CN102642822A - Method for separating metal-type and semiconductor-type single-walled carbon nanotube arrays - Google Patents

Method for separating metal-type and semiconductor-type single-walled carbon nanotube arrays Download PDF

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CN102642822A
CN102642822A CN2011100414520A CN201110041452A CN102642822A CN 102642822 A CN102642822 A CN 102642822A CN 2011100414520 A CN2011100414520 A CN 2011100414520A CN 201110041452 A CN201110041452 A CN 201110041452A CN 102642822 A CN102642822 A CN 102642822A
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adhesive tape
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walled carbon
phenyl
carbon nanotube
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CN102642822B (en
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张锦
洪果
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Peking University
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Abstract

The invention discloses a method for separating metal-type and semiconductor-type single-walled carbon nanotube arrays. The method comprises the following steps: placing an amino functionalization adhesive tape or a phenyl functionalization adhesive tape on the surfaces of the metal-type and semiconductor-type single-walled carbon nanotube arrays located on a substrate, and pressurizing to obtain a metal-type or semiconductor-type single-walled carbon nanotube array on the substrate to complete the separation. The separation method is applied to separating a single-walled carbon nanotube with a length of hundreds of micrometers, and simultaneously maintaining the feature of the single-walled carbon nanotube well without damaging the type of the required single-walled carbon nanotube. For a sample processed by the amino functionalization adhesive tape, the content of the metal-type single-walled carbon nanotube is 90%; and for a sample processed by the phenyl functionalization adhesive tape, the content of the semiconductor-type single-walled carbon nanotube is 85%. The method provided by the invention is simple to operate, low in cost, applicable to separating the single-walled carbon nanotube array with a large area and wide in application prospect.

Description

The method of a kind of SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array
Technical field
The present invention relates to the method for a kind of SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array.
Background technology
SWCN has important use and is worth with its excellent performance in nanoelectronics.Yet the various growth methods of SWCN can only obtain the mixture of metal mold and semi-conductor type, and this has influenced the practical application of SWCN to a great extent.Up to the present, the separation method of SWCN roughly can be divided into selective destruction and solution and is separated two big types.Though these two class methods can both realize the high efficiency separation of SWCN; But the former can introduce SWCN inevitably and destroy, and the latter then only is applicable to the SWCN of several microns left and right sides length and is difficult to control the pattern that separates the back SWCN.
Summary of the invention
The method that the purpose of this invention is to provide a kind of SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array.
Amino functional adhesive tape provided by the invention is made up of supporting layer and the tack coat that is positioned on the said supporting layer; The material that constitutes said supporting layer is a polydimethyl silane; The material that constitutes said tack coat is an aminosilane.
In the above-mentioned amino functional adhesive tape, said aminosilane is selected from least a in 3-aminopropyl triethoxysilane, N-aminoethyl-3-aminopropyl triethoxysilane and the 3-TSL 8330, preferred 3-aminopropyl triethoxysilane; The thickness of said amino functional adhesive tape is 1-5mm, preferred 2.5mm.
The method of the said amino functional adhesive tape of preparation provided by the invention; Comprise the steps: the polydimethyl Silan-based Thin Films is bombarded with oxygen plasma; Bombard in the ethanolic soln that is placed on aminosilane that finishes and soak; Immersion finishes and uses washing with alcohol, obtains said amino functional adhesive tape after in air, drying naturally.
In this method, said aminosilane is selected from least a in 3-aminopropyl triethoxysilane, N-aminoethyl-3-aminopropyl triethoxysilane and the 3-TSL 8330, preferred 3-aminopropyl triethoxysilane.Phenyl functionalization adhesive tape provided by the invention is made up of supporting layer and the tack coat that is positioned on the said supporting layer; The material that constitutes said supporting layer is a polydimethyl silane; The material that constitutes said tack coat is a phenyl silane.
