CN102723635B - Vacuum high-voltage electrode flange - Google Patents

Vacuum high-voltage electrode flange Download PDF

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Publication number
CN102723635B
CN102723635B CN201210100644.9A CN201210100644A CN102723635B CN 102723635 B CN102723635 B CN 102723635B CN 201210100644 A CN201210100644 A CN 201210100644A CN 102723635 B CN102723635 B CN 102723635B
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China
Prior art keywords
electrode
external
vacuum chamber
flange
pressing plate
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CN201210100644.9A
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Chinese (zh)
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CN102723635A (en
Inventor
戴建新
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CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD
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CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD
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Priority to CN201210100644.9A priority Critical patent/CN102723635B/en
Publication of CN102723635A publication Critical patent/CN102723635A/en
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Abstract

The invention discloses a vacuum high-voltage electrode flange, which utilizes a structure of coaxial electrodes and insulating materials to shield electric discharge, thereby being able to resist voltage of 20KV. The structure comprises an inner pressing plate of an external electrode of a vacuum chamber, an outer pressing plate of an upper electrode of an electrode external guard, an external coaxial conflux cable of the vacuum chamber, a flange, the external electrode, an internal electrode, an inner pressing plate of the internal electrode of the vacuum chamber, an outer pressing plate of a lower electrode, and an internal coaxial conflux cable of the vacuum chamber, wherein an external insulation lagging is arranged between the flange and the external electrode, an internal insulation lagging is arranged between the external electrode and the internal electrode, and an electrode internal guard is arranged between the inner pressing plate of the internal electrode of the vacuum chamber and the outer pressing plate of the lower electrode. Compared with the prior art, in the structure, special insulating materials are adopted to prepare special insulation laggings. The structure has the advantages of obvious effects in shielding electric discharge, simple structure, and easy and convenient disassembly.

Description

A kind of vacuum high-pressure electrode flange
Technical field
The present invention relates to a kind of flange, especially a kind of for vacuum plant assembling high pressure resistant electrode flange.
Background technology
Under vacuum state, the through-current capability of electrode ability 20KV voltage, tens KA, excites (tip) glow discharge phenomenon but be easy to form high voltage, thereby makes product electric discharge and can not work.
The withstand voltage properties of high voltage insulation structure (comprising insulation system and metal electrode structure) is the primary problem solving of high pressure vacuum electrode; if the withstand voltage properties of high voltage insulation structure can not ensure; conventionally there will be discharge breakdown phenomenon, product is discharged and can not work.The principal element that affects withstand voltage effect has: insulating material, insulation system etc.
Because all restriction of traditional flange under high pressure vacuum environment, becomes a great problem that current puzzlement vacuum high-pressure device is tested in a vacuum.
Summary of the invention
Goal of the invention: for the deficiencies in the prior art, we grope through long-term practice in construction, have designed a kind of vacuum high-pressure electrode flange.
Technical scheme: in order to realize foregoing invention object, the technical solution adopted in the present invention is: a kind of vacuum high-pressure electrode flange, this device utilizes coaxial electrode to add insulating material shielding discharging structure, thereby obtain the ability of ability 20KV voltage, the through-current capability of tens KA, its structure comprises vacuum chamber external electrode clip plate, electrode outer protective cover, top electrode outer plate, be arranged between top electrode outer plate and external electrode and vacuum chamber external electrode clip plate and interior electrode between the vacuum chamber cable that coaxially confluxes outward, ring flange, external electrode, interior electrode, electrode clip plate in vacuum chamber, bottom electrode outer plate and be arranged on the cable that coaxially confluxes in the vacuum chamber between electrode clip plate and interior electrode between bottom electrode outer plate and external electrode and in vacuum chamber, between described ring flange and external electrode, be provided with external insulation protective jacket, between described external electrode and interior electrode, be provided with interior insulating sheath, in vacuum chamber, between electrode clip plate and bottom electrode outer plate, be provided with protective cover in electrode.
Described external insulation protective jacket is equipped with vaccum seal ring near the position of ring flange and external electrode, interior electrode with the position that interior insulating sheath contacts.
Beneficial effect: beneficial effect fruit of the present invention is: through test of many times and use checking, the through-current capability of electrode ability 20KV voltage, tens KA; Simple in structure, dismantle easy and convenient.
Brief description of the drawings
Accompanying drawing is the structural representation of a kind of vacuum high-pressure electrode flange of the present invention.
Embodiment
Below in conjunction with accompanying drawing, by a most preferred embodiment, the technical program is elaborated, but protection scope of the present invention is not limited to described embodiment.
As shown in the figure, a kind of vacuum high-pressure electrode flange, comprise vacuum chamber external electrode clip plate 1, electrode outer protective cover 2, top electrode outer plate 3, be arranged on vacuum chamber between top electrode outer plate 3 and external electrode 7 and between vacuum chamber external electrode clip plate 1 and interior electrode 9 cable 4 that coaxially confluxes outward, ring flange 14, external electrode 7, interior electrode 9, electrode clip plate 13 in vacuum chamber, bottom electrode outer plate 11 and be arranged on bottom electrode outer plate 11 and external electrode 7 between and the cable 10 that coaxially confluxes in the vacuum chamber between electrode clip plate 13 and interior electrode 9 in vacuum chamber, between described ring flange 14 and external electrode 7, be provided with external insulation protective jacket 5, between described external electrode 7 and interior electrode 9, be provided with interior insulating sheath 8, in described vacuum chamber, between electrode clip plate 13 and bottom electrode outer plate 11, be provided with protective cover 12 in electrode.
Described external insulation protective jacket 5 is equipped with vaccum seal ring 6 near the position of ring flange 14 and external electrode 7, interior electrode 9 with the position that interior insulating sheath 8 contacts.

Claims (2)

1. a vacuum high-pressure electrode flange, comprise vacuum chamber external electrode clip plate (1), electrode outer protective cover (2), top electrode outer plate (3), be arranged on vacuum chamber between top electrode outer plate (3) and external electrode (7) and between vacuum chamber external electrode clip plate (1) and interior electrode (9) cable (4) that coaxially confluxes outward, ring flange (14), external electrode (7), interior electrode (9), electrode clip plate (13) in vacuum chamber, bottom electrode outer plate (11) and be arranged on bottom electrode outer plate (11) and external electrode (7) between and the cable (10) that coaxially confluxes in the vacuum chamber between electrode clip plate (13) and interior electrode (9) in vacuum chamber, it is characterized in that: between described ring flange (14) and external electrode (7), be provided with external insulation protective jacket (5), between described external electrode (7) and interior electrode (9), be provided with interior insulating sheath (8), in described vacuum chamber, between electrode clip plate (13) and bottom electrode outer plate (11), be provided with protective cover (12) in electrode.
2. a kind of vacuum high-pressure electrode flange according to claim 1, is characterized in that: the position that the position of the close ring flange (14) of described external insulation protective jacket (5) and external electrode (7), interior electrode (9) contact with interior insulating sheath (8) is equipped with vaccum seal ring (6).
CN201210100644.9A 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange Active CN102723635B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210100644.9A CN102723635B (en) 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210100644.9A CN102723635B (en) 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange

Publications (2)

Publication Number Publication Date
CN102723635A CN102723635A (en) 2012-10-10
CN102723635B true CN102723635B (en) 2014-10-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210100644.9A Active CN102723635B (en) 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103545935A (en) * 2012-07-10 2014-01-29 苏州张扬能源科技有限公司 Energy accumulation flange
CN110165494A (en) * 2019-05-30 2019-08-23 中国科学院上海应用物理研究所 High pressure vacuum feed-in attachment device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201174556Y (en) * 2008-03-20 2008-12-31 中国科学院近代物理研究所 Ceramic-metal enclosed high-pressure vacuum wall piercer
CN201184465Y (en) * 2007-12-04 2009-01-21 北京卫星环境工程研究所 Insulated vacuum seal flange for high pressure transmission and matching electrode thereof
EP2256876A1 (en) * 2009-05-29 2010-12-01 Radiall Very-high-power connector
CN102324669A (en) * 2011-08-05 2012-01-18 上海航天科工电器研究院有限公司 Twin-core high-voltage electric connector
CN202678569U (en) * 2012-04-09 2013-01-16 常熟市虞华真空设备科技有限公司 Vacuum high-voltage electrode flange

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201184465Y (en) * 2007-12-04 2009-01-21 北京卫星环境工程研究所 Insulated vacuum seal flange for high pressure transmission and matching electrode thereof
CN201174556Y (en) * 2008-03-20 2008-12-31 中国科学院近代物理研究所 Ceramic-metal enclosed high-pressure vacuum wall piercer
EP2256876A1 (en) * 2009-05-29 2010-12-01 Radiall Very-high-power connector
CN102324669A (en) * 2011-08-05 2012-01-18 上海航天科工电器研究院有限公司 Twin-core high-voltage electric connector
CN202678569U (en) * 2012-04-09 2013-01-16 常熟市虞华真空设备科技有限公司 Vacuum high-voltage electrode flange

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