CN102723411B - 具有镍铟锡氧化物自旋电子注入层的led芯片结构 - Google Patents
具有镍铟锡氧化物自旋电子注入层的led芯片结构 Download PDFInfo
- Publication number
- CN102723411B CN102723411B CN201210014723.8A CN201210014723A CN102723411B CN 102723411 B CN102723411 B CN 102723411B CN 201210014723 A CN201210014723 A CN 201210014723A CN 102723411 B CN102723411 B CN 102723411B
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- Prior art keywords
- gallium nitride
- layer
- tin oxide
- indium tin
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- SZSRJCBQOWRHGU-UHFFFAOYSA-N indium;nickel;oxotin Chemical compound [Ni].[In].[Sn]=O SZSRJCBQOWRHGU-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 238000002347 injection Methods 0.000 title abstract description 6
- 239000007924 injection Substances 0.000 title abstract description 6
- 229910002601 GaN Inorganic materials 0.000 claims abstract description 74
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims abstract description 66
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 49
- 239000002184 metal Substances 0.000 claims abstract description 27
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 25
- 239000002105 nanoparticle Substances 0.000 claims abstract description 24
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 15
- 239000010980 sapphire Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000009987 spinning Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000000605 extraction Methods 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229910052738 indium Inorganic materials 0.000 abstract 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
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- Led Devices (AREA)
Abstract
Description
Claims (5)
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CN201210014723.8A CN102723411B (zh) | 2012-01-18 | 2012-01-18 | 具有镍铟锡氧化物自旋电子注入层的led芯片结构 |
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CN201210014723.8A CN102723411B (zh) | 2012-01-18 | 2012-01-18 | 具有镍铟锡氧化物自旋电子注入层的led芯片结构 |
Publications (2)
Publication Number | Publication Date |
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CN102723411A CN102723411A (zh) | 2012-10-10 |
CN102723411B true CN102723411B (zh) | 2015-01-28 |
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CN201210014723.8A Expired - Fee Related CN102723411B (zh) | 2012-01-18 | 2012-01-18 | 具有镍铟锡氧化物自旋电子注入层的led芯片结构 |
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CN (1) | CN102723411B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106449922B (zh) * | 2016-08-31 | 2018-08-31 | 厦门市三安光电科技有限公司 | 一种发光二极管的制作方法 |
CN107516699A (zh) * | 2017-06-22 | 2017-12-26 | 淮安澳洋顺昌光电技术有限公司 | 一种高亮led芯片的制备方法 |
CN109860352A (zh) * | 2019-03-07 | 2019-06-07 | 南京邮电大学 | 基于Fe3N/GaN异质结构的自旋发光二极管及其制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1677703A (zh) * | 2004-03-12 | 2005-10-05 | 三星电子株式会社 | 氮化物基发光器件及其制造方法 |
CN101350385A (zh) * | 2007-07-17 | 2009-01-21 | 北京大学 | 一种GaN基自旋发光二极管及其制备方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101603777B1 (ko) * | 2009-04-16 | 2016-03-15 | 삼성전자주식회사 | 백색 발광 다이오드 |
KR101166547B1 (ko) * | 2010-06-21 | 2012-07-19 | 경희대학교 산학협력단 | 전기증착방식으로 형성된 나노 막대를 구비하는 발광 다이오드 소자 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1677703A (zh) * | 2004-03-12 | 2005-10-05 | 三星电子株式会社 | 氮化物基发光器件及其制造方法 |
CN101350385A (zh) * | 2007-07-17 | 2009-01-21 | 北京大学 | 一种GaN基自旋发光二极管及其制备方法 |
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CN102723411A (zh) | 2012-10-10 |
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