CN102645788B - Array substrate - Google Patents

Array substrate Download PDF

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Publication number
CN102645788B
CN102645788B CN201110152260.7A CN201110152260A CN102645788B CN 102645788 B CN102645788 B CN 102645788B CN 201110152260 A CN201110152260 A CN 201110152260A CN 102645788 B CN102645788 B CN 102645788B
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CN
China
Prior art keywords
teg
rete
structural sheet
staircase structure
array base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110152260.7A
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Chinese (zh)
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CN102645788A (en
Inventor
吴松
张南红
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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Application filed by BOE Technology Group Co Ltd, Hefei Xinsheng Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201110152260.7A priority Critical patent/CN102645788B/en
Publication of CN102645788A publication Critical patent/CN102645788A/en
Application granted granted Critical
Publication of CN102645788B publication Critical patent/CN102645788B/en
Expired - Fee Related legal-status Critical Current
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Abstract

The invention provides an array substrate. A staircase structure for reducing damages on friction cloth is formed on the upper surface of the array substrate; the staircase structure can be a test element group TEG with a staircase-shaped edge; or the staircase structure also can be formed by the TEG and at least one structure layer on the array substrate, and also can be formed by at least two structure layers on the array substrate, wherein a pre-set distances is reserved between adjacent edges of the two adjacent structure layers, and a pre-set distance is reserved between adjacent structure layers of the TEG and the adjacent edges of the TEG; and the pre-set distances are safe distances which do not cause damages on the friction cloth. The array substrate utilizes the staircase structure to reduce the damages on the friction cloth caused by the TEG on the substrate in the prior art, so that not only can the occurrence rate of poor friction be reduced, but also the service life of the friction cloth is prolonged and the production cost is saved.

