CN102738031B - Semiconductor processing apparatus containing drawable cavity - Google Patents
Semiconductor processing apparatus containing drawable cavity Download PDFInfo
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- CN102738031B CN102738031B CN201110094239.6A CN201110094239A CN102738031B CN 102738031 B CN102738031 B CN 102738031B CN 201110094239 A CN201110094239 A CN 201110094239A CN 102738031 B CN102738031 B CN 102738031B
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Abstract
The invention discloses a semiconductor processing apparatus containing a drawable chamber. The semiconductor processing apparatus comprises a microchamber that is used for accommodating tightly and processing a semiconductor wafer. The microchamber includes an upper chamber portion forming an upper working surface and/or an upper peripheral part and a lower chamber portion forming a lower working surface and/or a lower peripheral part; the upper chamber portion and/or the lower chamber portion can be moved between an opening position that is used for loading and/or removing the semiconductor wafer and a closing position that is used for tightly accommodating the semiconductor wafer; the lower chamber portion includes a lower chamber plate forming the lower working surface and/or the lower peripheral part as well as a lower box device for accommodating the lower chamber plate; and the lower box device includes an uncovered cavity containing an opening at one side and the lower cavity plate slidably enters or moves from the uncovered cavity through the opening.
Description
[technical field]
The present invention relates to the field of surface treatment of semiconductor crystal wafer or similar work piece, particularly one is used for chemical treatment semiconductor wafer surface, and the device of clean, etching and other process.
[background technology]
Wafer is the carrier producing used in integrated circuits.In actual production, need the wafer prepared to have surface that is smooth, ultra-clean, and two kinds can be divided into for the preparation of the existing method of ultra-clean wafer surface: the wet treatment process of such as submergence and spraying technique, and such as based on the dry process process of chemical gaseous phase and plasma technology.Wherein wet treatment process is that prior art adopts method comparatively widely, and wet treatment process generally includes the succession of steps composition adopting suitable chemical solution submergence or spray wafer.
Comprise a kind of wet treatment process that adopts in prior art and the device of ultra-clean process is carried out to wafer.Being formed with one in this device can close receipt process the micro chamber of semiconductor crystal wafer, this micro chamber can be in open mode for loading and removing semiconductor crystal wafer, also the process of closed condition for semiconductor crystal wafer can be in, wherein chemicals and other fluids described micro chamber can be introduced in processing procedure.Described open mode and closed condition drive the relative movement of upper and lower two working faces forming described micro chamber to realize by two drive units comprised in this device respectively.
But find in actual use, also there is following shortcoming in said apparatus: first, drive the structure of upper and lower two working faces forming described micro chamber comparatively complicated respectively by two drive units in described device, drive the upper working face of described micro chamber or lower working face also can reach effect same according to a drive unit; The second, for the semiconductor crystal wafer of different size, during process, need the micro chamber assembly changing corresponding different size, when changing this micro chamber assembly need entire machine to take apart, very inconvenient; 3rd, when micro chamber is poorly sealed or the pipeline generation chemicals of circulation chemicals reveals, leakage collection mechanism relevant in described device is perfect not; 4th, rely on the some metal upright posts running through described upper and lower two working surfaces to complete during described upper and lower two working face generation relative movements, described column is easily chemically treated the high temperature that produces in process and/or corrosive gas corrodes and damages.
Therefore be necessary to provide a kind of new solution to solve the problems referred to above.
[summary of the invention]
The object of the present invention is to provide a kind of comprising can the semiconductor processing device of pull chamber, described semiconductor processing device has the simple feature of mode changing micro chamber assembly.
According to object of the present invention, the invention provides a kind of comprising can the semiconductor processing device of pull chamber, process fluid is utilized to process semiconductor crystal wafer and similar work piece, described semiconductor crystal wafer comprises one for closely holding and process the micro chamber of semiconductor crystal wafer, described micro chamber comprises the portion of upper chamber forming upper working surface and/or upper periphery part and the lower chambers portion forming lower working surface and/or lower peripheral portion, portion of described upper chamber and/or described lower chambers portion can one for load and/or remove this semiconductor crystal wafer open position and one for closely hold this semiconductor crystal wafer off-position between move,
When portion of upper chamber or described lower chambers portion in the closed position time, semiconductor crystal wafer is installed between described upper working surface and lower working surface, and be formed for processing the space that fluid flows with the inwall of described micro chamber, portion of described upper chamber and/or described lower chambers portion comprise at least one enters described micro chamber entrance and at least one outlet for micro chamber described in process fluid expulsion for process fluid
Wherein said lower chambers portion comprises the lower chambers plate forming described lower working surface and/or lower peripheral portion and the lower box device holding described lower chambers plate, described lower box device comprises the uncovered cavity of lateral opening, and described lower chambers plate can slip into or shift out described uncovered cavity from described lateral opening.
Further, described lower chambers plate comprises a bottom being fit to described uncovered cavity shape and the top be positioned on described bottom, and the upper surface on described top forms lower working surface and/or the lower peripheral portion of described micro chamber.
Further, the side of described uncovered cavity is formed with opening, and the edge that described uncovered cavity corresponds to the bottom of described lower chambers plate is formed with groove, and described lower chambers plate slips into or shift out described uncovered cavity from described lateral opening along described groove.
