CN102709801A - Laser capable of simultaneously outputting nanosecond pulses and pico-second pulses - Google Patents

Laser capable of simultaneously outputting nanosecond pulses and pico-second pulses Download PDF

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CN102709801A
CN102709801A CN2012101809090A CN201210180909A CN102709801A CN 102709801 A CN102709801 A CN 102709801A CN 2012101809090 A CN2012101809090 A CN 2012101809090A CN 201210180909 A CN201210180909 A CN 201210180909A CN 102709801 A CN102709801 A CN 102709801A
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laser
pockers cell
polarizer
nanosecond
pulse
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CN102709801B (en
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于海娟
林学春
张玲
孙伟
鄢歆
杨盈莹
韩泽华
曲研
晏诗恋
侯玮
李晋闽
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Institute of Semiconductors of CAS
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Abstract

The invention discloses a laser capable of simultaneously outputting nanosecond pulses and pico-second pulses. The laser comprises a signal source, a signal isolation system and an amplifier. According to the invention, with an electric light control technology of combining an extra-cavity Pockels cell and intra-cavity Pockels cell, a regenerative amplification process is realized in case of signal light importing so as to obtain high-energy pico-second laser output, and cavity empty process is also realized in case of no signal light importing so as to obtain nanosecond pulse output; and the free combination of the two processes can be realized according to practical application demand, and as a result, free combination of numbers of the nanosecond pulses and the pico-second pulses in a single laser is realized and is output in an alternative way. The laser provided by the invention has an important application in high-precision high-efficiency fine processing field, as well as basic research fields such as plasma excitation, excited state control, chemical reaction control, special radiation excitation and the like.

Description

A kind of laser of exporting nanosecond and picopulse simultaneously
Technical field
The present invention relates to the laser technique field, relate in particular to a kind of laser of exporting nanosecond and picopulse simultaneously.
Background technology
The laser beam that nanosecond and picopulse constitute has important application in the high accuracy material processing field, and this laser can combine the advantage of psec and nanosecond pulse to accomplish the process of materials processing simultaneously.Picosecond laser processing heat affected area is little; Pulse duration is less than 10ps, and the etching ablation effect of the direct sublimator material of laser accounts for leading position, and " cold working " effect that obtains no obvious heat affected area is belonged to cold working laser category; But etching efficient is lower, has increased process time greatly; Nanosecond pulse can realize highly-efficient processing, but because the pulse duration broad, plasma shield is serious, and the heat affected area is big, has reduced machining accuracy.Two kinds of pulses are used in combination in the practical operation, can extract the advantage of distinct pulse widths, realize efficient, high-precision miniature processing.Acquisition is than the etching depth and the etching rate of high tens of times of simple picosecond laser processing, for efficient little processing dielectric substance provides a kind of feasible means.In fact; Not only can combine to realize good processing effect by many pulsewidths at little manufacture field; In other research field; Handle, control chemical reaction, excite can make up through distinct pulse widths in the process such as extraordinary radiation and handle like excitation of plasma and excitation state, the laser beam of many pulsewidths combinations has great significance in scientific research and practical application.
Two or more pulsewidth array outputs at present mainly realize through two of synchronous control technique controls or multi-station laser; The method that realizes impulsive synchronization control has two kinds; A kind of is through accurate circuit control technology; The outer light path design that this Technology Need is complicated exists bigger time jitter and random time to postpone usually; Second kind is to utilize full photocontrol to realize the synchronous of light beam; It realizes that mainly principle is to utilize the cross-phase modulation of medium to realize two kinds of light beam synchronous modulation simultaneously two-beam; The shared same laser medium of two kinds of lasers of this Technology Need, gain competition make the unsteadiness of lock-out pulse increase, and common resonant chamber complex design; Mismatch length is little, and the variation of external environment can cause that destabilizing factor increases.Above-mentioned two kinds of simultaneous techniquess all are on the basis of two lasers, to accomplish and realize; Laser has fully independently cavity resonator structure, pulse repetition frequency and pulse duration; The space that needs to realize two bundle laser through light path design is with bundle and Domain Synchronous, and system has increased unsteadiness and complexity.
