CN102723635A - Vacuum high-voltage electrode flange - Google Patents

Vacuum high-voltage electrode flange Download PDF

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Publication number
CN102723635A
CN102723635A CN2012101006449A CN201210100644A CN102723635A CN 102723635 A CN102723635 A CN 102723635A CN 2012101006449 A CN2012101006449 A CN 2012101006449A CN 201210100644 A CN201210100644 A CN 201210100644A CN 102723635 A CN102723635 A CN 102723635A
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CN
China
Prior art keywords
electrode
vacuum chamber
external
flange
pressing plate
Prior art date
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Granted
Application number
CN2012101006449A
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Chinese (zh)
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CN102723635B (en
Inventor
戴建新
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD
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CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD
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Application filed by CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD filed Critical CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD
Priority to CN201210100644.9A priority Critical patent/CN102723635B/en
Publication of CN102723635A publication Critical patent/CN102723635A/en
Application granted granted Critical
Publication of CN102723635B publication Critical patent/CN102723635B/en
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Abstract

The invention discloses a vacuum high-voltage electrode flange, which utilizes a structure of coaxial electrodes and insulating materials to shield electric discharge, thereby being able to resist voltage of 20KV. The structure comprises an inner pressing plate of an external electrode of a vacuum chamber, an outer pressing plate of an upper electrode of an electrode external guard, an external coaxial conflux cable of the vacuum chamber, a flange, the external electrode, an internal electrode, an inner pressing plate of the internal electrode of the vacuum chamber, an outer pressing plate of a lower electrode, and an internal coaxial conflux cable of the vacuum chamber, wherein an external insulation lagging is arranged between the flange and the external electrode, an internal insulation lagging is arranged between the external electrode and the internal electrode, and an electrode internal guard is arranged between the inner pressing plate of the internal electrode of the vacuum chamber and the outer pressing plate of the lower electrode. Compared with the prior art, in the structure, special insulating materials are adopted to prepare special insulation laggings. The structure has the advantages of obvious effects in shielding electric discharge, simple structure, and easy and convenient disassembly.

Description

A kind of vacuum high-pressure electrode flange
Technical field
The present invention relates to a kind of flange, especially a kind of be used for vacuum plant assembling high pressure resistant electrode flange.
Background technology
Under vacuum state, the through-current capability of electrode ability 20KV voltage, tens KA excites (tip) glow discharge phenomenon but be easy to form high voltage, thereby makes product discharge and can not work.
The withstand voltage properties of high voltage insulation structure (comprising insulation system and metal electrode structure) is the primary problem that solves of high pressure vacuum electrode, if the withstand voltage properties of high voltage insulation structure can not guarantee, the discharge breakdown phenomenon can appear usually, make the product discharge and can not work.The principal element that influences withstand voltage effect has: insulating material, insulation system etc.
Because all restriction of traditional flange under the high pressure vacuum environment becomes a great problem that present puzzlement vacuum high-pressure device is tested in a vacuum.
Summary of the invention
Goal of the invention: to the deficiency of prior art, we grope through long-term practice in construction, have designed a kind of vacuum high-pressure electrode flange.
Technical scheme: in order to realize the foregoing invention purpose; The technical scheme that the present invention adopted is: a kind of vacuum high-pressure electrode flange; This device utilizes coaxial electrode to add insulating material shielding discharging structure; Thereby obtain the ability of ability 20KV voltage, the through-current capability of tens KA; Its structure comprises vacuum chamber external electrode clip plate, electrode outer protective cover top electrode outer plate, be arranged in vacuum chamber external electrode clip plate and the outer coaxial cable that confluxes of the vacuum chamber between the top electrode outer plate, ring flange, external electrode, interior electrode, the vacuum chamber electrode clip plate, bottom electrode outer plate and be arranged in the vacuum chamber the coaxial cable that confluxes in the vacuum chamber between electrode clip plate, the bottom electrode outer plate; Be provided with the external insulation protective jacket between said ring flange and the external electrode; Be provided with interior insulating sheath between said external electrode and the interior electrode, be provided with protective cover in the electrode in the vacuum chamber between electrode clip plate and the bottom electrode outer plate.
Said external insulation protective jacket is equipped with vaccum seal ring near position and external electrode, interior electrode and the interior insulating sheath position contacting of ring flange.
Beneficial effect: beneficial effect of the present invention really is: through test of many times and use checking, the through-current capability of electrode ability 20KV voltage, tens KA; Simple in structure, dismantle easy and convenient.
Description of drawings
Accompanying drawing is the structural representation of a kind of vacuum high-pressure electrode of the present invention flange.
Embodiment
Below in conjunction with accompanying drawing, through a most preferred embodiment, the present technique scheme is elaborated, but protection scope of the present invention is not limited to said embodiment.
As shown in the figure; A kind of vacuum high-pressure electrode flange; Comprise vacuum chamber external electrode clip plate 1, electrode outer protective cover 2 top electrode outer plates 3, be arranged in vacuum chamber external electrode clip plate 1 and the outer coaxial cable 4 that confluxes of the vacuum chamber between the top electrode outer plate 3, ring flange 14, external electrode 7, interior electrode 9, the vacuum chamber electrode clip plate 13, bottom electrode outer plate 11 and be arranged in the vacuum chamber the coaxial cable 10 that confluxes in the vacuum chamber between electrode clip plate 13, the bottom electrode outer plate 11; Be provided with external insulation protective jacket 5 between said ring flange 14 and the external electrode 7; Be provided with protective cover 12 in the electrode in the insulating sheath 8 in being provided with between said external electrode 7 and the interior electrode 9, said vacuum chamber between electrode clip plate 13 and the bottom electrode outer plate 11.
Said external insulation protective jacket 5 is equipped with vaccum seal ring 6 near position and external electrode 7, interior electrode 9 and interior insulating sheath 8 position contacting of ring flange 14.

