CN102651531B - Optical fiber laser device and output monitoring method - Google Patents
Optical fiber laser device and output monitoring method Download PDFInfo
- Publication number
- CN102651531B CN102651531B CN201210018975.8A CN201210018975A CN102651531B CN 102651531 B CN102651531 B CN 102651531B CN 201210018975 A CN201210018975 A CN 201210018975A CN 102651531 B CN102651531 B CN 102651531B
- Authority
- CN
- China
- Prior art keywords
- light
- signal
- laser device
- fiber laser
- telecommunication
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000012544 monitoring process Methods 0.000 title abstract description 13
- 238000001514 detection method Methods 0.000 claims abstract description 59
- 230000003321 amplification Effects 0.000 claims abstract description 57
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 57
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- 239000000835 fiber Substances 0.000 claims description 68
- 238000000605 extraction Methods 0.000 claims description 37
- 239000000284 extract Substances 0.000 claims description 33
- 239000000203 mixture Substances 0.000 claims description 29
- 238000009499 grossing Methods 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 abstract description 32
- 238000012545 processing Methods 0.000 description 37
- 238000012360 testing method Methods 0.000 description 20
- 230000005284 excitation Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 238000003754 machining Methods 0.000 description 13
- 229910052761 rare earth metal Inorganic materials 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 6
- 230000005856 abnormality Effects 0.000 description 3
- 238000013519 translation Methods 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000023077 detection of light stimulus Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0064—Anti-reflection devices, e.g. optical isolaters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/127—Plural Q-switches
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Lasers (AREA)
Abstract
The invention relates to an optical fiber laser device and an output monitoring method. According to the invention, the detection accuracy of signal amplification light and background light of the output light of the optical fiber laser device can be improved. A TAP connector (143) can be used to diverge a part of the output light emitted by the light amplification optical fiber in order to take the sample light. A light radiodetector (146) can use the sample light to perform the light-to-current conversion in order to generate the detection signal corresponding to the quantity of light of the sample light. A multiplexer(205) can be used to take a signal light taking signal, namely a detection signal during a first period of outputting the signal amplification light, and to remove a background taking signal, namely a detection signal during the first and the second periods. The invention can be used for the optical laser device.
Description
Technical field
The present invention relates to fiber laser device and export supervision method, particularly improving the signal comprised in the output light of fiber laser device and amplify the fiber laser device of the accuracy of detection of light and bias light and export supervision method.
Background technology
Using optical fiber as in the fiber laser device of medium, the light of naturally releasing produced in the fibre core of optical fiber amplifies the remaining gain of the amplification of light by the signal do not contributed to for processing and amplifies, become bias light (ASE (amplified spontaneous emission: Amplified Spontaneous Emission) light), and be mixed into the output light exported from fiber laser device.This bias light do not affect by peak value export effect for the purpose of laser processing (such as, laser labelling, laser correction, laser drawing etc.), if therefore increase in the ratio exporting the bias light comprised in light, the error exported between the measurement result of the power (or intensity) of light and the processing result of reality becomes greatly, exists and brings dysgenic misgivings to machining accuracy.
Therefore, in the past, bias light was reduced by pulse modulation exciting light.
Fig. 1 represents by exciting signal when being exaggerated startup (seed) light to amplify the diagram of the relation example of light and bias light using continuous light as the CW of exciting light.On the other hand, Fig. 2 represents by exciting the signal be exaggerated when starting light to amplify the diagram of the relation example of light and bias light using pulsed light as the pulse modulation of exciting light.
In addition, the diagram of the top of Fig. 1 and Fig. 2 represents the waveform starting light, and horizontal axis representing time, the longitudinal axis represents power.The waveform of gain amplifier that the diagram of the centre of Fig. 1 and Fig. 2 represents exciting light and passes through exciting light and obtain, horizontal axis representing time, the longitudinal axis represents power or gain.The diagram of bottom represents that the signal exported from fiber laser device amplifies the waveform of light and bias light, and horizontal axis representing time, the longitudinal axis represents power.
It is no matter the situation of which mode, all before output signal amplifies light, export after amplifying bias light mainly through the energy in exciting, and after outputing signal amplification light and then, the residual gain mainly through the amplification not contributing to flashlight exports to amplify bias light.
In addition, when CW excites, exciting light incides optical fiber continuously, and also become the state in exciting all the time during therefore amplifying beyond during light amplifies to signal, gain amplifier keeps high level.Thus, do not contribute to the residual gain increase that signal amplifies the amplification of light, cause bias light to increase.On the other hand, when pulse modulation excites, because exciting light is input to optical fiber, the gain amplifier when startup light is input to optical fiber is made to become peak value, compared with when therefore exciting with CW, the gain amplifier during amplifying beyond during light amplifies can be suppressed for lower to signal.Thus comparison diagram 1 is known with Fig. 2, and compared with exciting with CW, pulse modulation excites minimizing bias light.
And be no matter the situation of which mode, be all exciting light stronger (excitation energy is higher), residual gain is larger, and bias light is larger, and exciting light more weak (excitation energy is lower), residual gain is fewer, and bias light is fewer.
In addition, be no matter the situation of which mode, it is higher to be all that signal amplifies the repetition rate of light, and the excitation energy (gain) being extracted in accumulation in optical fiber is more, and residual gain is fewer, and bias light is fewer.On the other hand, the repetition rate that signal amplifies light is lower, and the extracted amount of the excitation energy (gain) accumulated in optical fiber is fewer, and bias light is larger.
Fig. 3 represents while repetition rate changed in the scope of 10kHz to 100kHz, determines the diagram of the example being excited the result of the spectrum of the output light exported from fiber laser device by CW.In addition, transverse axis represents wavelength, and the longitudinal axis represents the logarithm value of the intensity exporting light.
When repetition rate is 100kHz, exports in light and comprise bias light hardly, the almost symmetrical waveform that it is peak value that the spectrum of output light becomes with the centre wavelength of signal amplification light.On the other hand, along with repetition rate reduces, export the bias light comprised in light and increase, the wavelength components that signal amplifies the surrounding of the centre wavelength of light increases, and the scope of spectrum also broadens.