In the above-mentioned phenyl functionalization adhesive tape, said phenyl silane is selected from least a in triethoxyphenylsilan, phenmethyl triethoxyl silane and the phenyltrimethoxysila,e, preferred triethoxyphenylsilan; The thickness of said phenyl functionalization adhesive tape is 1-5mm, preferred 2.5mm.
The method of the said phenyl functionalization of preparation provided by the invention adhesive tape; Comprise the steps: the polydimethyl Silan-based Thin Films is bombarded with oxygen plasma; Bombard in the ethanolic soln that is placed on phenyl silane that finishes and soak; Immersion finishes and uses washing with alcohol, obtains said phenyl functionalization adhesive tape after in air, drying naturally.
In this method, the thickness of said polydimethyl Silan-based Thin Films is the 1-5 millimeter, preferred 2.5 millimeters; In the said implant steps, vacuum tightness is 10 -2Pa, air flow quantity is 12-18sccm, preferred 15sccm; Power is 80-90W, preferred 90W, and the time is 1-15 minute; Said phenyl silane is selected from least a in oxygen base phenyl silane, phenmethyl triethoxyl silane and the phenyltrimethoxysila,e, preferred triethoxyphenylsilan.In addition; In above-mentioned amino functional adhesive tape and the phenyl functionalization adhesive tape; As the polydimethyl silane of support layer material (being called for short PDMS) can (desired raw material matrix silicone elastomer (staple is an octamethylcyclotetrasiloxane) and solidifying agent (staple is four (trimethylsiloxy) silane) be all available from Dow CorningCorporation about the specification sheets of PDMS preparation according to Dow Corning Corporation; Midland Michigan USA, PIN are SYLGARD 184) preparation get.This preparation method is an ordinary method; As can and get by the preparation of the method that comprises the steps: microslide is put into the 100ml beaker, successively ultrapure water, acetone, ethanol, ultrapure water, in ultrasonic 10min, in baking oven 120 ℃ slide glass and beaker dried and be cooled to room temperature after; With silicone elastomer and solidifying agent according to certain mass than mixing in the beaker of pouring oven dry into; Leave standstill 1h after stirring 20min, slowly be poured into the slide surface of oven dry then, and in baking oven, toasted 1 hour; Obtain the polydimethyl Silan-based Thin Films, thickness is 2.5mm.In this method, the mass ratio of silicone elastomer and solidifying agent can be 9: 1-11: 1, and preferred 10: 1; In the baking procedure, temperature is 80-150 ℃, and preferred 90 ℃, the time is 10-90 minute, preferred 60 minutes.
The method of SEPARATION OF GOLD genotype provided by the invention and semi-conductor type single-walled carbon nano tube array; Comprise the steps: said amino functional adhesive tape is placed the surface that is positioned at suprabasil said metal mold and semi-conductor type single-walled carbon nano tube array; After the pressurization; In said substrate, obtain the metal single-wall carbon nano pipe array, accomplish the method for said SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array;
Perhaps; Said phenyl functionalization adhesive tape is placed the surface that is positioned at suprabasil said metal mold and semi-conductor type single-walled carbon nano tube array; After the pressurization; In said substrate, obtain the semi-conductor type single-walled carbon nano tube array, accomplish the method for said SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array.
The principle of above-mentioned separation method is as shown in Figure 1, and Fig. 2 is amino functional adhesive tape provided by the invention and phenyl functionalization adhesive tape.Peculiar amino functional group on the amino functional adhesive tape can the selective adsorption semi-conductor type single-walled carbon nano tube, and the phenyl functional group on the phenyl functionalization adhesive tape, can selective adsorption metal single-wall carbon nanotube.In the said pressurization step, pressure is 10-30N, preferred 20N, and the time is 1-5 minute, preferred 2 minutes; In the said single-wall carbon nanotube array, the length of SWCN is the 1-500 micron, preferably is the 50-400 micron, more preferably is 200 microns; Said substrate all is selected from least a in aluminum oxide and the quartz, preferred aluminum oxide.
