CN102628791A - Three-dimensional controllable mobile bench of X-ray scatterometer and light scatterometer imaging plate detector - Google Patents
Three-dimensional controllable mobile bench of X-ray scatterometer and light scatterometer imaging plate detector Download PDFInfo
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- CN102628791A CN102628791A CN2012100746484A CN201210074648A CN102628791A CN 102628791 A CN102628791 A CN 102628791A CN 2012100746484 A CN2012100746484 A CN 2012100746484A CN 201210074648 A CN201210074648 A CN 201210074648A CN 102628791 A CN102628791 A CN 102628791A
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Abstract
The invention discloses a three-dimensional controllable mobile bench of an X-ray scatterometer and light scatterometer imaging plate detector. The mobile bench is characterized in that the mobile station comprises a pedestal, a dovetail slide carriage, a lifting table, a translation table, a right angle block, and an imaging plate fixer; the dovetail slide carriage is arranged on the upper portion of the pedestal, the pedestal is provided with a dovetail boss which is provided with scales, and the dovetail boss slidingly fits with the dovetail of the dovetail slide carriage; the top of the dovetail slide carriage is fixedly connected with the lifting table; the top of the lifting table is fixedly connected with the translation table; and the table surface of the translation table is fixedly provided with the right angle block, and the side wall of the right angle block is fixedly connected with the imaging plate fixer. The mobile bench which is an accessory of a small angle X-ray scatterometer or a light scatterometer has the advantages of compact and reasonable structure, convenient and fast imaging plate mounting and dismounting, easy correction, and accurately adjustable distance between the imaging plate and a fixed sample, so the mobile bench can be accurately adjusted according to different measure ranges of the sample to obtain required data and improve the analytic precision.
Description
Technical field
The present invention relates to the three-dimensional controlled transfer table of a kind of X-ray scattering appearance and light scattering apparatus imaging plate detecting device; Be the annex that on x-ray diffractometer or light scattering instrument, uses, utilize position that this transfer table can adjust detecting device easily with the observation that realizes the different structure size with realize synchronous SAXS/WAXS function.
Background technology
When utilizing two-dimensional x-ray scatterometer or light scattering apparatus to measure, its observation structure range of size is decided by the distance of sample and detecting device and the area of detection of detecting device.With the small angle X ray scattering appearance is the example explanation; There is following shortcoming in imaging plate (Image Plate) for (the for example wide-angle scatter detector part of Rigaku SMax3000 scatterometer) in the small angle X ray scattering of detecting device (SAXS) instrument at present: 1, observation of range is narrow; Very restricted, even middle angle (middle angle) X-ray scattering experimental requirements also is difficult to satisfy; 2, because the fixed distance of sample and detecting device, and little, the sample stage that are difficult to be implemented in different sizes are tested with the two-dimentional wide-angle under annex (for example, hot platform, drawing stand or the like) situation, and are as shown in Figure 1.In addition, if in the small angle X ray scattering appearance, realize synchronous SAXS/WAXS, need the Load/Lock device of special-purpose imaging plate detecting device, its shortcoming is that to occupy the space big, the fixed distance of sample and detecting device, and promptly sensing range is fixed.
Summary of the invention
The three-dimensional controlled transfer table that the purpose of this invention is to provide a kind of X-ray scattering appearance and light scattering apparatus imaging plate detecting device; This controlled transfer table can be installed in being placed on the sample chamber of X-ray diffractometer easily; To reach various requirement of experiment; In the little angle of Rigaku x-ray diffractometer (SMax3000) system, when surveying wide-angle X-ray scattering (WAXS), can be according to requirement of experiment; Regulate the distance between sample and the wide-angle detecting device easily, thereby reach the requirement of experiment of different structure size observation scope.
The three-dimensional controlled transfer table of a kind of X-ray scattering appearance provided by the present invention and light scattering apparatus imaging plate detecting device comprises base, dovetail groove slide, lifting table, translation stage, right angle block and imaging plate fixator;
Said dovetail groove slide is located at the top of said base, and said base is provided with the dovetail boss, and said dovetail boss is provided with scale, and the dovetail groove of said dovetail boss and said dovetail groove slide is slidingly matched; The top of said dovetail groove slide is fixedly connected with said lifting table; The top of said lifting table is fixedly connected with said translation stage; Be installed with said right angle block on the table top of said translation stage, the sidewall of said right angle block is fixedly connected with said imaging plate fixator.
In the above-mentioned three-dimensional controlled transfer table, can be provided with scale on the said dovetail boss, can said dovetail groove slide moved forward and backward on said dovetail boss, to confirm suitable position according to scale.
In the above-mentioned three-dimensional controlled transfer table, said base and said dovetail groove slide can carry out secure fit through bolt.
In the above-mentioned three-dimensional controlled transfer table, said base is provided with at least one mounting hole, thereby can said transfer table be fixed in the sample chamber of X-ray diffractometer or light scattering apparatus through bolt.