This is also identical when pulse modulation excites, and such as, when repetition rate is a few kHz, bias light accounts for the ratio exporting light and reaches tens % from a few %.
Thus the repetition rate that signal amplifies light is lower, the ratio that bias light accounts for output light is larger, and the error therefore exported between the measurement result of the power of light and the processing result of reality increases, and machining accuracy reduces.
More particularly, such as, ENERGY E and the peak power Pp of the output light used as machined parameters is calculated by following formula (1) and (2).
E＝Pave/f ...(1)
Pp＝E/Δt ...(2)
Here, the average power Pave exporting light is such as measured by measuring power meter and has carried out time averaging value according to thermal conversion.In addition, repetition rate f is known, and pulse duration Δ t is measured by the optical detector for detecting the light quantity exporting light.
If bias light increases, the difference then exported between average power that the measured value of the average power Pave of light and signal amplify light becomes large, its result, the output ENERGY E of light and the measured value of peak power Pp deviate from actual contribution amplifies light energy and peak power in the signal processed, and machining accuracy reduces.
The problems referred to above are such as replacing power meter, and by the power monitor that make use of the photodiode be generally combined in fiber laser device measure export the average power of light when also identical.
Thus in fiber laser device in the past, in order to prevent machining accuracy from reducing, when the repetition rate of signal being amplified light is set as lower, restriction exports the power of light.
Fig. 4 is the diagram of an example of the operating characteristics representing such fiber laser device.Transverse axis represents that signal amplifies the repetition rate of light, and the longitudinal axis represents the pulse energy exporting light.
Solid line 11 represents that the average power exporting light becomes the line of 10W.Wherein, when the pulse width set that will export light (signal amplification light) is certain, need peak power to be restricted to below the value of regulation by SRS (stimulated Raman scattering: Stimulated Raman Scattering), when the peak power exporting light is set to certain, need pulse duration to be restricted to below the value of regulation by SBS (stimulated Brillouin scattering: stimulatedBrilliouin scattering).Therefore, as shown in the drawing, when such as repetition rate is in the scope of below 10kHz, the pulse energy exporting light is restricted to certain value, its result, and the average power exporting light is restricted to and is less than 10W.
On the other hand, dotted line 12 represents the pulse energy of the output light from the actual output of fiber laser device.Like this, the pulse energy exporting light is limited, and the average power such as exporting light when repetition rate when the scope of about 20 ~ below 30kHz is reduced.This is because as described above, under low-repetition-frequency, unwanted bias light increases.Its result, when being set as lower by repetition rate, available machining energy reduces.
Therefore, proposed following technology: utilize FBG (Fiber Bragg Grating FBG: Fiber BraggGrating) to extract and the light (for example, referring to patent documentation 1) of the wavelength band of supervisory signal amplification light from exporting light in the past.
Patent documentation 1:(Japan) JP 2000-183434 publication
But as in the previous shown in Fig. 3, it is close that the centre wavelength of the spectrum of bias light and signal amplify light, overlap wider than the spectral region of signal amplification light, therefore can not be separated spectrum.
Thus, be difficult to utilize above-mentioned FBG etc., based on wavelength, extract signal from output light and amplify light and bias light.
Summary of the invention
The present invention completes in view of such situation, can improve the accuracy of detection that the signal comprised in the output light of fiber laser device amplifies light and bias light.
The fiber laser device of an aspect of of the present present invention, exports signal by being obtained by fiber amplifier by the startup light of pulse type and amplifies light, comprising: furcation, by a part of bifurcated of laser penetrate from optical fiber, thus extraction sampled light; Photoelectric conversion department, carries out light-to-current inversion to sampled light, generates the signal of telecommunication; And extraction unit, extract comprise the signal of telecommunication in during output signal amplifies the 1st during light that is the 1st extract the 2nd during signal and removing the 1st during in the signal of telecommunication i.e. the 2nd at least one extracting in signal.
In fiber laser device in one aspect of the invention, by a part of bifurcated of laser penetrated from optical fiber, thus extraction sampled light, light-to-current inversion is carried out to sampled light, generate the signal of telecommunication, extract comprise the signal of telecommunication in during output signal amplifies the 1st during light that is the 1st extract the 2nd during signal and removing the 1st during in the signal of telecommunication i.e. the 2nd at least one extracting in signal.
Thus, the accuracy of detection that the signal comprised in the output light of fiber laser device amplifies light and bias light can be improved.
This furcation is such as made up of TAP connector.This photoelectricity change section is such as made up of high speed PIN photodiode.This extraction unit is such as made up of High Speed Analog multiplexer.
In this extraction unit, according to the clock signal of the output of the startup light for controlling the light source from regulation, the 1st can be extracted and extract signal and the 2nd extraction signal.
Thereby, it is possible to control simply to extract for extracting the 1st the timing that signal and the 2nd extracts signal.
From clock signal is after the 1st time of regulation, can terminate after the 2nd time of regulation during 1st.
Thereby, it is possible to separation and Extraction is exporting the signal amplification composition of light and the composition of bias light that comprise in light more reliably.
This fiber laser device can also be provided with: smoothing portion, extracts signal smoothing by the 2nd; And wrong detection unit, when the 2nd extraction signal after smoothing has exceeded the threshold value of regulation, output error signal.
The gain accumulation state in a fiber of the state representation surplus of a large amount of production background light (ASE light) easily produces the state that light gushes (generation of the pulse of the needle pattern (spike) that strong peak value exports) at the direct of travel of flashlight with opposite direction.Thus, by this wrong detection unit, the generation that can prevent light from gushing in advance and its damage to optics caused.
This smoothing portion is such as made up of the smoothing circuit that make use of electric capacity etc.This wrong detection unit is such as made up of comparator.
In this fiber laser device, can also be as follows: the signal of telecommunication is bifurcated into the 1st signal of telecommunication and the 2nd signal of telecommunication, and fiber laser device comprises: limiting unit, the level of restriction the 2nd signal of telecommunication; And enlarging section, confined 2nd signal of amplification level, extraction unit is extracted the 1st from the 1st signal of telecommunication and is extracted signal, and the 2nd signal of telecommunication after being exaggerated extracts the 2nd extraction signal.
