are added calculates 8.1m
3Can continue the qualified mortar of use.
Embodiment 2
A kind of silicon chip cutting produces the online recovery method of waste mortar and comprises the steps:
A, in density be: 1.60 ~ 1.67, volume is: stir after adding cutting liquid in the waste mortar of 10m3; Form first mixed mortar; The proportion of first mixed mortar is formulated to 1.33 ~ 1.6 grams per milliliters; The proportion of first mixed mortar has been allocated post-heating to 80 ℃, and first mixed mortar heating back is input to settling centrifuge with 20 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 4800 rev/mins; Obtain first filter cake and first suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
B, after adding cutting liquid in first filter cake that step a obtains, stirring; Form second mixed mortar; The proportion of second mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of second mixed mortar has been allocated post-heating to 80 ℃, and second mixed mortar heating back is input to settling centrifuge with 20 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 4800 rev/mins; Obtain second filter cake and second suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
C, after adding cutting liquid in second filter cake that step b obtains, stirring; Form the 3rd mixed mortar; The proportion of the 3rd mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of three mixed mortars has been allocated post-heating to 80 ℃, is input to settling centrifuge after the heating of the 3rd mixed mortar and carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 4800 rev/mins; Obtain the 3rd filter cake and the 3rd suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
D, first suspension-s, second suspension-s and the 3rd suspension-s are mixed, obtain mixing suspension, in mixing suspension, add filtration adjuvant and stir, after stirring the mixing suspension that has added filtration adjuvant is heated to 80 ℃; The weight of said filtration adjuvant is 1% of mixing suspension weight, and filtration adjuvant is gac and diatomaceous mixture, and gac and diatomaceous weight ratio are 3:0.5;
E, the mixing suspension after the step e heating is input to tubular membrane filters, the filter membrane aperture is 2 microns;
F, the suspension-s input vacuum distillation plant that will pass through after step e tubular membrane is filtered carry out distillation dehydration, and the vacuum distilling temperature is controlled at 150 ℃, obtains reuse liquid;
G, get the 3rd filter cake mixing and stirring that reuse liquid that step f obtains and step c obtain, obtain the reuse mortar, the cutting liquid that reuse mortar deduction step a, step b and step c are added calculates 8.3m3 and can continue the qualified mortar that uses.
Embodiment 3
A kind of silicon chip cutting produces the online recovery method of waste mortar and comprises the steps:
A, in density be: 1.60 ~ 1.67, volume is: stir after adding cutting liquid in the waste mortar of 10m3; Form first mixed mortar; The proportion of first mixed mortar is formulated to 1.33 ~ 1.6 grams per milliliters; The proportion of first mixed mortar has been allocated post-heating to 50 ℃, and first mixed mortar heating back is input to settling centrifuge with 10 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 2500 rev/mins; Obtain first filter cake and first suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
B, after adding cutting liquid in first filter cake that step a obtains, stirring; Form second mixed mortar; The proportion of second mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of second mixed mortar has been allocated post-heating to 50 ℃, and second mixed mortar heating back is input to settling centrifuge with 10 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 2500 rev/mins; Obtain second filter cake and second suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
C, after adding cutting liquid in second filter cake that step b obtains, stirring; Form the 3rd mixed mortar; The proportion of the 3rd mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of three mixed mortars has been allocated post-heating to 50 ℃, and the 3rd mixed mortar heating back is input to settling centrifuge with 10 liters/minute flow carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 2500 rev/mins; Obtain the 3rd filter cake and the 3rd suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
D, first suspension-s, second suspension-s and the 3rd suspension-s are mixed, obtain mixing suspension, in mixing suspension, add filtration adjuvant and stir, after stirring the mixing suspension that has added filtration adjuvant is heated to 50 ℃; The weight of said filtration adjuvant is 0.3% ~ 1% of mixing suspension weight, and filtration adjuvant is gac and diatomaceous mixture, and gac and diatomaceous weight ratio are 1:2;
E, the mixing suspension after the step e heating is input to tubular membrane filters, the filter membrane aperture is 1.5 microns;
F, the suspension-s input vacuum distillation plant that will pass through after step e tubular membrane is filtered carry out distillation dehydration, and the vacuum distilling temperature is controlled at 100 ℃, obtains reuse liquid, during vacuum distilling the relative vacuum degree be controlled at-0.01 ~-0.1Mpa;
G, get the 3rd filter cake mixing and stirring that reuse liquid that step f obtains and step c obtain, obtain the reuse mortar, the cutting liquid that reuse mortar deduction step a, step b and step c are added calculates 8.2m3 and can continue the qualified mortar that uses.
