CN102751658A - Method and system for calibrating light source wavelength of laser device - Google Patents
Method and system for calibrating light source wavelength of laser device Download PDFInfo
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- CN102751658A CN102751658A CN201210239511XA CN201210239511A CN102751658A CN 102751658 A CN102751658 A CN 102751658A CN 201210239511X A CN201210239511X A CN 201210239511XA CN 201210239511 A CN201210239511 A CN 201210239511A CN 102751658 A CN102751658 A CN 102751658A
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Abstract
The invention discloses a method and a system for calibrating the light source wavelength of a laser device. The method comprises the steps that an incident laser signal containing incident light intensity information sent out by the laser device is received, after the energy of the incident laser signal is absorbed by standard gas with preset concentration encapsulated in a gas room, a transmission laser signal after energy change is obtained, the transmission laser signal is converted into a first electrical signal containing emergent light intensity information, an absorption peak position corresponding to the standard gas is obtained by a first processor according to the emergent light intensity information, a center wavelength corresponding to the absorption peak position is determined, the wavelength of the laser device is calibrated by taking the center wavelength as the standard, and the drifting problem caused by a temperature, ageing and a semiconductor laser manufacturing process is solved. The method disclosed by the invention is applied to the system to realize the calibration of the light source wavelength of the laser device, so that an accurate light source wavelength of the laser device is obtained.
Description
Technical field
The present invention relates to power domain, particularly a kind of laser light source method for wavelength calibration and system.
Background technology
Owing to use laser for a long time; Can be because temperature, aging and factors such as semiconductor laser manufacture craft and temperature drift can cause the laser optical source wavelength near centre wavelength, to drift about; Cause the wavelength of the LASER Light Source that laser sends constantly to change, therefore can't obtain laser source wavelength accurately.
At present, gas detecting concentration has a wide range of applications in numerous industries, and the detection of toxic and harmful, flammable explosive gas concentration is always significant to keeping the safety in production.The quantitative and qualitative analysis of gas is important thing in the national product life always simultaneously.In power equipment, often use SF6 as dielectric especially; In case and mixed other impurity in the SF6 gas, the insulation arc quenching effect will be had a greatly reduced quality, even causes security incident; Simultaneously, some gas concentrations also need be detected in fields such as petrochemical industry, environmental protection and epidemic prevention.
In the method for present detected gas concentration; Principle mostly is to use the laser emitted laser to shine certain gas; Utilize a certain physical characteristic of said gas or the intensity of variation of chemical characteristic to infer the concentration of gas; Because the wavelength of laser light source is not calibrated, just directly be used for measuring the concentration value of gas to be measured, therefore caused the low problem of accuracy of measurement.
Summary of the invention
Problem to be solved by this invention is: a kind of laser source wavelength calibration steps and system are provided, can't obtain the problem of laser source wavelength accurately to solve in the prior art.
The present invention provides a kind of laser source wavelength calibration steps, comprising:
Receive laser and send the incident laser signal that includes incident intensity information;
Said incident laser signal gets in the gas compartment through the first transmission window; The calibrating gas that defaults in the preset concentration in the said gas compartment absorbs the energy of said incident laser signal; Obtain the transmission laser signal after the energy variation, said transmission laser signal is transmitted to first sensor through the second transmission window;
Said first sensor receives said transmission laser signal, and converts it into first signal of telecommunication that includes said transmission laser signal output intensity information;
First processor obtains the corresponding absworption peak position of said calibrating gas through the output intensity information in said first signal of telecommunication, confirms and the corresponding centre wavelength in said absworption peak position, and be benchmark with said centre wavelength, calibrate the wavelength of said laser.
Preferably, the wavelength of said correcting laser comprises: receive drive current and self temperature through regulating laser are calibrated the wavelength of said laser.
