CN202974862U - Calibrator for light source wavelength of laser device and gas concentration measurer - Google Patents
Calibrator for light source wavelength of laser device and gas concentration measurer Download PDFInfo
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- CN202974862U CN202974862U CN 201220334991 CN201220334991U CN202974862U CN 202974862 U CN202974862 U CN 202974862U CN 201220334991 CN201220334991 CN 201220334991 CN 201220334991 U CN201220334991 U CN 201220334991U CN 202974862 U CN202974862 U CN 202974862U
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Abstract
The utility model discloses a calibrator for the light source wavelength of a laser device. An incident laser signal which includes incident light intensity information and emitted by the laser device is received; a transmitting laser signal subjected to energy change is obtained after the energy of the incident laser signal is absorbed by standard gas which is provided with preset concentration and is encapsulated inside a gas chamber; the transmitting laser signal is converted into a first electric signal including outgoing light intensity information; and a first processor obtains the position of an absorption peak corresponding to the standard gas according to the outgoing light intensity information, determines a center wavelength corresponding to the position of the absorption peak, and calibrates the wavelength of the laser device by taking the center wavelength as a reference. Therefore, the drifting problem caused by temperature, aging and laser manufacturing process of a semiconductor is solved. The method is applied to the system; and calibration of the light source wavelength of the laser device is achieved, so that accurate light source wavelength of the laser device can be obtained.
Description
Technical field
The utility model relates to laser field, particularly a kind of laser light source wavelength calibration device and a kind of gas concentration measurement device.
Background technology
Due to the long-time laser instrument that uses, can be due to temperature, the aging and factors such as semiconductor laser manufacture craft and temperature drift, can make the wavelength of laser light source constantly to drift about, cause the wavelength of the LASER Light Source that laser instrument sends constantly to change, therefore can't obtain accurately the wavelength of LASER Light Source.
The utility model content
Problem to be solved in the utility model is: provide a kind of laser light source wavelength calibration device, to solve the problem that can't accurately obtain laser source wavelength in prior art.
The utility model provides a kind of laser light source wavelength calibration device, comprising:
Emission includes the laser instrument of the incident laser signal of incident intensity information;
The incident laser signal that will include incident intensity information is through the first transmissive window on the first surface of the gas compartment that is arranged at the calibrating gas that is packaged with preset concentration;
Be provided with the second transmissive window relative with described the first transmissive window with absorbing laser signal after described incident laser signal energy and carry out on the second surface relative with first surface of transmission;
Be connected with described gas compartment, described transmission laser signal be converted into the first sensor of the first electric signal, include described transmission laser signal output intensity information in wherein said the first electric signal;
Be connected with described first sensor, according to the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, calibrate the first processor of described laser wavelength take described centre wavelength as benchmark.
Preferably, described laser source wavelength calibrating device also comprises:
Described the first transmissive glass is to become predetermined angle to be arranged on described first surface with the first surface of described gas compartment, the second surface of described the second transmissive glass and described gas compartment is arranged on described second surface with predetermined angle, and described first surface is relative with second surface.
A kind of gas concentration measurement device comprises:
Emission includes the laser instrument of the incident laser signal of incident intensity information;
The incident laser signal that will include incident intensity information is through the first transmissive window on the first surface of the gas compartment that is arranged at the calibrating gas that is packaged with preset concentration;
Be provided with the second transmissive window relative with described the first transmissive window with absorbing laser signal after described incident laser signal energy and carry out on the second surface relative with first surface of transmission;
Be connected with described gas compartment, described transmission laser signal be converted into the first sensor of the first electric signal, include described transmission laser signal output intensity information in wherein said the first electric signal;
Be connected with described first sensor, according to the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, calibrate the first processor of described laser wavelength take described centre wavelength as benchmark;
The laser wavelength that uses in described gas concentration measurement device need to use above-mentioned laser light source wavelength calibration device;
Emission includes the laser instrument after the calibration wavelength of incident laser signal of incident intensity information;
The energy that will include the incident laser signal after the calibration wavelength of incident intensity information absorbs, and obtains the container that is packaged with gas to be measured of transmission laser signal;
Be connected with described container, described transmission laser signal be converted into the second sensor of the second electric signal, wherein, include the transmission laser signal output intensity information of described calibration wavelength in described the second electric signal;
Be connected with described the second sensor, according to the output intensity information in described the second electric signal, obtain absorption peak position corresponding to described calibrating gas to be measured, by calculating incident intensity information, and obtain the ratio of the output intensity of the incident intensity of the laser signal after the above calibration wavelength of described absorption peak position and the transmission laser signal after the calibration wavelength, obtain the second processor of the concentration value of described gas to be measured according to described ratio calculation.