Claims (2)

1. vacuum high-pressure electrode flange; Comprise vacuum chamber external electrode clip plate (1), electrode outer protective cover (2) top electrode outer plate (3), be arranged on the outer coaxial cable that confluxes (4) of vacuum chamber between vacuum chamber external electrode clip plate (1) and the top electrode outer plate (3), electrode clip plate (13), bottom electrode outer plate (11) and be arranged in the vacuum chamber the coaxial cable that confluxes (10) in the vacuum chamber between electrode clip plate (13), the bottom electrode outer plate (11) in the ring flange (14), external electrode (7), interior electrode (9), vacuum chamber; It is characterized in that: be provided with external insulation protective jacket (5) between said ring flange (14) and the external electrode (7); Be provided with interior insulating sheath (8) between said external electrode (7) and the interior electrode (9), be provided with protective cover (12) in the electrode in the said vacuum chamber between electrode clip plate (13) and the bottom electrode outer plate (11).
2. a kind of vacuum high-pressure electrode flange according to claim 1 is characterized in that: said external insulation protective jacket (5) is equipped with vaccum seal ring (6) near position and external electrode (7), interior electrode (9) and interior insulating sheath (8) position contacting of ring flange (14).
CN201210100644.9A 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange Active CN102723635B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210100644.9A CN102723635B (en) 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210100644.9A CN102723635B (en) 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange

Publications (2)

Publication Number Publication Date
CN102723635A true CN102723635A (en) 2012-10-10
CN102723635B CN102723635B (en) 2014-10-08

Family

ID=46949336

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210100644.9A Active CN102723635B (en) 2012-04-09 2012-04-09 Vacuum high-voltage electrode flange

Country Status (1)

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CN (1) CN102723635B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103545935A (en) * 2012-07-10 2014-01-29 苏州张扬能源科技有限公司 Energy accumulation flange
CN110165494A (en) * 2019-05-30 2019-08-23 中国科学院上海应用物理研究所 High pressure vacuum feed-in attachment device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201174556Y (en) * 2008-03-20 2008-12-31 中国科学院近代物理研究所 Ceramic-metal enclosed high-pressure vacuum wall piercer
CN201184465Y (en) * 2007-12-04 2009-01-21 北京卫星环境工程研究所 Insulated vacuum seal flange for high pressure transmission and matching electrode thereof
EP2256876A1 (en) * 2009-05-29 2010-12-01 Radiall Very-high-power connector
CN102324669A (en) * 2011-08-05 2012-01-18 上海航天科工电器研究院有限公司 Twin-core high-voltage electric connector
CN202678569U (en) * 2012-04-09 2013-01-16 常熟市虞华真空设备科技有限公司 Vacuum high-voltage electrode flange

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201184465Y (en) * 2007-12-04 2009-01-21 北京卫星环境工程研究所 Insulated vacuum seal flange for high pressure transmission and matching electrode thereof
CN201174556Y (en) * 2008-03-20 2008-12-31 中国科学院近代物理研究所 Ceramic-metal enclosed high-pressure vacuum wall piercer
EP2256876A1 (en) * 2009-05-29 2010-12-01 Radiall Very-high-power connector
CN102324669A (en) * 2011-08-05 2012-01-18 上海航天科工电器研究院有限公司 Twin-core high-voltage electric connector
CN202678569U (en) * 2012-04-09 2013-01-16 常熟市虞华真空设备科技有限公司 Vacuum high-voltage electrode flange

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103545935A (en) * 2012-07-10 2014-01-29 苏州张扬能源科技有限公司 Energy accumulation flange
CN110165494A (en) * 2019-05-30 2019-08-23 中国科学院上海应用物理研究所 High pressure vacuum feed-in attachment device

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