A kind of method of gas concentration measurement comprises:
The wavelength of laser is calibrated according to step according to claim 1;
The laser that receives behind the said calibration wavelength sends the incident laser signal that includes incident intensity, and with it through calibrating gas module to be measured;
Said calibrating gas module to be measured absorbs the energy of the laser signal behind the said calibration wavelength, obtains the transmission laser signal of the calibration wavelength after the energy variation, and the transmission laser signal of said calibration wavelength is transmitted to second transducer;
Said second transducer receives the transmission laser signal of said calibration wavelength, and converts it into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength;
Second processor obtains the corresponding absworption peak position of said calibrating gas to be measured, through calculating incident intensity information according to the output intensity information in said second signal of telecommunication;
And the ratio of the output intensity of the transmission laser signal after obtaining the incident intensity of the laser signal behind the above calibration wavelength of said absworption peak position and calibrating wavelength, the said ratio calculation of foundation obtains the concentration value of said calibrating gas to be measured.
Preferably, behind the said concentration value that calculates said calibrating gas to be measured, also comprise:
Whether the concentration value of judging said calibrating gas to be measured meets the preset concentration value, if then do not calibrate, if not, then calibrate.
Preferably, the process of said calibration concentration value comprises:
Obtain the first optical path length value and the first gas pressure intensity value that obtain through said gas compartment by the laser behind the calibration wavelength;
Obtain second optical path length value and the second gas pressure intensity value corresponding respectively with said calibrating gas module to be measured;
Through regulating the calibration that the first gas pressure intensity value and the second gas pressure intensity value and the first optical path length value and the second optical path length value realize treating the concentration of the accurate gas of mark.
A kind of calibration system of laser optical source wavelength, said system comprises: laser, the gas compartment that is packaged with the calibrating gas of preset concentration, the first transmission window, the second transmission window, first sensor and first processor;
Said laser is used to send the incident laser signal that includes incident intensity information, and with said incident laser signal through the said first transmission window;
The said gas compartment that is packaged with the calibrating gas of preset concentration is used to absorb the energy of said incident laser signal, obtains the transmission laser signal after the energy variation, and said transmission laser signal is transmitted to said first sensor through the second transmission window;
Said first sensor is used for according to said transmission laser signal, and said transmission laser signal is changed into first signal of telecommunication that includes said transmission laser signal output intensity information;
Said first processor is used for the output intensity information through said first signal of telecommunication; Obtain the corresponding absworption peak position of said calibrating gas; Confirming and the corresponding centre wavelength in said absworption peak position, is benchmark with said centre wavelength, calibrates the wavelength of said laser.
A kind of gas concentration measurement system comprises: like the laser after the said system calibration of claim 6, calibrating gas module to be measured, second transducer and second processor;
Laser behind the said calibration wavelength is used to send the laser signal that includes incident intensity, and with said laser signal through calibrating gas module to be measured;
Said calibrating gas module to be measured is used to absorb the energy of the laser signal behind the said calibration wavelength, obtains the transmission laser signal of the calibration wavelength after the energy variation, and the transmission laser signal of said calibration wavelength is transmitted to said second transducer;
Said second transducer is used for according to the transmission laser signal that receives said calibration wavelength, and is translated into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength;
Said second processor is used for the output intensity information according to said second signal of telecommunication; Obtain the corresponding absworption peak position of said calibrating gas to be measured; Through calculating incident intensity information; And the ratio of the output intensity of the transmission laser signal behind the incident intensity that obtains the laser signal of the above calibration of said absworption peak position behind wavelength and the calibration wavelength, calculate the concentration value of said calibrating gas to be measured.
Preferably, also comprise: the 3rd processor;
The first optical path length value that obtains through said air chamber by the laser of calibration behind the wavelength that said the 3rd processor is used for obtaining through adjusting and first gas pressure intensity and by the laser behind the calibration wavelength through the second optical path length value and second gas pressure intensity that said calibrating gas module to be measured obtains, realize calibration to the concentration value of said calibrating gas to be measured.
