CN102621355B - Probe tip protective device and probe card with probe tip protective device - Google Patents
Probe tip protective device and probe card with probe tip protective device Download PDFInfo
- Publication number
- CN102621355B CN102621355B CN201210109965.5A CN201210109965A CN102621355B CN 102621355 B CN102621355 B CN 102621355B CN 201210109965 A CN201210109965 A CN 201210109965A CN 102621355 B CN102621355 B CN 102621355B
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- probe
- protective device
- needle point
- point protective
- guide
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- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A probe tip protective device comprises an imaging amplifying device, a locking fixing device used for fixedly locking the imaging amplifying device, guide shafts and an elastic element, wherein the locking fixing device is movably arranged on the guide shafts, and the elastic element is sleeved on the guide shafts and used for bearing the locking fixing device. The imaging amplifying device is a magnifier, and the elastic element is a spring. The number of the guide shafts is four. The probe tip protective device of a probe card is disposed above a probe and provided with the imaging amplifying device, not only is capable of preventing the probe from being scraped by an outside falling hard object and polluted by particle dust, but also is convenient for clearly observing each part of the probe of the probe card so as to find abnormal problems of the treatment probe timely and ensure correctness and accuracy of testing.
Description
Technical field
The present invention relates to probe card technology field, relate in particular to a kind of needle point protective device and there is the probe of needle point protective device.
Background technology
Probe is integrated circuit technology field important devices, is applied in before integrated circuit not yet encapsulates, and for wafer, with probe, does functional test, selects substandard product and carries out follow-up encapsulation engineering again, avoids bad product continue processing and cause waste.Described probe is responsible for the electric connection between test macro and integrated circuit (IC) chip.In described probe, have some probes, when test, the probe in described probe contacts with the weld pad on wafer, to wafer output signal or test wafer signal value output.
But existing probe is because not having any protective device, and be easy to be subject to the pollution of dropping grazing and being subject to granule dust of extraneous hard thing.On the other hand, because the probe of described existing probe is tiny, be difficult for observing, cause testing precision and reliability to reduce.
Therefore the problem existing for prior art, this case designer relies on the industry experience for many years of being engaged in, and active research improvement, so had invention needle point protective device and had the probe of needle point protective device.
Summary of the invention
The present invention be directed in prior art; existing probe is not because having any protective device; and be easy to be subject to the pollution of dropping grazing and being subject to granule dust of extraneous hard thing; and the probe of described existing probe is tiny; be difficult for observing, cause the defects such as testing precision and reliability reduction that a kind of needle point protective device is provided.
Another object of the present invention is the defect for prior art, and a kind of probe with described needle point protective device is provided.
In order to address the above problem, the invention provides a kind of needle point protective device, described needle point protective device comprises: imaging multiplying arrangement; Locked instrument, in order to the described imaging multiplying arrangement that locks; The axis of guide, on the described axis of guide, activity arranges described locked instrument; And flexible member, is set on the described axis of guide, and in order to carry described locked instrument.
Optionally, described imaging multiplying arrangement is magnifier.
Optionally, described flexible member is spring.
Optionally, described axis of guide quantity is 4.
For realizing the present invention's another object, the invention provides a kind of probe with described needle point protective device, described probe comprises printed circuit board (PCB), and is fixedly installed on the probe needle point protective device on described printed circuit board (PCB).
Optionally, described probe needle point protective device is fixed on described printed circuit board (PCB) by the described axis of guide.
Optionally, described axis of guide quantity is 4.
In sum; probe needle point protective device of the present invention is arranged on described probe top; and there is imaging multiplying arrangement; not only can avoid described probe to be subject to the drop pollution of grazing and granule dust of extraneous hard thing; and be convenient to clearly to observe each position of the probe of described probe; then find to process in time the abnormal problem of probe, guarantee correctness and the degree of accuracy of test.
Accompanying drawing explanation
Fig. 1 (a) is the front view of needle point protective device of the present invention;
Fig. 1 (b) is the vertical view of needle point protective device of the present invention;
Fig. 2 is the probe plan structure schematic diagram with needle point protective device of the present invention.
Embodiment
By describe in detail the invention technology contents, structural attitude, reached object and effect, below in conjunction with embodiment and coordinate accompanying drawing to be described in detail.
Refer to Fig. 1 (a), Fig. 1 (b), Fig. 1 (a) is depicted as the front view of needle point protective device of the present invention.Fig. 1 (b) is the vertical view of needle point protective device of the present invention.Described needle point protective device 1 has imaging multiplying arrangement 10; Locked instrument 11, in order to the described imaging multiplying arrangement 10 that locks; The axis of guide 12, on the described axis of guide 12, activity arranges described locked instrument 11; And flexible member 13, is set on the described axis of guide 12, and in order to carry described locked instrument 11.Wherein, in the present invention, described imaging multiplying arrangement 10 is magnifier preferably.Described flexible member 13 is spring preferably.Preferably 4 of the described axis of guide 12 quantity.