In the above-mentioned three-dimensional controlled transfer table, said lifting table all can be connected through bolt with translation stage with said dovetail groove slide.
In the above-mentioned three-dimensional controlled transfer table, said right angle block all can be connected through bolt with the imaging plate fixator with said translation stage.
During Installation and Debugging controlled transfer table provided by the invention, can regulate the distance between sample and the detecting device through the dovetail groove slide rail, and make X ray obtain complete two-dimensional scattering figure through the center of imaging plate through regulating lifting table and translation stage; It is local at imaging plate perhaps to regulate the X ray beam center, uses the imaging version to amplify, and enlarges observation scope.
Controlled transfer table provided by the invention is the annex of small angle X ray scattering appearance or light scattering apparatus; Its compact conformation, reasonable, the loading and unloading imaging plate is convenient, fast, is easy to proofread and correct; Make between imaging plate and the fixed sample apart from accurate and adjustable; Thereby can accurately adjust to sample different measuring scope, obtaining desired data, and improve analysis precision; Utilize the present invention, its effective wide-angle X-ray scattering (WAXS) observation scope can be modulated by original 8-50 degree to the 2-65 degree, angle X-ray scattering experimental requirements in can satisfying; In addition; Original WAXS/SAXS required Load/Lock device (like Fig. 1 (c)) synchronously in the alternative Rigaku SMax3000 diffractometer system; And it is limited to be improved as lab space, and the required shortcomings such as expense of synchronous WAXS/SAXS device are fixed and saved to the wide-angle sensing range.
Description of drawings
Fig. 1 is the little angle of X ray/wide-angle diffraction appearance overall schematic; Wherein Fig. 1 (a) is the little angle of X ray/wide-angle diffraction appearance structure diagram; Fig. 1 (b) is the little angle of X ray/wide-angle diffraction appearance index path, and Fig. 1 (c) is the little angle of X ray/wide-angle diffraction appearance wide-angle imaging plate loading/reading device.
Fig. 2 is the front view of the little angle of X ray/wide-angle diffraction appearance with the three-dimensional adjustable control platform of detecting device.
Fig. 3 is the right view of the little angle of X ray/wide-angle diffraction appearance with the three-dimensional adjustable control platform of detecting device.
Fig. 4 is the vertical view of the little angle of X ray/wide-angle diffraction appearance with the base of the three-dimensional adjustable control platform of detecting device.
Each mark is following among the figure: 1 base, 2 scales, 3 bolts, 4 dovetail groove slides, 5 lifting tables, 6 translation stages, 7 right angle block, 8 imaging fixed heads.
Embodiment
Below in conjunction with accompanying drawing the present invention is further specified, but the present invention and be confined to following examples.
The controlled transfer table of three-dimensional provided by the invention comprises base 1, dovetail groove slide 4, lifting table 5, translation stage 6. right angle block 7 and imaging plate fixator 8; Dovetail groove slide 4 is located at the top of base 1; This base 1 is provided with the dovetail boss, and this dovetail boss is provided with scale 2, and the dovetail boss slidably cooperates with the dovetail groove of dovetail groove slide 4; Thereby dovetail groove slide 4 can carry out front and back along the dovetail boss to slide, and can carry out the position according to scale 2 and confirm; Base 1 is provided with a mounting hole (not shown), can this transfer table is fixed in the sample chamber of X-ray diffractometer or light scattering apparatus through bolt 3; The top of dovetail groove slide 4 is fixedly connected through the bolt (not shown) with lifting table 5, thereby can carry out the regulation and control of this transfer table in perpendicular; The top of lifting table 5 also is fixedly connected through the bolt (not shown) with translation stage 6, thereby can carry out the regulation and control of this transfer table at surface level; The table top of translation stage 6 is provided with right angle block 7, and is fixedly connected through the bolt (not shown) between right angle block 7 and the translation stage 6; The sidewall of right angle block 7 is fixedly connected through the bolt (not shown) between the fixed head 8 with imaging.
When using the controlled transfer table of above-mentioned three-dimensional, earlier dovetail groove slide 4 is fixed on position suitable on the scale 2 as required; Fixedly behind the dovetail groove slide 4, through regulating lifting table 5 and translation stage 6, corrected X ray light path makes the center hole of X ray vertical centering control heart through imaging plate fixator 8.
Claims (6)
1. the three-dimensional controlled transfer table of X-ray scattering appearance and light scattering apparatus imaging plate detecting device, it is characterized in that: said control desk comprises base, dovetail groove slide, lifting table, translation stage, right angle block and imaging plate fixator;
Said dovetail groove slide is located at the top of said base, and said base is provided with the dovetail boss, and said dovetail boss is provided with scale, and the dovetail groove of said dovetail boss and said dovetail groove slide is slidingly matched; The top of said dovetail groove slide is fixedly connected with said lifting table; The top of said lifting table is fixedly connected with said translation stage; Be installed with said right angle block on the table top of said translation stage, the sidewall of said right angle block is fixedly connected with said imaging plate fixator.