Preferably, also comprise: the 3rd processor;
Be connected with described container with described gas compartment respectively, regulate the first optical path length value of being obtained by described gas compartment by the laser instrument after the calibration wavelength and the first gas pressure intensity value and the second optical path length value of being obtained by described container by the laser instrument after the calibration wavelength and the second gas pressure intensity value and realize the 3rd processor to described calibrating gas concentration calibration to be measured.
as can be seen from the above technical solutions, in the utility model, a kind of laser light source wavelength calibration device is provided, the incident laser signal that will include incident intensity information enters in gas compartment through the first transmission window, the calibrating gas that defaults in the preset concentration in described gas compartment absorbs the energy of described incident laser signal, obtain the transmission laser signal after energy variation, described transmission laser signal is transmitted to first sensor through the second transmission window, described first sensor receives described transmission laser signal, and convert it into the first electric signal that includes described transmission laser signal output intensity information, first processor is by the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, take described centre wavelength as benchmark, calibrate the wavelength of described laser instrument by be subjected to drive current and self temperature of regulating described laser instrument, therefore obtain the laser instrument of laser source wavelength accurately.
Description of drawings
Fig. 1 is the schematic flow sheet of the calibration steps of the disclosed a kind of laser optical source wavelength of embodiment one;
Fig. 2 is the schematic flow sheet of the method for embodiment two disclosed a kind of gas concentration measurements;
Fig. 3 is the schematic flow sheet of the method for embodiment three disclosed a kind of gas concentration measurements;
Fig. 4 is the schematic flow sheet of the method for embodiment four disclosed a kind of gas concentration measurements;
Fig. 5 is the structural representation of the calibration system of the disclosed a kind of laser optical source wavelength of embodiment five;
Fig. 6 is the structural representation of the disclosed a kind of gas concentration measurement of embodiment six system;
Fig. 7 is the structural representation of the disclosed a kind of gas concentration measurement of embodiment seven system.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills belong to protection domain of the present utility model not making the every other embodiment that obtains under the creative work prerequisite.
Embodiment one discloses a kind of calibration steps of laser optical source wavelength, is the schematic flow sheet of described method referring to Fig. 1, and the method step comprises:
Step S101: receive laser instrument and send the incident laser signal that includes incident intensity information;
Step S102: described incident laser signal enters in gas compartment through the first transmission window, and the calibrating gas that defaults in the preset concentration in described gas compartment absorbs the energy of described incident laser signal, obtains the transmission laser signal after energy variation;
Step S103: described transmission laser signal is transmitted to first sensor through the second transmission window;
Step S104: described first sensor receives described transmission laser signal, and is converted into through it the first electric signal that includes described transmission laser signal output intensity information;
Step S105: first processor is by the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, take described centre wavelength as benchmark, calibrate the wavelength of described laser instrument.
Wherein, the output intensity intensity F by transmission laser
outCurrent signal I with semiconductor laser drive
inBe directly proportional, we can suppose:
Before the laser instrument Emission Lasers enters calibration module, light intensity intensity F
in=K
1* I
in;
And output intensity F
out, F
out=F
in* K
2* K
3, K wherein
2Be optical path loss ratio, K
3Be the gas absorption ratio;
Incident intensity and output intensity ratio f=F
out/ F
in=F
out/ (K
1* I
in);
In whole scanning process, if laser wavelength not on the gas absorption peak position, K
3=1, this moment f=K
2It is a constant.
