CN102653405A - Device for treating hydrogenated by-product of silicon tetrachloride - Google Patents
Device for treating hydrogenated by-product of silicon tetrachloride Download PDFInfo
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- CN102653405A CN102653405A CN2012101189276A CN201210118927A CN102653405A CN 102653405 A CN102653405 A CN 102653405A CN 2012101189276 A CN2012101189276 A CN 2012101189276A CN 201210118927 A CN201210118927 A CN 201210118927A CN 102653405 A CN102653405 A CN 102653405A
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Abstract
The invention provides a device for treating a hydrogenated by-product of silicon tetrachloride, and the device comprises a gas-solid separation device and a heat exchange device, wherein the gas-solid separation device is used for carrying out gas-solid separation on the hydrogenated by-product of the silicon tetrachloride so as to obtain a first gas mixture containing trichlorosilane, silicon tetrachloride, dichlorosilane and hydrogen, and solid particles; the heat exchange device is connected with the gas-solid separation device, and is used for receiving the first gas mixture from the gas-solid separation device and carrying out heat exchange between the first gas mixture and second gas mixture so as to enable the temperature of the second gas mixture to be increased, wherein the second gas mixture is a mixture of silicon tetrachloride and hydrogen. The device for treating the hydrogenated by-product of the silicon tetrachloride is simple in structure, convenient in operation, low in energy consumption and cost and high in heat recovery rate. Furthermore, a pipeline can be prevented from being blocked by the solid particles, so that the utilization rate of a solid material is improved, and the normal operation of the pipeline and equipment can be guaranteed.
Description
Technical field
The present invention relates to field of polysilicon production, more specifically, relate to the equipment that is used for the processing silicon chloride hydrogenated by-product.
Background technology
In polysilicon production process, produce a large amount of silicon tetrachloride as by-product.For example, when adopting trichlorosilane hydrogen reduction technology (improvement siemens process) to produce polysilicon, 1 ton of polysilicon of every production can produce 10～20 tons of silicon tetrachlorides.Silicon tetrachloride is a kind of deleterious chemical substance, and very easily hydrolysis generates silicic acid and hydrogenchloride, serious environment pollution.Therefore, how the safe handling silicon tetrachloride becomes the focus of present research.At present, the effective means of processing silicon chloride is to make silicon tetrachloride be converted into the raw material trichlorosilane of producing polysilicon under certain conditions through the hydrogenation of silicon tetrachloride technology.
Yet, because the by product that contains silicon tetrachloride contains solid particulates such as a small amount of silica flour and catalyzer, make equipment and line clogging easily, and its heat can't reclaim, caused energy consumption higher, cost is higher, fluctuation of service.
Summary of the invention
The present invention is intended to one of solve the problems of the technologies described above at least.For this reason, one object of the present invention is to propose the equipment and the method for processing silicon chloride hydrogenated by-product effectively.
According to an aspect of the present invention, the invention provides a kind of equipment that is used for the processing silicon chloride hydrogenated by-product.According to embodiments of the invention; This equipment comprises: gas-solid separating device, said gas-solid separating device are used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation to obtain containing first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen; And heat exchanger; Said heat exchanger links to each other with said gas-solid separating device; Receive said first gaseous mixture from said gas-solid separating device, and said first gaseous mixture and second gaseous mixture are carried out heat exchange, so that make the temperature of said second gaseous mixture be enhanced; Wherein, said second gaseous mixture mixture that is silicon tetrachloride and hydrogen.According to the equipment that is used for the processing silicon chloride hydrogenated by-product of the embodiment of the invention, heat that can efficient recovery hydrogenation of silicon tetrachloride by product is realized energy-saving and cost-reducing.
According to embodiments of the invention, the said equipment that is used for the processing silicon chloride hydrogenated by-product can also have following additional technical feature:
According to one embodiment of present invention, further comprise: hydrogenation apparatus, said hydrogenation apparatus are used for silicon tetrachloride is carried out hydrogen treatment; And the solid particulate return pipeline, the said gas-solid separating device of said solid particulate return pipeline links to each other, and is used for said solid particulate is back to hydrogenation apparatus.Thus, can recycle silica flour and catalyzer, improve utilization of materials.
According to one embodiment of present invention, said gas-solid separating device is a cyclonic separator.Thus, can improve gas solid separation efficient, avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of pipeline and equipment.
