CN102629642A - Flocked face preparation method for preventing black grains from being produced on anti-reflection flocked face of solar cell - Google Patents
Flocked face preparation method for preventing black grains from being produced on anti-reflection flocked face of solar cell Download PDFInfo
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- CN102629642A CN102629642A CN2012101083572A CN201210108357A CN102629642A CN 102629642 A CN102629642 A CN 102629642A CN 2012101083572 A CN2012101083572 A CN 2012101083572A CN 201210108357 A CN201210108357 A CN 201210108357A CN 102629642 A CN102629642 A CN 102629642A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention relates to a flocked face preparation method for preventing black grains from being produced on anti-reflection flocked face of a solar cell in the field of processing of the solar cell. The method comprises the following steps of: performing anti-reflection flocked face preparation on a silicon wafer in a silicon wafer carrying box in a solution tank holding mixed solution; and cleaning. Thus, the problem of production of the black grains can be effectively solved in a process of preparing the anti-reflection flocked face on the surface of the silicon wafer of the solar cell, and the influence of the black grains on the conversion efficiency of the solar cell is avoided.
Description
[technical field]
The present invention relates to the solar cell manufacture field, especially relate to a kind of preparation method that when preparation solar battery antireflective matte, can avoid the black line of matte generation.
[background technology]
Known; In the process flow of manufacturing solar cells; Because the preparation of the first road cleaning and texturing operation antireflective matte can directly influence uniformity, the uniformity of phosphorosilicate glass layer thickness, the uniformity of silicon nitride film and the quality of printing and sintering of diffusion square resistance; Therefore, cleaning and texturing belongs to one important procedure that solar cell is made flow process; At present, preparation antireflective matte generally is to adopt wet method groove type making herbs into wool, promptly utilizes silicon chip Carrier box that mechanical arm will be equipped with solar energy-level silicon wafer to put into corresponding solution tank groove successively and operates, thereby accomplish the preparation of silicon chip antireflective matte;
Yet; In long-term practical operation, but find; Silicon chip in the silicon chip Carrier box must be mentioned the silicon chip Carrier box and be put in the flushed channel silicon chip is washed, but change in the process of groove at this after in the solution tank of depositing HF and HN03 mixed solution, being accomplished the preparation of antireflective matte by mechanical arm; The mixed solution that is attached to the solar energy-level silicon wafer surface can be glided by the influence of gravity along silicon chip surface, and in the process that glides, continues silicon chip is reacted; Because the mixed solution on solar energy-level silicon wafer surface distributed pole in the process that glides is inhomogeneous and be attended by exothermic reaction; This very easily causes the local surfaces reaction time of solar energy-level silicon wafer to prolong and temperature raises; Thereby local surfaces reaction excessive erosion phenomenon takes place; Cause producing black line, and then greatly reduce the conversion efficiency of solar cell;
For solving the problem that reduces conversion efficiency of solar cell because of black line, existing way is to transform as follows to the mechanical arm in the wet method groove type etching device; One, reduces the time that mixed solution contacts with silicon chip surface through the gait of march of when changing groove, accelerating mechanical arm when gliding, thereby avoid the generation of black line with the generation probability that reduces silicon chip surface reaction excessive erosion; But this way not only can increase the degree of wear of mechanical arm and reduce the stability of operation when using, and it can only reduce the generation of black line, but can not eradicate black line; Two, on mechanical arm, install shower additional, thereby utilize shower in changing the groove process, the silicon chip in the silicon chip Carrier box to be sprayed, avoid mixed solution and silicon chip surface to react, thereby stop the generation of black line; Yet the water that this way but can cause spraying out splashes what the mixed solution of silicon chip surface impacted everywhere, thereby very easily causes the equipment unit of periphery to be corroded, and not only can influence the useful life of equipment when serious, but also can cause security incident.
[summary of the invention]
In order to overcome the deficiency in the background technology; The invention discloses the matte preparation method that a kind of anti-solar battery antireflective matte produces black line; Use described preparation method when in solar cell cleaning and texturing operation, preparing silicon chip antireflective matte; Can in the operation for preparing silicon chip of solar cell surface antireflective matte, effectively solve the generation of black line, thereby avoid the conversion efficiency of solar cell to receive the influence of deceiving line.
For realizing the foregoing invention purpose, the present invention adopts following technical scheme:
A kind of anti-solar battery antireflective matte produces the matte preparation method of black line, and described method step is following:
A. HF and the mixed mixed solution temperature of HN03 are controlled at 6～8 degree;
B. after treating to input to mixed solution in the solution tank, the silicon chip Carrier box that utilizes the mechanical arm handle to be placed with silicon chip is put into the mixed solution of solution tank, the interior silicon chip of silicon chip Carrier box is soaked in carries out the preparation of antireflective matte in the mixed solution;
C. preparation finishes, and opens the liquid outlet that is provided with at the solution tank bottom land, and the mixed solution in the solution tank is discharged;
D. airtight liquid outlet after the mixed solution in the solution tank has been arranged utilizes spray equipment the silicon chip in the silicon chip Carrier box in the solution tank to be sprayed the mixed solution that remains in silicon chip surface to wash away then;
E. spray finishes, and opens the liquid outlet that is provided with at the solution tank bottom land, and the water liquid in the solution tank is discharged;
F. treat that the water liquid in the solution tank arrange airtight liquid outlet afterwards, the silicon chip Carrier box that utilizes mechanical arm will be placed with silicon chip extracts solution tank and carries out subsequent handling.