Can find out from above technical scheme; The invention provides a kind of laser source wavelength calibration steps and system, said method comprises: receive the incident laser signal that includes incident intensity information that laser sends, said incident laser signal has obtained the transmission laser signal behind the calibrating gas of the preset concentration that defaults in gas compartment; Said transducer has received said transmission laser signal; Be translated into first signal of telecommunication that includes said transmission laser signal output intensity information, first processor obtains the corresponding absworption peak of said calibrating gas position according to said output intensity information; Confirm and the corresponding centre wavelength in said absworption peak position; With said centre wavelength is benchmark, calibrates the wavelength of said laser, through regulating the attribute of said laser; To reach the absorption that light intensity is arranged on the position of said absworption peak; The corresponding wavelength in said absworption peak position this moment is the calibration wavelength so, and said method has solved because the problem of drift takes place the wavelength that temperature, aging and semiconductor laser manufacture craft and temperature drift cause, and has realized the laser optical source wavelength is calibrated.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment that put down in writing among the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the schematic flow sheet of the calibration steps of the embodiment of the invention one disclosed a kind of laser optical source wavelength;
Fig. 2 is the schematic flow sheet of the method for the embodiment of the invention two disclosed a kind of gas concentration measurements;
Fig. 3 is the schematic flow sheet of the method for the embodiment of the invention three disclosed a kind of gas concentration measurements;
Fig. 4 is the schematic flow sheet of the method for the embodiment of the invention four disclosed a kind of gas concentration measurements;
Fig. 5 is the structural representation of the calibration system of the embodiment of the invention five disclosed a kind of laser optical source wavelengths;
Fig. 6 is the structural representation of the disclosed a kind of gas concentration measurement of the embodiment of the invention six system;
Fig. 7 is the structural representation of the disclosed a kind of gas concentration measurement of the embodiment of the invention seven system.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that is obtained under the creative work prerequisite.
The embodiment of the invention one discloses a kind of calibration steps of laser optical source wavelength, is the schematic flow sheet of said method referring to Fig. 1, and this method step comprises:
Step S101: receive laser and send the incident laser signal that includes incident intensity information;
Step S102: said incident laser signal gets in the gas compartment through the first transmission window, and the calibrating gas that defaults in the preset concentration in the said gas compartment absorbs the energy of said incident laser signal, obtains the transmission laser signal after the energy variation;
Step S103: said transmission laser signal is transmitted to first sensor through the second transmission window;
Step S104: said first sensor receives said transmission laser signal, and is converted into first signal of telecommunication that includes said transmission laser signal output intensity information through it;
Step S105: first processor is through the output intensity information in said first signal of telecommunication; Obtain the corresponding absworption peak position of said calibrating gas; Confirming and the corresponding centre wavelength in said absworption peak position, is benchmark with said centre wavelength, calibrates the wavelength of said laser.
Wherein, the output intensity intensity F through transmission laser
OutCurrent signal I with semiconductor laser drive
InBe directly proportional, we can suppose:
Laser emission laser gets into before the calibration module light intensity intensity F
In=K
1* I
In;
And output intensity F
Out, F
Out=F
In* K
2* K
3, K wherein
2Be optical path loss ratio, K
3Be the GAS ABSORPTION ratio;
Incident intensity and output intensity ratio f=F
Out/ F
In=F
Out/ (K
1* I
In);
In whole scanning process, if laser wavelength not on the GAS ABSORPTION peak position, K then
3=1, this moment f=K
2It is a constant.
If laser wavelength on the absworption peak position, K then
3Be a decimal between 0 ~ 1, f is less than K
2, analyze the changing value of assimilation ratio in the whole scanning process, find out the highest position of absorptivity (being that f is minimum), just can find out the position of absworption peak.
Wherein, calibrate the wavelength of said laser, the actual wavelength that uses tunable technology to calibrate said laser through receive drive current and self temperature of regulating laser.
In the foregoing description; The invention discloses and a kind of the laser optical source wavelength is carried out Calibration Method; Said method comprises: the incident laser signal that will include incident intensity information gets in the gas compartment through the first transmission window; The calibrating gas that defaults in the preset concentration in the said gas compartment absorbs the energy of said incident laser signal, obtains the transmission laser signal after the energy variation, and said transmission laser signal is transmitted to first sensor through the second transmission window; Said first sensor receives said transmission laser signal; And converting it into first signal of telecommunication that includes said transmission laser signal output intensity information, first processor obtains the corresponding absworption peak position of said calibrating gas through the output intensity information in said first signal of telecommunication; Confirm and the corresponding centre wavelength in said absworption peak position; With said centre wavelength is benchmark, calibrates the wavelength of said laser through receive drive current and self temperature of regulating said laser, therefore obtains the laser of laser source wavelength accurately.