Refer to Fig. 2, Figure 2 shows that the probe plan structure schematic diagram with needle point protective device 1 of the present invention.Described probe 2 comprises printed circuit board (PCB) 21, and is fixedly installed on the needle point protective device 1 on described printed circuit board (PCB) 21.Described needle point protective device 1 is fixedly installed on described printed circuit board (PCB) 21 by the described axis of guide 12.
Please continue to refer to Fig. 1 (a), Fig. 1 (b); and in conjunction with consulting Fig. 2; the imaging multiplying arrangement 10 of the needle point protective device 1 of probe 2 of the present invention can be along the described axis of guide 12 up-down adjustment; be convenient to focusing; clearly to observe each position of the probe 22 of described probe 2; then find to process in time the abnormal problem of probe 22, guarantee correctness and the degree of accuracy of test.On the other hand, described needle point protective device 1 is arranged on described probe 22 tops, can avoid described probe 22 to be subject to the pollution of extraneous hard thing damage and granule dust.
In sum; needle point protective device of the present invention is arranged on described probe top; and there is imaging multiplying arrangement; not only can avoid described probe to be subject to the drop pollution of grazing and granule dust of extraneous hard thing; and be convenient to clearly to observe each position of the probe of described probe; then find to process in time the abnormal problem of probe, guarantee correctness and the degree of accuracy of test.
Those skilled in the art all should be appreciated that, in the situation that not departing from the spirit or scope of the present invention, can carry out various modifications and variations to the present invention.Thereby, if when any modification or modification fall in the protection domain of appended claims and equivalent, think that the present invention contains these modifications and modification.
Claims (3)
1. the probe of a needle point protective device; it is characterized in that; described probe comprises printed circuit board (PCB), some probes; and be fixedly installed on the needle point protective device on described printed circuit board (PCB); described needle point protective device is arranged at described some probes top; and cover described some probes completely, wherein, described needle point protective device comprises:
Imaging multiplying arrangement;
Locked instrument, in order to the described imaging multiplying arrangement that locks;
The axis of guide, on the described axis of guide, activity arranges described locked instrument; And,
Flexible member, is set on the described axis of guide, and in order to carry described locked instrument.
2. probe as claimed in claim 1, is characterized in that, described needle point protective device is fixed on described printed circuit board (PCB) by the described axis of guide.
3. probe as claimed in claim 1, is characterized in that, described axis of guide quantity is 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210109965.5A CN102621355B (en) | 2012-04-13 | 2012-04-13 | Probe tip protective device and probe card with probe tip protective device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210109965.5A CN102621355B (en) | 2012-04-13 | 2012-04-13 | Probe tip protective device and probe card with probe tip protective device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102621355A CN102621355A (en) | 2012-08-01 |
| CN102621355B true CN102621355B (en) | 2014-08-13 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210109965.5A Active CN102621355B (en) | 2012-04-13 | 2012-04-13 | Probe tip protective device and probe card with probe tip protective device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102621355B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203191415U (en) * | 2013-04-03 | 2013-09-11 | 中兴通讯股份有限公司 | Probe device used for hardware testing |
| CN112043428B (en) * | 2020-09-25 | 2022-01-28 | 珠海市人民医院 | Implant tooth structure fixed by two-way clamping pin |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63237538A (en) * | 1987-03-26 | 1988-10-04 | Sumitomo Electric Ind Ltd | Wafer auto-prober |
| JPH0442943A (en) * | 1990-06-06 | 1992-02-13 | Matsushita Electron Corp | Inspection device of semiconductor device |
| CN101112776A (en) * | 2006-07-27 | 2008-01-30 | 中芯国际集成电路制造(上海)有限公司 | Instrument for accurate cutting of crystal round examples and method of use thereof |
| CN101178414A (en) * | 2006-11-02 | 2008-05-14 | 嘉兆科技有限公司 | Probe card having cantilever probes, producing method and detecting probe needlepoint locating methods |
-
2012
- 2012-04-13 CN CN201210109965.5A patent/CN102621355B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63237538A (en) * | 1987-03-26 | 1988-10-04 | Sumitomo Electric Ind Ltd | Wafer auto-prober |
| JPH0442943A (en) * | 1990-06-06 | 1992-02-13 | Matsushita Electron Corp | Inspection device of semiconductor device |
| CN101112776A (en) * | 2006-07-27 | 2008-01-30 | 中芯国际集成电路制造(上海)有限公司 | Instrument for accurate cutting of crystal round examples and method of use thereof |
| CN101178414A (en) * | 2006-11-02 | 2008-05-14 | 嘉兆科技有限公司 | Probe card having cantilever probes, producing method and detecting probe needlepoint locating methods |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102621355A (en) | 2012-08-01 |
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