Claims (1)
1. a silicon chip cutting produces the online recovery method of waste mortar, and it is characterized in that: this method comprises the steps:
A, after adding cutting liquid in the waste mortar, stirring; Form first mixed mortar; The proportion of first mixed mortar is formulated to 1.33 ~ 1.6 grams per milliliters; The proportion of first mixed mortar has been allocated post-heating to 20 ~ 80 ℃, is input to settling centrifuge after the heating of first mixed mortar and carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 ~ 4800 rev/mins; Obtain first filter cake and first suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
Stir after adding cutting liquid in b, first filter cake that step a is obtained; Form second mixed mortar; The proportion of second mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of second mixed mortar has been allocated post-heating to 20 ~ 80 ℃, is input to settling centrifuge after the heating of first filter cake and carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 ~ 4800 rev/mins; Obtain second filter cake and second suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
Stir after adding cutting liquid in c, second filter cake that step b is obtained; Form the 3rd mixed mortar; The proportion of the 3rd mixed mortar is formulated to 1.33 ~ 1.7 grams per milliliters; The proportion of three mixed mortars has been allocated post-heating to 20 ~ 80 ℃, is input to settling centrifuge after the heating of second filter cake and carries out centrifugal settling and handle, and the rotating speed of settling centrifuge is controlled at 500 ~ 4800 rev/mins; Obtain the 3rd filter cake and the 3rd suspension-s after the centrifugal settling, the cutting liquid that this step is added is identical with the composition of contained cutting liquid in the waste mortar;
D, first suspension-s, second suspension-s and the 3rd suspension-s are mixed, obtain mixing suspension, in mixing suspension, add filtration adjuvant and stir, after stirring the mixing suspension that has added filtration adjuvant is heated to 20 ~ 80 ℃; The weight of said filtration adjuvant is 0.3% ~ 1% of mixing suspension weight, and filtration adjuvant is gac and diatomaceous mixture, and gac and diatomaceous weight ratio are (0.5 ~ 3): (0.5 ~ 3);
E, the mixing suspension after the step e heating is input to tubular membrane filters, the filter membrane aperture is 0.05 ~ 2 micron;
F, the suspension-s input vacuum distillation plant that will pass through after step e tubular membrane is filtered carry out distillation dehydration, and the vacuum distilling temperature is controlled at 70 ~ 150 ℃, obtains reuse liquid;
G, get the 3rd filter cake mixing and stirring that reuse liquid that step f obtains and step c obtain, obtain the reuse mortar, the cutting liquid that reuse mortar deduction step a, step b and step c are added calculates and can continue the qualified mortar that uses.
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| CN 201210266679 CN102757856B (en) | 2012-07-30 | 2012-07-30 | Online recovery method for waste mortar produced in silicon wafer cutting |
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| CN 201210266679 CN102757856B (en) | 2012-07-30 | 2012-07-30 | Online recovery method for waste mortar produced in silicon wafer cutting |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102977990A (en) * | 2012-11-16 | 2013-03-20 | 晶科能源有限公司 | Circulation process of distilled water in recycling process of silicon cutting fluids |
| CN106010764A (en) * | 2016-05-19 | 2016-10-12 | 苏州晶樱光电科技有限公司 | Method for recovering mortar during silicon wafer cutting |
| CN106737218A (en) * | 2016-12-30 | 2017-05-31 | 江苏奥明能源有限公司 | The method for cutting silicon chips of low cost |
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| CN101691224A (en) * | 2009-09-22 | 2010-04-07 | 王勇 | Method for extracting silicon, silicon carbide and polyethylene glycol from silicon wafer slicing slurry |
| CN101823712A (en) * | 2010-04-02 | 2010-09-08 | 河南新大新材料股份有限公司 | Recovery processing method of silicon slice cut waste mortar |
| CN102295285A (en) * | 2010-06-26 | 2011-12-28 | 比亚迪股份有限公司 | Recovery method of silicon slice cutting waste mortar |
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2012
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040144722A1 (en) * | 2001-05-29 | 2004-07-29 | Carlo Zavattari | Method for treating an exhausted glycol-based slurry |
| CN101691224A (en) * | 2009-09-22 | 2010-04-07 | 王勇 | Method for extracting silicon, silicon carbide and polyethylene glycol from silicon wafer slicing slurry |
| CN101823712A (en) * | 2010-04-02 | 2010-09-08 | 河南新大新材料股份有限公司 | Recovery processing method of silicon slice cut waste mortar |
| CN102295285A (en) * | 2010-06-26 | 2011-12-28 | 比亚迪股份有限公司 | Recovery method of silicon slice cutting waste mortar |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102977990A (en) * | 2012-11-16 | 2013-03-20 | 晶科能源有限公司 | Circulation process of distilled water in recycling process of silicon cutting fluids |
| CN106010764A (en) * | 2016-05-19 | 2016-10-12 | 苏州晶樱光电科技有限公司 | Method for recovering mortar during silicon wafer cutting |
| CN106737218A (en) * | 2016-12-30 | 2017-05-31 | 江苏奥明能源有限公司 | The method for cutting silicon chips of low cost |
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