The embodiment of the invention two discloses a kind of method of gas concentration measurement, is the schematic flow sheet of said method referring to Fig. 2, and this method step comprises:
Step S201: the wavelength of laser is calibrated according to embodiment one disclosed method;
Step S202: the laser that receives behind the said calibration wavelength sends the incident laser signal that includes incident intensity, and with it through calibrating gas module to be measured;
Step S203: said calibrating gas module to be measured absorbs the energy of the laser signal behind the said calibration wavelength, obtains the transmission laser signal of the calibration wavelength after the energy variation, and the transmission laser signal of said calibration wavelength is transmitted to second transducer;
Step S204: said second transducer receives the transmission laser signal of said calibration wavelength, and converts it into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength;
Step S205: second processor obtains the corresponding absworption peak position of said calibrating gas to be measured, through calculating incident intensity information according to the output intensity information in said second signal of telecommunication;
Step S206: the ratio of the output intensity of the transmission laser signal behind the incident intensity that obtains the laser signal of the above calibration of said absworption peak position behind wavelength and the calibration wavelength obtains the concentration value of said calibrating gas to be measured through said ratio calculation.
Wherein, adopt Lambert-Beer's law
In the formula:
I
t---transmitted light intensity;
I
o---incident intensity;
P---be the stagnation pressure of gas;
C---be the concentration of gas;
L---be the transmission light path of gas;
S (t)---the line strength of spectral line is represented the absorption intensity of this line spectrum, and is only relevant with temperature;
F (vt)---be linear function, it has represented the shape of tested absorption line,
In the foregoing description; The invention discloses a kind of method of gas concentration measurement, in said method, the laser optical source wavelength is calibrated; Obtain calibrating the laser behind the wavelength; The incident laser signal that includes incident intensity information that uses the laser behind the said calibration wavelength to send through calibrating gas module to be measured, obtains the transmission laser signal after the energy variation; And it is changed into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength through said second transducer; Said second processor obtains the corresponding absworption peak position of said calibrating gas to be measured, through calculating incident intensity information according to the output intensity information in said second signal of telecommunication; And the ratio of the output intensity of the transmission laser signal after obtaining the incident intensity of the laser signal behind the above calibration wavelength of said absworption peak position and calibrating wavelength; Calculate the concentration value of said calibrating gas to be measured, in the said method, used the laser behind the calibration wavelength that gas concentration to be measured measured; Higher than the laser that does not use the calibration wavelength to the concentration value precision that measures of gas concentration to be measured, improved accuracy for measuring.
The embodiment of the invention three discloses a kind of gas concentration measuring method, is the disclosed schematic flow sheet of present embodiment referring to Fig. 3, on the basis of the foregoing description, has increased behind the concentration value that calculates said calibrating gas to be measured, also comprises:
Step S301: whether the concentration value of judging said calibrating gas to be measured meets the preset concentration value, if, execution in step S302 then, if not, execution in step S303 then;
Step S302: then do not calibrate;
Step S303: then calibrate.
Present embodiment discloses behind the concentration value that calculates said calibrating gas to be measured, meets the preset concentration value in order to ensure the concentration value that obtains, and need judge, has improved the accuracy rate of detectable concentration value.
The embodiment of the invention four discloses a kind of gas concentration measuring method, is the disclosed schematic flow sheet of present embodiment referring to Fig. 4, and when said concentration value to be measured need be calibrated, said method comprised:
Step S401: obtain the first optical path length value and the first gas pressure intensity value that obtain through said air chamber by the laser behind the calibration wavelength;
Step S402: obtain the second optical path length value and the second gas pressure intensity value that obtain through said calibrating gas module to be measured by the laser behind the calibration wavelength;
Step S403: realize calibration to the concentration of said calibrating gas to be measured through regulating said first gas pressure intensity value and the said second gas pressure intensity value and the said first optical path length value and the said second optical path length value.