Patent " two pulsewidth output laser "; The patent No., CN201075571, date issued in June, 2008; Propose two pulsewidth output lasers in this patent, adopted long pulse circuit and short pulse drives Pockers cell to obtain the laser output of dipulse width respectively.But this laser belongs to electric light Q technology, obtains pulse duration and is respectively nanosecond and microsecond, does not belong to the ultrafast laser category, is not suitable for the applications in high retrofit.
Summary of the invention
The technical problem that (one) will solve
To the problems referred to above, main purpose of the present invention is to provide a kind of laser of exporting nanosecond and picopulse simultaneously, regenerative amplification and cavity dumping technology is focused in the laser realize, in same laser beam, obtains psec and nanosecond pulse sequence.
(2) technical scheme
For achieving the above object, the invention provides a kind of laser of exporting nanosecond and picopulse simultaneously, this laser comprises: signal source is used to supply the seed signal of laser; Signal isolation system is used to isolate the amplification light that returns, and prevents the stability that regenerative amplification laser returns influences signal source; And amplifier, be used to accomplish the round amplification of psec signal, and realize the accumulation of nanosecond pulse energy.
In the such scheme, said signal source is the picopulse signal source, and output polarisation of light direction is a horizontal polarization, and power output is 100mW~500mW, and pulse repetition frequency is 50~100MHz, and pulse duration is 1~20ps.
In the such scheme; Said signal isolation system comprises first Pockers cell 151, plane mirror 133, second polarizer 172, Faraday rotator 18, λ/2 wave plates 162 and first polarizer 171; Wherein: first Pockers cell 151 is the electric light Pockers cell; Clear aperature 10mm, half-wave (λ/2) voltage is 8kV, quarter-wave (λ/4) voltage is 4kV; Plane mirror 133 is coated with the high-reflecting film of 1064nm; First polarizer 171 and second polarizer 172 are 1064nm wavelength polarizer, and the polarization ratio was greater than 10000: 1; Faraday rotator 18 is 45 degree Faraday rotators; λ/2 wave plates 162 are 1/2nd (λ/2) wave plate of 1064nm wavelength.
In the such scheme; Said amplifier comprises that pumping source 11, orthopedic systems 12, dichroic mirror 131 and plane mirror 132 constitute laserresonator, laser crystal 14, λ/4 wave plates 161 and second Pockers cell 152; Wherein: pumping source 11 is 808nm pulse pump source, and its pumping pulse width is 250 μ s, and the pumping repetition rate is 1kHz; The pumping average power is 8~10W, coupling output optical fibre 400 μ m; Orthopedic systems 12 is 1: 2 pump light orthopedic systems, and pump light is about 800 μ m through the hot spot that orthopedic systems 12 arrives laser crystal 14; Dichroic mirror 131 is coated with the anti-reflection and high anti-Double-color film of 1064nm of 808nm, and plane mirror 132 is coated with the 1064nm highly reflecting films; Laser crystal 14 is Nd:YAG, Nd:YVO 4Or the Nd:YLF laser crystal, be of a size of 4 * 4 * 12mm 3λ/4 wave plates 161 are 1/4th (λ/4) wave plate of 1064nm wavelength; Second Pockers cell 152 is the electric light Pockers cell, clear aperature 10mm, and half-wave (λ/2) voltage is 8kV, quarter-wave (λ/4) voltage is 4kV.
In the such scheme; Said signal source 19 triggers first Pockers cell 151 simultaneously and second Pockers cell, 152, the first Pockers cells 151 are in two kinds of operating states: 0 voltage and λ/2 voltages, when 0 voltage; Laser is had no modulating action, and laser gets into enlarged cavity through isolator; When λ/2 voltages, realize 90 degree deflections through the horizontal signal light of Pockers cell, the polarizer reflection through the back can not get into enlarged cavity and amplify.