According to one embodiment of present invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises porcelain filter; Said porcelain filter links to each other with heat exchanger with said gas-solid separating device respectively; So that before first gaseous mixture gets into said heat exchanger, said first gaseous mixture is carried out dust removal by filtration handle.Thus, first gaseous mixture can be further purified, and solid particulate occluding device and pipeline can be further avoided, thus the normal operation of assurance equipment and pipeline.
According to one embodiment of present invention, the aperture of said porcelain filter is the 600-1500 order.Thus, can remove the fine solid particle in first gaseous mixture effectively, be further purified trichlorosilane.
According to one embodiment of present invention, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in said second gaseous mixture.Thus, the raw material that second gaseous mixture that heats through heat exchange can directly react as hydrogenation of silicon tetrachloride.
According to one embodiment of present invention; Further comprise condensing works; Said condensing works links to each other with said heat exchanger; Be used for receiving through overcooled first gaseous mixture, and said first gaseous mixture is carried out condensation process, make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and Hydrogen Separation in said first gaseous mixture from said heat exchanger.Thus, can further effectively separate trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.
According to one embodiment of present invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises heating unit; Said heating unit links to each other with said hydrogenation apparatus; Be used for said mixed gas being supplied to said hydrogenation apparatus with behind the further heat temperature raising of the mixed gas of hydrogen and silicon tetrachloride.Thus, can improve the temperature of the mixed gas of hydrogen and silicon tetrachloride, help the carrying out of hydrogenation of silicon tetrachloride reaction.
According to one embodiment of present invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises the second gaseous mixture transport pipe; The said second gaseous mixture transport pipe links to each other with electric heater unit with said heat exchanger respectively, is used for the said mixed gas that contains silicon tetrachloride and hydrogen through heat exchange is inputed to said hydrogenation apparatus.Thus, can second gaseous mixture that pass through heating be used for hydrogenation.
According to a further aspect in the invention, the present invention also provides a kind of method of processing silicon chloride hydrogenated by-product.According to embodiments of the invention; This method may further comprise the steps: the hydrogenation of silicon tetrachloride by product is supplied to gas-solid separating device, so that carry out gas solid separation to obtain containing first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen; And said first gaseous mixture and second gaseous mixture carried out heat exchange in heat exchanger, wherein, said second gaseous mixture is the mixture of silicon tetrachloride and hydrogen.Utilize this method, heat that can efficient recovery hydrogenation of silicon tetrachloride by product is realized energy-saving and cost-reducing.
According to embodiments of the invention, aforesaid method can also have following additional technical feature:
According to one embodiment of present invention, the method for said processing silicon chloride hydrogenated by-product further comprises said solid particulate is delivered to hydrogenation apparatus, is used to carry out the hydrogenation of silicon tetrachloride.Thus, can recycle silica flour and catalyzer, improve the utilization ratio of material.
According to one embodiment of present invention, said gas-solid separating device is a cyclonic separator.Thus, gas solid separation efficient be can improve, solid particulate occluding device and pipeline avoided, thus the normal operation of assurance equipment and pipeline.
According to one embodiment of present invention, before first gaseous mixture is carried out heat exchange, comprise that further utilizing porcelain filter that first gaseous mixture is carried out dust removal by filtration handles.Thus, first gaseous mixture can be further purified, and the solid particulate blocking pipe can be further avoided, thus the normal operation of assurance pipeline and equipment.
According to one embodiment of present invention, the aperture of said porcelain filter is the 600-1500 order.Thus, can remove the fine solid particle in first gaseous mixture effectively, be further purified first mixed gas.
According to one embodiment of present invention, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in said second gaseous mixture.Thus, the raw material that second gaseous mixture that heats through interchanger can directly react as hydrogenation of silicon tetrachloride.
According to one embodiment of present invention, further comprise said first gaseous mixture through heat exchange is carried out condensation process, make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and Hydrogen Separation in said first gaseous mixture.Thus, can further effectively separate trichlorosilane and hydrogen.
According to one embodiment of present invention, further comprise second gaseous mixture through heating is inputed to and carries out hydrogenation in the hydrogenation apparatus.Thus, can second gaseous mixture that pass through heating be used for hydrogenation.