In the present embodiment; When the concentration value of said calibrating gas to be measured need be calibrated, obtain the first optical path length value that obtains through said air chamber by the laser of calibration behind the wavelength and the first gas pressure intensity value and realize calibration through the second optical path length value and the second gas pressure intensity value that said calibrating gas module to be measured obtains said calibrating gas concentration to be measured by the laser behind the calibration wavelength through adjusting.
Embodiment five discloses a kind of calibration system of laser optical source wavelength; Referring to Fig. 5 is structural representation, and said system comprises: laser 101, the gas compartment 102 that is packaged with the calibrating gas of preset concentration, the first transmission window 103, the second transmission window 104, first sensor 105 and first processor 106;
Said laser 101 is used for, and sends the incident laser signal that includes incident intensity information, and with said incident laser signal through the said first transmission window 103;
The said gas compartment 102 that is packaged with the calibrating gas of preset concentration is used for, and absorbs the energy of said incident laser signal, obtains the transmission laser signal after the energy variation, and said transmission laser signal is transmitted to said first sensor 105 through the second transmission window 104;
Wherein, The said first transmission window is arranged at the first surface of the gas compartment of the said calibrating gas that is packaged with preset concentration; The second surface corresponding with said first surface is provided with the said second transmission window, and wherein, the said first transmission window can have a certain degree with said first surface; In like manner the second transmission window is provided with too, can avoid reverberation directly to reflect like this.
Said first sensor 105 is used for, and according to said transmission laser signal, and said transmission laser signal is changed into first signal of telecommunication that includes said transmission laser signal output intensity information;
Said first processor 106 is used for; Through the output intensity information in said first signal of telecommunication, obtain the corresponding absworption peak position of said calibrating gas, confirm and the corresponding centre wavelength in said absworption peak position; With said centre wavelength is benchmark, calibrates the wavelength of said laser.
Present embodiment discloses a kind of calibration system of laser optical source wavelength; Said system comprises: laser, air chamber, first sensor and first processor; Said laser send include incident intensity information the incident laser signal behind said air chamber, obtain the transmission laser signal after the energy variation, said transmission laser signal is transmitted to first sensor through the second transmission window; Said first sensor receives said transmission laser signal; And converting it into first signal of telecommunication that includes said transmission laser signal output intensity information, first processor obtains the corresponding absworption peak position of said calibrating gas through the output intensity information in said first signal of telecommunication; Confirm and the corresponding centre wavelength in said absworption peak position; With said centre wavelength is benchmark, calibrates the wavelength of said laser through receive drive current and self temperature of regulating said laser, therefore obtains the laser of laser source wavelength accurately.
Embodiment six discloses a kind of gas concentration measurement system, is the structural representation of said system referring to Fig. 6, and said system comprises: laser 201, calibrating gas module to be measured 202 second transducers 203 and second processor 204 behind the calibration wavelength;
Said calibrating gas module 202 to be measured is used for, and absorbs the energy of the laser signal behind the said calibration wavelength, obtains the transmission laser signal of the calibration wavelength after the energy variation, and the transmission laser signal of said calibration wavelength is transmitted to said second transducer 203;
Said second transducer 203 is used for, and foundation receives the transmission laser signal of said calibration wavelength, and is translated into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength;
Said second processor 204 is used for; According to the output intensity information in said second signal of telecommunication; Obtain the corresponding absworption peak position of said calibrating gas to be measured; Through calculating incident intensity information, and the ratio of the output intensity of the transmission laser signal behind the incident intensity that obtains the laser signal behind the above calibration wavelength of said absworption peak position and the calibration wavelength, calculate the concentration value of said calibrating gas to be measured.
In the present embodiment; The incident laser signal that includes incident intensity information that uses the laser behind the said calibration wavelength to send; Through calibrating gas module to be measured; Obtain the transmission laser signal after the energy variation, and it is changed into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength through said second transducer, said second processor is according to the output intensity information in said second signal of telecommunication; Obtain the corresponding absworption peak position of said calibrating gas to be measured; Through calculating incident intensity information, and the ratio of the output intensity of the transmission laser signal behind the incident intensity that obtains the laser signal behind the above calibration wavelength of said absworption peak position and the calibration wavelength, calculate the concentration value of said calibrating gas to be measured; In the said method; Used the laser behind the calibration wavelength that gas concentration to be measured is measured, higher than the laser that does not use the calibration wavelength to the concentration value precision that measures of gas concentration to be measured, improved accuracy for measuring.
