CN102620777A - Diesel flow measuring sensor - Google Patents
Diesel flow measuring sensor Download PDFInfo
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- CN102620777A CN102620777A CN2012100870848A CN201210087084A CN102620777A CN 102620777 A CN102620777 A CN 102620777A CN 2012100870848 A CN2012100870848 A CN 2012100870848A CN 201210087084 A CN201210087084 A CN 201210087084A CN 102620777 A CN102620777 A CN 102620777A
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- diesel oil
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Abstract
Disclosed is a diesel flow measuring sensor. A single crystal silicon substrate is arranged in the middle of a ceramic baseboard; a reference resistor, an upstream thermocouple, a heating member and a downstream thermocouple sequentially adhere to the single crystal silicon substrate through adhesives to form a sensor chip; the sensor chip is connected with a welding plate which is connected with an integrated circuit through a gold wire; and the heating member is used for heating hot junctions of the upstream thermocouple and the downstream thermocouple. When diesel in pipelines flows from left to right, temperatures of symmetrical positions on two sides of the heating member are not the same any more, then output voltages of the two thermocouples have a difference, the larger the temperature difference is, the larger the voltage difference becomes. The diesel flow measuring sensor has the advantages that no mechanical movement parts are included, the insulating strength is high, the corrosion resistance is good, the peripheral circuit is simple, the reliability is high, and the anti-electromagnetic interference capacity is high.
Description
Technical field
The present invention relates to flow sensor, be specifically related to a kind of diesel oil flow measuring sensor.
Background technology
High speed development along with infotech; Flow sensor and system thereof are increasing in the application percentage of genset; Flow-measuring method and instrument of a great variety, sorting technique is also a lot, up to now; Can industrial flow instrument kind reach 60 kinds more than; The so many reason of kind just is to be much to seek so far a kind of flow instrument that any fluid, any range, any flow state and any service condition all are suitable for, especially for the measurement of the diesel oil flow of diesel generator set, and the good surveying instrument of neither one so far both at home and abroad.Like existing electromagnetic flow transducer, it has conductive fluid when flowing through electromagnetic field, can obtain the speed of fluid through measuring voltage.But the very low liquid of energy measurement conductivity not is like petroleum product; Can not be used for higher temperature.
The diesel generator set poor working environment; Temperature is high, electromagnetic interference (EMI) is strong, and flow sensor requires strict especially, in the R&D process of diesel stream quantity sensor; Not only to select the chip material and the components and parts of excellent performance for use; It is good, high temperature resistant, corrosion-resistant also will to design shock resistance, but also will in circuit design, adopt integrated and anti-electromagnetic interference (EMI) measure, with the reliability that improves flow sensor work with to the adaptability of varying environment.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art; The object of the present invention is to provide a kind of diesel oil flow measuring sensor, the heat that liquid is taken away from chip surface in the time of can surveying diesel oil and flow induces the thermal field changes in distribution in the short space of chip surface; And directly convert a millivolt step voltage output signal into; The present invention does not have mechanical moving component, and it is simple to have a dielectric strength height, good corrosion resistance, peripheral circuit, the characteristics that reliability is high, anti-electromagnetic interference capability is strong.
In order to achieve the above object, technical scheme of the present invention is achieved in that
A kind of diesel oil flow measuring sensor; Comprise ceramic bottom board 11; The middle part of ceramic bottom board 11 is provided with monocrystalline substrate 15; Monocrystalline substrate 15 is bonded with reference resistance 12, upstream heat galvanic couple 13A, heating unit 14 and downstream heat galvanic couple 13B successively through tackifier and forms sensor chip, and sensor chip is connected with pad 17 through spun gold 16, and pad 17 is connected with integrated circuit 18.
Described monocrystalline substrate 15 forms the hot isolated film of a monocrystalline silicon through anisotropic etch, and through nitrogen treatment, and be coated with insulation film on it.
The DG-3S tackifier that described tackifier adopts the medium blue time to produce.
Described integrated circuit 18 adopts the ZMD31010 chip.
The present invention adopts, and corrosion-resistant, anti-aging plastics are grinding tool, adopt adhesive specially, make firm, stable being fixed in the grinding tool of detection chip, have good sealing and resistance to aging.The strenuous vibration that has produced when having satisfied diesel generator set work; Avoided pipe joint because long-term work produces oil impregnate, leakage of oil; This product do not have mechanical moving component, simple in structure, easy for installation, reliability is high, be convenient to advantage such as batch process, meets the oil consumption metering of diesel-driven generator or engine.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the sectional drawing of sensor chip.
Fig. 3 is sensor isotherm synoptic diagram when not having flow.
Fig. 4 is sensor isotherm synoptic diagram when flow is from left to right arranged.
Embodiment
Below in conjunction with accompanying drawing structural principle of the present invention and principle of work are described in detail.
With reference to Fig. 1; A kind of diesel oil flow measuring sensor of Fig. 2; Comprise ceramic bottom board 11, the middle part of ceramic bottom board 11 is provided with monocrystalline substrate 15, and monocrystalline substrate 15 is bonded with reference resistance 12, upstream heat galvanic couple 13A, heating unit 14 and downstream heat galvanic couple 13B successively through tackifier and forms sensor chip; Sensor chip is connected with pad 17 through spun gold 16, and pad 17 is connected with integrated circuit 18.
Described monocrystalline substrate 15 forms the hot isolated film of a monocrystalline silicon through anisotropic etch, and through nitrogen treatment, and be coated with insulation film on it.
The DG-3S tackifier that described tackifier adopts the medium blue time to produce.
Described integrated circuit 18 adopts the ZMD31010 chip, is import programmable digital integrated chip, has advantages such as high precision, high stability, high reliability.It can conveniently carry out processing and amplifying to the voltage differential signal of exporting.Debug through computing machine, simple and convenient.When giving the diesel stream quantity sensor, join a secondary Displaying Meter, can simple and clear observation flow volume.
Principle of work of the present invention is:
The thermojunction heating of 14 couples of upstream heat galvanic couple 13A of heating unit and downstream heat galvanic couple 13B.Thermograde between two thermopair thermojunction cold junctions causes output voltage, i.e. intrinsic Seebeck effect refers to cause owing to two kinds of different electric conductors or semi-conductive temperature contrast the pyroelectric phenomena of two kinds of voltage differences between material.When diesel oil is static in the pipeline; Isotherm is symmetrically distributed along the straight line at first 14 middle parts of vertical heating; The temperature that heats first 14 symmetria bilateralis positions is identical; With reference to Fig. 3, promptly upstream heat galvanic couple 13A is equal basically with downstream heat galvanic couple 13B output voltage, and then two thermopair output voltage differences are near zero millivolt; When pipeline diesel oil flowed from left to right, isotherm tilted to the right.The temperature that heats first 14 symmetria bilateralis positions is no longer identical, and please with reference to Fig. 3, promptly upstream heat galvanic couple 13A and downstream heat galvanic couple 13B output voltage are not equating that then will there be a difference in two thermopair output voltages.The temperature difference of upstream heat galvanic couple 13A and downstream heat galvanic couple 13B is big more, and two thermopair output voltage differences are also just big more, and it is big more promptly to export signal.In addition, also have a reference resistance 12 on the chip, the environment temperature parameter is provided, for temperature-compensation circuit provides parameter.
The diesel stream quantity sensor of the present invention and the traditional diesel stream quantity sensor mode of connection are in full accord; Avoided the wiring of like product complicated; And can directly be connected with secondary display instrument, flow control warning device, indicate diesel-driven generator, engine oil pipeline flow size and provide pipeline flow to report to the police.
Advantages such as compare with traditional diesel stream quantity sensor, the diesel stream quantity sensor of this project does not have mechanical moving component, and dielectric strength height, good corrosion resistance, peripheral circuit are simple, and reliability is high, anti-electromagnetic interference capability is strong.
The present invention has unique Design on thermal insulation scheme, and is as shown in Figure 2, and monocrystalline substrate 15 forms the film of the heat isolation of a monocrystalline silicon through anisotropic etch.Through nitrogen treatment, increase the internal stress and the thermal conductivity that reduces monocrystalline silicon of monocrystalline silicon.Then, plate one deck insulation film again, with the reference electrode group, the thermocouple heap heats fixed thereon of unit, has so just formed the chip of sensor.The DG-3S tackifier that this product adopts the medium blue time to produce, this adhesive once obtained international Geneva gold medal, had good dissimilar material bonding degree, guaranteed chip and the fixing of ceramic bottom board 11 and the sealing of housing.
Autonomous Design of the present invention digitizing thick film temperature-compensation circuit, like Fig. 4, when the test environment temperature raises; Voltage on the reference resistance 12 also can be more rising, behind temperature amplifier, export a reference voltage; On the output signal of the galvanic couple that is added to afterwards heap 13A, the preposition programmable amplifier through integrated circuit 18 amplifies again, then; Through integrated circuit 18A/D conversion, data processing chip is nourished to signal and is repaid.At last, advanced the D/A conversion, the output analog voltage signal.
The resistance of entire circuit of the present invention is selected low temperature drift (25ppm) thick-film resistor for use; Saved the rosin joint interference that welding causes; Through laser instrument resistance is carried out resistance and accurately locate, solved resistance inconsistent problem in process of production, guaranteed the high precision of sensor output.Select laser instrument model JT-KW50 for use.
When tested diesel oil was still in the pipeline, between the thermopair of two symmetrical distributions, because the even heating of middle heating unit forms one to heat the temperature difference that unit is an axis of symmetry, i.e. stable thermograde was according to the intrinsic Seebeck effect.Thermograde between thermocouple heap thermojunction and the cold junction causes exporting faint millivolt voltage signal; Stable millivolt voltage signal output just; When tested diesel oil flowed in pipeline, original steady state (SS) was broken, and forms a new temperature difference (being thermograde).According to the intrinsic Seebeck effect, will export a stable millivolt voltage signal of a corresponding flow at this moment.Diesel oil flow and output voltage signal are proportional.Through rear end intelligence amplifying circuit, output voltage signal is carried out normalization handle, can outputting standard industry voltage signal.Again this signal is sent into the secondary display instrument, can monitor the instantaneous delivery of diesel oil in the pipeline intuitively.The diesel oil flow of this product testing is, is under the situation of 9L/h in the flow size of diesel oil, and the voltage signal of thermopair output probably is 55mV.Through the digitizer calibration, export 5V at last, i.e. range ability 0-9L/h corresponding voltage 0-5V output.
Claims (4)
1. diesel oil flow measuring sensor; It is characterized in that; Comprise ceramic bottom board (11), the middle part of ceramic bottom board (11) is provided with monocrystalline substrate (15), and monocrystalline substrate (15) is bonded with reference resistance (12), upstream heat galvanic couple (13A), heating unit (14) and downstream heat galvanic couple (13B) successively through tackifier and forms sensor chip; Sensor chip is connected with pad (17) through spun gold (16), and pad (17) is connected with integrated circuit (18).
2. a kind of diesel oil flow measuring sensor according to claim 1 is characterized in that, described monocrystalline substrate (15) forms the hot isolated film of a monocrystalline silicon through anisotropic etch, and through nitrogen treatment, and be coated with insulation film on it.
3. a kind of diesel oil flow measuring sensor according to claim 1 is characterized in that, the DG-3S tackifier that described tackifier adopts the medium blue time to produce.
4. a kind of diesel oil flow measuring sensor according to claim 1 is characterized in that, described integrated circuit (18) adopts the ZMD31010 chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100870848A CN102620777A (en) | 2012-03-29 | 2012-03-29 | Diesel flow measuring sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100870848A CN102620777A (en) | 2012-03-29 | 2012-03-29 | Diesel flow measuring sensor |
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| Publication Number | Publication Date |
|---|---|
| CN102620777A true CN102620777A (en) | 2012-08-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100870848A Pending CN102620777A (en) | 2012-03-29 | 2012-03-29 | Diesel flow measuring sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113252121A (en) * | 2021-03-26 | 2021-08-13 | 深圳市世宗自动化设备有限公司 | Method, device and equipment for monitoring flow of two-component dispensing valve and storage medium thereof |
| CN113874733A (en) * | 2019-05-24 | 2021-12-31 | Mmi半导体有限公司 | Flow sensor chip |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1058647A (en) * | 1990-08-01 | 1992-02-12 | 涂相征 | A kind of heat-flow sensor of integrated Si-membrane and manufacture method thereof |
| CN1174984A (en) * | 1996-08-23 | 1998-03-04 | 李韫言 | Thermal type flow sensor for very fine working |
| CN1654927A (en) * | 2004-02-12 | 2005-08-17 | 李韫言 | All silicon integrated flow sensor and method for manufacturing the same |
| CN202494479U (en) * | 2012-03-29 | 2012-10-17 | 宝鸡恒通电子有限公司 | Diesel oil flow sensor |
-
2012
- 2012-03-29 CN CN2012100870848A patent/CN102620777A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1058647A (en) * | 1990-08-01 | 1992-02-12 | 涂相征 | A kind of heat-flow sensor of integrated Si-membrane and manufacture method thereof |
| CN1174984A (en) * | 1996-08-23 | 1998-03-04 | 李韫言 | Thermal type flow sensor for very fine working |
| CN1654927A (en) * | 2004-02-12 | 2005-08-17 | 李韫言 | All silicon integrated flow sensor and method for manufacturing the same |
| CN202494479U (en) * | 2012-03-29 | 2012-10-17 | 宝鸡恒通电子有限公司 | Diesel oil flow sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113874733A (en) * | 2019-05-24 | 2021-12-31 | Mmi半导体有限公司 | Flow sensor chip |
| CN113252121A (en) * | 2021-03-26 | 2021-08-13 | 深圳市世宗自动化设备有限公司 | Method, device and equipment for monitoring flow of two-component dispensing valve and storage medium thereof |
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Application publication date: 20120801 |