Further, described semiconductor processing device also comprises a plug-in unit, the shape of described plug-in unit meets the shape of described lateral opening, after described lower chambers plate is loaded into described uncovered cavity, fixes described lower chambers plate in described uncovered cavity by described plug-in unit being inserted described lateral opening.
Further, the lower surface of described uncovered cavity includes diversion groove, and the outlet of described diversion groove is positioned at bottom or the lateral opening place of described lower box device.
Further, described diversion groove comprises several angles of inclination of the lower surface being arranged in described uncovered cavity slope identical with angled manner, arranged side by side, is positioned at described lateral opening place at the bottom of the slope of described slope.
Further, the outlet of described diversion groove is communicated at the bottom of the slope of described slope.
Further, when transportable chamber portion is portion of upper chamber, above portion of described upper chamber, also comprise a drive unit, when described drive unit produces downward actuating force, drive portion of described upper chamber to move to off-position from open position; When described drive unit produces actuating force upwards, portion of described upper chamber is driven to move from off-position to open position;
When transportable chamber portion is lower chambers portion, below described lower chambers portion, also comprise a drive unit, when described drive unit produces actuating force upwards, drive described lower chambers portion to move to off-position from open position; When described drive unit produces downward actuating force, described lower chambers portion is driven to move from off-position to open position.
Further, described drive unit comprises a driver and holds the scalable cavity of described driver, and described driver is the one in air impeller, motor driver, thermo-mechanical drive or hydraulic unit driver.
Further, the edge in portion of described upper chamber and described lower chambers portion comprises corresponding hole, post position, wherein a chamber portion by run through described hole, post position and perpendicular to described working surface column fix; Another chamber portion is by running through described hole, post position and moving relative to fixing chamber portion perpendicular to the column guiding of described working surface.
Compared with prior art, the present invention adopts pullable lower box device to hold lower chambers plate, makes the mode of the lower chambers plate changing different size become simple and convenient.Now, owing to not needing to split whole table apparatus, therefore installation effectiveness improves greatly.
[accompanying drawing explanation]
In conjunction with reference accompanying drawing and ensuing detailed description, the present invention will be easier to understand, the structure member that wherein same Reference numeral is corresponding same, wherein:
Fig. 1 is the semiconductor processing device schematic perspective view in one embodiment in the present invention;
Fig. 2 is the semiconductor processing device front schematic view in one embodiment in the present invention;
Fig. 3 is the base plate schematic top plan view in one embodiment in the present invention;
Fig. 4 is the first intermediate plate schematic perspective view in one embodiment in the present invention;
Fig. 5 is the second intermediate plate reverse side schematic perspective view in one embodiment in the present invention;
Fig. 6 is the upper plate schematic top plan view in one embodiment in the present invention;
Fig. 7 is the lower box device schematic perspective view in one embodiment in the present invention;
Fig. 8 be lower chambers plate in the present invention in one embodiment with the assembling schematic diagram of described lower box device;
Fig. 9 is the plug-in unit reverse side schematic perspective view in one embodiment in the present invention;
Figure 10 is the top box device schematic perspective view in one embodiment in the present invention;
Figure 11 is the top box device schematic top plan view in one embodiment in the present invention;
Figure 12 is the dividing plate schematic top plan view in one embodiment in the present invention;
Figure 13 is the column front elevational schematic in one embodiment in the present invention;
Figure 14 is the sleeve generalized section in one embodiment in the present invention;
Figure 15 is the correcting plate elevational schematic view in one embodiment in the present invention;
Figure 16 is the top board schematic perspective view in one embodiment in the present invention; With
Figure 17 is operating diagram when adopting flattening correction module to carry out flattening correction in the present invention.
[embodiment]
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, and below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
Please refer to Fig. 1 and Fig. 2, which respectively show schematic perspective view in an embodiment 100 of semiconductor processing device in the present invention and front schematic view.Briefly, described semiconductor processing device 100 comprises flattening correction module 110, micro chamber module 120, driver module 130 and stand column device 140.Each assembly in first three module described by four stand column device 140 parallel to each other fix, support or guide, and be respectively driver module 130, micro chamber module 120 and smooth correction module 110 from lower to upper along described stand column device 140.Wherein micro chamber module 120 comprises the micro chamber of a process semiconductor crystal wafer, described micro chamber includes upper chamber's plate 122 and lower chambers plate 126 is formed, described upper chamber plate 122 is supported by top box device 124, and is fixed in described top box device 124 by the flattening correction module 110 of the side of being located thereon; Correspondingly, described lower chambers plate 126 is supported by lower box device 128, and lower box device 128 is supported by the driver module 130 be positioned at below it and driven again.
Described driver module 130 can drive described lower box device 128 guide according to described stand column device 140 and move relative to described top box device 124, need to load and remove semiconductor die bowlder to open or close top box device 124 and lower box device 128 with box lunch, also namely can open or close the micro chamber of upper chamber's plate 122 and lower chambers plate 126 formation.When closing described micro chamber, chemical reagent and other fluids can be introduced described micro chamber inner for the semiconductor crystal wafer in it being carried out to chemical analysis, cleaning, etching and other process, and after being disposed, described chemical reagent and other fluids are drawn described micro chamber.