In the such scheme, said first Pockers cell, 151 associatings, second Pockers cell 152 makes laser operation in regenerative amplification operation mode and two kinds of pulsed output modes of cavity dumping operation mode.
First Pockers cell 151 is in 0 voltage, flashlight is not produced any Polarization Modulation effect, and laser is in the regenerative amplification operation mode, and second Pockers cell 152 is in 0 voltage and λ/4 voltage two states; When the Nd:YAG energy storage is the highest, flashlight is introduced enlarged cavity, flashlight is through plane mirror 133 reflections; Through becoming orthogonal polarized light, introduce amplifiers through 171 reflections of first polarizer, through λ/4 wave plates, 161 rotations, 45 degree by second polarizer 172, Faraday rotator 18, λ/2 wave plates 162 and first polarizer 171; Through second Pockers cell 152, arrive the end mirror of amplifier, promptly plane mirror 132; Through second Pockers cell 152, through λ/4 wave plates, 161 rotations, 45 degree, this moment, flashlight became horizontal polarization once more after plane mirror 132 reflections; Pass first polarizer, 171 directive laser crystals 14, arrive dichroic mirror 131, in the moment of flashlight directive dichroic mirror 131; Add λ/4 wave voltages for second Pockers cell 152 at two inter-train pauses, the individual signals pulse is locked in the resonant cavity, draw the energy that is stored in laser crystal 14 inside through repeatedly coming and going; When pulse reach energy saturated after, in the moment through first polarizer, 171 directive plane mirrors 132, return the high pressure that is added on second Pockers cell 152; Twice of pulse becomes orthogonal polarized light again through λ/4 wave plates 161, reflects enlarged cavity through first polarizer 171, through λ/2 wave plates 162 and Faraday rotators 18; Reflect laser through second polarizer 172, finally obtain the output of high energy picopulse.
Under the cavity dumping operation mode, first Pockers cell 151 is in λ/2 voltages, and the flashlight that signal source 19 is sent becomes vertical polarization through first Pockers cell 151; Be reflected after arriving second polarizer 172, can't introduce amplifier, this moment, laser works was in the cavity dumping operation mode: when second Pockers cell 152 is in 0 voltage; Crystallofluorescence comes and goes twice and becomes vertical polarization through λ/4 wave plates 161; Reflect outside the chamber, prevent laser generation, laser is in high Q value; When gain media Nd:YAG energy storage was the highest, second Pockers cell 152 added λ/4 voltages, and λ/4 wave plates 161 and first Pockers cell 151 are united assurance horizontal polarization light and in the chamber, formed vibration; Through repeatedly coming and going vibration; Moment moves back pressure for fast first Pockers cell 151, and radiation once comes and goes in experience in optics cavity and propagates in the required time, and the energy in the chamber is poured out outside the chamber fully; Through 171 reflections of first polarizer; Through λ/2 wave plates 162 and Faraday rotator 18, reflect laser through second polarizer 172, form a high-octane nanosecond pulse and pour out.
In the such scheme; The time interval that said cavity dumping operation mode and regenerative amplification operation mode hocket and completion number of times; Time-delay and pulsewidth through controlling between first Pockers cell 151 and second Pockers cell 152 are controlled; Realize the independent assortment of the running number of times of two processes: in same laser beam, realize alternately output of single psec and single nanosecond pulse, perhaps in same laser beam, realize alternately output of a plurality of picopulses and a plurality of nanosecond pulse.
In the such scheme, pulse repetition frequency depends on the modulating frequency of first Pockers cell 151 and second Pockers cell 152, frequency range covering~Hz-~MHz.