2. the controlled transfer table of three-dimensional according to claim 1 is characterized in that: said dovetail boss is provided with scale.
3. the controlled transfer table of three-dimensional according to claim 1 and 2 is characterized in that: said base and said dovetail groove slide carry out secure fit through bolt.
4. according to the controlled transfer table of arbitrary described three-dimensional among the claim 1-3, it is characterized in that: said base is provided with at least one mounting hole.
5. according to the controlled transfer table of arbitrary described three-dimensional among the claim 1-4, it is characterized in that: said lifting table all is connected through bolt with translation stage with said dovetail groove slide.
6. according to the controlled transfer table of arbitrary described three-dimensional among the claim 1-5, it is characterized in that: said right angle block all is connected through bolt with the imaging plate fixator with said translation stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210074648.4A CN102628791B (en) | 2012-03-20 | 2012-03-20 | Three-dimensional controllable mobile bench of X-ray scatterometer and light scatterometer imaging plate detector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210074648.4A CN102628791B (en) | 2012-03-20 | 2012-03-20 | Three-dimensional controllable mobile bench of X-ray scatterometer and light scatterometer imaging plate detector |
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| Publication Number | Publication Date |
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| CN102628791A true CN102628791A (en) | 2012-08-08 |
| CN102628791B CN102628791B (en) | 2014-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210074648.4A Expired - Fee Related CN102628791B (en) | 2012-03-20 | 2012-03-20 | Three-dimensional controllable mobile bench of X-ray scatterometer and light scatterometer imaging plate detector |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103852423A (en) * | 2012-11-30 | 2014-06-11 | 华东师范大学 | Profound hypothermia three-dimensional adjustable sample holder |
| CN111458356A (en) * | 2020-04-14 | 2020-07-28 | 国网湖南省电力有限公司 | Auxiliary device for radiographic inspection of substation equipment |
| CN111624216A (en) * | 2020-07-23 | 2020-09-04 | 丹东通达科技有限公司 | Detection device for measuring sample characteristics of X-ray diffractometer at high temperature |
| CN113970566A (en) * | 2021-11-25 | 2022-01-25 | 安徽国科仪器科技有限公司 | Small-angle X-ray scatterometer |
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| CN2811316Y (en) * | 2005-06-30 | 2006-08-30 | 上海恒精机电设备有限公司 | Three-dimensional adjusting device for quenching device |
| CN2849651Y (en) * | 2005-06-10 | 2006-12-20 | 北京工业大学 | Paper cup measurer |
| US7191529B2 (en) * | 2005-02-15 | 2007-03-20 | Columbia Marking Tools | Apparatus and method for controlling a programmable marking scribe |
| CN201464680U (en) * | 2009-06-16 | 2010-05-12 | 河北华美光电子有限公司 | Frock clamp for coupling electro-optical module |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20050214083A1 (en) * | 2004-03-29 | 2005-09-29 | Daniel Chen | Optical lens drill press |
| US7191529B2 (en) * | 2005-02-15 | 2007-03-20 | Columbia Marking Tools | Apparatus and method for controlling a programmable marking scribe |
| CN2849651Y (en) * | 2005-06-10 | 2006-12-20 | 北京工业大学 | Paper cup measurer |
| CN2811316Y (en) * | 2005-06-30 | 2006-08-30 | 上海恒精机电设备有限公司 | Three-dimensional adjusting device for quenching device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103852423A (en) * | 2012-11-30 | 2014-06-11 | 华东师范大学 | Profound hypothermia three-dimensional adjustable sample holder |
| CN103852423B (en) * | 2012-11-30 | 2016-09-14 | 华东师范大学 | The three-dimensional adjustable specimen holder of a kind of profound hypothermia |
| CN111458356A (en) * | 2020-04-14 | 2020-07-28 | 国网湖南省电力有限公司 | Auxiliary device for radiographic inspection of substation equipment |
| CN111624216A (en) * | 2020-07-23 | 2020-09-04 | 丹东通达科技有限公司 | Detection device for measuring sample characteristics of X-ray diffractometer at high temperature |
| CN111624216B (en) * | 2020-07-23 | 2023-09-19 | 丹东通达科技有限公司 | Detection device for measuring sample characteristics of X-ray diffractometer at high temperature |
| CN113970566A (en) * | 2021-11-25 | 2022-01-25 | 安徽国科仪器科技有限公司 | Small-angle X-ray scatterometer |
| CN113970566B (en) * | 2021-11-25 | 2024-08-27 | 安徽国科仪器科技有限公司 | Small angle X-ray scatterometer |
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| CN102628791B (en) | 2014-07-02 |
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