Described anti-solar battery antireflective matte produces the matte preparation method of black line; Described method is through in the container of placing mixed solution, settling cooling water coil; And the cooling water water yield that in cooling water coil, circulates and introduce according to the adjustment of mixed solution, thereby the temperature of mixed solution is controlled at 6～8 degree.
Described anti-solar battery antireflective matte produces the matte preparation method of black line, is carrying out the antireflective matte when preparing in the said method, and the silicon chip in the silicon chip Carrier box need be immersed in the mixed solution 2～5 minutes.
Described anti-solar battery antireflective matte produces the matte preparation method of black line, and when washing away the mixed solution that remains in silicon chip surface, spray equipment need spray 1～3 minute silicon chip in the said method.
Described anti-solar battery antireflective matte produces the matte preparation method of black line, and the spray equipment of using said method is the shower that is installed on the solution tank groove cover plate, and in the corresponding silicon chip Carrier box box that the shower tube head is provided with the nozzle of silicon chip.
Described anti-solar battery antireflective matte produces the matte preparation method of black line, and what spray out in the said method is the pure water of 18M Ω.
Described anti-solar battery antireflective matte produces the matte preparation method of black line; The solution tank bottom land of using said method is provided with a liquid outlet that is used for discharging by turns mixed solution and shower water liquid, or is provided with corresponding respectively mixed solution and the liquid outlet of discharging shower water liquid of discharging.
Described anti-solar battery antireflective matte produces the matte preparation method of black line, and the liquid outlet that is used to discharge mixed solution or shower water liquid in the said method is provided with pneumatic operated valve.
Described anti-solar battery antireflective matte produces the matte preparation method of black line, and the mixed solution of discharging in the said method can recycle.
Because adopt aforesaid technical scheme, the present invention has following beneficial effect:
When using the matte preparation method of the black line of described anti-solar battery antireflective matte generation when in solar cell cleaning and texturing operation, preparing silicon chip antireflective matte; Can not transform mechanical arm and not change under the overall situation prerequisite of existing silicon chip of solar cell surface antireflective matte preparation section; Effectively solve the problem that black line when preparation antireflective matte, occurs, promptly described method can solve the problem that reduces conversion efficiency of solar cell because of black line.
[embodiment]
Can explain the present invention in more detail through following embodiment, open the object of the invention is intended to protect all variations and the improvement in the scope of the invention, and the present invention is not limited to following embodiment;
When implementing the matte preparation method of the black line of described anti-solar battery antireflective matte generation, step is following:
A, in placing the container of mixed solution, settle cooling water coil, the cooling water water yield that in cooling water coil, circulate and introduce according to the adjustment of mixed solution is then spent thereby the temperature of HF and the mixed mixed solution of HN03 is controlled at 6～8;
B, treat to input to mixed solution in the solution tank after; Utilize mechanical arm to put into the silicon chip Carrier box that is placed with silicon chip the mixed solution of solution tank; And let silicon chip in the silicon chip Carrier box be immersed in the mixed solution 4 minutes, promptly the chemical reaction through mixed solution and silicon chip surface generation prepares the antireflective matte;
C, after preparation accomplish to finish, open the liquid outlet that is provided with at the solution tank bottom land, the mixed solution in the solution tank groove is discharged;
D, after the mixed solution in the solution tank groove has been arranged airtight liquid outlet; Utilize then and be installed in the shower on the solution tank groove cover plate; And in the corresponding silicon chip Carrier box box that the shower tube head is provided with the nozzle of silicon chip to the pure water of silicon chip spray 18M Ω 3 minutes; Thereby the impulse force that utilizes spray will remain in the mixed solution of silicon chip surface and wash away, and promptly avoid mixed solution and silicon chip surface to continue reaction, prevent the generation of black line;
E, when spray finishes, open the liquid outlet that is provided with at the solution tank bottom land, the water liquid that accumulates in behind the spray in the solution tank is discharged;
F, treat that the water liquid in the solution tank arrange airtight liquid outlet afterwards, the silicon chip Carrier box that utilizes mechanical arm will be placed with silicon chip extracts solution tank, carries out the corresponding subsequent operation then.
As required, when the described method of operation, can a liquid outlet that be used for discharging by turns mixed solution and shower water liquid be set, or two corresponding respectively mixed solution and liquid outlets of discharging shower water liquid of discharging are set at the solution tank bottom land; Discharge mixed solution and shower water liquid for ease of control, the liquid outlet that is used to discharge mixed solution or shower water liquid is provided with the pneumatic operated valve that can control folding; In addition, the mixed solution of being discharged by solution tank can cycling and reutilization, thereby has reached the purpose of resource reutilization, for the user provides cost savings.
The present invention does not detail part for prior art, so the present invention does not detail it.
Claims (9)
1. an anti-solar battery antireflective matte produces the matte preparation method who deceives line, and it is characterized in that: described method step is following:
A, HF and the mixed mixed solution temperature of HN03 are controlled at 6～8 degree;
B, treat to input to mixed solution in the solution tank after, utilize mechanical arm to put into the mixed solution of solution tank to the silicon chip Carrier box that is placed with silicon chip, silicon chip in the silicon chip Carrier box is soaked in carries out the preparation of antireflective matte in the mixed solution;
C, preparation finish, and open the liquid outlet that is provided with at the solution tank bottom land, and the mixed solution in the solution tank is discharged;
D, after the mixed solution in the solution tank has been arranged airtight liquid outlet, utilize spray equipment the silicon chip in the silicon chip Carrier box in the solution tank to be sprayed the mixed solution that remains in silicon chip surface to wash away then;
E, spray finish, and open the liquid outlet that is provided with at the solution tank bottom land, and the water liquid in the solution tank is discharged;
F, treat that the water liquid in the solution tank arrange airtight liquid outlet afterwards, the silicon chip Carrier box that utilizes mechanical arm will be placed with silicon chip extracts solution tank and carries out subsequent handling.
2. anti-solar battery antireflective matte according to claim 1 produces the matte preparation method of black line; It is characterized in that: described method is through in the container of placing mixed solution, settling cooling water coil; And the cooling water water yield that in cooling water coil, circulates and introduce according to the adjustment of mixed solution, thereby the temperature of mixed solution is controlled at 6～8 degree.
3. anti-solar battery antireflective matte according to claim 1 produces the matte preparation method of black line, it is characterized in that: carrying out the antireflective matte when preparing in the said method, the silicon chip in the silicon chip Carrier box need be immersed in the mixed solution 2～5 minutes.
4. anti-solar battery antireflective matte according to claim 1 produces the matte preparation method of black line, and it is characterized in that: when washing away the mixed solution that remains in silicon chip surface, spray equipment need spray 1～3 minute silicon chip in the said method.
5. produce the matte preparation method who deceives line according to claim 1 or 4 described anti-solar battery antireflective mattes; It is characterized in that: the spray equipment of using said method is the shower that is installed on the solution tank groove cover plate, and in the corresponding silicon chip Carrier box box that the shower tube head is provided with the nozzle of silicon chip.
6. produce the matte preparation method who deceives line according to claim 1 or 4 described anti-solar battery antireflective mattes, it is characterized in that: what spray out in the said method is the pure water of 18M Ω.
7. anti-solar battery antireflective matte according to claim 1 produces the matte preparation method of black line; It is characterized in that: the solution tank bottom land of using said method is provided with a liquid outlet that is used for discharging by turns mixed solution and shower water liquid, or is respectively arranged with the liquid outlet that is used to discharge mixed solution and discharge shower water liquid.
8. produce the matte preparation method who deceives line according to claim 1 or 7 described anti-solar battery antireflective mattes, it is characterized in that: described liquid outlet is provided with pneumatic operated valve.
9. anti-solar battery antireflective matte according to claim 1 produces the matte preparation method of black line, and it is characterized in that: the mixed solution of discharging in the said method can recycle.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101083572A CN102629642A (en) | 2012-04-13 | 2012-04-13 | Flocked face preparation method for preventing black grains from being produced on anti-reflection flocked face of solar cell |
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| CN2012101083572A CN102629642A (en) | 2012-04-13 | 2012-04-13 | Flocked face preparation method for preventing black grains from being produced on anti-reflection flocked face of solar cell |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201376997Y (en) * | 2009-02-27 | 2010-01-06 | 深圳市捷佳创精密设备有限公司 | Silicon material acid etching comprehensive treatment device |
| WO2012002212A1 (en) * | 2010-06-29 | 2012-01-05 | 三洋電機株式会社 | Method for manufacturing semiconductor device and substrate cassette used therefor |
| CN102330156A (en) * | 2011-08-12 | 2012-01-25 | 无锡尚品太阳能电力科技有限公司 | Polycrystalline silicon etching solution in solar cell and polycrystalline silicon etching process |
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- 2012-04-13 CN CN2012101083572A patent/CN102629642A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201376997Y (en) * | 2009-02-27 | 2010-01-06 | 深圳市捷佳创精密设备有限公司 | Silicon material acid etching comprehensive treatment device |
| WO2012002212A1 (en) * | 2010-06-29 | 2012-01-05 | 三洋電機株式会社 | Method for manufacturing semiconductor device and substrate cassette used therefor |
| CN102330156A (en) * | 2011-08-12 | 2012-01-25 | 无锡尚品太阳能电力科技有限公司 | Polycrystalline silicon etching solution in solar cell and polycrystalline silicon etching process |
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Application publication date: 20120808 |