CN102681003A - Electronically controlled fluid gas density stabilizing device for spectrograph - Google Patents

Electronically controlled fluid gas density stabilizing device for spectrograph Download PDF

Info

Publication number
CN102681003A
CN102681003A CN2012100602350A CN201210060235A CN102681003A CN 102681003 A CN102681003 A CN 102681003A CN 2012100602350 A CN2012100602350 A CN 2012100602350A CN 201210060235 A CN201210060235 A CN 201210060235A CN 102681003 A CN102681003 A CN 102681003A
Authority
CN
China
Prior art keywords
gas
closed chamber
flow cavity
pressure
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012100602350A
Other languages
Chinese (zh)
Inventor
刘小东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHENZHEN UNIQUE METRICAL TECHNOLOGY Co Ltd
Original Assignee
SHENZHEN UNIQUE METRICAL TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHENZHEN UNIQUE METRICAL TECHNOLOGY Co Ltd filed Critical SHENZHEN UNIQUE METRICAL TECHNOLOGY Co Ltd
Priority to CN2012100602350A priority Critical patent/CN102681003A/en
Publication of CN102681003A publication Critical patent/CN102681003A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

The invention discloses an electronically controlled fluid gas density stabilizing device for a spectrograph. An airtight cavity is served as a reference cavity; a working gas is filled into the airtight cavity in advance; the gas pressure of the airtight cavity is monitored by a pressure sensor connected with the airtight cavity; the pressure of the airtight cavity is adjusted to be a required value by continuously filling or slightly releasing gas; a micro-flow proportional control valve is used for controlling gas flow of the working gas inputted into a flowing cavity; the releasing volume of the gas in the flowing cavity is controlled by the micro-flow proportional control valve; a pressure difference of the airtight cavity and the flowing cavity is detected by a micro-pressure difference sensor; and under the condition of same temperature of the flowing cavity and the airtight cavity, the gas pressure of the flowing cavity and the gas pressure of the airtight cavity are maintained as 0 or preset value, by adjusting the micro-flow proportional control valve for replenishing gas into the flowing cavity and the micro-flow proportional control valve for controlling the discharging of the gas in the flowing cavity, so that the purpose of stabilizing the density of the gas in the flowing cavity is achieved.

Description

A kind of electronically controlled gas volume density stabilising arrangement of spectrometer
Technical field
The invention belongs to a kind of detection analysis field of spectrometer, particularly a kind of electronically controlled gas volume density stabilising arrangement of spectrometer.
Background technology
Xray fluorescence spectrometer mainly by excite, unit such as chromatic dispersion, detection, record and data processing forms.The effect that excites the unit is to produce elementary X ray.It is made up of high pressure generator and X-ray pipe.Latter's power is bigger, and water and/or oil cooling are but.The effect of chromatic dispersion unit is the characteristic fluorescence X ray monochromatization with element to be measured.It partly is made up of sample chamber, slit, angular instrument, analyzing crystal etc.Rotate analyzing crystal and detector through clinometer rule with 1: 2 speed, can on different Bragg angle positions, record the X ray of different wave length and do the qualitative analysis of element.The effect of detector is to be electric energy with the x-ray photon Conversion of energy, and commonly used have geiger's tube, proportional counter tube, scintillation counter, a semiconductor detector etc.Record cell is made up of amplifier, pulse height analyzer, display part.Pulse analysis signal through scaler can directly be imported computing machine, carries out in-line processing and obtains the content of tested element.
The X-ray spectral analysis field usually can adopt gas proportional counter as x-ray detection device, is filled with working gas in the proportional counter, is generally the inert gas that is mixed with a certain proportion of polyatomic gas.The output signal of proportional counter amplifies through amplifying circuit and handles the spectrum peak that obtains incident ray through single track or multichannel pulse height analyzer.Have only the amplitude of signal highly stable, the position at spectrum peak just can be stablized, and could measure accurately the intensity of incident ray.And according to the principle of work of proportional counter, the density of working gas directly has influence on the amplitude of output signal, thus one of prerequisite of proportional counter steady operation be the density of working gas must be constant.Proportional counter is divided into two types usually, closed proportional counter and flow gas proportional counter.Closed proportional counter adopts the beryllium window as the ray incidence window; Because working gas is in the space of sealing; Gas density surely not changes, but because the decay of certain thickness beryllium window to incident X-rays arranged, closed proportional counter is not suitable for the lower grenz ray of measured energy.And the flow gas proportional counter owing to adopt organic film material as the X ray incidence window, makes it be particularly suitable for the measurement of grenz ray.But owing to adopt the organic film window, the tiny leakage of window material is inevitably, and it is constant that gas density can not keep, and in order to keep the constant of gas density, needs constantly to replenish working gas.How control replenishes the flow of working gas, could guarantee constant gas density, is an individual difficult technologies.The direct detected gas density because have no idea.
Application number is that 200810154563 patent " a kind of air bag type gas density stabilizer and method of work thereof " discloses a kind of density stabilized device that utilizes mechanical transient equilibrium way.Another kind method is to control indirectly gas density through the pressure that controls gas, and prerequisite is that gas pressure intensity detects and proportional counter tube must remain on isoperibol.The first method machining accuracy requires high, and control accuracy is difficult to grasp, and debugging difficulty is big; Second method is owing to adopt Electronic Control miniflow metered valve to come the pilot-gas quantity delivered; It is very high that the control accuracy of pressure can reach; But require constant temperature enclosure to keep very high temperature stability,, must cause the fluctuation of working gas density in case temperature has fluctuation or changes.Especially shutting down the back start-up phase at instrument, owing to need to wait for that constant temperature enclosure reaches temperature balance fully and needs a period of time, is incorrect in gas density during this period of time, causes the spectrum peak position of ray to depart from very big.Perhaps the constant temperature enclosure control target temperature is if any modification, and peak position also takes place to depart from more greatly, and is very unfavorable to the X ray intensity detection.
Summary of the invention
Of the present invention day is the deficiency that solves above-mentioned technology, proposes a kind of electronically controlled gas volume density stabilising arrangement of spectrometer; Reach and to avoid the X-ray spectral analysis device to receive Influence of Temperature, can make X-ray spectral analysis reach high-precision density control simultaneously again, finally stablized the spectrum peak position of gas proportional detector, improved the purpose of the measurement stability of X ray.
For achieving the above object, the technical scheme that the present invention adopts is:
Adopt closed chamber chamber as a reference, pour the suitable working gas of density or other gas in the closed chamber in advance; The gas pressure intensity of closed chamber can be kept watch on through the pressure transducer that is connected on the closed chamber; Closed chamber is equipped with variable valve, can through continue to charge into or pressure that closed chamber is regulated in the trace venting to the value that is fit to; Working gas is controlled the gas flow that is input to flow cavity through the micrometeor proportional control valve; Flow cavity connects the working chamber of flow gas proportional counter tube; The gas of flow cavity has micrometeor needle-valve or micrometeor proportional control valve to release; The pressure difference of closed chamber and flow cavity can detect or the gas pressure intensity of gas pressure intensity through flow cavity and closed chamber subtracts each other after detecting respectively and obtains through micro-pressure sensor; Flow cavity is under the identical temperature with closed chamber; Through electronic control circuit or microprocessor or computer control software; Through regulating the micrometeor proportional control valve of releasing toward the micrometeor proportional control valve and/or the control flow cavity gas of flow cavity make-up gas; Make the gaseous tension of gaseous tension and the closed chamber of flow cavity be maintained 0 or setting value, reach the stable purpose of flow cavity gas density.Even the constant temperature enclosure temperature does not reach setting value as yet, as long as flow gas proportional counter and closed chamber temperature are equal to, it is constant that gas density remains.And, can reach very high control accuracy through precision control to pressure reduction.
The pressure of said closed chamber is regulated through absolute pressure transducer, variable valve and two logical stop valves; When needing to regulate the pressure of closed chamber, the pressure regulation instrument is connected with closed chamber two logical stop valves, opens stop valve; Connect source of the gas; Can inflate closed chamber, inflation rate can be through variable valve control, and the pressure through sensor monitoring closed chamber is to desired value.
When the pressure of said closed chamber is higher than working pressure, close variable valve earlier, break off source of the gas, under the supervision of sensor, slowly be deflated to the value that needs with variable valve.
When the pressure of said closed chamber is higher than working pressure, close variable valve earlier, break off source of the gas, under the supervision of sensor; Slowly exit with variable valve, to suitable value, when once adjusting does not reach desired value, but this process repeated multiple times; After regulating, stop valve is closed, remove the pressure regulation instrument.
Described micrometeor proportional control valve back can the connection traffic sensor to keep watch on gas consumption.
Adopt above-mentioned technology; Beneficial effect of the present invention has: the electronically controlled gas volume density stabilising arrangement that adopts spectrometer; Can avoid the X-ray spectral analysis device to receive Influence of Temperature; Can make simultaneously X-ray spectral analysis reach high-precision density control again, finally stablize the spectrum peak position of gas proportional detector, improve the measurement stability of X ray.
Description of drawings
Fig. 1 is the adjusting process flow diagram of the preset pressure of closed chamber of the present invention;
Fig. 2 is the adjusting process flow diagram of the preset pressure of the non-online mode closed chamber of the present invention;
Wherein: 1 operation valve, 2 closed chamber, 3 flow cavities, 4 sensors, 5 working chambers, 6 operation valves, 7 sensors, 8 variable valve, 9 stop valves.
Embodiment
Below in conjunction with specific embodiment the present invention is described further, but the present invention is not limited to following examples.
Like the adjusting process flow diagram of Fig. 1 for the preset pressure of closed chamber of the present invention; Working gas from decompressor; Get into flow cavity 3 through micrometeor proportional control valve 1, be connected gas micro-pressure sensor 4 between flow cavity 3 and the closed chamber 2, closed chamber 2 pours the working gas that working gas is higher than operating pressure in advance through variable valve 8; Gaseous tension is kept watch on by absolute pressure transducer 7; Reach suitable operating pressure through regulating the trace venting with variable valve 8 then, the gas of possibly resetting repeatedly just can reach suitable pressure, variable valve 8 is closed extremely to get final product at last.Flow cavity 3 is connected with the working chamber 5 of flow gas proportional counter; In the end the gas of the working chamber 5 of one proportional counter discharges as tail gas through micrometeor proportional control valve 6 or needle-valve.Through electronic control circuit or microprocessor or computer control software; Through regulating the micrometeor proportional control valve 6 of releasing toward the micrometeor proportional control valve 1 and/or the control flow cavity gas of flow cavity 3 make-up gas; The pressure differential maintain that differential pressure pickup 4 is read is 0 or setting value, reaches the stable purpose of flow cavity gas density.
Fig. 2 is the adjusting process flow diagram of the preset pressure of the non-online mode closed chamber of the present invention; Electronically controlled gas volume density stabilising arrangement adopts closed chamber 2 chamber as a reference, and closed chamber pours working gas for 2 li in advance, and the gas pressure intensity of closed chamber 2 is through being connected pressure transducer 7 monitoring on the closed chamber 2; Closed chamber 2 is equipped with variable valve 8, through continue to charge into or pressure that closed chamber 2 is regulated in the trace venting to fit value, working gas is controlled the gas flow that is input to flow cavity 3 through micrometeor proportional control valve 1; Flow cavity 3 connects the working chamber 5 of flow gas proportional counter tube; The gas of flow cavity 3 is released by micrometeor proportional control valve 6; The pressure difference of closed chamber 2 and flow cavity 3 detects through micro-pressure sensor 4; Flow cavity 3 is under the identical temperature with closed chamber 2, through electronic control circuit, regulates the micrometeor proportional control valve 6 of releasing toward the micrometeor proportional control valve 1 and control flow cavity 3 gases of flow cavity 3 make-up gas; Make the gaseous tension of gaseous tension and the closed chamber 2 of flow cavity 3 be maintained 0 or setting value, reach the stable purpose of flow cavity 3 gas densities.
Flow cavity 3 is under the identical temperature with closed chamber 2; Through band microprocessor or computer control software; Regulate the micrometeor proportional control valve 6 of releasing toward the micrometeor proportional control valve 1 and control flow cavity 2 gases of flow cavity 3 make-up gas; Make the gaseous tension of gaseous tension and the closed chamber 2 of flow cavity 3 be maintained 0 or setting value, reach the stable purpose of flow cavity 3 gas densities.
Flow cavity 3 is under the identical temperature with closed chamber 2; Through electronic control circuit, microprocessor or computer control software; Regulate micrometeor proportional control valve 1 toward flow cavity 3 make-up gas; Make the gaseous tension of gaseous tension and the closed chamber 2 of flow cavity 3 be maintained 0 or setting value, reach the stable purpose of flow cavity 3 gas densities.
Flow cavity 3 is under the identical temperature with closed chamber 2; Through electronic control circuit, microprocessor or computer control software; The micrometeor proportional control valve 6 that control flow cavity 3 gases are released; Make the gaseous tension of gaseous tension and the closed chamber 2 of flow cavity 3 be maintained 0 or setting value, reach the stable purpose of flow cavity 3 gas densities.
Further, make a pressure regulation instrument, comprise variable valve 8 and absolute pressure transducer 7; When needing to regulate closed chamber pressure, the pressure regulation instrument is connected with closed chamber two logical stop valves 9, opens stop valve 9; Connect source of the gas, can inflate closed chamber 2, inflation rate can be through variable valve 8 controls.Sensor 7 is kept watch on closed chamber pressure to suitable value, if careless charge pressure is higher than working pressure, closes variable valve 8 earlier, breaks off source of the gas, under the supervision of sensor 7, slowly exits with variable valve 8, to suitable value.This process maybe repeated multiple times.After regulating, stop valve is closed, remove the pressure regulation instrument.
In order to keep watch on gas consumption, can be at proportioning valve or needle-valve 6 back connection traffic sensors.
The above is merely the preferred embodiments of the present invention, is not limited to the present invention, and obviously, those skilled in the art can carry out various changes and modification and not break away from the spirit and scope of the present invention the present invention.Like this, belong within the scope of claim of the present invention and equivalent technologies thereof if of the present invention these are revised with modification, then the present invention also is intended to comprise these changes and modification interior.

Claims (9)

1. the electronically controlled gas volume density stabilising arrangement of a spectrometer; It is characterized in that: the density stabilized device of described electronically controlled gas adopts closed chamber (2) chamber as a reference; Closed chamber (2) lining is poured working gas in advance, and the gas pressure intensity of closed chamber (2) is through being connected pressure transducer (7) monitoring on the closed chamber (2);
One described closed chamber (2) is equipped with variable valve (8), through continue to charge into or pressure that closed chamber (2) is regulated in the trace venting to desired value, working gas is controlled the gas flow that is input to flow cavity (3) through micrometeor proportional control valve (1);
--described flow cavity (3) connects the working chamber (5) of flow gas proportional counter tube, and the gas of flow cavity (3) is released by micrometeor proportional control valve (6), and the pressure difference of closed chamber (2) and flow cavity (3) detects through micro-pressure sensor (4);
--flow cavity (3) is under the identical temperature with closed chamber (2); Pass through electronic control circuit; Regulate the micrometeor proportional control valve (6) of releasing toward the micrometeor proportional control valve (1) and control flow cavity (3) gas of flow cavity (3) make-up gas; Make the gaseous tension of gaseous tension and the closed chamber (2) of flow cavity (3) be maintained 0 or setting value, reach the stable purpose of flow cavity (3) gas density.
2. the electronically controlled gas volume density stabilising arrangement of spectrometer according to claim 1; It is characterized in that: said flow cavity (3) is under the identical temperature with closed chamber (2); Through microprocessor or computer control software; Regulate the micrometeor proportional control valve (6) of releasing toward the micrometeor proportional control valve (1) and control flow cavity (2) gas of flow cavity (3) make-up gas; Make the gaseous tension of gaseous tension and the closed chamber (2) of flow cavity (3) be maintained 0 or setting value, reach the stable purpose of flow cavity (3) gas density.
3. the electronically controlled gas volume density stabilising arrangement of spectrometer according to claim 1 and 2; It is characterized in that: said flow cavity (3) is under the identical temperature with closed chamber (2); Through electronic control circuit, microprocessor or computer control software; Regulate micrometeor proportional control valve (1), make the gaseous tension of gaseous tension and the closed chamber (2) of flow cavity (3) be maintained 0 or setting value, reach the stable purpose of flow cavity (3) gas density toward flow cavity (3) make-up gas.
4. the electronically controlled gas volume density stabilising arrangement of spectrometer according to claim 3; It is characterized in that: said flow cavity (3) is under the identical temperature with closed chamber (2); Through electronic control circuit, band microprocessor or computer control software; The micrometeor proportional control valve (6) that control flow cavity (3) gas is released makes the gaseous tension of gaseous tension and the closed chamber (2) of flow cavity (3) be maintained 0 or setting value, reaches the stable purpose of flow cavity (3) gas density.
5. the electronically controlled gas volume density stabilising arrangement of spectrometer according to claim 1, it is characterized in that: the working chamber of described flow gas proportional counter tube (5) is connected in series for the working chamber (5) of at least one flow gas proportional counter tube.
6. the electronically controlled gas volume density stabilising arrangement of spectrometer according to claim 1; It is characterized in that: the pressure of said closed chamber (2) is regulated through absolute pressure transducer (7), variable valve (8) and two logical stop valves (9); When needing to regulate the pressure of closed chamber (2), the pressure regulation instrument is connected with closed chamber two logical stop valves (9), opens stop valve (9); Connect source of the gas; Can inflate closed chamber (2), inflation rate can pass through variable valve (8) control, and the pressure through sensor (7) monitoring closed chamber (2) is to desired value.
7. the electronically controlled gas volume density stabilising arrangement of spectrometer according to claim 6; It is characterized in that: when the pressure of said closed chamber (2) is higher than working pressure; Close variable valve (8) earlier; Break off source of the gas, under the supervision of sensor (7), slowly be deflated to the value that needs with variable valve (8).
8. the electronically controlled gas volume density stabilising arrangement of spectrometer according to claim 7 is characterized in that: when the pressure of said closed chamber (2) is higher than working pressure, cut out variable valve (8) earlier; Break off source of the gas, under the supervision of sensor (7), with slowly venting of variable valve (8); To the value that needs, when once adjusting does not reach desired value, but this process repeated multiple times; After regulating, stop valve (9) is closed, remove the pressure regulation instrument.
9. according to the electronically controlled gas volume density stabilising arrangement of claim 1 or 6 described spectrometers, it is characterized in that: described micrometeor proportional control valve (6) back connection traffic sensor is to keep watch on gas consumption.
CN2012100602350A 2012-03-09 2012-03-09 Electronically controlled fluid gas density stabilizing device for spectrograph Pending CN102681003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012100602350A CN102681003A (en) 2012-03-09 2012-03-09 Electronically controlled fluid gas density stabilizing device for spectrograph

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012100602350A CN102681003A (en) 2012-03-09 2012-03-09 Electronically controlled fluid gas density stabilizing device for spectrograph

Publications (1)

Publication Number Publication Date
CN102681003A true CN102681003A (en) 2012-09-19

Family

ID=46813208

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012100602350A Pending CN102681003A (en) 2012-03-09 2012-03-09 Electronically controlled fluid gas density stabilizing device for spectrograph

Country Status (1)

Country Link
CN (1) CN102681003A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102927447A (en) * 2012-10-31 2013-02-13 北京控制工程研究所 Synchronous deflation method for air channel pressure-reducing pipeline system
CN103018079A (en) * 2012-11-07 2013-04-03 吉林大学 Partial flow equivalently-dynamic diluting and sampling system for diesel engine exhaust particles and control method
CN105241851A (en) * 2015-09-25 2016-01-13 清华大学 Solid powder online detection apparatus based on laser-induced breakdown spectroscopy technology

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255016A (en) * 1988-04-01 1989-10-11 Shimadzu Corp Gas density stabilizer
CN1187621A (en) * 1997-12-30 1998-07-15 中国科学院紫金山天文台 Method for precision detecting and controlling gas density and apparatus thereof
CN201344912Y (en) * 2008-12-25 2009-11-11 中国建筑材料检验认证中心 Air pocket-type gas density stabilizer
CN201344911Y (en) * 2008-12-25 2009-11-11 中国建筑材料检验认证中心 Thin film-type gas density stabilizer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255016A (en) * 1988-04-01 1989-10-11 Shimadzu Corp Gas density stabilizer
CN1187621A (en) * 1997-12-30 1998-07-15 中国科学院紫金山天文台 Method for precision detecting and controlling gas density and apparatus thereof
CN201344912Y (en) * 2008-12-25 2009-11-11 中国建筑材料检验认证中心 Air pocket-type gas density stabilizer
CN201344911Y (en) * 2008-12-25 2009-11-11 中国建筑材料检验认证中心 Thin film-type gas density stabilizer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102927447A (en) * 2012-10-31 2013-02-13 北京控制工程研究所 Synchronous deflation method for air channel pressure-reducing pipeline system
CN102927447B (en) * 2012-10-31 2014-10-08 北京控制工程研究所 Synchronous deflation method for air channel pressure-reducing pipeline system
CN103018079A (en) * 2012-11-07 2013-04-03 吉林大学 Partial flow equivalently-dynamic diluting and sampling system for diesel engine exhaust particles and control method
CN103018079B (en) * 2012-11-07 2015-06-10 吉林大学 Partial flow equivalently-dynamic diluting and sampling system for diesel engine exhaust particles and control method
CN105241851A (en) * 2015-09-25 2016-01-13 清华大学 Solid powder online detection apparatus based on laser-induced breakdown spectroscopy technology

Similar Documents

Publication Publication Date Title
CN103487593B (en) Gas analysis device and method
CN105424180B (en) Calibration method for terahertz laser power meter
CN102681003A (en) Electronically controlled fluid gas density stabilizing device for spectrograph
CN102859459B (en) For the method and system of calibration gas stream thinner
CN101813595B (en) Device of quickly measuring hydrogen content in aluminium alloy fusant
Ulanovsky et al. The FOZAN-II fast-response chemiluminescent airborne ozone analyzer
CN202814667U (en) Photoelectric instrument gas-tightness detector
KR20200105385A (en) System and method for determining performance of fine dust sensor
RU91779U1 (en) GAS GAS MEDIA DETECTION DETECTION DEVICE AND SPECTOMETRIC GAS GAMMA RADIATION MONITOR
CN109752751B (en) In the air131I dynamic balance monitoring device and monitoring method
GB2024411A (en) Measuring oil and water cuts in a multiphase flowstream with elimination of the effects of gas in determining the liquid cuts
US5524473A (en) Gas chromatograph flow calibrator
CN111929227B (en) Switching method, device, equipment and storage medium of infrared detection pool
JP5364957B2 (en) Trace moisture generator and standard gas generator
Henn et al. A simple means for reproducibly dosing low vapor pressure and/or reactive gases to surfaces in ultrahigh vacuum
CN203772801U (en) Discharge ionization current detector
US3934139A (en) Apparatus for measuring calorific power of hydrocarbon compounds
Venturini et al. Ageing tests for the MEG II drift chamber
WO2019048322A3 (en) Aerosol particle measuring device for determining materials in real time by means of fluorescence lifetime measurement in the frequency range
RU23105U1 (en) DENSITY RADIO ISOTOPIC
JPH06249765A (en) Standard gas generator
CN109253780A (en) Fuel consumption meter calibrating installation
RU154702U1 (en) MULTI-PHASE LIQUID CONCENTRATOMETER
US11680866B2 (en) Bleeding air regulator control pneumatic circuit, and leakage detection system for testing a device under test
JP6248460B2 (en) Excitation light irradiation device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20120919