The present invention for convenience of description, first the upper plate 138 describing described driver module 130, described driver module 130 comprises base plate 132 from bottom to top successively, be positioned at the first intermediate plate 134 above base plate, be positioned at the second intermediate plate 136 above the first intermediate plate 134 and be positioned at above the second intermediate plate 136.A driver (not shown) is also comprised in the cavity formed by described base plate 132, first intermediate plate 134, second intermediate plate 136 and upper plate 138.When described driver produces actuating force upwards, described second intermediate plate 136 and upper plate 138 can drive along the guiding of described stand column device 140 and be positioned at lower box device 128 above described upper plate 138 and lower chambers plate 126 moves up, and make described micro chamber complete conversion from open mode to closed condition.
Fig. 3 is the schematic top plan view of described base plate 132 in an embodiment 300.The shape of described base plate 300 is in square, and the hole, four post positions 302 comprised in the corner of described base plate 300 corresponding to described stand column device 140, and by be connected with described stand column device 140 be positioned at the first screw 151 (see Fig. 2) below described base plate 300 and the bottom of described four root post devices 140 that is positioned at above described base plate 300 tightens together.Obviously, plane residing for described base plate 300 and other plates all with place, the axis linear vertical of described stand column device 140.Described base plate 300 one side downward also includes the fin 304 be positioned on described base plate 300 diagonal.The rectangular in cross-section of described fin 304, described fin 304 provides the support of high strength for described base plate.The close middle body of described base plate 300 also comprises circular perforations 306 and two threaded perforations 308, and described circular perforations 306 is for providing other equipment, pipeline or device; Described two threaded perforations 308 can be used for the below fixing described driver in conjunction with parts such as screws.On the other hand, four limits of described base plate 300 are also formed with the breach 309 of three rectangles arranged side by side respectively.
Fig. 4 is the schematic perspective view of described first intermediate plate 134 in an embodiment 400.The shape of described first intermediate plate 400 is also in square, and the hole, four post positions 402 comprised equally in the corner of described first intermediate plate 400 corresponding to described stand column device 140, and together with described base plate 300 by be connected with described stand column device 140 be positioned at the first screw 151 (see Fig. 1) below described base plate 300 and the bottom of described four root post devices 140 that is positioned at above described first intermediate plate 400 tightens together.Described first intermediate plate 400 one side upwards, with perpendicular to described first intermediate plate 400 place plane direction extend and be formed with first barrel 404 of volume slightly larger than the circle of driver size to hold described driver.Described first intermediate plate 400 corresponds to described base plate 300 and is also comprising circular perforations 406 and two threaded perforations 408 near middle body, and described circular perforations 406 is for providing other equipment, pipeline or device; Described two threaded perforations 408 can be used for the below fixing described driver in conjunction with parts such as screws.Four limits of described first intermediate plate 400 are also formed with the perforation 409 of three rectangles arranged side by side respectively.
Fig. 5 is the reverse side schematic perspective view of described second intermediate plate 136 in an embodiment 500.Described second intermediate plate 500 has almost symmetry in the structure of described first intermediate plate 400.The corner of described second intermediate plate 500 comprises the hole, four post positions 502 corresponding to described stand column device 140, and this plate can along the guiding of described stand column device 140 upwards or move down.The downward one side of described second intermediate plate 500 (one side upwards also namely in diagram), to be formed with second barrel 504 of volume slightly larger than the circle of driver size to hold described driver perpendicular to the direction of described second intermediate plate 500 place plane extends.The diameter of described second barrel 504 should slightly larger than or be slightly less than the diameter of the first barrel 404 of described first intermediate plate 400, described in when moving to the first intermediate plate 400 to make the second intermediate plate 500, the second barrel 504 can comprise or be embedded in described first barrel 404.Described second intermediate plate 500 is also comprising two threaded perforations 508 near middle body, and described two threaded perforations 508 can be used for the top fixing described driver in conjunction with parts such as screws.Four limits of described second intermediate plate 500 of described second intermediate plate 500 are also formed with the perforation 509 of three rectangles arranged side by side respectively.
Fig. 6 be described upper plate 138 in one embodiment 600 schematic top plan view.The shape of described upper plate 600 corresponds to base plate 300 in square, and the corner of described upper plate 600 comprises the hole, four post positions 602 corresponding to described stand column device 140, and described upper plate 600 can along the guiding of described stand column device 140 upwards or move down.The central authorities of described upper plate 600 also include two perforation 608 arranged side by side.Described perforation 608 can fix the top of described driver in conjunction with parts such as screws.Four limits of described upper plate 600 are also formed with the breach 609 of three rectangles arranged side by side respectively.
In sum, the columniform cavity that described base plate 132, first intermediate plate 134, second intermediate plate 136 and upper plate 138 are formed, its inner space can accommodate driver, described driver is product comparatively ripe in prior art, such as air impeller, similarly, the driver of other such as Mechanical Driven, motorized motions or hydraulic-driven principles can also be adopted.But should recognize, when described driver produces actuating force upwards, described second intermediate plate 136 and upper plate 138 can drive by the actuating force of described driver and move up; When described driver produces downward actuating force, described second intermediate plate 136 and upper plate 138 can by the actuating force of described driver and self gravitation drive and move down.
