CN102684256A - Resonant high-precision pulse charging power supply - Google Patents
Resonant high-precision pulse charging power supply Download PDFInfo
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- CN102684256A CN102684256A CN201210119063XA CN201210119063A CN102684256A CN 102684256 A CN102684256 A CN 102684256A CN 201210119063X A CN201210119063X A CN 201210119063XA CN 201210119063 A CN201210119063 A CN 201210119063A CN 102684256 A CN102684256 A CN 102684256A
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Abstract
The invention discloses a resonant high-precision pulse charging power supply which comprises a frequency generator, a direct-current power supply and a power supply energy storage capacitor. Charging capacitors of an MO cavity and a PA cavity are charged simultaneously in a working mode of LC resonance voltage-multiplying charging so that the two cavities have the same charging voltage, and a discharging loop of charging voltage of the MO cavity and the PA cavity is designed so that the voltage micro-discharging is enabled to be an exact value. The charging capacitors of a double-cavity excimer laser can be charged simultaneously, high repetition frequency charging can be achieved, and the charging voltage has high precision. Meanwhile, the pulse charging frequency of the resonant high-precision pulse charging power supply is also the working frequency of the double-cavity excimer laser, the precision of the charging voltage is improved, the power consumption of a circuit is reduced, and the stability of the charging voltage in work is guaranteed.
Description
Technical field
The present invention relates to the pulse current charge field of power supplies, be specifically related to a kind of resonant mode high-accuracy pulse towards charge power supply.
Background technology
Excimer laser is because wavelength is short; The single photon energy is big, but characteristics such as repetition operation are widely used in processing; Medical treatment; Fields such as scientific research, and the main light source that 193nm ArF PRK is an IC etching to be used, the 193nm ArF excimer laser of single cavity configuration has been widely used in the semiconductor volume production of 90nm with lower node.
In recent years, along with the volume production that semiconductor gets into 45nm, 32nm, photoetching needs higher power output of light source and narrower spectral line width, and the excimer laser of single cavity configuration can not be taken into account on power output and spectral line width.One preferred scheme is to take the vibration-amplification system of two-chamber ArF excimer laser structure, and vibration chamber (MO chamber) produces the extremely narrow seed light of live width, injects vibration chamber (PA chamber) and amplifies, to obtain narrow linewidth and high-power 193nm laser beam.
Because the PRK discharge period is generally at 20～50ns; The population inversion of excimer laser only can exist at interdischarge interval; In this double cavity structure system, when injecting the PA chamber in downstream from the seed light in the MO chamber at the upper reaches, the population in the PA chamber must be reversed and could be amplified seed light; What therefore MO chamber and PA cavity discharging will be in good time is synchronous, and PA chamber, the 20ns left and right sides must discharge behind the general MO cavity discharging.The one of the main reasons of influence discharge sequential is the variation of charging voltage on the charging capacitor, because the magnetic field impulse compression time in the excimer laser excitation system mainly receives the influence of charging voltage.And the precision of charging voltage influences the stability of laser beam energy.
The excimer laser that is different from single cavity configuration, all there is independently charging capacitor in each chamber in the double cavity structure, therefore, needs a kind of pulse current charge power supply of design, can be the simultaneously high repetition high accuracy charging of charging capacitor of two-chamber excimer laser simultaneously.
Summary of the invention
The technical problem that the present invention will solve provides a kind of working method of the LC of taking resonance multiplication of voltage charging and simultaneously the charging capacitor in MO chamber and PA chamber is charged; So that two-chamber has identical charging voltage, take the mode of reduction regulation to realize the two-chamber excimer laser pulse current charge power supply of charging voltage precision.
For solving the problems of the technologies described above technical scheme of the present invention:
The resonant mode high-accuracy pulse is characterized in that towards charge power supply, includes frequency generator, DC power supply, power supply energy storage capacitor C
0, described DC power supply and power supply energy storage capacitor C
0The parallel connection and altogether, power supply energy storage capacitor C
0Positive pole be connected with the resonant inductance L and the switching tube K1 of mutual series connection, switching tube K1 inserts charging capacitor C through a steering diode D1, D2 respectively
M0And C
Pa, described charging capacitor C
M0And C
PaBe parallel with a diode D3, D6 respectively, charging capacitor C
M0And C
PaNegative pole and diode D3, D6 positive pole altogether; Diode D3, D6 are parallelly connected with pulse boostering circuit one, two respectively; Pulse boostering circuit one includes K switch 3, diode D7, the step-up transformer one of series connection successively; Pulse boostering circuit two includes K switch 4, diode D8, the step-up transformer two of series connection successively, charging capacitor C
M0Positive pole and charging capacitor C
PaPositive pole insert a bleed-off circuit through steering diode D4, a D5 respectively; Described bleed-off circuit is parallel with a voltage sample circuit; Voltage sample circuit includes resistance R 1, the R2 of series connection; Bleed-off circuit includes resistance R 3, the switching tube K2 of series connection; The other end ground connection of switching tube K2, the electrode input end of a comparator is followed, inserted after the Filtering Processing to the resistance R 1 of voltage sample circuit, the voltage at the series connection node place between the R2 as sampled signal through follower, filter, and the negative input of comparator inserts reference voltage; The frequency signal output of described frequency generator inserts timing control unit; Through the trigger element of an AND circuit control connection switching tube K2, the control end of timing control unit is the trigger element of control connection switching tube K1 also jointly for the control end of timing control unit and the signal output part of comparator, and the triggering signal of timing control unit inserts K switch 3, K4; The voltage output end of the step-up transformer one, two in the described pulse boostering circuit one, two acts on the MO chamber and the PA chamber of two-chamber excimer laser respectively.
The output voltage range of described DC power supply is 0～1500V, power 10KW, when more than pulse current charge power supply 2000Hz, working, needs two DC power supply parallel connections to use.The output voltage of DC power supply is set in 600V～700V.
Described frequency generator is the adjustable square wave frequency generator of 0～4000Hz.
Operation principle of the present invention is:
Frequency generator produces square-wave signal, sends into timing control unit through optical fiber.Frequency signal is as the triggering signal of timing control unit, produces the triggering signal of switching tube K1 by timing control unit, with control switch pipe K1 conducting and closure.After LC resonant charging finished, timing control unit produced the charging voltage precision and regulates the time limit, carried out voltage accuracy and regulated, and adjustment process is narrated as follows: sampled signal is through follower; Filtering Processing is then sent into comparator and reference voltage is done comparison, if sampled signal is higher than reference voltage, and comparator output high level; Comparator output signal and charging voltage precision are regulated the time limit and are sent into AND circuit, as long as sampled signal is higher than reference voltage, with door output high level; The K2 conducting, charging voltage is released, when the sampled signal of releasing is less than or equal to reference voltage; The comparator output low level, K2 is closed, the end of releasing.Then, timing control unit produces the charging capacitor energy and shifts the time limit, i.e. K3, and the K4 triggering signal realizes that the voltage on the charging capacitor shifts to the pulse boosting unit.
Beneficial effect of the present invention is:
The present invention can be simultaneously for the charging capacitor of two-chamber excimer laser charges simultaneously, and can high repetition charging, and charging voltage has higher precision, and simultaneously, pulse current charge frequency of the present invention also is the operating frequency of two-chamber excimer laser.The present invention takes the working method of LC resonance multiplication of voltage charging simultaneously the charging capacitor in MO chamber and PA chamber to be charged; So that two-chamber has identical charging voltage; And having designed the bleed-off circuit of a MO chamber and PA chamber charging voltage, so that the charging voltage trace is released exact value has improved the precision of charging voltage; Reduce the power consumption of circuit, charging voltage is stable when guaranteeing work.
Description of drawings
Fig. 1 is a pulse current charge power work loop diagram
Fig. 2 is a pulse power source control loop block diagram
Embodiment
Do further detailed explanation below in conjunction with the accompanying drawing specific embodiments of the invention.
Like Fig. 1, shown in 2, the resonant mode high-accuracy pulse includes frequency generator 1, DC power supply 2, power supply energy storage capacitor C towards charge power supply
0, DC power supply 2 and power supply energy storage capacitor C
0The parallel connection and altogether, power supply energy storage capacitor C
0Positive pole be connected with the resonant inductance L and the switching tube K1 of mutual series connection, switching tube K1 inserts charging capacitor C through a steering diode D1, D2 respectively
M0And C
Pa, described charging capacitor C
M0And C
PaBe parallel with a diode D3, D6 respectively, charging capacitor C
M0And C
PaNegative pole and diode D3, D6 positive pole altogether; Diode D3, D6 are parallelly connected with pulse boostering circuit one 9,2 10 respectively; Pulse boostering circuit 1 includes K switch 3, diode D7, the step-up transformer 1 of series connection successively; Pulse boostering circuit 2 10 includes K switch 4, diode D8, the step-up transformer 2 12 of series connection successively, charging capacitor C
M0Positive pole and charging capacitor C
PaPositive pole insert a bleed-off circuit through steering diode D4, a D5 respectively; Bleed-off circuit is parallel with a voltage sample circuit; Voltage sample circuit includes resistance R 1, the R2 of series connection; Bleed-off circuit includes resistance R 3, the switching tube K2 of series connection; The other end ground connection of switching tube K2, the electrode input end of a comparator 5 is followed, inserted after the Filtering Processing to the resistance R 1 of voltage sample circuit, the voltage at the series connection node place between the R2 as sampled signal 13 through follower 3, filter 4, and the negative input of comparator 5 inserts reference voltage 8; The frequency signal output of frequency generator 1 inserts timing control unit 6; Through the trigger element of AND circuit 7 control connection switching tube K2, the control end of timing control unit 6 is the trigger element of control connection switching tube K1 also jointly for the signal output part of the control end of timing control unit 6 and comparator 5, and the triggering signal of timing control unit 6 inserts K switch 3, K4; The voltage output end of the step-up transformer one 11,2 12 in the pulse boostering circuit one 9,2 10 acts on the MO chamber and the PA chamber of two-chamber excimer laser respectively.
The output voltage range of DC power supply 2 is 0～1500V, power 10KW, when more than pulse current charge power supply 2000Hz, working, needs two DC power supply parallel connections to use.The output voltage of DC power supply is set in 600V～700V.
Further, groundwork process of the present invention is following:
C
0Be charged as V by DC power supply
0, frequency generator 1 is set the pulse current charge frequency, and square-wave signal imports timing control unit 6 into through optical fiber;
Timing control unit produces switching tube K immediately
1Triggering signal, K
1Closure, electric current I is from C
0Flow to C through resonant inductance L
M0And C
Pa, C
M0And C
PaFilled simultaneously with identical voltage levvl, through selecting C
0The appearance value much larger than C
M0And C
PaThe appearance value, charging voltage is 2V
0, the charging voltage computing formula is:
V(t)＝2V
0(1-cosωt)
In the formula:
Be the angular frequency of resonant charging process, C=C
M0+ C
Pa
When electric current I is reduced to zero in the loop, switching tube K
1Closure, C
0Through resonant inductance L to C
M0And C
PaResonance multiplication of voltage charging process finish;
R1 and R2 provide voltage signal to the sampling of charging capacitor real-time voltage to control circuit, and R3 becomes the charging voltage bleed-off circuit with K2; Sampled signal is carried out Filtering Processing, do comparison, regulate in the time limit at the voltage accuracy that timing control unit provides with reference voltage; Conducting and the shutoff of control switch pipe K2 are with the reference voltage level of releasing of the charging voltage on the charging capacitor, in each charging process; All with the charging voltage same reference voltage level of releasing, to improve the precision of charging voltage;
After charging finished, timing control unit provided K3, K4 triggering signal, and the energy on the charging capacitor is transferred to the pulse boosting unit; The square-wave signal that frequency generator produces carries out the course of work next time after arriving.
Claims (3)
1. a resonant mode high-accuracy pulse is characterized in that towards charge power supply, includes frequency generator, DC power supply, power supply energy storage capacitor C
0, described DC power supply and power supply energy storage capacitor C
0The parallel connection and altogether, power supply energy storage capacitor C
0Positive pole be connected with the resonant inductance L and the switching tube K1 of mutual series connection, switching tube K1 inserts charging capacitor C through a steering diode D1, D2 respectively
M0And C
Pa, described charging capacitor C
M0And C
PaBe parallel with a diode D3, D6 respectively, charging capacitor C
M0And C
PaNegative pole and diode D3, D6 positive pole altogether; Diode D3, D6 are parallelly connected with pulse boostering circuit one, two respectively; Pulse boostering circuit one includes K switch 3, diode D7, the step-up transformer one of series connection successively; Pulse boostering circuit two includes K switch 4, diode D8, the step-up transformer two of series connection successively, charging capacitor C
M0Positive pole and charging capacitor C
PaPositive pole insert a bleed-off circuit through steering diode D4, a D5 respectively; Described bleed-off circuit is parallel with a voltage sample circuit; Voltage sample circuit includes resistance R 1, the R2 of series connection; Bleed-off circuit includes resistance R 3, the switching tube K2 of series connection; The other end ground connection of switching tube K2, the electrode input end of a comparator is followed, inserted after the Filtering Processing to the resistance R 1 of voltage sample circuit, the voltage at the series connection node place between the R2 as sampled signal through follower, filter, and the negative input of comparator inserts reference voltage; The frequency signal output of described frequency generator inserts timing control unit; Through the trigger element of an AND circuit control connection switching tube K2, the control end of timing control unit is the trigger element of control connection switching tube K1 also jointly for the control end of timing control unit and the signal output part of comparator, and the triggering signal of timing control unit inserts K switch 3, K4; The voltage output end of the step-up transformer one, two in the described pulse boostering circuit one, two acts on the MO chamber and the PA chamber of two-chamber excimer laser respectively.
2. resonant mode high-accuracy pulse according to claim 1 is characterized in that towards charge power supply the output voltage range of described DC power supply is 0～1500V, power 10KW, and the output voltage of DC power supply is set in 600V～700V.
3. resonant mode high-accuracy pulse according to claim 1 is characterized in that towards charge power supply described frequency generator is the adjustable square wave frequency generator of 0 ~ 4000Hz.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210119063.XA CN102684256B (en) | 2012-04-21 | 2012-04-21 | Resonant high-precision pulse charging power supply |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210119063.XA CN102684256B (en) | 2012-04-21 | 2012-04-21 | Resonant high-precision pulse charging power supply |
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| CN102684256A true CN102684256A (en) | 2012-09-19 |
| CN102684256B CN102684256B (en) | 2014-04-09 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104066260A (en) * | 2014-07-17 | 2014-09-24 | 矽力杰半导体技术(杭州)有限公司 | LED detecting circuit, driving circuit and lighting system |
| CN105226990A (en) * | 2015-10-29 | 2016-01-06 | 中国工程物理研究院激光聚变研究中心 | A kind of efficient pumping shaping pulse power-supply system and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201466183U (en) * | 2009-07-27 | 2010-05-12 | 郑州华航科技有限公司 | Double-cavity band-pass filter |
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2012
- 2012-04-21 CN CN201210119063.XA patent/CN102684256B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201466183U (en) * | 2009-07-27 | 2010-05-12 | 郑州华航科技有限公司 | Double-cavity band-pass filter |
Non-Patent Citations (2)
| Title |
|---|
| DANIEL J.COLON CYMER: "用于光刻成像技术中的双腔准分子光源(英文)", 《电子工业专用设备》 * |
| 储艳飞等: "基于CPLD的数字可编程延迟单元的设计", 《大气与环境光学学报》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104066260A (en) * | 2014-07-17 | 2014-09-24 | 矽力杰半导体技术(杭州)有限公司 | LED detecting circuit, driving circuit and lighting system |
| CN104066260B (en) * | 2014-07-17 | 2016-08-24 | 矽力杰半导体技术(杭州)有限公司 | A kind of LED testing circuit and drive circuit and illuminator |
| CN105226990A (en) * | 2015-10-29 | 2016-01-06 | 中国工程物理研究院激光聚变研究中心 | A kind of efficient pumping shaping pulse power-supply system and method |
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| CN102684256B (en) | 2014-04-09 |
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Granted publication date: 20140409 |