Thereby, it is possible to amplify and detect at the composition exporting the bias light comprised in light.
This limiting unit is such as made up of Zener diode.This enlarging section is such as made up of high speed operation amplifier amplifying circuit.
In this fiber laser device, can also be provided with removing unit, from sampled light removing for amplifying the composition of the wavelength band of the exciting light starting light, the sampled light eliminating the composition of the wavelength band of exciting light is carried out light-to-current inversion by photoelectric conversion department.
Thereby, it is possible to removing does not have to contribute and the residual excitation light of output to amplifying in the exciting light being input to optical fiber, thus detection signal amplifies light and bias light.
This removing unit is such as made up of optical filters such as band pass filter and ND filters.
In this fiber laser device, can also be provided with: output control part, according at least one in the detected value based on the 1st extraction signal and the detected value based on the 2nd extraction signal, control the output of fiber laser device.
Thereby, it is possible to raising machining accuracy.In addition, the fiber laser device carrying out laser processing with low-repetition-frequency height machining energy can be realized.
This output control part is such as made up of processors such as CPU, MPU.
The output supervision method of an aspect of of the present present invention is used for fiber laser device, fiber laser device exports and amplifies light by the startup light of pulse type being amplified in optical fiber the rear signal obtained, export supervision method to comprise the following steps: by a part of bifurcated of laser penetrate from optical fiber, extraction sampled light; Sampled light light-to-current inversion is generated the signal of telecommunication; And extract comprise the signal of telecommunication in during output signal amplifies the 1st during light that is the 1st extract the 2nd during signal and removing the 1st during in the signal of telecommunication i.e. the 2nd at least one extracting in signal.
In output supervision method in one aspect of the invention, by a part of bifurcated of laser penetrated from optical fiber, thus extraction sampled light, light-to-current inversion is carried out to sampled light, generate the signal of telecommunication, extract comprise the signal of telecommunication in during output signal amplifies the 1st during light that is the 1st extract the 2nd during signal and removing the 1st during in the signal of telecommunication i.e. the 2nd at least one extracting in signal.
Thus, the accuracy of detection that the signal comprised in the output light of fiber laser device amplifies light, bias light can be improved.
The extraction of sampled light is such as undertaken by TAP connector.Light-to-current inversion is such as undertaken by the neat photodiode of high speed PIN.1st extraction of extracting signal and the 2nd extraction signal is such as undertaken by High Speed Analog multiplexer.
According to an aspect of the present invention, the accuracy of detection that the signal comprised in the output light of fiber laser device amplifies light, bias light can be improved.
Accompanying drawing explanation
The diagram that Fig. 1 is startup light when representing that CW excites, exciting light, gain amplifier, signal amplify the development of light and bias light.
Fig. 2 is the diagram that indicating impulse modulates the development of startup light, exciting light, gain amplifier, signal amplification light and bias light when exciting.
Fig. 3 represents that the signal of fiber laser device amplifies the diagram of the repetition rate of light and the relation of spectrum.
Fig. 4 is the diagram of an example of the operating characteristics of the fiber laser device represented in the past.
Fig. 5 is the block diagram representing the execution mode applying fiber laser device of the present invention.
Fig. 6 is the figure of the structure example of the test section representing fiber laser device.
Fig. 7 is the flow chart monitoring process for illustration of the output performed by fiber laser device.
Fig. 8 is the oscillogram monitoring process for illustration of the output performed by fiber laser device.
Label declaration
101 fiber laser devices
111 LASER Light Source
112 laser control systems
113 machining cells
131 start LD
134 excite LD
136 light amplification optical fiber
139A to 139D excites LD
141 light amplification optical fiber
143TAP connector (coupler)
145 optical filters
146 optical detectors
161 drive control parts
162 pulse generators
163,164,165A to 165D driver
166 test sections
181 monitoring units
203 Zener diodes
204 amplifying circuits
205 multiplexers
206A, 206B signal processing part
208 comparators
Embodiment
Below, illustrate for implementing mode of the present invention (hereinafter referred to as execution mode).In addition, illustrate and carry out in the following order.
1. execution mode
2. variation
<1. execution mode >
Fig. 5 is the figure representing the execution mode applying fiber laser device 101 of the present invention.
Fiber laser device 101 comprises LASER Light Source 111, the laser control system 112 controlling LASER Light Source 111 and machining cell 113.
LASER Light Source 111 comprises following and forms: start LD (laser diode) 131, band pass filter (BPF) 132, isolator 133, excite LD (laser diode) 134, coupler 135, light amplification optical fiber 136, isolator 137, band pass filter (BPF) 138, excite LD (laser diode) 139A to 139D, coupler 140, light amplification optical fiber 141, isolator 142, TAP connector 143, end cap (end cap) 144, optical filter 145, and optical detector 146.
Start LD131 impulse hunting based on the control of laser control system 112, thus send the startup light of pulse type.In addition, the wavelength starting light is such as selected from the scope of 1000 ~ 1100nm.
From starting the startup light that sends of LD131 by BPF132 and isolator 133.
BPF132 makes the light of the wavelength band of the regulation comprising the centre wavelength starting light pass through, and cut-off is different from the light of the wavelength band of this wavelength band.
Isolator 133 makes startup light pass through, and cut-off is from the back light of light amplification optical fiber 136, prevents back light from inciding and starts LD131.
Exciting LD134 based on the control of laser control system 112, sending the exciting light for exciting the rare earth element added in the fibre core of light amplification optical fiber 136.Such as, when rare earth element is Yb (ytterbium), the wavelength of exciting light is such as set as 915 ~ 975nm.
Coupler 135 be coupled self-starting LD131 startup light and carry out the light path of exciting light of self-excitation LD134, make it incide light amplification optical fiber 136.
Light amplification optical fiber 136 has fibre core and is arranged on the coating of surrounding of this fibre core, and fibre core is added the rare earth element as light amplification composition.The kind of adding the rare earth element in fibre core to is not particularly limited, such as, have Er (erbium), Yb (ytterbium), Nd (neodymium) etc.
In addition, the rare earth element comprised in the fibre core of light amplification optical fiber 136 absorbs exciting light, thus this rare earth element is excited.In this condition, propagate in the fibre core of light amplification optical fiber 136 if start light, then produce the stimulated emission that the rare earth element that is excited causes.By this stimulated emission, the startup light be input in light amplification optical fiber 136 is exaggerated.