The embodiment of the invention seven discloses a kind of system of gas concentration measurement, is the structural representation of said system referring to Fig. 7, and on the basis of the foregoing description six disclosed systems, said system also comprises: the 3rd processor 205;
Said the 3rd processor 205; Obtain respectively by the laser of calibration behind the wavelength through the gas compartment 102 of the said calibrating gas that is packaged with preset concentration and the first optical path length value and the first gas pressure intensity value and the second optical path length value and the second gas pressure intensity value of said calibrating gas module 202 to be measured, realize calibration the concentration value of said calibrating gas to be measured through regulating above-mentioned value.
In the present embodiment; To the concentration value of the calibrating gas to be measured that calculates in the foregoing description, through adjusting obtain by first optical path length value and first gas pressure intensity of the laser behind the calibration wavelength through said air chamber and the accuracy rate of coming further to improve calibrating gas concentration value to be measured by the second optical path length value and second gas pressure intensity of the laser behind the calibration wavelength through said calibrating gas module to be measured.
Each embodiment adopts the mode of going forward one by one to describe in this specification, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.For the disclosed device of embodiment, because it is corresponding with the embodiment disclosed method, so description is fairly simple, relevant part is partly explained referring to method and is got final product.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment is conspicuous to those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments among this paper.Therefore, the present invention will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and the corresponding to wide region of features of novelty.
Claims (8)
1. the calibration steps of a laser optical source wavelength is characterized in that, this method comprises:
Receive laser and send the incident laser signal that includes incident intensity information;
Said incident laser signal gets in the gas compartment through the first transmission window; The calibrating gas that defaults in the preset concentration in the said gas compartment absorbs the energy of said incident laser signal; Obtain the transmission laser signal after the energy variation, said transmission laser signal is transmitted to first sensor through the second transmission window;
Said first sensor receives said transmission laser signal, and converts it into first signal of telecommunication that includes said transmission laser signal output intensity information;
First processor obtains the corresponding absworption peak position of said calibrating gas through the output intensity information in said first signal of telecommunication, confirms and the corresponding centre wavelength in said absworption peak position, and be benchmark with said centre wavelength, calibrate the wavelength of said laser.
2. method according to claim 1 is characterized in that, the wavelength of said correcting laser comprises:
Receive drive current and self temperature through regulating laser are calibrated the wavelength of said laser.
3. the method for a gas concentration measurement is characterized in that, comprising:
The wavelength of laser is calibrated according to step according to claim 1;
The laser that receives behind the said calibration wavelength sends the incident laser signal that includes incident intensity, and with it through calibrating gas module to be measured;
Said calibrating gas module to be measured absorbs the energy of the laser signal behind the said calibration wavelength, obtains the transmission laser signal of the calibration wavelength after the energy variation, and the transmission laser signal of said calibration wavelength is transmitted to second transducer;
Said second transducer receives the transmission laser signal of said calibration wavelength, and converts it into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength;
Second processor obtains the corresponding absworption peak position of said calibrating gas to be measured, through calculating incident intensity information according to the output intensity information in said second signal of telecommunication;
And the ratio of the output intensity of the transmission laser signal after obtaining the incident intensity of the laser signal behind the above calibration wavelength of said absworption peak position and calibrating wavelength, the said ratio calculation of foundation obtains the concentration value of said calibrating gas to be measured.
4. method according to claim 3 is characterized in that, behind the said concentration value that calculates said calibrating gas to be measured, also comprises:
Whether the concentration value of judging said calibrating gas to be measured meets the preset concentration value, if then do not calibrate, if not, then calibrate.
5. method according to claim 4 is characterized in that, the process of said calibration concentration value comprises:
Obtain the first optical path length value and the first gas pressure intensity value that obtain through said gas compartment by the laser behind the calibration wavelength;
Obtain second optical path length value and the second gas pressure intensity value corresponding respectively with said calibrating gas module to be measured;
Through regulating the calibration that the first gas pressure intensity value and the second gas pressure intensity value and the first optical path length value and the second optical path length value realize treating the concentration of the accurate gas of mark.