If laser wavelength on the absorption peak position, K
3Be a decimal between 0～1, f is less than K
2, analyze the changing value of assimilation ratio in whole scanning process, find out the highest position of absorptivity (being that f is minimum), just can find out the position of absorption peak.
Wherein, calibrate the wavelength of described laser instrument, the actual wavelength of calibrating described laser instrument with tunable technology by be subjected to drive current and self temperature of regulating laser instrument.
in above-described embodiment, a kind of method that the laser optical source wavelength is calibrated is disclosed, described method comprises: the incident laser signal that will include incident intensity information enters in gas compartment through the first transmission window, the calibrating gas that defaults in the preset concentration in described gas compartment absorbs the energy of described incident laser signal, obtain the transmission laser signal after energy variation, described transmission laser signal is transmitted to first sensor through the second transmission window, described first sensor receives described transmission laser signal, and convert it into the first electric signal that includes described transmission laser signal output intensity information, first processor is by the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, take described centre wavelength as benchmark, calibrate the wavelength of described laser instrument by be subjected to drive current and self temperature of regulating described laser instrument, therefore obtain the laser instrument of laser source wavelength accurately.
Embodiment two discloses a kind of method of gas concentration measurement, is the schematic flow sheet of described method referring to Fig. 2, and the method step comprises:
Step S201: the wavelength of laser instrument is calibrated according to the disclosed method of embodiment one;
Step S202: the laser instrument that receives after described calibration wavelength sends the incident laser signal that includes incident intensity, and with it by calibrating gas module to be measured;
Step S203: described calibrating gas module to be measured absorbs the energy of the laser signal after described calibration wavelength, obtains the transmission laser signal of the calibration wavelength after energy variation, and the transmission laser signal of described calibration wavelength is transmitted to the second sensor;
Step S204: described the second sensor receives the transmission laser signal of described calibration wavelength, and converts it into the second electric signal of the transmission laser signal output intensity information that includes described calibration wavelength;
Step S205: the second processor is according to the output intensity information in described the second electric signal, obtains absorption peak position corresponding to described calibrating gas to be measured, by calculating incident intensity information;
Step S206: obtain the ratio of the output intensity of the incident intensity of the laser signal after the above calibration wavelength of described absorption peak position and the transmission laser signal after the calibration wavelength, obtain the concentration value of described calibrating gas to be measured by described ratio calculation.
Wherein, adopt Lambert-Beer's law
In formula:
I
t---transmitted light intensity;
I
o---incident intensity;
P---be the stagnation pressure of gas;
C---be the concentration of gas;
L---be the transmission light path of gas;
S (t)---the line strength of spectral line represents the absorption intensity of this line spectrum, and is only relevant with temperature;
F (vt)---be linear function, it has represented the shape of tested absorption line,
in above-described embodiment, a kind of method of gas concentration measurement is disclosed, in described method, the laser optical source wavelength is calibrated, obtain calibrating the laser instrument after wavelength, the incident laser signal that includes incident intensity information that uses the laser instrument after described calibration wavelength to send, through calibrating gas module to be measured, obtain the transmission laser signal after energy variation, and it is changed into the second electric signal of the transmission laser signal output intensity information that includes described calibration wavelength by described the second sensor, described the second processor is according to the output intensity information in described the second electric signal, obtain absorption peak position corresponding to described calibrating gas to be measured, by calculating incident intensity information, and obtain the ratio of the output intensity of the incident intensity of the laser signal after the above calibration wavelength of described absorption peak position and the transmission laser signal after the calibration wavelength, calculate the concentration value of described calibrating gas to be measured, in described method, used the laser instrument after the calibration wavelength that gas concentration to be measured measured, higher to the concentration value precision that measures of gas concentration to be measured than the laser instrument that does not use the calibration wavelength, improved the accuracy rate of measuring.
Embodiment three discloses a kind of gas concentration measuring method, is the disclosed schematic flow sheet of the present embodiment referring to Fig. 3, on the basis of above-described embodiment, has increased after the concentration value that calculates described calibrating gas to be measured, also comprises:
Step S301: whether the concentration value that judges described calibrating gas to be measured meets the preset concentration value, if so, and execution in step S302, if not, execution in step S303;
Step S302: do not calibrate;
Step S303: calibrate.