Separation method provided by the invention is applicable to the various SWCNs that separate hundreds of microns length, the pattern of maintenance SWCN that simultaneously can be fabulous, and can not destroy the type of needed SWCN.Through the sample after the processing of amino functional adhesive tape, the content of metal single-wall carbon nanotube is 90%; Through the sample after the processing of phenyl functionalization adhesive tape, the content of semi-conductor type single-walled carbon nano tube is 85%.In addition, separation method provided by the invention, simple to operate, with low cost, be applicable to the separation of large-area single-wall carbon nanotube array, have broad application prospects.
Description of drawings
Fig. 1 is the principle schematic of SEPARATION OF GOLD genotype of the present invention and semi-conductor type single-walled carbon nano tube array, and wherein, 1 is the metal single-wall carbon nanotube, and 2 is semi-conductor type single-walled carbon nano tube, and 3 is phenyl functionalization adhesive tape, and 4 is the amino functional adhesive tape.
Fig. 2 is the structural representation of amino functional adhesive tape used in the present invention (A) and phenyl functionalization adhesive tape (B); Among Fig. 2 A and the B, 1 is supporting layer polydimethyl silylation layer, and 2 are the hydroxyl functional group layer that belongs to a supporting layer part, and 3 are tack coat aminosilane layer, and 4 are substrate.
Fig. 3 separates the operation chart that obtains the metal single-wall carbon nano pipe array for the present invention uses the amino functional adhesive tape, and the sem of the array that obtains, AFM, and microcell resonance strengthens the characterization result of Raman spectrum; Wherein, 1 is the amino functional adhesive tape, and 2 is the primary sample zone, and 3 is borderline region, and 4 for handling rear region, and 5 is the SWCN sample.
Fig. 4 separates the operation chart that obtains the semi-conductor type single-walled carbon nano tube array for the present invention uses phenyl functionalization adhesive tape, and the sem of the array that obtains, AFM, and microcell resonance strengthens the characterization result of Raman spectrum; Wherein, 1 is phenyl functionalization adhesive tape, and 2 is the primary sample zone, and 3 is borderline region, and 4 for handling rear region, and 5 is the SWCN sample.
Fig. 5 strengthens the characterization result of Raman spectrum for the present invention uses the microcell resonance of the metal single-wall carbon nano pipe array that the amino functional adhesive tape obtains under different separation conditions.
Fig. 6 strengthens the characterization result of Raman spectrum for the present invention uses the microcell resonance of the semi-conductor type single-walled carbon nano tube array that phenyl functionalization adhesive tape obtains under different separation conditions.
The metal mold that Fig. 7 obtains under optimum separation condition for the present invention and the electrical properties of semi-conductor type single-walled carbon nano tube array are measured characterization result.
Embodiment
Below in conjunction with specific embodiment the present invention is done further elaboration, but the present invention is not limited to following examples.Said method is ordinary method if no special instructions.Used material, reagent etc. like no specified otherwise, all can obtain from commercial sources among the following embodiment.
Embodiment 1, preparation amino functional and phenyl functionalization adhesive tape
1) microslide is put into the 100ml beaker; Successively ultrapure water, acetone, ethanol, ultrapure water, in ultrasonic 10min; In baking oven 120 ℃ with after the oven dry of slide glass and beaker and being cooled to room temperature, silicone elastomer (staple is an octamethylcyclotetrasiloxane) and solidifying agent (staple be (four (trimethylsiloxy) silane)) are poured according to mass ratio at 10: 1 in the beaker of oven dry and are mixed, leave standstill 1h behind the stirring 20min; Slowly be poured into the slide surface of oven dry then; And in baking oven 90 ℃ the baking 1h, obtain polydimethyl Silan-based Thin Films as supporting layer, thickness is 2.5mm.