Easy full of beard and, in another embodiment, described base plate 132 and the first intermediate plate 134 one-body molded making can become one piece of bottom plate; Described second intermediate plate 136 and upper plate 138 can become one piece of top plate in conjunction with making.That is, described drive unit 130 is also not limited to the embodiment described in above-described embodiment, as long as the execution mode that can reach same or more excellent effect all can.
The micro chamber module 120 gone out as shown in Figures 1 and 2 is then described.Upper chamber's plate 122 that described micro chamber module 120 comprises the top box device 124 above lower box device 128, the lower chambers plate 126 supported by lower box device 128, dividing plate 125, dividing plate 125 from bottom to top successively and supported by top box device 124.Described lower box device 128 and the lower chambers plate 126 that supported by lower box device 128 can under the driving of described driver module 130 along the guiding of described stand column device 140 upwards or move down.Top box device 124 above described dividing plate 125, dividing plate 125 and upper chamber's plate 122 transfixion usually supported by top box device 124, carried out the adjustment slightly of relevant planarization only by described flattening correction module 110, this details relevant hereafter will describe in detail.When described lower box device 128 and the lower chambers plate 126 that supported by lower box device 128 move up along the guiding of described stand column device 140 under the driving of described driver module 130 and with described upper chamber plate 122 and top box device 124 closed after, will micro chamber be formed.
Fig. 7 be described lower box device 124 in one embodiment 700 schematic perspective view.The shape of described lower box device 700 is bottom surface is substantially that foursquare uncovered is box-like.The hole, four post positions 702 corresponding to described stand column device 140 is comprised in the corner of described lower box device 700.The bottom surface of described lower box device 700 is thicker, and relative to the one side of top box device 124 include three angles of inclination identical with angled manner, side by side and the identical slope 704 of width, comprise the floor design of slope herein for collecting chemical agent or other fluids of the lower chambers plate water clock of the side of being located thereon.Above slope, chemicals or other fluids finally can flow at the bottom of the slope of described slope 704.Now again coordinate be communicated with described slope slope at the bottom of 704 diversion groove, hole, pipeline or receiver and so on device can collect this fluid.
To will be appreciated that at the bottom of the slope of described odd number slope simultaneously 704 towards box wall disappearance non-existent, and the inwall position that other three box walls 706 contact with described bottom surface is recessed to form a groove 707 to horizontal direction.Described lower chambers plate 128 via the box wall portion position of disappearance, can enter described lower box device 700 and by described bottom supporting along groove 707 horizontal slip on other box walls 706.In like manner, also can slide along described groove 707 when described lower chambers plate 128 is positioned at lower box device 700, slide out from the box wall portion position of disappearance described lower box device 700.Four limits of described lower box device 700 are also formed with the breach 708 of rectangle respectively.
Please refer to Fig. 8, it illustrates described lower chambers plate 128 in an embodiment 800 with the assembling schematic diagram of described lower box device 700.Although described lower chambers plate 800 is generally one-body molded.The size of described bottom 820 and edge thickness correspond respectively to the width of the Distance geometry groove 707 between the box wall 706 of described lower box device 700.Can slide along the groove 707 on the box wall 706 of described lower box device 700 to make described lower chambers plate 800.The upper surface 842 on described top 840 is the lower working face of described micro chamber.
Will be appreciated that, described lower chambers plate 800 adopts pullable mode to slip into or shift out, and can carry out easily loading and removing.Size due to semiconductor crystal wafer is divided into the equal-specifications such as 4 inches, 5 inches, 6 inches, 8 inches, adds the lower chambers plate that man-hour requirement is mated according to the wafer replacement of different size.Simultaneously, when described lower chambers plate 800 slips into described lower box device 700, a plug-in unit 160 (as shown in fig. 1) can also be used to be sticked in described lower box device, to figure 9 illustrates the reverse side schematic perspective view of described plug-in unit 160 in an embodiment 900.The both sides of described plug-in unit 900 comprise the fin 902 corresponding with the groove 707 of described lower box device 700, and the bottom of described plug-in unit 900 constructs with the bottom surface of the described lower box device 700 of correspondence corresponding to the projection 904 of described even number slope and the depression 906 of odd number slope including above also namely in diagram.Apparently, by the fixation of described plug-in unit 900, described lower chambers plate 800 can be fixed in described lower box device 700.
Described upper chamber plate 122 includes the structure being symmetrical in described lower chambers plate 800 substantially substantially.Described upper chamber plate 122 comprises in foursquare top and in discoidal bottom, those skilled in the art by Fig. 8 fairly full of beard and structure to described upper chamber plate 122, therefore omits the accompanying drawings of described upper chamber plate 122 herein.Obviously, the length of side on the foursquare top of described upper chamber plate 122 can be identical or close with described lower chambers plate 800 with the diameter of described disc bottom, and the lower surface of described bottom is the upper working face of described micro chamber.Will be appreciated that, when the upper working face of the lower working face of described lower chambers plate 800 and described upper chamber plate is closed or when being close to, wherein can form one for the cavity of holding semiconductor wafer.