The present embodiment discloses after the concentration value that calculates described calibrating gas to be measured, meets the preset concentration value in order to ensure the concentration value that obtains, and need to judge, has improved the accuracy rate of detectable concentration value.
Embodiment four discloses a kind of gas concentration measuring method, is the disclosed schematic flow sheet of the present embodiment referring to Fig. 4, and when described concentration value to be measured need to be calibrated, described method comprised:
Step S401: obtain the first optical path length value and the first gas pressure intensity value that are obtained by described air chamber by the laser instrument after the calibration wavelength;
Step S402: obtain the second optical path length value and the second gas pressure intensity value that are obtained by described calibrating gas module to be measured by the laser instrument after the calibration wavelength;
Step S403: realize calibration to the concentration of described calibrating gas to be measured by regulating described the first gas pressure intensity value and described the second gas pressure intensity value and described the first optical path length value and described the second optical path length value.
In the present embodiment, when the concentration value of described calibrating gas to be measured need to be calibrated, obtain the first optical path length value of being obtained by described air chamber by the laser instrument of calibration after wavelength and the first gas pressure intensity value and the second optical path length value that is obtained by described calibrating gas module to be measured by the laser instrument after the calibration wavelength and the second gas pressure intensity value by adjusting and realize calibration to described calibrating gas concentration to be measured.
Embodiment five discloses a kind of calibration system of laser optical source wavelength, be structural representation referring to Fig. 5, described system comprises: laser instrument 101, the gas compartment 102 that is packaged with the calibrating gas of preset concentration, the first transmission window 103, the second transmission window 104, first sensor 105 and first processor 106;
Described laser instrument 101 is used for, and sends the incident laser signal that includes incident intensity information, and with described incident laser signal by described the first transmission window 103;
The described gas compartment 102 that is packaged with the calibrating gas of preset concentration is used for, and absorbs the energy of described incident laser signal, obtains the transmission laser signal after energy variation, and described transmission laser signal is transmitted to described first sensor 105 through the second transmission window 104;
Wherein, described the first transmission window is arranged at the first surface of the gas compartment of the described calibrating gas that is packaged with preset concentration, be provided with described the second transmission window on the second surface corresponding with described first surface, wherein, described the first transmission window can have a certain degree with described first surface, in like manner the second transmission window arranges too, can avoid like this reflected light directly to reflect.
Described first sensor 105 is used for, and according to described transmission laser signal, and described transmission laser signal is changed into the first electric signal that includes described transmission laser signal output intensity information;
Described first processor 106 is used for, by the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, take described centre wavelength as benchmark, the wavelength of the described laser instrument of calibration.
the present embodiment discloses a kind of calibration system of laser optical source wavelength, described system comprises: laser instrument, air chamber, first sensor and first processor, described laser instrument send include incident intensity information the incident laser signal after described air chamber, obtain the transmission laser signal after energy variation, described transmission laser signal is transmitted to first sensor through the second transmission window, described first sensor receives described transmission laser signal, and convert it into the first electric signal that includes described transmission laser signal output intensity information, first processor is by the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, take described centre wavelength as benchmark, calibrate the wavelength of described laser instrument by be subjected to drive current and self temperature of regulating described laser instrument, therefore obtain the laser instrument of laser source wavelength accurately.
Embodiment six discloses a kind of gas concentration measurement system, is the structural representation of described system referring to Fig. 6, and described system comprises: laser instrument 201, calibrating gas module to be measured 202 second sensors 203 and the second processor 204 after the calibration wavelength;
Described calibrating gas module 202 to be measured is used for, and absorbs the energy of the laser signal after described calibration wavelength, obtains the transmission laser signal of the calibration wavelength after energy variation, and the transmission laser signal of described calibration wavelength is transmitted to described the second sensor 203;
Described the second sensor 203 is used for, and foundation receives the transmission laser signal of described calibration wavelength, and is translated into the second electric signal of the transmission laser signal output intensity information that includes described calibration wavelength;
Described the second processor 204 is used for, according to the output intensity information in described the second electric signal, obtain absorption peak position corresponding to described calibrating gas to be measured, by calculating incident intensity information, and obtain the ratio of the output intensity of the incident intensity of the laser signal after the above calibration wavelength of described absorption peak position and the transmission laser signal after the calibration wavelength, calculate the concentration value of described calibrating gas to be measured.