Description

A kind of array base palte
Technical field
The present invention relates to panel of LCD manufacturing technology field, be specifically related to a kind of array base palte.
Background technology
Liquid crystal display (LCD) controls by controlling sense of rotation and the angle of liquid crystal molecule the light quantity that penetrates liquid crystal layer, thereby the image that shows various gray scales, therefore in liquid crystal display, must there is the evenly oriented layer of orientation of one deck, thereby guarantee that liquid crystal molecule is evenly distributed.
In the manufacture method of various liquid crystal display oriented layers, rubbing manipulation (Rubbing) is the method for commonly using the most.Adopt the manufacture method of rubbing manipulation manufacture liquid crystal display oriented layer as follows:
Array (Array) substrate that has applied oriented layer is placed on base station, has been wound around friction cloth on roller, and with substrate contacts and high-speed rotation, thereby base station moves the friction treatment realizing monoblock substrate to a direction simultaneously.Oriented layer on substrate, after such friction treatment, has formed uniform microflute, has had the ability of directional crystal molecule.
In prior art, the edge of crystal liquid substrate oriented layer can arrange testing element group (TEG, Test Element Group), Fig. 1 is the sectional view of TEG edge designs in prior art, as seen from Figure 1, the first metal layer 11, the edge of the second metal level 12 and the 3rd metal level 13 is substantially on a perpendicular line, the edge gradient forming is very precipitous, while adopting the substrate of this edge shape to rub, friction cloth directly contacts with substrate, when friction, the edge of TEG can bring damage to friction cloth, use can not guarantee that with the produced oriented layer of friction cloth of damage liquid crystal molecule is evenly distributed, and then affect liquid crystal display effect.
Summary of the invention
The invention provides a kind of array base palte, to solve when the manufacture of liquid crystal display oriented layer, substrate edges easily produces the problem of damage to friction cloth.
A kind of array base palte provided by the invention, is formed with for reducing the staircase structure to the damage of friction cloth at this array base palte upper surface.
Concrete, described staircase structure is formed by testing element group TEG, this TEG comprises at least two independent retes and at least one covering rete, it is stepped that at least one group of adjacent independent rete one end indentation is from bottom to up formed with, and the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped.
Concrete, described staircase structure can be for having the structural sheet of identical rete with TEG, this structural sheet comprises at least two independent retes and at least one covering rete, at least one group of adjacent independent rete one end indentation is from bottom to up formed with stepped, the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped, between this structural sheet and TEG, have setpoint distance, described setpoint distance is not for causing the safe distance of damage to friction cloth.
Concrete, described staircase structure can form at least one structural sheet on TEG and this array base palte, the thickness of each structural sheet is different and change according to the distance from TEG, less with the thickness of TEG spacing structural sheet far away, and between the neighboring edge of two adjacent structural sheets, have setpoint distance between the structural sheet adjacent with TEG and the neighboring edge of TEG, described setpoint distance is not for causing the safe distance of damage to friction cloth.
Concrete, described staircase structure can form at least two structural sheets on this array base palte, the thickness of each structural sheet is different and change according to the distance from TEG, less with the thickness of TEG spacing structural sheet far away, the structural sheet adjacent with TEG and TEG have identical rete, and between the neighboring edge of two adjacent structural sheets, have setpoint distance between the structural sheet adjacent with TEG and the neighboring edge of TEG, described setpoint distance is not for causing the safe distance of damage to friction cloth.
In such scheme, described staircase structure can also be for having the structural sheet of identical rete with TEG, this structural sheet comprises at least two independent retes and at least one covering rete, it is stepped that at least one group of adjacent independent rete one end indentation is from bottom to up formed with, and the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped.
Described setpoint distance is greater than the alignment precision of exposure machine, and is less than friction cloth wool fibre diameter.
The length of the platform of described structural sheet upper end is greater than friction cloth wool fibre diameter.
The present invention is formed with for reducing the staircase structure to the damage of friction cloth at array base palte upper surface, reduced the damage that in prior art, on substrate, TEG produces friction cloth, not only reduced the bad incidence that rubs, and save production cost the serviceable life of prolongation friction cloth.
Accompanying drawing explanation
Fig. 1 is the diagrammatic cross-section of TEG edge designs in prior art;
Fig. 2 is the TEG edge designs diagrammatic cross-section described in the embodiment of the present invention one;
Fig. 3 is the TEG edge designs diagrammatic cross-section described in the embodiment of the present invention two;
Fig. 4 is the TEG edge designs diagrammatic cross-section described in the embodiment of the present invention three;
Fig. 5 is the TEG edge designs diagrammatic cross-section described in the embodiment of the present invention four.
Embodiment
Array base palte provided by the invention, is formed with for reducing the staircase structure to the damage of friction cloth at this array base palte upper surface, thereby reduces the damage to friction cloth in friction process.
As the first embodiment, described staircase structure is formed by testing element group TEG, forming edge is stair-stepping TEG, this TEG comprises at least two independent retes and at least one covering rete, it is stepped that at least one group of adjacent independent rete one end indentation is from bottom to up formed with, and the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped.
For example, shown in Figure 2, first layer metal thin layer 21 is to the second layer metal thin layer 22 formation staircase structure of successively decreasing step by step to one end of three-layer metal or transparent electrode thin film layer 23 again, TEG edge has also formed stepped, the TEG rete gradient is reduced, thereby can reduce the damage to friction cloth.
In addition, as the second embodiment, described staircase structure can not be to be formed by TEG, but new formation is positioned at the array of structures substrate on this liquid crystal display substrate, described staircase structure is to have the structural sheet of identical rete with TEG, this structural sheet comprises at least two independent retes and at least one covering rete, wherein, at least one group of adjacent independent rete one end indentation from bottom to up forms stepped, the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped, between this structural sheet and TEG, there is setpoint distance, described setpoint distance is not for causing the safe distance of damage to friction cloth.
For example, shown in Figure 3, certain distance outside TEG34 edge, with a structural sheet 30 that there is identical rete with TEG, form staircase structures, the included independent rete of this structural sheet is first layer metal thin layer 31, second layer metal thin layer 32 and three-layer metal or transparent electrode thin film layer 33 one end step by step indentation form staircase structure, the edge that corresponding each metal level of covering rete of this structural sheet periphery forms one end of staircase structure has also formed stepped, structural sheet 30 has identical rete with TEG, and the distance between TEG 34 and structural sheet 30 neighboring edges can't cause damage to friction cloth, so both can reduce the damage to friction cloth, to TEG self, can not impact yet.In this example, the setpoint distance between this structural sheet 30 and TEG34 refers to the length between the platform right-hand member of structural sheet 30 upper ends and the left end of TEG34 upper end platform.
Each structural sheet can also have the rete not identical with TEG, no matter but whether rete is identical, the thickness of each structural sheet can according to from TEG between distance different and change, less with the thickness of TEG spacing structural sheet far away, so also can form staircase structure.
As the 3rd embodiment, described staircase structure can form at least one structural sheet on TEG and this array base palte, the thickness of each structural sheet is different and change according to the distance from TEG, less with the thickness of TEG spacing structural sheet far away, and between the neighboring edge of two adjacent structural sheets, have setpoint distance between the structural sheet adjacent with TEG and the neighboring edge of TEG, described setpoint distance is not for causing the safe distance of damage to friction cloth.
Illustrate, as shown in Figure 4, certain distance outside TEG 43 edges, with the structural sheet 40 that has different retes from TEG 43, form staircase structures, the rete of structural sheet 40 is rete 42, and the rete of TEG 43 is rete 41, the thickness of the Thickness Ratio TEG 43 of structural sheet 40 is little, and the distance between TEG 43 and structural sheet 40 neighboring edges can't cause damage to friction cloth, so both can reduce the damage to friction cloth, to TEG self, also can not impact.In this example, the setpoint distance between this structural sheet 40 and TEG43 refers to the length between the platform right-hand member of structural sheet 40 upper ends and the left end of TEG43 upper end platform.
As the 4th embodiment, described staircase structure can form at least two structural sheets on this array base palte, the thickness of each structural sheet is different and change according to the distance from TEG, less with the thickness of TEG spacing structural sheet far away, the structural sheet adjacent with TEG and TEG have identical rete, and between the neighboring edge of two adjacent structural sheets, have setpoint distance between the structural sheet adjacent with TEG and the neighboring edge of TEG, described setpoint distance is not for causing the safe distance of damage to friction cloth.
In above-mentioned the 4th embodiment, the described structural sheet adjacent with TEG itself also can form staircase structure, be that described staircase structure can also be for having the structural sheet of identical rete with TEG, this structural sheet comprises at least two independent retes and at least one covering rete, it is stepped that at least one group of adjacent independent rete one end indentation is from bottom to up formed with, and the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped.
As shown in Figure 5, TEG 50 has first layer metal thin layer 51, second layer metal thin layer 52 and three-layer metal or transparent electrode thin film layer 53.TEG 50 and the first structural sheet 56 and the second structural sheet 55 form staircase structure, the rete of the first structural sheet 56 is rete 54, it has identical rete with TEG50, itself be also staircase structure, the thickness of the Thickness Ratio TEG 50 of the second structural sheet 55 is little, and the distance between TEG50 and the first structural sheet 56 neighboring edges, distance between the first structural sheet 56 and the second structural sheet 55 neighboring edges can't cause damage to friction cloth, so both can reduce the damage to friction cloth, and to TEG self, also can not impact.
In addition, in the embodiment of the present invention, to forming the ladder number of staircase structure, do not limit, as long as form staircase structure.
It should be noted that, in the forming process of pattern, the precision of pattern is main relevant with the precision of exposure machine, so the edge relation of the aligning accuracy of exposure machine and each rete is very large.If structural sheet and TEG are adjacent, two Edge Distances are less than or equal to aligning accuracy, and structural sheet and TEG just may connect together.Therefore, in the above-described embodiments, described setpoint distance need to be greater than the alignment precision of exposure machine.
Meanwhile, also require described setpoint distance (correspondence) to be less than friction cloth wool fibre diameter, the length (left and right is to size) of the platform of described structural sheet upper end is greater than friction cloth wool fibre diameter, to reduce the damage to friction cloth.
Therefore, no matter adopt several structural sheets and TEG to form staircase structure, between adjacent structural sheet, and the structural sheet adjacent with TEG and the setpoint distance between TEG need to be greater than the alignment precision of exposure machine, and be less than friction cloth wool fibre diameter.And when structural sheet is ladder, in structural sheet, the length of each platform is greater than friction cloth wool fibre diameter.
The present invention utilizes staircase structure can reduce the damage that in prior art, on substrate, TEG produces friction cloth, has not only reduced the bad incidence that rubs, and has extended the serviceable life of friction cloth, saves production cost.
Obviously, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the present invention.Like this, if within of the present invention these are revised and modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.