According to one embodiment of present invention, before said second gaseous mixture is input to said hydrogenation apparatus, further comprises said second gaseous mixture is heated.Thus, can improve the temperature of the mixed gas of hydrogen and silicon tetrachloride, help the carrying out of hydrogenation of silicon tetrachloride reaction.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize through practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage obviously with are easily understood becoming the description of embodiment from combining figs, wherein:
Fig. 1 is the synoptic diagram according to the equipment that is used for the processing silicon chloride hydrogenated by-product of the embodiment of the invention; And
Fig. 2 is the schematic flow sheet of the method for processing silicon chloride hydrogenated by-product according to an embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of said embodiment is shown in the drawings, and wherein identical from start to finish or similar label is represented identical or similar elements or the element with identical or similar functions.Be exemplary through the embodiment that is described with reference to the drawings below, only be used to explain the present invention, and can not be interpreted as limitation of the present invention.
With reference to figure 1 equipment that is used for the processing silicon chloride hydrogenated by-product is described below:
According to an aspect of the present invention, the invention provides a kind of equipment that is used for the processing silicon chloride hydrogenated by-product.According to one embodiment of present invention, the said system that is used to carry out the hydrogenation of silicon tetrachloride reaction comprises the equipment of hydrogenation apparatus and processing silicon chloride hydrogenated by-product.The equipment of processing silicon chloride hydrogenated by-product comprises: gas-solid separating device and heat exchanger.According to some embodiments of the present invention; Gas-solid separating device is used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation to obtain containing first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen; Heat exchanger links to each other with gas-solid separating device; Receive first gaseous mixture from gas-solid separating device, and first gaseous mixture and second gaseous mixture are carried out heat exchange, so that make the temperature of said second gaseous mixture be enhanced; Wherein, second gaseous mixture is the mixture of silicon tetrachloride and hydrogen.The equipment that is used for the processing silicon chloride hydrogenated by-product according to the embodiment of the invention; Simple in structure, easy to operate, can be effectively with the energy that reclaims the hydrogenation of silicon tetrachloride by product; Energy consumption is low; Cost is low, and can avoid solid particulate occluding device and pipeline, thereby guarantees the normal operation of pipeline and equipment.
Among this paper; Broad understanding should be made in term " hydrogenation of silicon tetrachloride by product "; It is meant that silicon tetrachloride and hydrogen carry out hydrogenation in polysilicon production process; The mixture of from reaction unit, discharging wherein contains trichlorosilicane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen and solid particulate etc.According to embodiments of the invention, the type of hydrogenation apparatus does not receive special restriction, as long as can make the hydrogenation of silicon tetrachloride reaction smoothly.In examples more of the present invention, can adopt fixed-bed reactor or fluidized-bed reactor.In a concrete example of the present invention, can adopt fluidized-bed reactor.In fluidized-bed reactor, utilize gas to make solid particulate be in the suspended motion state, the promoting the circulation of qi solid state reaction of going forward side by side through the particulate solid layer.In said hydrogenation apparatus, following reaction takes place in silicon tetrachloride and hydrogen:
3SiCl
4+2H
2+Si＝4SiHCl
3
At first, the quality that catalyst powder powder and silica flour are pressed 1%-5% is warming up to 400 ℃ by 28 ℃ and carries out the activation drying treatment than uniform mixing under hydrogen atmosphere.Then, with mol ratio be 1: 1～1: 10 the mixed gas of silicon tetrachloride and hydrogen with certain flow velocity through catalyzer and the silica flour bed of material after the activation treatment, temperature is 400～600 ℃, pressure is 1.5～3.5MPa, carries out hydrogenation of silicon tetrachloride and reacts.Under above reaction conditions, silicon tetrachloride can be converted into trichlorosilane effectively, and transformation efficiency can reach 20～30%.Therefore, reaction can be carried out under lower temperature and pressure, thereby can cut down the consumption of energy, and practices thrift cost.