(3) beneficial effect
This laser of exporting nanosecond and picopulse simultaneously provided by the invention; Utilize the time-delay and the synchronous control technique of two Pockers cells cleverly; Design in conjunction with laser optical path; In same laser, accomplish two processes of regenerative amplification and cavity dumping respectively; Obtain the psec-nanosecond pulse sequence of any pulse number array output, a series of problems such as light path complicacy, poor stability, the synchronization accuracy that this technology has effectively avoided two or multi-station laser to bring synchronously is low have improved the laser utilization ratio greatly.Has very important application in laser fine processing and basic research field.
Description of drawings
Fig. 1 is a sketch map of exporting the laser of nanosecond and picopulse when accordinging to the embodiment of the invention;
Fig. 2 is the pulse train according to the regenerative amplification of the embodiment of the invention and the output of cavity dumping single alternate-running;
Fig. 3 is the laser pulse sequence that alternately occurs according to 3 regenerative amplifications of the embodiment of the invention and 2 cavity dumping runnings.
Embodiment
For making the object of the invention, technical scheme and advantage clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to further explain of the present invention.
The laser of exporting nanosecond and picopulse simultaneously provided by the invention; Its technical thought is: in psec regenerative amplification laser; The electric light control technology of Pockers cell associating in Pockers cell and the chamber outside the employing chamber; Realization has the regenerative amplification process under the flashlight importing situation, obtains the output of high energy picosecond laser; With the cavity dumping process under the situation that does not have flashlight to import; Obtain the output of nanosecond pulse; Final pulse through two Pockers cells is regulated control with time-delay; Can realize the independent assortment of two processes according to practical application request, in single laser beam, realize psec and nanosecond pulse number independent assortment, alternately output.
The laser of exporting nanosecond and picopulse simultaneously provided by the invention has two Pockers cells, and one is positioned between psec signal source and the enlarged cavity, is called first Pockers cell, is used for the shutoff and the introducing of control signal light; Other one inner at enlarged cavity, second Pockers cell is used to control deadline of regenerative amplification and cavity dumping.Two Daepori Kerr cells are not to work alone, but, adopt same signal source to do triggering, have certain delay control between the two.When first Pockers cell adds λ/2, there is not flashlight to introduce, laser is accomplished the process of cavity dumping, obtains nanosecond pulse output; When first Pockers cell added 0 voltage, flashlight got into amplifier, and laser is accomplished the process of regenerative amplification, obtained the output of high energy picosecond laser.Regulate through two Pockers cell work time-delays and operating time, realize adjusting control, obtain the psec-nanosecond pulse string of different pulse number independent assortments regenerative amplification and cavity dumping number of times.
As shown in Figure 1, the laser of output nanosecond and picopulse comprised signal source, signal isolation system and three parts of amplifier when the embodiment of the invention provided, and wherein: signal source is used for the required seed signal of amplifier; Signal isolation system, being used to prevent to amplify light inverse signal source influences its stability; And amplifier, be used to realize that high-octane picopulse amplifies and the nanosecond pulse of realization high-energy.
Signal source 19 is the picopulse signal source, and output polarisation of light direction is a horizontal polarization, and power output is 100mW~500mW, preferred 300mW.Pulse repetition frequency is 80MHz, and pulse duration is 15ps.
Signal isolation system comprises first polarizer 171, second polarizer 172, Faraday rotator 18, λ/2 wave plate 162, plane mirror 133 and first Pockers cell 151.First Pockers cell 151 is the electric light Pockers cell, clear aperature 10mm, and half-wave (λ/2) voltage is 8kV, quarter-wave (λ/4) voltage is 4kV; Plane mirror 133 is coated with the high-reflecting film of 1064nm; λ/2 wave plates 162 are 1/2nd (λ/2) wave plate; Faraday rotator 18 is 45 degree Faraday rotators; First polarizer 171 and second polarizer 172 are 1064nm wavelength polarizer, and polarization extinction ratio was greater than 10000: 1.