Claims (8)

1. an array base palte, it is characterized in that, at this array base palte upper surface, be formed with for reducing the staircase structure to friction cloth damage, described staircase structure be by testing element group TEG formed, described staircase structure is that at least one structural sheet on TEG and this array base palte forms or described staircase structure is that at least two structural sheets on this array base palte form for having the structural sheet of identical rete, described staircase structure with TEG;
In described staircase structure, be while being formed by testing element group TEG, this TEG comprises at least two independent retes and at least one covering rete;
In described staircase structure, be at least two structural sheets on this array base palte while forming, the thickness of each structural sheet is different and change according to the distance from TEG, less with the thickness of TEG spacing structural sheet far away.
2. array base palte according to claim 1, it is characterized in that, described staircase structure is formed by testing element group TEG, this TEG comprises at least two independent retes and at least one covering rete, it is stepped that at least one group of adjacent independent rete one end indentation is from bottom to up formed with, and the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped.
3. array base palte according to claim 1, it is characterized in that, described staircase structure is to have the structural sheet of identical rete with TEG, this structural sheet comprises at least two independent retes and at least one covering rete, at least one group of adjacent independent rete one end indentation is from bottom to up formed with stepped, the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped, between this structural sheet and TEG, have setpoint distance, described setpoint distance is not for causing the safe distance of damage to friction cloth.
4. array base palte according to claim 1, it is characterized in that, described staircase structure is that at least one structural sheet on TEG and this array base palte forms, the thickness of each structural sheet is different and change according to the distance from TEG, less with the thickness of TEG spacing structural sheet far away, and between the neighboring edge of two adjacent structural sheets, have setpoint distance between the structural sheet adjacent with TEG and the neighboring edge of TEG, described setpoint distance is not for causing the safe distance of damage to friction cloth.
5. array base palte according to claim 1, it is characterized in that, described staircase structure is that at least two structural sheets on this array base palte form, the thickness of each structural sheet is different and change according to the distance from TEG, less with the thickness of TEG spacing structural sheet far away, the structural sheet adjacent with TEG and TEG have identical rete, and between the neighboring edge of two adjacent structural sheets, have setpoint distance between the structural sheet adjacent with TEG and the neighboring edge of TEG, described setpoint distance is not for causing the safe distance of damage to friction cloth.
6. array base palte according to claim 5, it is characterized in that, described staircase structure is to have the structural sheet of identical rete with TEG, this structural sheet comprises at least two independent retes and at least one covering rete, it is stepped that at least one group of adjacent independent rete one end indentation is from bottom to up formed with, and the stepped place of the outside corresponding independent rete of covering rete one end also forms stepped.
7. according to the array base palte described in any one in claim 3~6, it is characterized in that, described setpoint distance is greater than the alignment precision of exposure machine, and is less than friction cloth wool fibre diameter.
8. according to the array base palte described in any one in claim 3~6, it is characterized in that, the length of the platform of described structural sheet upper end is greater than friction cloth wool fibre diameter.
CN201110152260.7A 2011-06-08 2011-06-08 Array substrate Expired - Fee Related CN102645788B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9349753B2 (en) 2014-02-24 2016-05-24 Boe Technology Group Co., Ltd. Array substrate, method for producing the same and display apparatus
CN105511144A (en) * 2016-01-27 2016-04-20 京东方科技集团股份有限公司 Display substrate, display panel and display device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003215600A (en) * 2002-01-23 2003-07-30 Matsushita Electric Ind Co Ltd Liquid crystal panel and its production method
CN1519628A (en) * 2003-02-05 2004-08-11 Nec液晶技术株式会社 LCD device and its mfg.method
KR20070069923A (en) * 2005-12-28 2007-07-03 엘지.필립스 엘시디 주식회사 Liquid crystal display device for preventin rubbing defect
KR20080057784A (en) * 2006-12-21 2008-06-25 삼성전자주식회사 Orientation film printing apparatus and method of manufacturing mother substrate for display apparatus using the same
JP2009025596A (en) * 2007-07-20 2009-02-05 Mitsubishi Electric Corp Liquid crystal display panel and manufacturing method of same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100710149B1 (en) * 2000-12-28 2007-04-20 엘지.필립스 엘시디 주식회사 Liquid Crystal Display Device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003215600A (en) * 2002-01-23 2003-07-30 Matsushita Electric Ind Co Ltd Liquid crystal panel and its production method
CN1519628A (en) * 2003-02-05 2004-08-11 Nec液晶技术株式会社 LCD device and its mfg.method
KR20070069923A (en) * 2005-12-28 2007-07-03 엘지.필립스 엘시디 주식회사 Liquid crystal display device for preventin rubbing defect
KR20080057784A (en) * 2006-12-21 2008-06-25 삼성전자주식회사 Orientation film printing apparatus and method of manufacturing mother substrate for display apparatus using the same
JP2009025596A (en) * 2007-07-20 2009-02-05 Mitsubishi Electric Corp Liquid crystal display panel and manufacturing method of same

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