in the present embodiment, the incident laser signal that includes incident intensity information that uses the laser instrument after described calibration wavelength to send, through calibrating gas module to be measured, obtain the transmission laser signal after energy variation, and it is changed into the second electric signal of the transmission laser signal output intensity information that includes described calibration wavelength by described the second sensor, described the second processor is according to the output intensity information in described the second electric signal, obtain absorption peak position corresponding to described calibrating gas to be measured, by calculating incident intensity information, and obtain the ratio of the output intensity of the incident intensity of the laser signal after the above calibration wavelength of described absorption peak position and the transmission laser signal after the calibration wavelength, calculate the concentration value of described calibrating gas to be measured, in described method, used the laser instrument after the calibration wavelength that gas concentration to be measured measured, higher to the concentration value precision that measures of gas concentration to be measured than the laser instrument that does not use the calibration wavelength, improved the accuracy rate of measuring.
Embodiment seven discloses a kind of system of gas concentration measurement, is the structural representation of described system referring to Fig. 7, and on the basis of above-described embodiment six disclosed systems, described system also comprises: the 3rd processor 205;
Described the 3rd processor 205, obtain respectively by the laser instrument of calibration after wavelength by the gas compartment 102 of the described calibrating gas that is packaged with preset concentration and the first optical path length value and the first gas pressure intensity value and the second optical path length value and the second gas pressure intensity value of described calibrating gas module 202 to be measured, realize calibration to the concentration value of described calibrating gas to be measured by regulating above-mentioned value.
In the present embodiment, to the concentration value of the calibrating gas to be measured that calculates in above-described embodiment, the first optical path length value by described air chamber by the laser instrument after the calibration wavelength of obtaining by adjusting and the first gas pressure intensity and the accuracy rate that the second optical path length value and the second gas pressure intensity by described calibrating gas module to be measured further improves calibrating gas concentration value to be measured by the laser instrument after the calibration wavelength.
In this instructions, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is and the difference of other embodiment that between each embodiment, identical similar part is mutually referring to getting final product.For the disclosed device of embodiment, because it is corresponding with the disclosed method of embodiment, so description is fairly simple, relevant part partly illustrates referring to method and gets final product.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment is apparent to those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from spirit or scope of the present utility model, realization in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the wide region consistent with principle disclosed herein and features of novelty.
Claims (4)
1. a laser light source wavelength calibration device, is characterized in that, comprising:
Emission includes the laser instrument of the incident laser signal of incident intensity information;
The incident laser signal that will include incident intensity information is through the first transmissive window on the first surface of the gas compartment that is arranged at the calibrating gas that is packaged with preset concentration;
Be provided with the second transmissive window relative with described the first transmissive window with absorbing laser signal after described incident laser signal energy and carry out on the second surface relative with first surface of transmission;
Be connected with described gas compartment, described transmission laser signal be converted into the first sensor of the first electric signal, include described transmission laser signal output intensity information in wherein said the first electric signal;
Be connected with described first sensor, according to the output intensity information in described the first electric signal, obtain absorption peak position corresponding to described calibrating gas, determine the centre wavelength corresponding with described absorption peak position, calibrate the first processor of described laser wavelength take described centre wavelength as benchmark.
2. calibrating device according to claim 1, is characterized in that, also comprises:
Described the first transmissive glass is to become predetermined angle to be arranged on described first surface with the first surface of described gas compartment, the second surface of described the second transmissive glass and described gas compartment is arranged on described second surface with predetermined angle, and described first surface is relative with second surface.