In addition, below, the pulsed light obtained by amplifying startup light in light amplification optical fiber 136 is called that signal amplifies light.
Isolator 137 makes the signal amplification light penetrated from light amplification optical fiber 136 pass through, and cut-off is to the back light of light amplification optical fiber 136.
BPF138 makes the light of the wavelength band of the regulation of the centre wavelength comprising the signal amplification light penetrated from light amplification optical fiber 136 pass through, and cut-off is different from the light of the wavelength band of this wavelength band.
Exciting LD139A to 139D separately based on the control of laser control system 112, sending the exciting light for exciting the rare earth element comprised in the fibre core of light amplification optical fiber 141.
In addition, in Figure 5, four are arranged to light amplification optical fiber 141 and excites LD, but excite the number of LD to be not particularly limited.
The signal that coupler 140 has been coupled through BPF138 amplifies light and the light path of exciting light carrying out self-excitation LD139A to 139D, and is incided light amplification optical fiber 141.
Light amplification optical fiber 141 has the structure same with light amplification optical fiber 136, is amplified light and exciting light by incoming signal, thus amplifying signal amplifies light and penetrates further.
In addition, below the light penetrated from light amplification optical fiber 141 is called output light.Export in light and comprise the amplification light of the signal after being amplified by light amplification optical fiber 136 and light amplification optical fiber 141 and bias light and be not used in the remaining exciting light (hereinafter referred to as residual excitation light) that signal amplifies the amplification of light and bias light.
Isolator 142 makes the output light penetrated from light amplification optical fiber 141 pass through, and cut-off is to the back light of light amplification optical fiber 141.
TAP connector 143 makes a part (the such as about 1%) bifurcated of the output light penetrated from light amplification optical fiber 141, and makes it incide optical filter 145.Remaining output light, by end cap 144, incides machining cell 113.
In addition, below, by by TAP connector 143 bifurcated and the output light inciding optical filter 145 is called sampled light.
End cap 144 in order to the output light high in peak power inject to air from optical fiber time, the damage (damage) preventing the boundary face between the cross section and air of optical fiber from producing and arranging.
Machining cell 113 is built-in with the processing optical system such as comprising f θ lens, scanning mirror, crack etc., the output illumination penetrated is mapped to workpiece 103, and in the enterprising line scanning of machined surface, is processed by workpiece 103 from LASER Light Source 111.
On the other hand, the sampled light inciding optical filter 145 is ended the light of the wavelength band of regulation by optical filter 145, and the light of the wavelength band being different from this wavelength band is passed through.More particularly, as mentioned above, in sampled light except signal amplifies light, bias light and residual excitation light is comprised.In addition, as mentioned above, signal amplifies the wavelength wavelength of light (=start) of light, such as in the scope of 1000 ~ 1100nm, the wavelength of exciting light is such as 915 ~ 975nm, and disconnected from each other.Therefore, optical filter 145 is made up of band pass filter and ND filter, the light of the wavelength band of band pass filter cut-off exciting light, and the light of wavelength band is in addition passed through, thus from sampled light, remove residual excitation light, ND filter adjustment light quantity.
In addition, band pass filter is such as made up of the optical filter of dielectric Vacuum Deposition.
The sampled light that have passed optical filter 145 incides optical detector 146.Optical detector 147 is such as made up of high speed PIN photodiode, opto-electronic conversion is carried out to the sampled light of incidence, generate the signal of telecommunication (hereinafter referred to as detection signal) based on the light quantity (intensity) of sampled light, and be supplied to the test section 166 of laser control system 112.
Laser control system 112 comprises drive control part 161, pulse generator 162, driver 163,164 and 165A to 165D and test section 166.
It is overall that drive control part 161 controls fiber laser device 101, makes to penetrate from LASER Light Source 111 signal meeting the condition (such as, signal amplifies the power, injection time etc. of light) provided from personal computer (PC) 103 and amplify light.More particularly, drive control part 161 amplifies the power (or intensity) of light and bias light based on the signal detected by test section 166, unified clamp-pulse generator 162, driver 164 and driver 165A to 165D, thus control the action of LASER Light Source 111.
Pulse generator 162, based on the control of drive control part 161, produces by the clock signal in the cycle of drive control part 161 instruction, and provides it to driver 163 and test section 166.
Driver 163 and the clock signal synchronization provided from pulse generator 162, modulate the drive current provided startup LD131.Then, drive current startup LD131 provided by modulation, thus the waveform of this drive current is reflected from the waveform starting the startup light that LD131 sends.In addition, consistent with the frequency of the clock signal provided from pulse generator 162 from the repetition rate starting the startup light that LD131 sends.
Driver 164, based on the control of drive control part 161, provides drive current to exciting LD134.Thus, LD134 is excited to send exciting light.
Driver 165A to 165D is set to separately and respectively excites LD139A to 139D corresponding respectively.Driver 165A to 165D, respectively based on the control of drive control part 161, provides drive current to the LD that excites of correspondence.Thus, excite LD139A to 139D to send exciting light separately.
Test section 166 is based on the detection signal provided from optical detector 146, and detection signal amplifies the power (or intensity) of light and bias light, and will represent that the signal of testing result is supplied to drive control part 161.In addition, test section 166 is based on the bias light detected, the exception of detection laser light source 111, when detecting abnormal, is supplied to drive control part 161 by rub-out signal.
In addition, monitor that relevant TAP connector 143, optical filter 145, optical detector 146 and test section 166 are referred to as monitoring unit 181 by with the output of LASER Light Source 111 below.
[structure example of test section 166]
Fig. 6 represents the structure example of test section 166.
Test section 166 comprises following and forms: pulse voltage translation circuit 201, amplifying circuit 202, Zener diode 203, amplifying circuit 204, multiplexer 205, signal processing part 206A, 206B, reference power supply 207, comparator 208, power supply 209 and switch 210.In addition, comparator 208 comprises clock circuit 221 and switch 222A, 222B.
In addition, for the action of each several part of test section 166, will carry out describing with reference to Fig. 7 and Fig. 8 below.