According to embodiments of the invention; Heat exchanger can be realized the heat exchange between first gaseous mixture and second gaseous mixture; Thereby in the temperature that reduces byproduct gas; Improved the temperature of second gaseous mixture that contains silicon tetrachloride and hydrogen, inputed in the hydrogenation apparatus thereby second gaseous mixture that makes process heat can be used as the raw material of hydrogenation.According to embodiments of the invention, the type of heat exchanger does not receive special restriction.In a concrete example of the present invention, said heat exchanger is a shell and tube heat exchanger.Thereby effectively utilize the heat of gas in the hydrogenated by-product, improve the heat energy utilization rate, reduce cost.According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises the mixed gas delivery pipeline; Said mixed gas delivery pipeline links to each other with said hydrogenation apparatus with said heat exchanger respectively; The said mixed gas that contains silicon tetrachloride and hydrogen that is used for passing through heat exchange inputs to said hydrogenation apparatus, thereby is convenient to the carrying out of subsequent disposal operation.According to concrete example of the present invention, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in said second gaseous mixture.Thus, the raw material that second gaseous mixture that heats through heat exchange can directly react as hydrogenation of silicon tetrachloride.
According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises heating unit; Said heating unit links to each other with said hydrogenation apparatus; After being used for mixed gas with hydrogen and silicon tetrachloride and heating, said mixed gas is supplied to said hydrogenation apparatus.According to embodiments of the invention, the type of heating unit does not receive special restriction, as long as can the mixed gas of said hydrogen and silicon tetrachloride be heated to temperature required (as 400～600 ℃).In a concrete example of the present invention, said heating unit is a resistance heater.Through after the heat treated, can improve the temperature of the mixed gas of said hydrogen and silicon tetrachloride, help the carrying out of hydrogenation of silicon tetrachloride reaction.
According to embodiments of the invention, the type of gas-solid separating device does not receive special restriction, as long as can from the hydrogenation of silicon tetrachloride by product, isolate first gaseous mixture, promptly trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen get final product.In a concrete example of the present invention, said gas-solid separating device is a cyclonic separator.Cyclonic separator adopts vertical pyramidal structure, and inwall is coated with high-abrasive material.Equipment adopts the ear seat supports, and end socket adopts high pressure resistant ellipse end socket.Said first gaseous mixture that contains trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen gets into cyclonic separator; After impure gas radially gets into cyclone tube; Air-flow receives guide functions and produces strong rotation, and air-flow gets into Whirlwind barrel downwards twist along cylindrical shell, and the big grit of density is thrown toward wall under centrifugal action; And under action of gravity, fall to flowing out the tornadotron dust-exhausting port along barrel.The air-flow of rotation shrinks in cylindrical shell to center flow, upwards forms the secondary vortices gas tube of flowing through and flow to downstream unit.After the gas-solid separating device separation; Can particle diameter in the said mixture that contains trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen be removed greater than 10 microns solid particulate (like catalyzer or silica flour etc.), thereby obtain the gaseous mixture of more purified trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.Therefore, can avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of pipeline and equipment.
According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises the solid particulate return pipeline; Said solid particulate return pipeline links to each other with gas-solid separating device with hydrogenation apparatus respectively, is used for said solid particulate is back to said hydrogenation apparatus.Thus, can catalyzer in the said solid particulate and silica flour be used as hydrogenation of silicon tetrachloride catalyst for reaction and silica flour again, thus recycle catalyzer and silica flour.
According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises porcelain filter; Said porcelain filter links to each other with said gas-solid separating device; So that receive through hydrogen and silicon tetrachloride, and the said hydrogen that purifies through gas solid separation carried out the dust removal by filtration processing with silicon tetrachloride from said gas-solid separating device.According to embodiments of the invention, the type of porcelain filter does not receive special restriction, removes as long as can remove the fine solid particle that the trichlorosilane mixed gas carries.According to embodiments of the invention, the aperture of said porcelain filter is the 600-1500 order.Through after the filtration treatment; Can be from said gaseous mixture through the trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and the hydrogen that purify; With particle diameter is that 1～10 micron fine solid particle is removed; Be further purified trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen, and can avoid solid particulate occluding device and pipeline, thus the normal operation of assurance pipeline and equipment.
According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises condensing works; Said condensing works links to each other with said heat exchanger, is used for receiving through overcooled first gaseous mixture from said heat exchanger, and said first gaseous mixture is carried out condensation process; Make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon be condensed, thereby realize separating with hydrogen.According to embodiments of the invention, the type of condensing works does not receive special restriction, as long as can change liquid into through overcooled trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon gas with said.In a concrete example of the present invention, said condensing works is the multi-stage condensing device.Through after the condensation process, can further reduce the temperature of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, realize and Hydrogen Separation, and hydrogen can recycle.