2) step 1) is prepared gained polydimethyl Silan-based Thin Films and peel off from slide glass, what will contact with slide glass one faces up and is positioned in the plasma clean machine, and system is evacuated to vacuum, and (vacuum tightness is 10 -2Pa) and keep the air flow quantity of 15sccm, make oxygen plasma bombard above-mentioned polydimethyl Silan-based Thin Films surface and bombard 10 minutes respectively with the power of 90W after, take out subsequent use;
3) ethanolic soln of the certain density 3-aminopropyl triethoxysilane of configuration and the ethanolic soln of certain density triethoxyphenylsilan; With step 2) preparation gained film was soaked in respectively in above-mentioned two solution each 10 minutes; All use the alcohol flushing film surface after the taking-up; In air, dry naturally, promptly obtain amino functional adhesive tape provided by the invention and phenyl functionalization adhesive tape respectively by the ethanolic soln of above-mentioned 3-aminopropyl triethoxysilane and the ethanolic soln of triethoxyphenylsilan respectively; Above-mentioned two kinds of adhesive tapes are formed by supporting layer and the tack coat that is positioned on this supporting layer, and the thickness of two adhesive tapes is 2.5mm; Wherein, the material that constitutes this supporting layer is that thickness is the polydimethyl Silan-based Thin Films of 2.5mm, and the material that constitutes this tack coat is respectively 3-aminopropyl triethoxysilane and triethoxyphenylsilan.
Above-mentioned steps 2) and in the step 3); Carry out oxygen plasma bombardment and solution soaking according to table 1 column data; Gained amino and the equal number consecutively of phenyl functionalization adhesive tape are 0,1,2,3,4,5 and 6; The gained optimal conditions is: for the amino functional adhesive tape be: the oxygen plasma bombardment time is that the mass percentage concentration of the ethanolic soln of 10min, aminosilane is 20%, and preparation gained amino functional adhesive tape is numbered 4 under this optimal conditions; For phenyl functionalization adhesive tape be: the oxygen plasma bombardment time is that the mass percentage concentration of the ethanolic soln of 10min, phenyl silane is 10%, and preparation gained phenyl functionalization adhesive tape is numbered 3 under this optimal conditions.Can know; Amino functional adhesive tape adhesive tape will obviously be better than phenyl functionalization adhesive tape adhesive tape to the adhesive power of SWCN; The original single-wall carbon nanotube array sample rate that amino functional adhesive tape adhesive tape is acted on is 10/um, phenyl functionalization adhesive tape adhesive tape then be 2/um.
Table 1, bombardment time and the tabulation of soaking solution concentration value
The plasma bombardment time (min) ?0 1 5 10 10 15 15
The concentration of the ethanolic soln of aminosilane (mass percentage concentration %) ?0 1 10 10 20 20 30
The concentration of the ethanolic soln of phenyl silane (mass percentage concentration %) ?0 1 10 10 20 20 30
6 kinds of amino functional adhesive tapes of his-and-hers watches 1 gained and 6 kinds of phenyl functionalization adhesive tapes carry out Electronic Speculum and Raman spectrum sign, gained result such as Fig. 5 and shown in Figure 6.Wherein, sem characterization result such as Fig. 5 A are shown in the 6A; Under different preparation conditions; Two kinds of adhesive tapes all make the density of single-wall carbon nanotube array that variation has in various degree taken place, and trend all is to increase afterwards earlier and reduce that (wherein, this variable density is to measure according to following method to calculate and get: adopt sem regional and characterize through functionalization adhesive tape processing rear region to primary sample; Can obtain the SWCN density in two zones respectively; If the primary sample areal concentration is A, handling rear region density through the functionalization adhesive tape is B, and then variable density is (A-B)/A); Microcell resonance strengthens Raman spectrum characterization result such as Fig. 5 B; Shown in the 6B; Under different preparation conditions; Two kinds of adhesive tapes make that all variation in various degree (the annular data are taken to the primary sample zone among the figure, and triangle number is handled rear region according to being taken to) has taken place the content of metal mold and semi-conductor type single-walled carbon nano tube in the single-wall carbon nanotube array, and the variable density of trend and single-wall carbon nanotube array is consistent.