Figure 10 and Figure 11 respectively illustrates the schematic perspective view of described top box device 124 in an embodiment 1000 and upward view.It is that foursquare uncovered is box-packed that the shape of described top box device 1000 is substantially bottom.The corner of described top box device 1000 has the middle body of bottom described in the hole, post position 1020 corresponding to described stand column device 140 to include the circular cavity 1040 of the bottom slightly larger than described upper chamber plate respectively, and described circular cavity 1040 includes the circumference fin 1042 extending described bottom downwards.And by the box-like space matched with the top of described upper chamber plate 122 comprising three box walls 1060, form the structure closely can holding described upper chamber plate 122.By this structure, described upper chamber plate 122 can by the stable support of described top box device 1000.
Figure 12 shows the schematic top plan view of described dividing plate 125 in an embodiment 1200.The shape of described dividing plate 1200 in square, and comprises the hole, four post positions 1220 corresponding to described stand column device 140 in the corner of described dividing plate 1200.The middle body of described dividing plate 1200 includes can the circumferential notch 1240 of circumference fin 1042 of close receipt top box device 1000.The Main Function of described dividing plate 1200 is the support level top box device 1000 of side and upper chamber's plates 122 of being contained in described top box device 1000 thereon.Four limits of described dividing plate 1200 are also formed with the breach 1260 of rectangle respectively, and described breach 1260 may be used for the element holding pipeline and install other such as valves, flow governor, sensor and so on.In one embodiment, described dividing plate 1200 can adopt stainless steel material to make.
In order to further describe the position relationship of each plate above-mentioned and described stand column device 140.Please first with reference to Figure 13 and Figure 14, the front elevational schematic of the sleeve which respectively show column and the correspondence comprised in stand column device 140 in an embodiment 1300 and generalized section.Described column 1320 comprise the thinnest columniform top 1321 of diameter, diameter thinner columniform first in the middle part of 1323, diameter thicker columniform second in the middle part of 1325 and cross section be hexagonal bottom 1327, the top outer surface on described top 1321 also comprises the first screw thread (not shown) of predetermined length.In the middle part of in the of described first, the 1323 one end outer surfaces being close to described top 1321 also comprise the second screw thread (not shown) of predetermined length, in the middle part of in the of described second, the 1325 one end outer surfaces being close to described hexagonal bottom 1327 also comprise the 3rd screw thread (not shown) of predetermined length, the screwed hole 1329 and bottom 1327 of described column 1420 has also extended internally along the axis of described column 1320.The internal diameter r of described sleeve 1340 slightly larger than or equal described column 1320 second in the middle part of 1325 diameter, and the length of described sleeve 1340 with in the middle part of in the of described second 1325 length identical.Also stand column device 140 is assembled into, now please also refer to Fig. 1 and Fig. 2 when described sleeve 1340 is enclosed within described column 1320.After described sleeve 1340 and column 1320 are assembled, internal diameter or the beeline in the cross section of described stand column device 140 diminish from down to up successively, in the middle part of the internal diameter r > second of the also i.e. external diameter R > sleeve 1340 of the beeline > sleeve 1340 in the cross section of described bottom 1,327 1325 external diameter > first in the middle part of 1323 the external diameter on external diameter > top 1321.In one embodiment, described first intermediate plate 134 and base plate 132 can also be arranged on column bottom 1327, hole, the post position internal diameter of the first intermediate plate 134 and base plate 132 slightly larger than in the middle part of second of described column 1,320 1325 external diameter, coordinate the 3rd nut corresponding to described 3rd screw thread described first intermediate plate 134 and base plate can be fixed between the 3rd nut and column bottom 1327.Described second intermediate plate 136, hole, the post position internal diameter of upper plate 138 and lower box device 128 is slightly larger than the external diameter of described sleeve 1340, also be described second intermediate plate 136, the hole, post position of upper plate 138 and lower box device 128 can hold described sleeve 1340 and be positioned at sleeve 1340 inside second in the middle part of 1325, and the height of described lower box device 128 can not to exceed in the middle part of in the of described second the upper edge of 1325 or described sleeve 1340, now described second intermediate plate 136, upper plate 138 and lower box device 128 can under the driving of driver along described sleeve 1340 and be positioned at sleeve 1340 inside second in the middle part of 1325 to move up and down.Described dividing plate 125 and top box device 124 to be positioned in the middle part of in the of described second 1325 or described sleeve 1340 top edge more than, and hole, the post position internal diameter of described dividing plate 125 and top box device 124 slightly larger than in the middle part of described first 1323 diameter but be not more than in the middle part of in the of described second 1325 external diameter.Also namely described dividing plate 125 lower surface can by the middle part of described second 1325 and the top edge of described sleeve 1340 support and can not move down.On the other hand, described flattening correction module 110 comprises the correcting plate 114 be positioned at above upper chamber's plate 122 and the top board 112 be positioned at above correcting plate 114.The corner of described correcting plate 114 also includes the hole, post position corresponding to described stand column device 140, the internal diameter in hole, described post position slightly larger than in the middle part of described first 1323 diameter, because described correcting plate 114 to be positioned at above described upper chamber plate 122 also namely above top box device 124, thus coordinate correspond to described second screw thread the second nut 154 can by correcting plate 114, top box device 124, dividing plate 125 in the middle part of fastening and described second nut 154 and described second 1325 and described sleeve 1340 top edge between.And the internal diameter in the hole, post position that the tetra-pack of top board 112 contains is less than the diameter of in the middle part of in the of described first 1323 slightly larger than the diameter on described column top 1321, therefore coordinate and to correspond between top edge that described top board 112 can be anchored in the middle part of described first nut 153 and described first 1323 by the first nut 153 of described first screw thread (nut 153 and nut 154 shown in Figure 17).Especially, described column 1320 can adopt metal or alloy cutting or casting to make, and described sleeve 1340 adopts corrosion-resistant, the exotic material of such as plastics and so on to make.