[export and monitor process]
Then, with reference to the flow chart of Fig. 7 and the oscillogram of Fig. 8, illustrate that the output performed by fiber laser device 101 monitors process.
In step sl, TAP connector 143 makes sampled light bifurcated.That is, TAP connector 143 will penetrate from light amplification optical fiber 141 and have passed a part (i.e. sampled light) bifurcated of the output light of isolator 142, thus makes it incide optical filter 145.
The waveform 2 of Fig. 8 represents the waveform of the sampled light after by TAP connector 143 bifurcated.In addition, in waveform 2, the part of undermost hollow represents the composition of residual excitation light, and oblique line portion represents the composition of bias light, and the pulse type part with peak value represents that signal amplifies the composition of light.
Signal amplifies light and transmits in LASER Light Source 111, therefore penetrates from light amplification optical fiber 141 than after the startup light delay stipulated time shown in waveform 1, and by optical filter 145.
Bias light amplifies light smooth variation than signal, before signal amplifies the output of light and after exporting, become the strongest.Wherein, bias light amplifies at signal in the output procedure of light and almost becomes 0.
Residual excitation light, when CW excites, amplifies with signal the intensity that light independently becomes almost certain.
In step s 2, optical filter 145 is from sampled light removing residual excitation light.That is, optical filter 145 ends the light of the wavelength band of exciting light in the sampled light of incidence, and the light of wavelength band is in addition passed through.Thus, from sampled light removing residual excitation light, the sampled light almost only comprising signal amplification light and bias light is incident to optical detector 146.
In step s3, optical detector 146 detects the intensity of sampled light.That is, the sampled light of incidence is carried out light-to-current inversion by optical detector 146, generates the detection signal be made up of the electric current of the light quantity (brightness) based on sampled light, and provides it to pulse voltage translation circuit 201.
In step s 4 which, the detection signal be made up of the electric current provided from optical detector 146 is transformed to voltage by pulse voltage translation circuit 201, and is supplied to amplifying circuit 202.
In step s 5, amplifying circuit 202 amplification detection signal.Amplifying circuit 202 is such as made up of high speed operation amplifier circuit, amplification detection signal, makes the level of detection signal become tractable value (such as, wave height value becomes a few volt).
Thus, the S/N ratio of such as detection signal and signal amplify light component is 10 relative to the ratio of bias light composition
3~ 10
4, therefore when detection signal be enlarged into wave height value become a few volt time, the signal level of the bias light composition of the detection signal after amplification becomes several millivolts.
The waveform 3 of Fig. 8 represents the waveform of the detection signal exported from amplifying circuit 202.Compared with waveform 2, eliminate the composition of residual excitation light, be only made up of the composition of signal amplification light and bias light.
In step s 6, detection signal bifurcated is two by test section 166, and limits a signal level.Specifically, be bifurcated into the signal of two same level from the detection signal of amplifying circuit 202 output, one of them is imported into multiplexer 205, and another is input to amplifying circuit 204 via Zener diode 203.
In addition, below the detection signal being input to multiplexer 205 is called flashlight detection signal, the detection signal being input to amplifying circuit 204 via Zener diode 203 is called bias light detection signal.
Bias light detection signal, before being input to amplifying circuit 204, is removed the composition of more than assigned voltage value by Zener diode 203.Thus, the bias light detection signal being input to amplifying circuit 204 is restricted to below the magnitude of voltage of regulation.In addition, the limits value of this voltage is such as set to the undersaturated level of magnitude of voltage when being amplified by amplifying circuit 204 by bias light detection signal.
In the step s 7, the bias light composition of amplifying circuit 204 amplification detection signal.Specifically, amplifying circuit 204 is such as made up of high speed operation amplifier amplifying circuit.In addition, the gain of amplifying circuit 204 is such as set to following value: the signal level of bias light composition is amplified to hundreds of millivolt ~ a few volt from several millivolts, even and if the intensity of bias light changes within the limits prescribed, the signal level of bias light composition also can not be saturated.Then, amplifying circuit 204, based on this gain, amplifies the bias light detection signal be transfused to, thus is supplied to multiplexer 205.
The waveform 4 of Fig. 8 represents the example of the waveform of the bias light detection signal exported from amplifying circuit 204.Compare with waveform 3, bias light composition is exaggerated, and signal amplifies voltage below the cut-off level L1 that light component is restricted to regulation.
In step s 8, multiplexer 205 extracts signal amplification light component and bias light composition from detection signal.
Specifically, the simulation multiplexer that multiplexer 205 is such as roughly the high speed of 20 nanoseconds below by responding ability is formed.The clock circuit 221 of the inside of multiplexer 205 according to the clock signal provided from pulse generator 162 namely for controlling the clock signal of the output of the startup light of self-starting LD131, the selection signal of production burst shape.
Then, during selection signal conduction, the switch 222A of the flashlight detection data side of multiplexer 205 is switched on, and the switch 222B of bias light detection data side is cut off.Thus, only output signal light detection signal from multiplexer 205, and be input to signal processing part 206A.
On the other hand, during selection signal is cut off, the switch 222A of the flashlight detection data side of multiplexer 205 is cut off, and the switch 222B of bias light detection data side is switched on.Thus, only export bias light detection signal from multiplexer 205, and be input to signal processing part 206B.
The waveform 5 of Fig. 8 represents the example of the waveform selecting signal, waveform 6 represents the example of the waveform being input to the flashlight detection signal of signal processing part 206A from multiplexer 205, and waveform 7 represents the example of the waveform being input to the bias light detection signal of signal processing part 206B from multiplexer 205.
Select signal after the 1st time of regulation, starting (conducting) the clock signal provided from pulse generator 162, after the 2nd time of regulation, terminate (cut-off).More particularly, the timing conducting that signal is delayed the time of delay of regulation sending the timing (timing of clock signal conducting) of startup light from startup LD131 is selected.Such as be set to the time (such as, if the total length of optical fiber is 10m, being then about for 30 nanoseconds) needed for the spread fiber of laser in LASER Light Source 111 this time of delay, or the time of official hour shorter in this time.