The method of processing silicon chloride hydrogenated by-product is described with reference to figure 2 below:
According to another aspect of the present invention, the present invention also provides a kind of method of processing silicon chloride hydrogenated by-product.According to embodiments of the invention, the method for said processing silicon chloride hydrogenated by-product may further comprise the steps.
At first, the hydrogenation of silicon tetrachloride by product is supplied to gas-solid separating device, so that carry out gas solid separation to obtain containing first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen.According to some embodiments of the present invention, gas-solid separating device is used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation to obtain containing first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen.According to embodiments of the invention, the type of gas-solid separating device does not receive special restriction, as long as can from the hydrogenation of silicon tetrachloride by product, isolate first gaseous mixture, promptly trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen get final product.In a concrete example of the present invention, said gas-solid separating device is a cyclonic separator.Cyclonic separator adopts vertical pyramidal structure, and inwall is coated with high-abrasive material.Equipment adopts the ear seat supports, and end socket adopts high pressure resistant ellipse end socket.Said first gaseous mixture that contains trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen gets into cyclonic separator; When impure gas after radially conduit gets into cyclone tube; Air-flow receives guide functions and produces strong rotation, and air-flow gets into the whirlwind cone downwards twist along cylindrical shell, and the big grit of density is thrown toward wall under centrifugal action; And under action of gravity, fall to flowing out the tornadotron dust-exhausting port along barrel.The air-flow of rotation shrinks in cylindrical shell to center flow, upwards forms the secondary vortices gas tube of flowing through and flow to downstream unit.After the gas-solid separating device separation; Can particle diameter in the said mixture that contains trichlorosilane and hydrogen be removed greater than 10 microns solid particulate (silica flour or catalyzer etc.), thereby obtain the gaseous mixture of more purified trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.Therefore, can avoid solid particulate occluding device and pipeline, thereby guarantee the normal operation of pipeline and equipment.According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises the solid particulate return pipeline; Said solid particulate return pipeline links to each other with gas-solid separating device with hydrogenation apparatus respectively, is used for said solid particulate is back to said hydrogenation apparatus.Thus, can said solid particulate be used as hydrogenation of silicon tetrachloride catalyst for reaction and raw material silica flour again, thus recycle.
Next, said first gaseous mixture and second gaseous mixture are carried out heat exchange in heat exchanger, wherein, said second gaseous mixture is the mixture of silicon tetrachloride and hydrogen.According to embodiments of the invention; Heat exchanger can be realized the heat exchange between first gaseous mixture and second gaseous mixture; Thereby in the temperature that reduces byproduct gas; Improved the temperature of second gaseous mixture that contains silicon tetrachloride and hydrogen, inputed in the hydrogenation apparatus thereby second gaseous mixture that makes process heat can be used as the raw material of hydrogenation.According to embodiments of the invention, the type of heat exchanger does not receive special restriction.In a concrete example of the present invention, said heat exchanger is a shell and tube heat exchanger.Thereby effectively utilize the heat of gas in the hydrogenated by-product, improve the heat energy utilization rate, reduce cost.According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises the mixed gas delivery pipeline; Said mixed gas delivery pipeline links to each other with said hydrogenation apparatus with said heat exchanger respectively; The said mixed gas that contains silicon tetrachloride and hydrogen that is used for passing through heat exchange inputs to said hydrogenation apparatus, thereby is convenient to the carrying out of subsequent disposal operation.According to concrete example of the present invention, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in said second gaseous mixture.Thus, the raw material that second gaseous mixture that heats through heat exchange can directly react as hydrogenation of silicon tetrachloride.According to embodiments of the invention; The said equipment that is used for the processing silicon chloride hydrogenated by-product further comprises heating unit; Said heating unit links to each other with said hydrogenation apparatus; After being used for mixed gas with hydrogen and silicon tetrachloride and heating, said mixed gas is supplied to said hydrogenation apparatus.According to embodiments of the invention, the type of heating unit does not receive special restriction, as long as can the mixed gas of said hydrogen and silicon tetrachloride be heated to temperature required (as 400～600 ℃).In a concrete example of the present invention, said heating unit is a resistance heater.Through after the heat treated, can improve the temperature of the mixed gas of said hydrogen and silicon tetrachloride, help the carrying out of hydrogenation of silicon tetrachloride reaction.According to one embodiment of present invention, further be included in said first gaseous mixture is carried out before the heat exchange, said first gaseous mixture is carried out dust removal by filtration handle.Thus, first gaseous mixture can be further purified, and solid particulate occluding device and pipeline can be further avoided, thus the normal operation of assurance pipeline and equipment.According to one embodiment of present invention, the aperture of said porcelain filter is the 600-1500 order.Thus, can remove the fine solid particle in first gaseous mixture effectively, be further purified the trichlorosilane mixed gas.According to one embodiment of present invention, further comprise and carry out condensation process through overcooled first gaseous mixture, make trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and Hydrogen Separation in said first gaseous mixture said.Thus, can further effectively separate trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon and hydrogen.According to one embodiment of present invention, before said second gaseous mixture is input to said hydrogenation apparatus, further comprises said second gaseous mixture is heated.Thus, can improve the temperature of the mixed gas of hydrogen and silicon tetrachloride, help the carrying out of hydrogenation of silicon tetrachloride reaction.