In order to further describe described flattening correction device 110, please refer to Figure 15, Figure 16 and Figure 17.Figure 15 shows the elevational schematic view of correcting plate 114 in an embodiment 1500 in the present invention.As previously mentioned, described correcting plate 1500 tetra-pack containing internal diameter slightly larger than in the middle part of described column second 1325 the hole, post position 1520 of diameter.Described correcting plate 1500 one side is downward smooth one side (also namely illustrating face), described correcting plate 1500 one side upward also includes the fin 1540 be positioned on described correcting plate 1500 diagonal, the rectangular in cross-section of described fin 1540.Described correcting plate 1500 one side downward fits tightly the upper surface in described upper chamber plate 122, and described correcting plate 1500 corner upward corresponded to the second nut 154 of the second screw thread fastening and produce downward pressure, force described upper chamber plate 122 to be closely contained in described top box device 124.On the other hand, in the middle part of four limits of described correcting plate 1500, all include elongated strip shaped perforation 1560, may be used for holding pipeline and other elements being installed.
Figure 16 show top board 112 in the present invention in one embodiment 1600 schematic perspective view.The tetra-pack of described top board 1600 is less than the hole, post position 1620 of the diameter of in the middle part of in the of described first 1323 containing internal diameter slightly larger than the diameter on described column top 1321, utilize the first nut 153 corresponding to the first screw thread described top board 1600 can be anchored on described first nut 153 and described column first in the middle part of 1323 top edge between.The diagonal of described top board 1600 and opposite side mid point line also include the screwed hole 1640 of some same inner diameter.Screwed hole 1640 on described diagonal is positioned at the fin 1540 on diagonal equally corresponding to described correcting plate 1500.Known in conjunction with Figure 17, after adopting the second screw 152 corresponding to described screwed hole 1540 to screw in described top board 1600, pressure can be produced to the local of the correcting plate 1500 being positioned at below.Also namely different pressure can be produced to the diverse location of described correcting plate 1500 by different the second screw 152 screwing in position and screw-in length, the below of described correcting plate 1500 can be made to have identical pressure through certain measurement means and cause that described upper chamber plate 122 is not only fastening to be contained in top box device 124, and making the lower working face of described upper chamber plate 122 have suitable shape.On the other hand, in the middle part of four limits of described top board 1600, all include elongated strip shaped perforation 1660, may be used for holding pipeline and other elements being installed.
In sum, described flattening correction device 110 can make the lower surface of described upper chamber plate 122 be in comparatively suitable stationary state, and described drive unit 130 can make the upper surface of described lower chambers plate 126 decline or rise and micro chamber that the upper surface of the lower surface of described upper chamber plate 122 and described lower chambers plate 126 is formed is in and opens or closed condition.Certainly, in order to obtain comparatively tight micro chamber, the lower surface of described upper chamber plate 122 and the upper surface of described lower chambers plate 126 can have corresponding laminating or coupled structure, and the joint place of described upper chamber plate 122, top box device 124, lower chambers plate 126 and lower box device 128 can also adopt the elements such as the sealing O ring of such as rubber quality.Simultaneously in order to enable chemicals or other fluid inlet and outlet micro chamber, described upper chamber plate 122 and lower chambers plate 126 also should have the structure of the microtubule and guiding gutter and so on of hollow.For example need to make semiconductor crystal wafer when described micro chamber is inner, the inwall of semiconductor crystal wafer and described micro chamber is formed can for the space of chemicals circulation, and this gap length is usually between 0.01mm and 10mm.The such as above-mentioned part that these are not described in detail herein, the content be well known to the skilled person, is not repeated at this.
In a specific embodiment, when adopting the semiconductor processing device 100 in the present invention to process semiconductor die bowlder, processing procedure probably can be divided into following several process: chamber panel Renewal process, smooth calibration process, chemical treating process.
At chamber panel Renewal process, the chamber panel of coupling can be changed according to semiconductor die size to be processed.First driver produced downward actuating force and lower box device 128 and lower chambers plate 126 are declined, then opening or extract plug-in unit 160, more original lower chambers plate 126 is taken out along sliding in the navigation groove of described lower box device 128.Suitable described lower chambers plate 126 being loaded along sliding in the navigation groove of described lower box device 128, described plug-in unit 160 being installed and being fixed in described lower box device 128 to make described lower chambers plate 126.