3. a gas concentration measurement device, is characterized in that, comprising:
The wavelength of laser instrument is calibrated according to laser light source wavelength calibration device claimed in claim 1;
Emission includes the laser instrument after the calibration wavelength of incident laser signal of incident intensity information;
The energy that will include the incident laser signal after the calibration wavelength of incident intensity information absorbs, and obtains the container that is packaged with gas to be measured of transmission laser signal;
Be connected with described container, described transmission laser signal be converted into the second sensor of the second electric signal, wherein, include the transmission laser signal output intensity information of described calibration wavelength in described the second electric signal;
Be connected with described the second sensor, according to the output intensity information in described the second electric signal, obtain absorption peak position corresponding to described calibrating gas to be measured, by calculating incident intensity information, and obtain the ratio of the output intensity of the incident intensity of the laser signal after the above calibration wavelength of described absorption peak position and the transmission laser signal after the calibration wavelength, obtain the second processor of the concentration value of described gas to be measured according to described ratio calculation.
4. gas concentration measurement device according to claim 3, also comprise: the 3rd processor;
Be connected with described container with described gas compartment respectively, regulate the first optical path length value of being obtained by described gas compartment by the laser instrument after the calibration wavelength and the first gas pressure intensity value and the second optical path length value of being obtained by described container by the laser instrument after the calibration wavelength and the second gas pressure intensity value and realize the 3rd processor to described calibrating gas concentration calibration to be measured.
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| CN 201220334991 CN202974862U (en) | 2012-07-11 | 2012-07-11 | Calibrator for light source wavelength of laser device and gas concentration measurer |
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Cited By (7)
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| CN104280361A (en) * | 2013-07-09 | 2015-01-14 | 西门子公司 | Method for measuring the concentration of a gas component in a measuring gas |
| US9869634B2 (en) | 2014-08-27 | 2018-01-16 | General Electric Company | System and method for dissolved gas analysis |
| CN109115720A (en) * | 2018-07-26 | 2019-01-01 | 安徽大学 | A kind of long measurement method simultaneously with gas concentration of the effective journey of multi-way gas absorption cell |
| CN110806395A (en) * | 2019-11-19 | 2020-02-18 | 国网重庆市电力公司电力科学研究院 | Gas concentration measuring method, device, equipment and system |
| CN111670354A (en) * | 2018-02-05 | 2020-09-15 | 伊莱肯兹公司 | Method for analyzing gases by dual illumination |
| CN112857571A (en) * | 2021-02-10 | 2021-05-28 | 王世有 | Photoacoustic spectrum detection system and calibration method for automatically calibrating working wavelength of laser |
| CN114646609A (en) * | 2022-02-24 | 2022-06-21 | 西北核技术研究所 | Correction method based on TDLAS absorption method pressure measurement under high mole fraction |
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2012
- 2012-07-11 CN CN 201220334991 patent/CN202974862U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104280361A (en) * | 2013-07-09 | 2015-01-14 | 西门子公司 | Method for measuring the concentration of a gas component in a measuring gas |
| US9869634B2 (en) | 2014-08-27 | 2018-01-16 | General Electric Company | System and method for dissolved gas analysis |
| CN111670354A (en) * | 2018-02-05 | 2020-09-15 | 伊莱肯兹公司 | Method for analyzing gases by dual illumination |
| CN111670354B (en) * | 2018-02-05 | 2024-01-23 | 伊莱肯兹公司 | Method for analysing a gas by double illumination |
| CN109115720A (en) * | 2018-07-26 | 2019-01-01 | 安徽大学 | A kind of long measurement method simultaneously with gas concentration of the effective journey of multi-way gas absorption cell |
| CN109115720B (en) * | 2018-07-26 | 2021-05-07 | 安徽大学 | Method for simultaneously measuring effective range length and gas concentration of multi-pass gas absorption cell |
| CN110806395A (en) * | 2019-11-19 | 2020-02-18 | 国网重庆市电力公司电力科学研究院 | Gas concentration measuring method, device, equipment and system |
| CN112857571A (en) * | 2021-02-10 | 2021-05-28 | 王世有 | Photoacoustic spectrum detection system and calibration method for automatically calibrating working wavelength of laser |
| CN114646609A (en) * | 2022-02-24 | 2022-06-21 | 西北核技术研究所 | Correction method based on TDLAS absorption method pressure measurement under high mole fraction |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130605 |