Utilization is according to the method for the processing silicon chloride hydrogenated by-product of the embodiment of the invention, and heat that can efficient recovery hydrogenation of silicon tetrachloride by product is realized energy-saving and cost-reducing.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means the concrete characteristic, structure, material or the characteristics that combine this embodiment or example to describe and is contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete characteristic, structure, material or the characteristics of description can combine with suitable manner in any one or more embodiment or example.
Although illustrated and described embodiments of the invention; Those having ordinary skill in the art will appreciate that: under the situation that does not break away from principle of the present invention and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is limited claim and equivalent thereof.
Claims (9)
1. an equipment that is used for the processing silicon chloride hydrogenated by-product is characterized in that, comprising:
Gas-solid separating device, said gas-solid separating device are used for the hydrogenation of silicon tetrachloride by product is carried out gas solid separation to obtain containing first gaseous mixture and the solid particulate of trichlorosilane, silicon tetrachloride, dichloro-dihydro silicon, hydrogen; And
Heat exchanger; Said heat exchanger links to each other with said gas-solid separating device; Receive said first gaseous mixture from said gas-solid separating device, and said first gaseous mixture and second gaseous mixture are carried out heat exchange, so that make the temperature of said second gaseous mixture be enhanced; Wherein, said second gaseous mixture mixture that is silicon tetrachloride and hydrogen.
2. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 1 is characterized in that, further comprises:
Hydrogenation apparatus, said hydrogenation apparatus are used for silicon tetrachloride is carried out hydrogen treatment; And
The solid particulate return pipeline, the said gas-solid separating device of said solid particulate return pipeline links to each other, and is used for said solid particulate is back to hydrogenation apparatus.
3. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 1 is characterized in that, said gas-solid separating device is a cyclonic separator.
4. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 1; It is characterized in that; Further comprise porcelain filter; Said porcelain filter links to each other with heat exchanger with said gas-solid separating device respectively, so that before first gaseous mixture gets into said heat exchanger, said first gaseous mixture is carried out dust removal by filtration handle.
5. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 4 is characterized in that, the aperture of said porcelain filter is the 600-1500 order.
6. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 1 is characterized in that, the molar ratio of silicon tetrachloride and hydrogen is 1: 1～1: 10 in said second gaseous mixture.
7. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 1; It is characterized in that, further comprise condensing works, said condensing works links to each other with said heat exchanger; Be used for receiving through overcooled first gaseous mixture from said heat exchanger; And said first gaseous mixture carried out condensation process, make trichlorosilane, silicon tetrachloride and dichloro-dihydro silicon and Hydrogen Separation in said first gaseous mixture, the hydrogen recycle utilization.
8. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 1; It is characterized in that; Further comprise heating unit; Said heating unit links to each other with said hydrogenation apparatus, after being used for mixed gas with hydrogen and silicon tetrachloride and heating, said mixed gas is supplied to said hydrogenation apparatus.
9. the equipment that is used for the processing silicon chloride hydrogenated by-product according to claim 8 is characterized in that, further comprises:
The second gaseous mixture transport pipe; The said second gaseous mixture transport pipe links to each other with said heating unit with said heat exchanger respectively, is used for the said mixed gas that contains silicon tetrachloride and hydrogen through heat exchange is inputed to said hydrogenation apparatus.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109715285A (en) * | 2016-09-19 | 2019-05-03 | 韩华化学株式会社 | For synthesizing the fluidized-bed reactor of trichlorosilane |
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