6. the calibration system of a laser optical source wavelength is characterized in that, said system comprises: laser, the gas compartment that is packaged with the calibrating gas of preset concentration, the first transmission window, the second transmission window, first sensor and first processor;
Said laser is used to send the incident laser signal that includes incident intensity information, and with said incident laser signal through the said first transmission window;
The said gas compartment that is packaged with the calibrating gas of preset concentration is used to absorb the energy of said incident laser signal, obtains the transmission laser signal after the energy variation, and said transmission laser signal is transmitted to said first sensor through the second transmission window;
Said first sensor is used for according to said transmission laser signal, and said transmission laser signal is changed into first signal of telecommunication that includes said transmission laser signal output intensity information;
Said first processor is used for the output intensity information through said first signal of telecommunication; Obtain the corresponding absworption peak position of said calibrating gas; Confirming and the corresponding centre wavelength in said absworption peak position, is benchmark with said centre wavelength, calibrates the wavelength of said laser.
7. a gas concentration measurement system is characterized in that, comprising: like the laser after the said system calibration of claim 6, calibrating gas module to be measured, second transducer and second processor;
Laser behind the said calibration wavelength is used to send the laser signal that includes incident intensity, and with said laser signal through calibrating gas module to be measured;
Said calibrating gas module to be measured is used to absorb the energy of the laser signal behind the said calibration wavelength, obtains the transmission laser signal of the calibration wavelength after the energy variation, and the transmission laser signal of said calibration wavelength is transmitted to said second transducer;
Said second transducer is used for according to the transmission laser signal that receives said calibration wavelength, and is translated into second signal of telecommunication of the transmission laser signal output intensity information that includes said calibration wavelength;
Said second processor is used for the output intensity information according to said second signal of telecommunication; Obtain the corresponding absworption peak position of said calibrating gas to be measured; Through calculating incident intensity information; And the ratio of the output intensity of the transmission laser signal behind the incident intensity that obtains the laser signal of the above calibration of said absworption peak position behind wavelength and the calibration wavelength, calculate the concentration value of said calibrating gas to be measured.
8. system according to claim 7, said system also comprises: the 3rd processor;
The first optical path length value that obtains through said air chamber by the laser of calibration behind the wavelength that said the 3rd processor is used for obtaining through adjusting and first gas pressure intensity and by the laser behind the calibration wavelength through the second optical path length value and second gas pressure intensity that said calibrating gas module to be measured obtains, realize calibration to the concentration value of said calibrating gas to be measured.
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| JP2015194383A (en) * | 2014-03-31 | 2015-11-05 | 株式会社島津製作所 | Gas analyser |
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| CN110806395A (en) * | 2019-11-19 | 2020-02-18 | 国网重庆市电力公司电力科学研究院 | Gas concentration measuring method, device, equipment and system |
| CN114646609A (en) * | 2022-02-24 | 2022-06-21 | 西北核技术研究所 | Correction method based on TDLAS absorption method pressure measurement under high mole fraction |
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| CN104280361A (en) * | 2013-07-09 | 2015-01-14 | 西门子公司 | Method for measuring the concentration of a gas component in a measuring gas |
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| CN104568386A (en) * | 2014-12-30 | 2015-04-29 | 北京航天易联科技发展有限公司 | Laser wavelength screening method and device thereof |
| CN110261328A (en) * | 2019-07-19 | 2019-09-20 | 宁波海尔欣光电科技有限公司 | Calibrate method and device, the gas concentration analyzer of optical maser wavelength |
| CN110806395A (en) * | 2019-11-19 | 2020-02-18 | 国网重庆市电力公司电力科学研究院 | Gas concentration measuring method, device, equipment and system |
| CN114646609A (en) * | 2022-02-24 | 2022-06-21 | 西北核技术研究所 | Correction method based on TDLAS absorption method pressure measurement under high mole fraction |
| CN115684081A (en) * | 2023-01-04 | 2023-02-03 | 杭州泽天春来科技有限公司 | Laser gas analysis system |
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| CN102751658B (en) | 2013-11-13 |
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