Amplifier comprises that pumping source 11, orthopedic systems 12, dichroic mirror 131 and plane mirror 132 constitute laserresonator, laser crystal 14, λ/4 wave plates 161 and second Pockers cell 152.Pumping source 11 is 808nm pulse pump source, and its pumping pulse width is 250 μ s, and the pumping repetition rate is 1kHz, and the pumping average power is 8~10W, coupling output optical fibre 400 μ m; Orthopedic systems 12 is 1: 2 pump light orthopedic systems, and pump light is about 800 μ m through the hot spot that orthopedic systems 12 arrives laser crystal 14; Dichroic mirror 131 is coated with the anti-reflection and high anti-Double-color film of 1064nm of 808nm, and plane mirror 132 is coated with the 1064nm highly reflecting films; Laser crystal 14 is Nd:YAG, Nd:YVO 4Or the Nd:YLF laser crystal, be of a size of 4 * 4 * 12mm 3λ/4 wave plates 161 are 1/4th (λ/4) wave plate of 1064nm, and second Pockers cell 152 is the electric light Pockers cell, clear aperature 10mm, and half-wave (λ/2) voltage is 8kV, quarter-wave (λ/4) voltage is 4kV.
Signal source 19 triggers first Pockers cell 151 simultaneously and second Pockers cell, 152, the first Pockers cells 151 are in two kinds of operating states: 0 voltage and λ/2 voltages, when 0 voltage, laser is had no modulating action, and laser gets into enlarged cavity through isolator.When λ/2 voltages, realize 90 degree deflections through the horizontal signal light of Pockers cell, the polarizer reflection through the back can not get into enlarged cavity and amplify.Second Pockers cell 152 is in 0 voltage and λ/4 voltage two states.Make laser operation under two kinds of pulsed output modes in conjunction with first Pockers cell 151:
The regenerative amplification operation mode: first Pockers cell 151 is in 0 voltage, flashlight is not produced any Polarization Modulation effect, and laser is in the regenerative amplification operation mode: when the Nd:YAG energy storage is the highest; Flashlight is introduced enlarged cavity, and flashlight is through plane mirror 133 reflection, through becoming orthogonal polarized light by second polarizer 172, Faraday rotator 18, λ/2 wave plates 162 and first polarizer 171; Introduce amplifier through 171 reflections of first polarizer, through λ/4 wave plates, 161 rotations, 45 degree, through second Pockers cell 152; Arrive the end mirror of amplifier, promptly plane mirror 132, after plane mirror 132 reflections, pass through second Pockers cell 152; Through λ/4 wave plates, 161 rotations, 45 degree, this moment, flashlight became horizontal polarization, passed first polarizer, 171 directive laser crystals 14 once more; Arrive dichroic mirror 131,, add λ/4 wave voltages for second Pockers cell 152 in two burst length gaps in the moment of flashlight directive dichroic mirror 131; The individual signals pulse is locked in the resonant cavity, draws and be stored in the inner energy of laser crystal 14 through coming and going vibration, when pulse reach energy saturated after; In the moment through first polarizer, 171 directive plane mirrors 132, return the high pressure that is added on second Pockers cell 152, twice of pulse becomes orthogonal polarized light again through λ/4 wave plates 161; Reflect enlarged cavity through first polarizer 171; Through λ/2 wave plates 162 and Faraday rotator 18, reflect laser through second polarizer 172, finally obtain the output of high energy picopulse.