At described smooth calibration phase, the planarization of described upper chamber plate 122 can be corrected.First by regulating the second nut 154 above the corner of described correcting plate 114 to give the corner of described correcting plate 114 suitable pressure, the planarization of described upper chamber plate 122 can tentatively be regulated.Recycle the micro chamber of existing level measurement device or observation closure state, according to measurement result or observed result, coordinate multiple second installation of screw 152 on top board 112, accurately can adjust the pressure distribution on described correcting plate 122, thus make described upper chamber plate 122 be in the state comparatively meeting technological requirement.Certainly, in certain embodiments, also may need to regulate described upper chamber plate 122 to be in the state at certain inclination angle, to facilitate, corresponding process be done to semiconductor crystal wafer, now regulate the mode of described upper chamber plate 122 can associate easily from foregoing description.
At chemical treating process, first described drive unit 130 is utilized described micro chamber to be closed, by the microtubule of the hollow in described upper chamber plate 122, chemicals or other fluids are introduced described micro chamber with the process such as analyzed the wafer of inside, etch and so on again, then order about described chemicals or other fluids by the delivery of inner pressure, such as gas or gravity and discharge via the structure within the microtubule of the hollow in described lower chambers plate 126 or guiding gutter.This partial content is content well-known to those skilled in the art.Especially; because upper chamber's plate 122 and lower chambers plate 126 need the structure considering the microtubule or guiding gutter and so on of such as hollow when designing; according to specific embodiment, upper chamber's plate 122 and lower chambers plate 126 may have various deformation and more complicated structure; and not exclusively as the description herein for upper chamber's plate 122 and lower chambers plate 126, therefore relevant difference herein should as the factor restricting protection scope of the present invention.
One of advantage of the present invention and bright spot are: semiconductor processing device like this in prior art, usually adopt upper and lower two drive units to drive the structure of described upper chamber plate 122 and described lower chambers plate 126 respectively.And in the present invention, adopt flattening correction device 111 to substitute superposed drive unit of the prior art, make the present invention not only be provided with more simple structure, also facilitate the operation of user.
Another advantage of the present invention and bright spot are: semiconductor processing device like this in prior art, when pending semiconductor die size is different, when changing upper chamber's plate 122 and the lower chambers plate 126 of coupling need whole table apparatus all to take apart, particularly the replacing of lower chambers plate 126 is loaded down with trivial details especially.And adopt pullable lower box device 128 and supporting plug-in unit 160 to make the loading of described lower chambers plate 126 in the present invention and remove process more for convenience, only need lower chambers plate 126 along pull-out of sliding in the navigation groove of described lower box device 128, slip into described lower box device 128 again after changing the suitable lower chambers plate 126 of size, and all can with plug-in unit 160 is fixing.
Another advantage of the present invention and bright spot are: semiconductor processing device like this in prior art, if in chemical treating process, described micro chamber closes not tight or poorly sealed lattice, and microtubule in the described lower chambers plate situation that occurs to reveal and so on is when occurring, chemicals or other fluid leakages all may be caused in described lower box device, and then whole semiconductor device may be overflowed.And the bottom surface of the lower box device 128 adopted in the present invention is not smooth, but it is identical with angled manner, side by side and the identical slope of width to include three angles of inclination, by the structure be similar to described in Fig. 7, the chemicals of leakage can be collected in side or a place of at the bottom of the slope of described slope 704 by described lower box device 128, coordinate the structure of such as guiding gutter, pipeline, receiver and so on just can collect again described by the chemicals leaked out, and avoid other position flowing to equipment outside described chemicals cause corrosion and pollute.Meanwhile, only needing, a transducer is set in described chemicals leakage collection side or collection place and just can complete whether having chemicals leakage to monitor, when there being chemicals to leak, sending signal in time.
Another advantage of the present invention and bright spot are: semiconductor processing device like this in prior art, such as the assembly of stand column device 140 adopts integrated metal casting usually, and on the one hand due to described in chemical treatment stage micro chamber chemical pretreatment solution sometimes generating strap be corrosive and/or the gas of high temperature, can corrode described stand column device when these are with mordant gas to touch metal upright post surface, the contamination particle of containing metal composition is produced on the other hand because described lower box device can cause mild wear to described stand column device in the process risen and decline.。And the structure that the stand column device 140 adopted in the present invention adopts column 1320 and sleeve 1340 to combine, its central post 1320 can adopt integrated Metal Cutting or casting to form, and described sleeve 1340 can adopt the material of corrosion-resistant and resistant to elevated temperatures such as plastics to make.Even if abrasion and corrosion occurs described stand column device 140, only need to change described sleeve 1340.
Describe from here simultaneously and can be easy to associate, upper chamber's plate 122 that directly may contact with chemical reagent and other fluids, top box device 124, lower chambers plate 126 and lower box device 128 all should adopt corrosion-resistant and resistant to elevated temperatures material to make, and other assemblies all can adopt integrated Metal Cutting or casting to form.
On the other hand, described column 1320 has multistage stair-stepping cylindrical column and bolt hole, only needs to coordinate corresponding screw and bolt just can other each assemblies very convenient fixing and being fastened in described stand column device 140.
Above-mentioned explanation fully discloses the specific embodiment of the present invention.It is pointed out that the scope be familiar with person skilled in art and any change that the specific embodiment of the present invention is done all do not departed to claims of the present invention.Correspondingly, the scope of claim of the present invention is also not limited only to described embodiment.
Claims (6)
1. comprising can the semiconductor processing device of pull chamber, and utilize process fluid to semiconductor crystal wafer, it is characterized in that, it comprises:
Comprise one for closely holding and process the micro chamber of semiconductor crystal wafer, described micro chamber comprises the portion of upper chamber forming upper working surface and the lower chambers portion forming lower working surface, portion of described upper chamber and/or described lower chambers portion can one for load and/or remove this semiconductor crystal wafer open position and one for closely hold this semiconductor crystal wafer off-position between move
When portion of upper chamber or described lower chambers portion in the closed position time, semiconductor crystal wafer is installed between described upper working surface and lower working surface, and be formed for processing the space that fluid flows with the inwall of described micro chamber, portion of described upper chamber and/or described lower chambers portion comprise at least one enters described micro chamber entrance and at least one outlet for micro chamber described in process fluid expulsion for process fluid
Wherein said lower chambers portion comprises the lower chambers plate forming described lower working surface and the lower box device holding described lower chambers plate, described lower box device comprises the uncovered cavity of lateral opening, described lower chambers plate can slip into or shift out described uncovered cavity from described lateral opening
The edge that described uncovered cavity corresponds to the bottom of described lower chambers plate is formed with groove, and described lower chambers plate slips into or shift out described uncovered cavity from described lateral opening along described groove.
2. semiconductor processing device according to claim 1, it is characterized in that, described lower chambers plate comprises a bottom being fit to described uncovered cavity shape and the top be positioned on described bottom, and the upper surface on described top forms the lower working surface of described micro chamber.
3. semiconductor processing device according to claim 1, it is characterized in that, described semiconductor processing device also comprises a plug-in unit, the shape of described plug-in unit meets the shape of described lateral opening, after described lower chambers plate is loaded into described uncovered cavity, fix described lower chambers plate in described uncovered cavity by described plug-in unit being inserted described lateral opening.
4. semiconductor processing device according to claim 1, is characterized in that,
When transportable chamber portion is portion of upper chamber, above portion of described upper chamber, also comprise a drive unit, when described drive unit produces downward actuating force, drive portion of described upper chamber to move to off-position from open position; When described drive unit produces actuating force upwards, portion of described upper chamber is driven to move from off-position to open position;
When transportable chamber portion is lower chambers portion, below described lower chambers portion, also comprise a drive unit, when described drive unit produces actuating force upwards, drive described lower chambers portion to move to off-position from open position; When described drive unit produces downward actuating force, described lower chambers portion is driven to move from off-position to open position.
5. semiconductor processing device according to claim 4, it is characterized in that, described drive unit comprises a driver and holds the scalable cavity of described driver, and described driver is the one in air impeller, motor driver, thermo-mechanical drive or hydraulic unit driver.
6. semiconductor processing device according to claim 5, it is characterized in that, the edge in portion of described upper chamber and described lower chambers portion comprises corresponding hole, post position, wherein a chamber portion by run through described hole, post position and perpendicular to the working surface in this chamber portion column fix; Another chamber portion is by running through described hole, post position and moving relative to fixing chamber portion perpendicular to the column guiding of the working surface in this chamber portion.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110094239.6A CN102738031B (en) | 2011-04-15 | 2011-04-15 | Semiconductor processing apparatus containing drawable cavity |
| US14/111,859 US10121681B2 (en) | 2011-04-15 | 2012-04-14 | Semiconductor processing device |
| PCT/CN2012/074053 WO2012139527A1 (en) | 2011-04-15 | 2012-04-14 | Semiconductor processing device |
| EP15187073.0A EP2998990B1 (en) | 2011-04-15 | 2012-04-14 | Semiconductor processing device |
| EP12770708.1A EP2693461B1 (en) | 2011-04-15 | 2012-04-14 | Semiconductor processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110094239.6A CN102738031B (en) | 2011-04-15 | 2011-04-15 | Semiconductor processing apparatus containing drawable cavity |
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| Publication Number | Publication Date |
|---|---|
| CN102738031A CN102738031A (en) | 2012-10-17 |
| CN102738031B true CN102738031B (en) | 2015-02-04 |
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| CN201110094239.6A Active CN102738031B (en) | 2011-04-15 | 2011-04-15 | Semiconductor processing apparatus containing drawable cavity |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1225747A (en) * | 1996-06-05 | 1999-08-11 | 兰姆研究公司 | Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support |
| CN1806312A (en) * | 2003-06-13 | 2006-07-19 | 温子瑛 | Method and apparatus for thin-layer chemical processing of semiconductor wafers |
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2011
- 2011-04-15 CN CN201110094239.6A patent/CN102738031B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1225747A (en) * | 1996-06-05 | 1999-08-11 | 兰姆研究公司 | Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support |
| CN1806312A (en) * | 2003-06-13 | 2006-07-19 | 温子瑛 | Method and apparatus for thin-layer chemical processing of semiconductor wafers |
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| CN102738031A (en) | 2012-10-17 |
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