In addition, (select the pulse duration of signal) during selecting signal switched on and be set to the pulse duration of the drive singal starting LD131 (
start the pulse duration of light) identical, or than during the long official hour of this width.
Thus, output signal is reliably included in the conduction period selecting signal during amplifying light, as shown in waveform 6, amplifies the composition of light from flashlight detection with signal extraction signal.In addition, as shown in waveform 7, eliminate from bias light detection signal extraction the bias light composition that signal amplifies the composition of light.
In addition, below, the composition of light will be amplified with signal extraction signal from flashlight detection by multiplexer 205, and the signal being input to signal processing part 206A is called that flashlight extracts signal.In addition, below, by by multiplexer 205 from the composition of bias light detection with signal extraction bias light, and the signal being input to signal processing part 206B is called that bias light extracts signal.
Here, bias light extracts in signal the composition not comprising the bias light during selecting signal to be switched on.But, if bias light affect crudy be signal amplify the repetition rate of light low in, such as, when the repetition rate that signal amplifies light be below 50kHz and pulse duration is below 200 nanoseconds.Thus, select the duty ratio of signal about to become less than 1%.In addition, during signal is selected in conducting, during output signal amplifies light, bias light almost becomes 0.Thus compared with the composition of the bias light extracted when ending and selecting signal, selecting the composition of the bias light that can not extract during signal fully little in conducting, is insignificant degree.
In step s 9, signal processing part 206A, 206B carries out signal transacting.Specifically, flashlight is extracted signal smoothing by integrating circuit etc. by signal processing part 206A.The waveform 8 of Fig. 8 represents the waveform of the signal obtained by the flashlight of waveform 6 extraction signal smoothing.And, after the flashlight extraction signal after smoothing is carried out A/D conversion by signal processing part 206A, average with the laggard line time of suitable periodic sampling.The value (hereinafter referred to as flashlight detected value) that signal amplifies the time average of the power (or intensity) of light is corresponded to thereby, it is possible to detect.This flashlight detected value is supplied to drive control part 161 by signal processing part 206A.
In addition, bias light is extracted signal smoothing by integrating circuit etc. by signal processing part 206B.The waveform 9 of Fig. 8 represents the example of the waveform by the signal will obtained after the bias light of waveform 7 extraction signal smoothing.And, after the bias light extraction signal after smoothing is carried out A/D conversion by signal processing part 206B, average with the laggard line time of suitable periodic sampling, and obtained value is carried out division arithmetic with the gain of amplifying circuit 204.Thereby, it is possible to detect the value (hereinafter referred to as bias light detected value) of the time average of the power (or intensity) corresponding to bias light.This bias light detected value is supplied to drive control part 161 by signal processing part 206B.
And the bias light after smoothing is extracted signal and is supplied to comparator 208 by signal processing part 206B.
In step slo, comparator 208, based on the intensity of bias light, detects abnormal.Specifically, comparator 208 compares the magnitude of voltage that the bias light after the smoothing provided from signal processing part 206B extracts the magnitude of voltage of signal and the abnormality detection level L2 (Fig. 8) from reference power supply 207 input, when the magnitude of voltage that bias light extracts signal exceedes abnormality detection level L2, rub-out signal is exported to drive control part 161.
The waveform 10 of Fig. 8 represents that the bias light after the smoothing of waveform 9 extracts that signal is shown in dotted line to be passed like that, and when having exceeded abnormality detection level L2, the example of the waveform of the rub-out signal exported from comparator 208.
Such as, when long-time use LASER Light Source 111, there is the possibility becoming following state: when bias light significantly increases, start optical attenuation or stopping, the gain amplifier of light amplification optical fiber 136,141 is high.Now, there is generation light and gush, and damage the hidden danger of the optics of LASER Light Source 111.Thus comparator 208 monitors the intensity of bias light as described above, and when the intensity of bias light becomes more than threshold value output error signal.
In step s 11, drive control part 161, based on testing result, carries out output and controls.Namely, drive control part 161 is based on the flashlight detected value provided from signal processing part 206A, 206B and bias light detected value, unified clamp-pulse generator 162, driver 164 and driver 165A to 165D, thus the power of control signal amplification light and injection time etc.
In addition, drive control part 161 when have input rub-out signal from comparator 208, such as clamp-pulse generator 162, driver 164 and driver 165A to 165D, thus reduce export light power or stop export.Thereby, it is possible to the generation preventing light from gushing in advance and light gush the damage of the optics to LASER Light Source 111 caused.
The process of above step S1 to S11 proceeds in the course of work of fiber laser device 101.
As previously discussed, the signal that can comprise in the output light of detection fiber laser aid 101 in real time amplifies the power (or intensity) of light and bias light, and can improve its accuracy of detection.Thus, exporting under the low-repetition-frequency and highly excited condition being easily mixed into bias light in light, also can amplify the average power, pulse energy, peak power etc. of light by detection signal exactly, and based on this testing result, improve machining accuracy.Its result, even if the repetition rate of such as signal being amplified light is set as lower, also can be set as higher by machining energy.
In addition, monitoring unit 181 can be realized by the electronic equipment of the cheapness of standard specification, therefore, it is possible to realize low cost and small-sized size.Thus, can easily enroll fiber laser device 101.
In addition, as described above, can prevent light from gushing, the fault of LASER Light Source 111 can be prevented in advance.
[method of the supervision correction of monitoring unit 181]
Then, an example of the method that the supervision of monitoring unit 181 corrects is described.
The voltage of power supply 209, by switch 210 conducting of outside, is applied to clock circuit 221, thus can forces actuating switch 222A by multiplexer 205, and switch 222B is ended.Then, by continuous actuating switch 222A, can detect and comprise the power (or intensity) that signal amplifies the output light of light and bias light.
Further, based on the average power of the output light that the detected value (magnitude of voltage) of signal processing part 206A now measures with the power meter (not shown) generally arranged at fiber laser device 101, the corrected value of the dependency relation between the average power can obtaining the output light for representing detected value and the reality detected by signal processing part 206A.Then, this corrected value is such as stored in drive control part 161 or PC102, utilize the corrected value stored, can based on the flashlight detected value of signal processing part 206A, obtain the average power that signal amplifies light, or based on the bias light detected value of signal processing part 206B, obtain the average power of bias light.