Embodiment 2, SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array
The amino functional adhesive tape that embodiment 1 preparation institute call number is followed successively by 1-6 places and is arranged in lip-deep metal mold of alumina substrate and semi-conductor type single-walled carbon nano tube array (length of this array SWCN is 200 microns) surface; After applying the pressure effect 2min of 20N; This amino functional adhesive tape meeting selective attachment semi-conductor type single-walled carbon nano tube; Thereby; Obtain the metal single-wall carbon nano pipe array at this alumina base basal surface, accomplish the separation of two types of single-wall carbon nanotube arrays.
According to last identical method; The amino functional adhesive tape that only numbering is followed successively by 1-6 replaces with the phenyl functionalization adhesive tape that numbering is followed successively by 1-6; Can be by phenyl functionalization adhesive tape selective attachment metal single-wall carbon nanotube; Thereby, obtain the semi-conductor type single-walled carbon nano tube array at this alumina base basal surface, accomplish the separation of two types of single-wall carbon nanotube arrays.
Be the isolating effect of convenient sign; In above-mentioned sepn process; Adhesive tape only contact as sample be positioned at the half the of lip-deep metal mold of alumina substrate and semi-conductor type single-walled carbon nano tube array, half that stays not contact done contrast and characterized, this working method is shown in Fig. 3 A and Fig. 4 A.
Metal mold and semi-conductor type single-walled carbon nano tube array to obtaining carries out sem, AFM, microcell resonance strengthens Raman spectrum and electrical properties is measured sign, and the gained result is following.
The sem characterization result of the metal single-wall carbon nano pipe array that use amino functional adhesive tape obtains is shown in Fig. 3 B; Single-wall carbon nanotube array after treatment; Obvious variation has taken place in its density, explains that a large amount of SWCNs is removed by adhesive tape.AFM characterization result such as Fig. 3 C, shown in the 3D, wherein 3C is taken to the primary sample zone, and 3D is taken to the processing rear region.Except that observing obvious variable density, the pattern of single-wall carbon nanotube array obtains very fabulous maintenance.Microcell resonance strengthens Raman spectrum characterization result such as Fig. 3 E, and shown in the 3F, wherein 3E is taken to the primary sample zone, and 3F is taken to the processing rear region.Learn that from Raman spectrum data use the amino functional adhesive tape to carry out the separation of SWCN, the content of metal single-wall carbon nanotube is improved significantly on alumina substrate.
The sem characterization result of the semi-conductor type single-walled carbon nano tube array that use phenyl functionalization adhesive tape obtains is shown in Fig. 4 B; Single-wall carbon nanotube array after treatment; Obvious variation has taken place in its density equally, explains that a large amount of SWCNs is removed by adhesive tape.AFM characterization result such as Fig. 4 C, shown in the 4D, wherein 4C is taken to the primary sample zone, and 4D is taken to the processing rear region.Similar with amino functional adhesive tape result, except that observing obvious variable density, the pattern of single-wall carbon nanotube array obtains very fabulous maintenance.Microcell resonance strengthens Raman spectrum characterization result such as Fig. 4 E, and shown in the 4F, wherein 4E is taken to the primary sample zone, and 4F is taken to the processing rear region.Learn from Raman spectrum data, use the amino functional adhesive tape to carry out the separation of SWCN, be improved significantly at the content of alumina substrate semiconductor-on-insulator type SWCN.
Separate the metal mold and the semi-conductor type single-walled carbon nano tube array that obtain with the phenyl functionalization adhesive tape that is numbered 3 and transfer to respectively on the silicon base with 800nm thick silicon dioxide zone of oxidation being numbered 4 amino functional adhesive tape by embodiment 1 preparation gained respectively; Utilize electron beam exposure and hot vapor deposition that SWCN is prepared into field-effect transistor structure and carry out the electrical properties measurement, the gained result is as shown in Figure 7.Among Fig. 7, on-off ratio is conducting state strength of current I ONTo closing off-state strength of current I OFFRatio, frequency is the radical of respective switch than following SWCN; Shown in Fig. 7 A; Through metal single-wall content of carbon nanotubes in the single-wall carbon nanotube array after the processing of amino functional adhesive tape is 90%; Shown in Fig. 7 B, be 85% through semi-conductor type single-walled carbon nano tube content in the single-wall carbon nanotube array after the processing of phenyl functionalization adhesive tape.
Among this embodiment, the metal mold of the sample that is used as and semi-conductor type single-walled carbon nano tube array are to get according to following method preparation:
1) cleaning of substrate: select the growth substrate of amino functional adhesive tape face (11-20) alumina single crystal sheet for use, be cut to 0.4 * 0.6cm as single-wall carbon nanotube array 2The small pieces (the 0.6cm limit is parallel to [1-100] direction) of size, ultrasonic 10min in ultrapure water, acetone, ethanol, ultrapure water, concentrated hydrochloric acid successively, and then with ultrapure water rinsing 5 times repeatedly.Substrate front surface after cleaning is placed on the filter paper up, and 170 ℃ of oven dry perhaps dry up with high pure nitrogen in baking oven.
2) annealing of substrate: retort furnace is put in the substrate that step 1) obtains, in air, carried out high temperature annealing.Temperature programmed control 1h is warming up to 1100 ℃ from room temperature, and under this temperature constant temperature 8h, then 10h be cooled to 300 ℃ more naturally the cooling be cooled to room temperature, for use.
3) in step 2) contain the Fe (OH) of 3mmol/L in the substrate that obtains with the rotating speed spin coating of 2000r/s 3The colloidal ethanolic soln is as catalyzer, and the spin coating time is 1min.Repeating step 2) once, the catalyzer to institute's spin coating carries out oxide treatment.
4) substrate that has catalyzer of step 3) preparation is put into the silica tube of low-pressure chemical vapor deposition system and made the 0.6cm limit be parallel to air flow line.System is evacuated to vacuum (8*10 -2Torr.), feed high-purity Ar again and make system air pressure rise to 700torr., keep this pressure then and make system be warming up to 850 ℃ from room temperature.
5) under 850 ℃, feed 2200sccmAr and 500sccm H 2Mixed gas 5min with reducing catalyst.Keeping this Ar and H 2Under the situation of flow unchanged, feed 50sccm amino functional adhesive tape r and take ethanol out of to the ethanol jar and be used for growing single-wall carbon nano tube, growth time is 5min.
6) close the Ar that feeds in the ethanol jar growth response is finished, close amino functional adhesive tape r and H simultaneously 2Mixed gas and vacuumize (8*10 -2Torr.).Charge into argon gas and make system return to normal pressure and be cooled to room temperature naturally, the taking-up sample obtains metal mold and semi-conductor type single-walled carbon nano tube array, and the length of SWCN is 200 microns in this array.

Claims (10)

1. an amino functional adhesive tape is made up of supporting layer and the tack coat that is positioned on the said supporting layer; The material that constitutes said supporting layer is a polydimethyl silane; The material that constitutes said tack coat is an aminosilane.
2. adhesive tape according to claim 1; It is characterized in that: said aminosilane is selected from least a in 3-aminopropyl triethoxysilane, N-aminoethyl-3-aminopropyl triethoxysilane and the 3-TSL 8330, preferred 3-aminopropyl triethoxysilane; The thickness of said amino functional adhesive tape is 1-5mm, preferred 2.5mm.
3. method for preparing claim 1 or 2 said amino functional adhesive tapes; Comprise the steps: the polydimethyl Silan-based Thin Films is bombarded with oxygen plasma; Bombard in the ethanolic soln that is placed on aminosilane that finishes and soak; Immersion finishes and uses washing with alcohol, obtains said amino functional adhesive tape after in air, drying naturally.
4. method according to claim 3 is characterized in that: the thickness of said polydimethyl Silan-based Thin Films is the 1-5 millimeter, preferred 2.5 millimeters; In the said implant steps, vacuum tightness is 10 -2Pa, air flow quantity is 12-18sccm, preferred 15sccm, power is 80-90W, preferred 90W, the time is 1-15 minute; Said aminosilane is selected from least a in 3-aminopropyl triethoxysilane, N-aminoethyl-3-aminopropyl triethoxysilane and the 3-TSL 8330, preferred 3-aminopropyl triethoxysilane.
5. a phenyl functionalization adhesive tape is made up of supporting layer and the tack coat that is positioned on the said supporting layer; The material that constitutes said supporting layer is a polydimethyl silane; The material that constitutes said tack coat is a phenyl silane.
6. adhesive tape according to claim 5 is characterized in that: said phenyl silane is selected from least a in triethoxyphenylsilan, phenmethyl triethoxyl silane and the phenyltrimethoxysila,e, preferred triethoxyphenylsilan; The thickness of said phenyl functionalization adhesive tape is 1-5mm, preferred 2.5mm.
7. method for preparing claim 5 or 6 said phenyl functionalization adhesive tapes; Comprise the steps: the polydimethyl Silan-based Thin Films is bombarded with oxygen plasma; Bombard in the ethanolic soln that is placed on phenyl silane that finishes and soak; Immersion finishes and uses washing with alcohol, obtains said phenyl functionalization adhesive tape after in air, drying naturally.
8. method according to claim 7 is characterized in that: the thickness of said polydimethyl Silan-based Thin Films is the 1-5 millimeter, preferred 2.5 millimeters; In the said implant steps, vacuum tightness is 10 -2Pa, air flow quantity is 12-18sccm, preferred 15sccm, power is 80-90W, preferred 90W, the time is 1-15 minute; Said phenyl silane is selected from least a in triethoxyphenylsilan, phenmethyl triethoxyl silane and the phenyltrimethoxysila,e, preferred triethoxyphenylsilan.
9. the method for SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array; Comprise the steps: claim 1 or 2 arbitrary said amino functional adhesive tapes are placed the surface that is positioned at suprabasil said metal mold and semi-conductor type single-walled carbon nano tube array; After the pressurization; In said substrate, obtain the metal single-wall carbon nano pipe array, accomplish the method for said SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array;
Perhaps; Claim 5 or 6 arbitrary said phenyl functionalization adhesive tapes are placed the surface that is positioned at suprabasil said metal mold and semi-conductor type single-walled carbon nano tube array; After the pressurization; In said substrate, obtain the semi-conductor type single-walled carbon nano tube array, accomplish the method for said SEPARATION OF GOLD genotype and semi-conductor type single-walled carbon nano tube array.
10. method according to claim 9 is characterized in that: in the said pressurization step, pressure is 10-30N, preferred 20N, and the time is 1-5 minute, preferred 2 minutes; In the said single-wall carbon nanotube array, the length of SWCN is the 1-500 micron, preferably is the 50-400 micron, more preferably is 200 microns; Said substrate all is selected from least a in aluminum oxide and the quartz, preferred aluminum oxide.
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CN107235482A (en) * 2016-03-28 2017-10-10 中国科学院苏州纳米技术与纳米仿生研究所 The preparation method of single-walled carbon nanotube of the clean surface without dispersant
CN110734053A (en) * 2019-10-14 2020-01-31 深圳烯湾科技有限公司 Method for producing carbon nanotube and carbon nanotube fiber
CN113484469A (en) * 2021-06-30 2021-10-08 中国科学院青海盐湖研究所 In-situ characterization method for nano-scale phase separation of phase change energy storage material of hydrated salt system

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