CN102694452A - 基于mems的振动能量采集器 - Google Patents
基于mems的振动能量采集器 Download PDFInfo
- Publication number
- CN102694452A CN102694452A CN201210183179XA CN201210183179A CN102694452A CN 102694452 A CN102694452 A CN 102694452A CN 201210183179X A CN201210183179X A CN 201210183179XA CN 201210183179 A CN201210183179 A CN 201210183179A CN 102694452 A CN102694452 A CN 102694452A
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- Prior art keywords
- permanent magnet
- thin plate
- induction coil
- graphite thin
- pyrolytic graphite
- Prior art date
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound 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[C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 56
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 56
- 239000010439 graphite Substances 0.000 claims abstract description 56
- 230000001939 inductive effect Effects 0.000 claims abstract description 55
- 239000000725 suspension Substances 0.000 claims abstract description 42
- 238000003860 storage Methods 0.000 claims abstract description 5
- 238000005516 engineering process Methods 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound 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[Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 238000009713 electroplating Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth Chemical compound 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- 239000012528 membrane Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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Abstract
一种基于MEMS的振动能量采集器，包括上层热解石墨薄板、悬浮永磁体、下层热解石墨薄板和提升永磁体，上层热解石墨薄板、悬浮永磁体和下层热解石墨薄板从上而下依次设置，上层热解石墨薄板下侧面设有上感应线圈，下层热解石墨薄板上侧面设有下感应线圈。本发明在基于MEMS的振动能量采集器中采用永磁体作为悬浮体，在永磁体上下各设有抗磁材料结构，在抗磁材料上设有感应线圈，为了更好的实现永磁体的悬浮，在上面一个抗磁材料结构上还设有一个提升永磁体，在静止状态时永磁体悬浮于上下两个抗磁体结构之间，在环境振动作用下，该永磁体没有摩擦地上下运动，进而在上下两个感应线圈中产生感应电动势，由蓄电回路对该感应电动势进行存储。
Description
基于MEMS的振动能量采集器技术领域
[0001] 本发明涉及ー种能量采集装置，特别涉及利用环境振动源为无线传感器或生物微纳机电自治系统提供电源的装置，具体是ー种基于MEMS的振动能量采集器。
背景技术
[0002] 无线传感器或生物微纳机电自治系统目前得到越来越多的重视，比如设备工作性能的实时监測，以及便携式生物微纳机电系统使用。可是这些器件的电源目前得不到很好的解决，限制其广泛的应用。能量采集（Energy harvesting,Energy scavenging)是指通过光、热、振动、生物技术和其他技术来收集环境中未用到的能源（比如光能、热能、机械能、风能等能量）转换成可以使用的电能。目前研究的振动能量采集器主要有静电式、压电式和电磁式三种，由于压电材料应用广泛，因此压电振动能量采集器研究较为深入，涉及到器件的结构设计、电极的布局以及压电材料性能的研究；在压电振动能量采集器中主要用到 压电材料的d33和d31两种工作模式，这通常需要ー个利用环境振动的悬臂梁或振动膜。而现有研究的电磁式能量采集器大多也是通过一个弹簧或振动膜利用环境振动，使磁铁和线圈产生相对运动，进而得到感应电动势。
[0003] 美国Michigan大学的Najafi等人2008年报道的微型电磁式振动能量采集器可以将低频振动通过ー个电磁式频率放大装置转换成较高频率振动，进而利用电磁感应定律把较高频率振动具有的动能转换成电能。上海交通大学的王佩红提出一种基于MEMS (Micro-Electro-Mechanical System,微机电系统)微加工技术的新型电磁式振动能量采集器，该结构主要包括永磁体、硅基平面螺旋型镍弹簧和双层铜线圈，其中的弹簧和线圈采用MEMSエ艺制作，NdFeB永磁体通过胶粘结于平面螺旋形金属Ni弹簧上。D. Marioli研究的电磁振动能量采集器为三明治结构，在一个圆柱筒上端和下端固定有永磁体结构，在这两个永磁体结构之间是由环形弹簧支撑的线圈，永磁体结构包括一个环形永磁体和中央永磁体块,而且中央永磁体和环形永磁体的磁化方向相反,线圈在上下永磁体结构的磁场中的上下运动便产生感应电动势。北京大学的张海霞课题组研究的电磁振动能量采集器，在硅基底上制作铜线圈，一个振动圆盘通过四个蛇形悬臂梁支撑于硅基底上，振动圆盘上电镀有永磁体阵列，当振动圆盘在外界振动作用下上下运动，就在铜线圈中产生感应电动势，该振动能量采集器的特点是在全部可以采用MEMSエ艺制作。
[0004] 由于目前利用环境振动源的振动能量采集器中需要通过相连接支撑部件利用环境振动，在其能量采集工作过程中会造成能量的额外消耗，导致环境振动耦合到吸振部件的效率不高，不利于微能源的收集。
发明内容
[0005] 本发明的目的在于提供一种基于MEMS的振动能量米集器,所述的这种基于MEMS的振动能量采集器要解决现有技术中机械式振动能量采集器需要通过支撑部件支撑振子，从而造成额外的能源消耗、造成振动能量采集器的能量采集效率低的技术问题。[0006] 本发明的目的是通过以下技术方案实现的：其中，该振动能量采集器包括上层热解石墨薄板、悬浮永磁体、下层热解石墨薄板和提升永磁体，上层热解石墨薄板、悬浮永磁体和下层热解石墨薄板从上而下依次设置，上层热解石墨薄板与悬浮永磁体间设有间距，悬浮永磁体和下层热解石墨薄板间设有间距，上层石墨薄板和下层石墨薄板固定干支架上，提升永磁体设干支架上，上层热解石墨薄板下侧面设有上感应线圈，下层热解石墨薄板上侧面设有下感应线圈，悬浮永磁体呈悬浮状态位于上层石墨薄板和下层石墨薄板之间，该上感应线圈两端与上引出导线电连接，下感应线圈两端与下引出导线电连接，该上引出导线和下引出导线与蓄电回路连接。
[0007] 进ー步的，上感应线圈和下感应线圈由铜构成，上感应线圈通过电镀エ艺制作于上层石墨薄板下侧面，下感应线圈通过电镀エ艺制作于下层石墨薄板上侧面，上感应线圈和下感应线圈是螺旋线圈。
[0008] 进ー步的，上感应线圈和下感应线圈由金属铋构成,上感应线圈和下感应线圈是螺旋线圈。 [0009] 进ー步的，提升永磁体呈圆环形，悬浮永磁体呈圆盘状。
[0010] 进ー步的,悬浮永磁体由SmCo永磁体、NdFeB永磁体或CoNiMnP永磁体构成。
[0011] 进一步的,悬浮永磁体直径为2mm,厚度为50〜200 μ m。
[0012] 本发明利用感应线圈中磁通量的变化产生感应电动势，进而从线圈输出电压，实现振动能量的采集。本发明在基于MEMS的振动能量采集器中采用永磁体作为悬浮体，在永磁体上下各设有抗磁材料结构，在抗磁材料上设有感应线圈，为了更好的实现永磁体的悬浮，在上面一个抗磁材料结构上还设有ー个提升永磁体，可以有效确保悬浮永磁体悬浮于上下两个抗磁材料薄板之间。这样，在静止状态时永磁体悬浮于上下两个抗磁体结构之间，在环境振动作用下，该永磁体可以没有摩擦地上下运动，进而在上下两个感应线圈中产生感应电动势，通过导线输出，由蓄电回路对该感应电动势进行存储。
附图说明
[0013] 图I是本发明基于MEMS的振动能量采集器的结构示意图。
[0014] 图2是本发明基于MEMS的振动能量采集器的另ー个结构示意图。
具体实施方式
[0015] 实施例：
[0016] 下面结合附图通过实施例对本发明作进ー步详细说明。
[0017] 如图I和图2所示，本发明的这种基于MEMS的振动能量采集器，在本实施例中，其中，该振动能量采集器包括上层热解石墨薄板I、悬浮永磁体2、下层热解石墨薄板3和提升永磁体4，上层热解石墨薄板I、悬浮永磁体2和下层热解石墨薄板3从上而下依次设置，上层热解石墨薄板与悬浮永磁体间设有间距，悬浮永磁体和下层热解石墨薄板间设有间距，上层石墨薄板I和下层石墨薄板3固定干支架上，为了侧重表示该振动能量采集器的结构，图中未画出支架，提升永磁体4设于支架上，上层热解石墨薄板I下侧面设有上感应线圈5，下层热解石墨薄板3上侧面设有下感应线圈6，悬浮永磁体呈悬浮状态位于上层石墨薄板和下层石墨薄板之间，该上感应线圈5两端与上引出导线电连接，下感应线圈两端与下引出导线电连接，该上引出导线和下引出导线与蓄电回路连接。上感应线圈可以通过上层热解石墨薄板上的过孔与上引出导线连接，下感应线圈可以通过下层热解石墨薄板上的过孔与下引出导线，这在制作エ艺上容易实现，为了侧重振动能量采集器的结构，图中没有画出上引出导线和下引出导线。由于本结构的特殊性，在悬浮永磁体的上下都设有热解石墨薄板，热解石墨是现有常温下抗磁特性最強的材料，当永磁体靠近热解石墨薄板吋，热解石墨薄板给悬浮永磁体推力，因此本结构方案中悬浮永磁体可以可靠地悬浮于上下两个热解石墨薄板之间；提 升永磁体的作用是调节悬浮永磁体静态稳定时的高度。
[0018] 进ー步的，上感应线圈5和下感应线圈6由铜构成，上感应线圈5通过电镀エ艺制作于上层石墨薄板I下侧面，下感应线圈6通过电镀エ艺制作于下层石墨薄板3上侧面，上感应线圈5和下感应线圈6是螺旋线圈。铜的电阻率很小，是比较理想的导电材料，这可以减小该振动能量采集器工作中的热损；同时在MEMS制作エ艺中电镀铜线圈的エ艺为成熟エ艺，容易制作横截面为边长10微米左右的正方形的铜线圏。
[0019] 进ー步的，提升永磁体呈圆环形，悬浮永磁体呈圆盘状，圆环形提升永磁体产生的磁势能阱可以使圆盘形悬浮永磁体自动对中。
[0020] 进ー步的，悬浮永磁体CoNiMnP永磁体构成，在本结构中我们首先选择悬浮磁体为CoNiMnP永磁体,这种永磁体可以通过电镀エ艺制作。
[0021] 进一步的，为了减小悬浮永磁体的重量，悬浮永磁体直径选择为2mm,厚度为100 μ m,上感应线圈和下感应线圈的外径与悬浮永磁体的直径相适应。
[0022] 当然，本结构还有其他的变形。比如，上感应线圈和下感应线圈由金属铋构成，上感应线圈和下感应线圈是螺旋线圈，金属鉍也是抗磁材料，它可以进ー步提高上下石墨薄板对悬浮永磁体的排斥力，同时，在悬浮永磁体上下运动时，金属鉍线圈中可以产生感应电动势。悬浮永磁体也可以由SmCo永磁体或NdFeB永磁体,这两种材料的磁性能较强。同时，悬浮永磁体的厚度在50〜200 μπι之间均可以，根据悬浮永磁体的重量，调节提升永磁体，以保证其可靠悬浮。悬浮永磁体也可以是方形薄板，这是上感应线圈和下感应线圈采用方形螺旋线圈比较合适。提升永磁体也可以采用其它形状，其主要作用是帮助实现悬浮永磁体的悬浮。
Claims (6)
1. 一种基于MEMS的振动能量采集器，其特征在于：该振动能量采集器包括上层热解石墨薄板、悬浮永磁体、下层热解石墨薄板和提升永磁体，上层热解石墨薄板、悬浮永磁体和下层热解石墨薄板从上而下依次设置，上层热解石墨薄板与悬浮永磁体间设有间距，悬浮永磁体和下层热解石墨薄板间设有间距，上层石墨薄板和下层石墨薄板固定干支架上，提升永磁体设干支架上，上层热解石墨薄板下侧面设有上感应线圈，下层热解石墨薄板上侧面设有下感应线圈，悬浮永磁体呈悬浮状态位于上层石墨薄板和下层石墨薄板之间，该上感应线圈两端与上引出导线电连接，下感应线圈两端与下引出导线电连接，该上引出导线和下引出导线与蓄电回路连接。
2.如权利要求I所述的基于MEMS的振动能量采集器，其特征在于：上感应线圈和下感应线圈由铜构成，上感应线圈通过电镀エ艺制作于上层石墨薄板下侧面，下感应线圈通过电镀エ艺制作于下层石墨薄板上侧面，上感应线圈和下感应线圈是螺旋线圈。
3.如权利要求I所述的基于MEMS的振动能量采集器，其特征在于：上感应线圈和下感应线圈由金属鉍构成，上感应线圈和下感应线圈是螺旋线圈。
4.如权利要求2或3所述的基于MEMS的振动能量采集器，其特征在于：提升永磁体呈圆环形，悬浮永磁体呈圆盘状。
5.如权利要求4所述的基于MEMS的振动能量米集器,其特征在于：悬浮永磁体由SmCo永磁体、NdFeB永磁体或CoNiMnP永磁体构成。
6.如权利要求5所述的基于MEMS的振动能量采集器，其特征在于：悬浮永磁体直径为.2mm,厚度为50〜200 μ m。
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