[the removing method of the noise of monitoring unit 181]
Then, the removing method of the noise of monitoring unit 181 is described.
As mentioned above, be 10 because signal amplifies light with the S/N ratio of bias light
3~ 10
4, therefore in order to improve the accuracy of detection of bias light, the noise of removing monitoring unit 181 becomes important.
Here, the method for the impact of the noise of dark current for removing optical detector 146 and test section 166 is described.Such as, cut-off excites LD134 and excites LD139A to 139D, and the detected value (hereinafter referred to as corrected value) of signal processing part 206A when stopped the state of output exporting light and signal processing part 206B is stored in advance in such as drive control part 161 or PC102.Then, in the actual output exporting light, from the value that signal processing part 206A and signal processing part 206B detects, deducting the corrected value of storage, thus the impact of the dark current of optical detector 146 and the noise of test section 166 can be removed.
In addition, in monitoring unit 181, as mentioned above, utilize optical filter 145, from supervision light removing residual excitation light, thus the noise that residual excitation light causes can be removed.
<2. variation >
[variation 1]
In the above description, illustrate the example from signal processing part 206A and 206B, drive control part 161 being provided to digitized detected value, but also can provide the signal of telecommunication of the waveform 8 of such as Fig. 8 and the such simulation of waveform 9 to drive control part 161.
[variation 2]
In addition, in signal processing part 206A and signal processing part 206B, can according to object adjustment for calculating flashlight detected value and bias light detected value time the length of time averaging period.Such as, identify amplify the average power of light and bias light relative to the signal of the lasing condition set (repetition rate, exciting power etc.) time, expect to be set as long during (such as 100 milliseconds of degree).In addition, when the supervision value of the average power of signal being amplified light is used for the FEEDBACK CONTROL that stabilized lasers exports, expect to be set as shorter during (such as, about several milliseconds).
[variation 3]
And, also can by exchanging by before and after Zener diode 203 and the part of amplifying circuit 204 and the part of multiplexer 205 of dotted line in the test section 166 of Fig. 6.
[variation 4]
In addition, in figure 6, illustrate example signal processing part 206A and signal processing part 206B being divided into two, but also can be set to the structure that unification is.
[variation 5]
And, in the above description, illustrate detection signal and amplify light and the example both bias light, but as required, also only can detect one of them.In addition, when only detecting one, such as, light extraction signal and bias light extraction signal can only be outputed signal from multiplexer 205.Such as, and now, drive control part 161 only utilizes one in flashlight detected value and bias light detected value, the output carrying out fiber laser device 101 controls.
In addition, embodiments of the present invention are not limited to above-mentioned execution mode, can carry out various change without departing from the spirit and scope of the invention.
Claims (7)
1. a fiber laser device, the signal exported by being obtained by fiber amplifier by the startup light of pulse type amplifies light, it is characterized in that, comprising:
Furcation, by a part of bifurcated of laser penetrated from described optical fiber, thus extracts sampled light;
Photoelectric conversion department, carries out light-to-current inversion to described sampled light, generates the signal of telecommunication;
Extraction unit, extracts the described signal of telecommunication and extracts signal as the 1st comprising to export in during described signal amplifies the 1st during light, and during removing the described 1st the 2nd during in extract the described signal of telecommunication and extract signal as the 2nd; And
Output control part, according to the detected value based on described 1st extraction signal and based on the detected value of described 2nd extraction signal or according to the detected value extracting signal based on the described 2nd, controls the output of described fiber laser device.
2. fiber laser device as claimed in claim 1, is characterized in that,
Described extraction unit, according to the clock signal of the output of the described startup light for controlling self-starting light source, being extracted the described 1st and being extracted signal and described 2nd extraction signal.
3. fiber laser device as claimed in claim 2, is characterized in that,
From described clock signal is after the 1st time of regulation during described 1st, terminate after the 2nd time of regulation.
4. the fiber laser device as described in any one of claims 1 to 3, is characterized in that, also comprises:
Smoothing portion, extracts signal smoothing by the described 2nd; And
Wrong detection unit, when the described 2nd extraction signal after smoothing has exceeded the threshold value of regulation, output error signal.
5. the fiber laser device as described in any one of claims 1 to 3, is characterized in that,
The described signal of telecommunication is bifurcated into the 1st signal of telecommunication and the 2nd signal of telecommunication,
Described fiber laser device also comprises:
Limiting unit, limits the level of described 2nd signal of telecommunication; And
Enlarging section, confined described 2nd signal of amplification level,
Described extraction unit is extracted the described 1st from described 1st signal of telecommunication and is extracted signal, and described 2nd signal of telecommunication after being exaggerated extracts described 2nd extraction signal.
6. the fiber laser device as described in any one of claims 1 to 3, is characterized in that,
Also comprise removing unit, from described sampled light removing for amplifying the composition of the wavelength band of the exciting light of described startup light,
The described sampled light eliminating the composition of the wavelength band of described exciting light is carried out light-to-current inversion by described photoelectric conversion department.