The cavity dumping operation mode: first Pockers cell 151 is in λ/2 voltages, and the flashlight that signal source 19 is sent becomes vertical polarization through first Pockers cell 151, is reflected after arriving second polarizer 172; Can't introduce amplifier, this moment, laser works was in the cavity dumping operation mode: when second Pockers cell 152 was in 0 voltage, the crystal emitting fluorescence came and went twice through λ/4 wave plates 161; Become vertical polarization; Reflect outside the chamber, do not have laser generation, laser to be in high Q value in the enlarged cavity; When gain media Nd:YAG energy storage was the highest, second Pockers cell 152 added λ/4 voltages, and λ/4 wave plates 161 and first Pockers cell 151 are united assurance horizontal polarization light and in the chamber, formed vibration; When circulating power is the highest; Moment moves back pressure for fast first Pockers cell 151, and radiation is experienced once to come and go in optics cavity and propagated in the required time, and the energy in the chamber is poured out outside the chamber fully; Through 171 reflections of first polarizer; Through λ/2 wave plates 162 and Faraday rotator 18, reflect laser through second polarizer 172, form a high-octane nanosecond pulse and pour out.
Pu Keer 151 adds λ/2 wave voltages, and flashlight is reflected and can not gets into amplifier, and laser operation is in the cavity dumping state, and the cavity dumping running can be exported nanosecond pulse, and the regenerative amplification running can be exported picopulse.
The time interval of above-mentioned two kinds of operation modes can be controlled through the time-delay and the pulsewidth of pulse generator with the completion number of times; Thereby realize the alternate-running of regenerative amplification and two kinds of patterns of cavity dumping; And the running number of times of two processes can pass through independent assortment; The output number of nanosecond and picopulse can be regulated, and can be alternately output of single psec and single nanosecond pulse, also can be alternately output of a plurality of picopulses and a plurality of nanosecond pulse.Output pulse sequence as shown in Figures 2 and 3.Fig. 2 is the pulse train of regenerative amplification and the output of cavity dumping single alternate-running, and pulse repetition frequency is 1kHz, and the pulse spacing is 1ms.Fig. 3 is the laser pulse sequence that 3 regenerative amplifications and 2 cavity dumping runnings alternately occur, and pulse repetition frequency is 1kHz, and the pulse spacing is 1ms.
Simultaneously, it is 1kHz that the present invention not only is confined to repetition rate, also can be other pulse repetition frequencys, and the medium of amplifier gain simultaneously also can adopt other laser crystals.
Above-described specific embodiment; The object of the invention, technical scheme and beneficial effect have been carried out further explain, and institute it should be understood that the above is merely specific embodiment of the present invention; Be not limited to the present invention; All within spirit of the present invention and principle, any modification of being made, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. a laser of exporting nanosecond and picopulse simultaneously is characterized in that, this laser comprises:
Signal source is used to provide the seed signal of laser;
Signal isolation system is used to isolate the amplification light that returns, and prevents the stability that regenerative amplification laser returns influences signal source, and realizes the shutoff to flashlight realizing the control of two kinds of different operating conditions of laser;
Amplifier is used to accomplish the round vibration amplification of psec signal, and realizes the accumulation of nanosecond pulse energy.
2. the laser of exporting nanosecond and picopulse simultaneously according to claim 1; It is characterized in that; Said signal source is the picopulse signal source, and output polarisation of light direction is a horizontal polarization, and power output is 100mW~500mW; Pulse repetition frequency is 50~100MHz, and pulse duration is 1~20ps.
3. the laser of exporting nanosecond and picopulse simultaneously according to claim 1; It is characterized in that; Said signal isolation system comprises first Pockers cell (151), plane mirror (133), second polarizer (172), Faraday rotator (18), λ/2 wave plates (162) and first polarizer (171), wherein:
First Pockers cell (151) is the electric light Pockers cell, clear aperature 10mm, and half-wave (λ/2) voltage is 8kV, quarter-wave (λ/4) voltage is 4kV;
Plane mirror (133) is coated with the high-reflecting film of 1064nm;
First polarizer (171) and second polarizer (172) are 1064nm wavelength polarizer, and the polarization ratio was greater than 10000: 1;
Faraday rotator (18) is 45 degree Faraday rotators;
λ/2 wave plates (162) are 1/2nd (λ/2) wave plate of 1064nm wavelength.
4. the laser of exporting nanosecond and picopulse simultaneously according to claim 1; It is characterized in that; Said amplifier comprises that pumping source (11), orthopedic systems (12), dichroic mirror (131) and plane mirror (132) constitute laserresonator, laser crystal (14), λ/4 wave plates (161) and second Pockers cell (152), wherein:
Pumping source (11) is 808nm pulse pump source, and its pumping pulse width is 250 μ s, and the pumping repetition rate is 1kHz, and the pumping average power is 8~10W, coupling output optical fibre 400 μ m;
Orthopedic systems (12) is 1: 2 pump light orthopedic systems, and pump light is about 800 μ m through the hot spot that orthopedic systems (12) arrives laser crystal (14);
Dichroic mirror (131) is coated with the anti-reflection and high anti-Double-color film of 1064nm of 808nm, and plane mirror (132) is coated with the 1064nm highly reflecting films;
Laser crystal (14) is Nd:YAG, Nd:YVO 4Or the Nd:YLF laser crystal, be of a size of 4 * 4 * (12) mm 3
λ/4 wave plates (161) are 1/4th (λ/4) wave plate of 1064nm wavelength;
Second Pockers cell (152) is the electric light Pockers cell, clear aperature 10mm, and half-wave (λ/2) voltage is 8kV, quarter-wave (λ/4) voltage is 4kV.
5. according to each described laser of exporting nanosecond and picopulse simultaneously in the claim 1 to 4; It is characterized in that; Said signal source (19) triggers first Pockers cell (151) and second Pockers cell (152) simultaneously, and first Pockers cell (151) is in two kinds of operating states: 0 voltage and λ/2 voltages, when 0 voltage; Laser is had no modulating action, and laser gets into enlarged cavity through isolator; When λ/2 voltages, realize 90 degree deflections through the horizontal signal light of Pockers cell, the polarizer reflection through the back can not get into enlarged cavity and amplify.
6. the laser of exporting nanosecond and picopulse simultaneously according to claim 5; It is characterized in that said first Pockers cell (151) associating second Pockers cell (152) makes laser operation in regenerative amplification operation mode and two kinds of pulsed output modes of cavity dumping operation mode.
7. the laser of exporting nanosecond and picopulse simultaneously according to claim 6; It is characterized in that; First Pockers cell (151) is in 0 voltage; Flashlight is not produced any Polarization Modulation effect, laser is in the regenerative amplification operation mode, and second Pockers cell (152) is in 0 voltage and λ/4 voltage two states; When the Nd:YAG energy storage is the highest, flashlight is introduced enlarged cavity, flashlight is through plane mirror (133) reflection; Through becoming orthogonal polarized light, introduce amplifier through first polarizer (171) reflection, through λ/4 wave plates (161) rotation, 45 degree by second polarizer (172), Faraday rotator (18), λ/2 wave plates (162) and first polarizer (171); Through second Pockers cell (152), arrive the end mirror of amplifier, i.e. plane mirror (132); Through second Pockers cell (152), through λ/4 wave plates (161) rotation, 45 degree, this moment, flashlight became horizontal polarization once more after plane mirror (132) reflection; Pass first polarizer (171) directive laser crystal (14), arrive dichroic mirror (131), in the moment of flashlight directive dichroic mirror (131); Add λ/4 wave voltages for second Pockers cell (152) at two inter-train pauses, the individual signals pulse is locked in the resonant cavity, be stored in the inner energy of laser crystal (14) through repeatedly coming and going to draw; When pulse reach energy saturated after; In the moment through first polarizer (171) directive plane mirror (132), return the high pressure that is added on second Pockers cell (152), twice of pulse becomes orthogonal polarized light again through λ/4 wave plates (161); Reflect enlarged cavity through first polarizer (171); Through λ/2 wave plates (162) and Faraday rotator (18), reflect laser through second polarizer (172), finally obtain the output of high energy picopulse.
8. the laser of exporting nanosecond and picopulse simultaneously according to claim 6 is characterized in that, under the cavity dumping operation mode; First Pockers cell (151) is in λ/2 voltages, and the flashlight that signal source (19) is sent becomes vertical polarization through first Pockers cell (151), is reflected after arriving second polarizer (172); Can't introduce amplifier; This moment, laser works was in the cavity dumping operation mode: when second Pockers cell (152) was in 0 voltage, crystallofluorescence came and went twice and becomes vertical polarization, reflect outside the chamber through λ/4 wave plates (161); Prevent laser generation, laser is in high Q value; When gain media Nd:YAG energy storage was the highest, second Pockers cell (152) added λ/4 voltages, and λ/4 wave plates (161) and first Pockers cell (151) are united assurance horizontal polarization light and in the chamber, formed vibration; When circulating power is the highest; Moment moves back pressure for fast first Pockers cell (151), and radiation experience in optics cavity once in the required time of propagation, and the energy in the chamber is poured out outside the chamber fully; Through first polarizer (171) reflection; Through λ/2 wave plates (162) and Faraday rotator (18), reflect laser through second polarizer (172), form a high-octane nanosecond pulse and pour out.
9. according to claim 6, the 7 or 8 described lasers of exporting nanosecond and picopulse simultaneously; It is characterized in that; The time interval that said cavity dumping operation mode and regenerative amplification operation mode hocket and completion number of times; Be to control through time-delay and the pulsewidth controlled between first Pockers cell (151) and second Pockers cell (152); Realize the independent assortment of the running number of times of two processes: in same laser beam, realize alternately output of single psec and single nanosecond pulse, perhaps in same laser beam, realize alternately output of a plurality of picopulses and a plurality of nanosecond pulse.
10. the laser of exporting nanosecond and picopulse simultaneously according to claim 9 is characterized in that, pulse repetition frequency depends on the modulating frequency of first Pockers cell (151) and second Pockers cell (152), frequency range covering~Hz-~MHz.
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CN103094821A (en) * 2013-01-31 2013-05-08 中国工程物理研究院激光聚变研究中心 Regenerative amplification system used for laser amplification
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CN106207738A (en) * 2016-09-22 2016-12-07 广州安特激光技术有限公司 Low-repetition-frequency passive Q-adjusted regenerative amplification lamp pump picosecond laser
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CN111952830A (en) * 2020-07-21 2020-11-17 大族激光科技产业集团股份有限公司 Nanosecond seed source and double-pulse-width optical fiber laser
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CN108141001A (en) * 2015-10-19 2018-06-08 安谱特 According to the temporally variable pulse laser system of rate and/or amplitude
CN107782714A (en) * 2016-08-24 2018-03-09 中国科学院光电研究院 A kind of laser pulse width includes the Laser induced plasma spectroscopy analytical equipment of both psec and nanosecond specification
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CN106253043A (en) * 2016-08-31 2016-12-21 中国科学院半导体研究所 A kind of temporal envelope pattern adjustable burst pulse laser regenerative amplifier
CN106253043B (en) * 2016-08-31 2019-08-23 中国科学院半导体研究所 A kind of adjustable burst pulse laser regenerative amplifier of temporal envelope pattern
CN106207738A (en) * 2016-09-22 2016-12-07 广州安特激光技术有限公司 Low-repetition-frequency passive Q-adjusted regenerative amplification lamp pump picosecond laser
CN106169691A (en) * 2016-09-22 2016-11-30 广州桦洋电子科技有限公司 A kind of three grades of amplification picosecond lasers for speckle dispelling
CN107363486A (en) * 2017-08-08 2017-11-21 北京航空航天大学 A kind of method of electric knife surface laser cutting polishing integral processing
CN108767629A (en) * 2018-03-26 2018-11-06 中国科学院上海光学精密机械研究所 The active multi-way chirped pulse stretcher of big energy
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