7. export a supervision method, for fiber laser device, described fiber laser device exports the signal obtained by being amplified in optical fiber by the startup light of pulse type and amplifies light, and it is characterized in that, described output supervision method comprises the following steps:
By a part of bifurcated of laser penetrated from described optical fiber, extract sampled light;
Described sampled light light-to-current inversion is generated the signal of telecommunication;
Extract the described signal of telecommunication and extract signal as the 1st comprising to export in during described signal amplifies the 1st during light, and during removing the described 1st the 2nd during in extract the described signal of telecommunication and extract signal as the 2nd; And
According to the detected value based on described 1st extraction signal and based on the detected value of described 2nd extraction signal or according to the detected value extracting signal based on the described 2nd, control the output of described fiber laser device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011042532A JP5664913B2 (en) | 2011-02-28 | 2011-02-28 | Fiber laser device and output monitoring method |
| JP2011-042532 | 2011-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102651531A CN102651531A (en) | 2012-08-29 |
| CN102651531B true CN102651531B (en) | 2015-03-11 |
Family
ID=46693457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210018975.8A Expired - Fee Related CN102651531B (en) | 2011-02-28 | 2012-01-20 | Optical fiber laser device and output monitoring method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5664913B2 (en) |
| KR (1) | KR101367452B1 (en) |
| CN (1) | CN102651531B (en) |
| TW (1) | TWI488392B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101579558B1 (en) * | 2013-12-31 | 2015-12-22 | (주)엔에스 | Apparatus for sensing laser |
| WO2016002947A1 (en) | 2014-07-04 | 2016-01-07 | 古河電気工業株式会社 | Optical fiber laser device |
| JP6456250B2 (en) * | 2014-08-29 | 2019-01-23 | 三菱電機株式会社 | Laser apparatus and laser processing machine |
| CN106872027A (en) * | 2017-04-18 | 2017-06-20 | 中国电子科技集团公司第四十六研究所 | A kind of high-capacity optical fiber laser back-ray detection and its protection circuit |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05291648A (en) * | 1992-04-13 | 1993-11-05 | Toshiba Corp | Ase monitor |
| DE4340395C1 (en) * | 1993-11-26 | 1994-12-15 | Weidmueller Interface | Method for processing a workpiece by means of a laser beam |
| JP3353243B2 (en) * | 1995-03-08 | 2002-12-03 | 日本電信電話株式会社 | Noise figure measurement method |
| JPH09257575A (en) * | 1996-03-21 | 1997-10-03 | Toshiba Corp | Light frequency synchronous type detecting device |
| JP2000183434A (en) * | 1998-12-10 | 2000-06-30 | Nec Corp | Highly accurate light output monitor |
| JP2005150435A (en) * | 2003-11-17 | 2005-06-09 | Fujitsu Ltd | Optical amplifier and control method thereof |
| WO2005117215A1 (en) * | 2004-05-26 | 2005-12-08 | Mitsubishi Denki Kabushiki Kaisha | Optical amplifier and its gain controlling method |
| JP2007190566A (en) * | 2006-01-17 | 2007-08-02 | Miyachi Technos Corp | Fiber laser beam machining apparatus |
| JP2006322950A (en) * | 2006-08-07 | 2006-11-30 | Fujitsu Ltd | Method and instrument for measuring waveform of light signal |
| JP4612038B2 (en) * | 2007-11-19 | 2011-01-12 | 富士通株式会社 | Optical amplification device and optical transmission system |
| JP5260097B2 (en) * | 2008-03-18 | 2013-08-14 | ミヤチテクノス株式会社 | Laser processing equipment |
| JP5245854B2 (en) * | 2009-01-19 | 2013-07-24 | 富士通株式会社 | WDM optical amplifier |
| JP5026454B2 (en) * | 2009-03-18 | 2012-09-12 | アンリツ株式会社 | Optical signal monitoring device |
| JP5343722B2 (en) * | 2009-06-15 | 2013-11-13 | 富士通株式会社 | Optical amplifier and polarization dependent gain suppression method for optical amplifier |
-
2011
- 2011-02-28 JP JP2011042532A patent/JP5664913B2/en active Active
- 2011-12-27 TW TW100148760A patent/TWI488392B/en not_active IP Right Cessation
-
2012
- 2012-01-19 KR KR1020120006243A patent/KR101367452B1/en active IP Right Grant
- 2012-01-20 CN CN201210018975.8A patent/CN102651531B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| TWI488392B (en) | 2015-06-11 |
| TW201236288A (en) | 2012-09-01 |
| KR101367452B1 (en) | 2014-02-25 |
| CN102651531A (en) | 2012-08-29 |
| JP5664913B2 (en) | 2015-02-04 |
| JP2012182204A (en) | 2012-09-20 |
| KR20120098410A (en) | 2012-09-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9494484B2 (en) | In-service optical time domain reflectometry utilizing raman pump source | |
| EP0502283B1 (en) | Temperature distribution analyzer using optical fiber | |
| JP3203611B2 (en) | Noise figure measuring method and apparatus | |
| CN102651531B (en) | Optical fiber laser device and output monitoring method | |
| CN106451043A (en) | 200W nanosecond pulsed optical fiber laser system | |
| JP2008157859A (en) | Device for measuring optical fiber characteristic | |
| WO2013123003A2 (en) | Suppression of stimulated raman scattering | |
| JP2011064573A (en) | Device for detecting fault point of optical fiber | |
| EP1351046B1 (en) | Multi-path interference light measuring method and apparatus | |
| Motil et al. | High spatial resolution BOTDA using simultaneously launched gain and loss pump pulses | |
| Hu et al. | Stimulated Brillouin scattering threshold dependent on temporal characteristics in a kilowatt-peak-power, single-frequency nanosecond pulsed fiber amplifier | |
| JP4974774B2 (en) | Lightwave radar device | |
| JP2011064574A (en) | Device for analyzing polarization state of optical fiber | |
| JP3353243B2 (en) | Noise figure measurement method | |
| Savage-Leuchs et al. | High-pulse energy extraction with high peak power from short-pulse eye safe all-fiber laser system | |
| JP5189435B2 (en) | Optical pulse tester | |
| CN211042527U (en) | Brillouin optical time domain analyzer with high spatial resolution | |
| Wright et al. | A fiber-based master oscillator power amplifier laser transmitter for optical communications | |
| JP5678759B2 (en) | Distance measuring device | |
| Shi et al. | Power scaling for narrow linewidth C-band pulsed fiber lasers using a highly Er/Yb co-doped phosphate glass fiber | |
| Urricelqui et al. | Brillouin distributed sensing assisted by Brillouin amplification of pump pulses | |
| Marini et al. | Tunable lower-RIN Brillouin fiber ring laser for BOTDA sensing | |
| Galindez et al. | Integral temperature hybrid laser sensor | |
| Mermelstein | Gain-Switching, ASE Suppression and Efficiency Enhancement in a Low Repetition Rate Pulsed Yb-doped Fiber Amplifier | |
| CN116799606A (en) | BOTDR system based on active mode locking dual-wavelength fiber laser |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190215 Address after: Japan, Kyoto Kyoto South bird feathers on the tone of CHO 5 times Patentee after: Towa Corporation Address before: Kyoto Japan Patentee before: Omron Corporation |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150311 Termination date: 20210120 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |