CN102615725A - Multiwire cutting machine and wiring device thereof - Google Patents
Multiwire cutting machine and wiring device thereof Download PDFInfo
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- CN102615725A CN102615725A CN2012101120336A CN201210112033A CN102615725A CN 102615725 A CN102615725 A CN 102615725A CN 2012101120336 A CN2012101120336 A CN 2012101120336A CN 201210112033 A CN201210112033 A CN 201210112033A CN 102615725 A CN102615725 A CN 102615725A
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- 238000005520 cutting process Methods 0.000 title claims abstract description 95
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- 230000008569 process Effects 0.000 description 20
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- 238000009434 installation Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 239000004484 Briquette Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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Abstract
The invention provides a wiring device of a multiwire cutting machine, which is used for wiring the multiwire cutting machine. The wiring device comprises a first driving main shaft, a second driving main shaft, a third driving main shaft and a fourth driving main shaft, wherein a working mode of a driving motor of at least one driving main shaft is set into a torque control mode; the torque directions of the driving motors are the same as the rotation directions of the driving main shafts, so that the rotation frictions of part of the driving main shafts are counteracted; the torque of each driving motor is set to be less than friction torque of each driving main shaft, so that the friction torque of each driving main shaft is counteracted with the torque set on each driving motor; the torque of each driving motor is less than the friction torque of each driving main shaft, so that each driving main shaft is kept in a static state when wiring is not performed; and outer force can be used for wiring the cutting machine by only counteracting the friction torque of part of the driving main shafts, so that resistance of a roller system during wiring is reduced, the wiring time is shortened, and the wiring speed of the multiwire cutting machine is increased.
Description
Technical field
The present invention relates to the wire cutting technology technical field, more particularly, relate to a kind of multi-line cutting machine and multi-line cutting machine connecton layout.
Background technology
Multi-thread cutting is that a kind of high speed through metal wire moves back and forth; Bring abrasive material into the semiconductor machining zone and grind, hard brittle materials such as semiconductor once are cut into hundreds of simultaneously cut into square silico briquette or polycrystal silicon ingot is cut into a kind of novel cutting process method of square silico briquette to thousands of plate sheets or with the cylinder silico briquette.
Silicon chip is the main production material in semiconductor and photovoltaic field; The multi-thread cutting technique of silicon chip is present more advanced in the world silicon chip process technology; It is different from cutting modes such as traditional knife saw sheet, grinding wheel; Also be different from advanced cut and interior circle cutting, its principle is that the steel wire through a high-speed motion drives and attached to the cutting blade material on the steel wire silicon rod rubbed, thereby reaches cutting effect.In whole process, steel wire on the main line roller, form a bracing cable net, and workpiece to be processed is realized the feeding of workpiece through the decline of workbench through the guiding of tens guide rollers.The multi-thread cutting technique of silicon chip is compared efficient height with other technologies, production capacity is high, and the precision advantages of higher is to adopt silicon chip cutting technique the most widely at present.
The use of multi-line cutting machine is more and more at present; Because the raising of multi-line cutting machine efficient; The working time of actual cutting reduces; The shared time scale of cutting preparation is increased, and the shortening multi-line cutting machine non-working time has very important significance to the overall efficiency that improves multi-line cutting machine.In the preparation of multi-line cutting machine, wiring time has accounted for very big ratio, shortens wiring time, improves wiring efficient and can effectively reduce non-cutting time, improves the overall efficiency of machinery equipment, has good and economic.In multi-line cutting machine when wiring, need be with a very long metal wire on tens rollers and since need around roller more, resistance is big; The pulling metal wire can't drag whole roll system, adopts the slowly rotation synchronously of control system control retractable cable wheel, main shaft wheel at present, artificial with line along with the rotation of line wheel slowly around getting on; This method needs two people to carry out the wiring of time more than two hours; The cloth linear velocity is slow, needs manual work many, influences the overall efficiency of multi-line cutting machine.
Therefore, the resistance of roll system when how to reduce wiring to improve the cloth linear velocity of multi-line cutting machine, is present those skilled in the art's problem demanding prompt solution.
Summary of the invention
In view of this, the invention provides a kind of multi-line cutting machine and multi-line cutting machine connecton layout, the resistance of roll system when connecting up to realize reducing is to improve the cloth linear velocity of multi-line cutting machine.
In order to achieve the above object, the present invention provides following technical scheme:
A kind of multi-line cutting machine connecton layout; Be used for the wiring of multi-line cutting machine; Said multi-line cutting machine comprises that first driving main shaft, second driving main shaft, the 3rd driving main shaft and 4 wheel driven move main shaft; The mode of operation of the drive motors of at least one driving main shaft is set to torque control mode, and it is identical with the rotation direction of said driving main shaft that the torque direction of said drive motors is set to, and the moment of torsion of said drive motors is less than the moment of friction of said driving main shaft.
Preferably, in above-mentioned multi-line cutting machine connecton layout, the torque of said drive motors is near said moment of friction.
Preferably; In above-mentioned multi-line cutting machine connecton layout, the drive motors of the moving main shaft of the drive motors of the drive motors of said first driving main shaft, said second driving main shaft, the drive motors of said the 3rd driving main shaft and said 4 wheel driven all is set to torque control mode.
Preferably, in above-mentioned multi-line cutting machine connecton layout, also comprise:
The swing arm that the bar tail is fixed and in perpendicular, swung;
The swing arm line wheel that is arranged on the bar head of said swing arm and in said perpendicular, rotates;
Be arranged on said swing arm the bar tail be used to measure said swing arm swing parameter and send the encoder of feedback signal;
Be used to drive the CD-ROM drive motor that the unwrapping wire wheels of said multi-line cutting machine rotate;
Be used to receive said feedback signal and control the controller that said CD-ROM drive motor rotates.
Preferably, in above-mentioned multi-line cutting machine connecton layout, said swing parameter is the angular speed and the angular acceleration of said swing arm swing.
Preferably, in above-mentioned multi-line cutting machine connecton layout, the control mode of said CD-ROM drive motor is PID control.
Preferably, in above-mentioned multi-line cutting machine connecton layout, the leading-out terminal that also includes line end and said swing arm line wheel is in the lead-in wire terminal that conplane first transition wheel and leading-out terminal and said swing arm line take turns and is in conplane second transition wheel.
Preferably, in above-mentioned multi-line cutting machine connecton layout, also comprise the coiling wheels, it is arranged between said first transition wheel and said second driving main shaft, and the position of said coiling wheels is higher than said first transition wheel and said second driving main shaft.
Preferably, in above-mentioned multi-line cutting machine connecton layout, said first transition wheel, said second transition wheel, said swing arm line wheel and said coiling wheels are positioned at same working face.
A kind of multi-line cutting machine, said multi-line cutting machine are provided with aforesaid multi-line cutting machine connecton layout.
Multi-line cutting machine connecton layout provided by the invention; Be used for the wiring of multi-line cutting machine; Comprise that first driving main shaft, second driving main shaft, the 3rd driving main shaft and 4 wheel driven move main shaft; The mode of operation of the drive motors of at least one driving main shaft is set to torque control mode; It is identical with the rotation direction of driving main shaft that the torque direction of drive motors is set to, so that the moment of torsion of drive motors is offset the rotation friction of a part of driving main shaft, and the moment of friction of the moment of torsion of drive motors less than driving main shaft is set.Multi-line cutting machine is in wiring process; Each driving main shaft all rotates in wiring process, rotation direction with when wiring wiring direction identical, the drive motors that is provided with at least one driving main shaft is a torque control mode; Make the moment of torsion that is provided with on moment of friction and the drive motors of driving main shaft cancel out each other; The moment of torsion of drive motors makes that less than the moment of friction of driving main shaft driving main shaft does not keep inactive state when carrying out installation work, and the external force when then connecting up only need overcome the moment of friction of a part of driving main shaft can carry out installation work; Make that the moment of friction of driving main shaft reduces in the wiring process; Thereby make that the resistance of roll system reduces in the installation work, reduced wiring time, improved the cloth linear velocity of multi-line cutting machine.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The structural representation of the multi-line cutting machine connecton layout that Fig. 1 provides for present embodiment;
The multi-line cutting machine connecton layout swing arm control flow chart partly that Fig. 2 provides for present embodiment.
The specific embodiment
The invention discloses a kind of multi-line cutting machine and multi-line cutting machine connecton layout, realized reducing the resistance of roll system when connecting up, improved the cloth linear velocity of multi-line cutting machine.
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme in the embodiment of the invention is carried out clear, complete description, obviously, described true example only is the true example of the present invention's part, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
As shown in Figure 1, the structural representation of the multi-line cutting machine connecton layout that Fig. 1 provides for present embodiment.
Present embodiment provides a kind of multi-line cutting machine connecton layout; Be used for the wiring of multi-line cutting machine; Comprise first driving main shaft 9, second driving main shaft 10, the 3rd driving main shaft 11 and the moving main shaft 12 of 4 wheel driven; The mode of operation of the drive motors of at least one driving main shaft is set to torque control mode; It is identical with the rotation direction of driving main shaft that the torque direction of drive motors is set to, so that the moment of torsion of drive motors is offset the rotation friction of a part of driving main shaft, and the moment of friction of the moment of torsion of drive motors less than driving main shaft is set.
The course of work of the multi-line cutting machine connecton layout that present embodiment provides is following:
Multi-line cutting machine is in wiring process, and each driving main shaft all rotates in wiring process, and rotation direction is identical with the stressed direction of when wiring metal wire 13, and promptly tensile force f is pulled out the direction of metal wire 13.The drive motors that is provided with at least one driving main shaft is a torque control mode; Make the moment of torsion that is provided with on moment of friction and the drive motors of driving main shaft cancel out each other; The moment of torsion of drive motors makes that less than the moment of friction of driving main shaft driving main shaft does not keep inactive state when carrying out installation work, and the external force F that then when wiring, provides only need overcome the moment of friction of a part of driving main shaft can carry out installation work; Make that the moment of friction of driving main shaft reduces in the wiring process; Thereby make that the resistance of roll system reduces in the installation work, reduced wiring time, improved the cloth linear velocity of multi-line cutting machine.
The multi-line cutting machine connecton layout that present embodiment provides; The moment of torsion that provides through drive motors is offset the moment of friction of driving main shaft in a part of roll system; The resistance of roll system when reducing wiring; Make the external force that needs in the wiring process reduce, then the time of wiring corresponding the minimizing, improved the cloth linear velocity of multi-line cutting machine.
Moment of torsion control with servo controller output+/-the 10V voltage commands is delivered on the servo-driver; Size with control servomotor moment of torsion; The forward output torque of the big more representative control of positive voltage motor is big more; The Inverted Output moment of torsion of the big more representative control of negative voltage motor is big more, representes then that when command voltage is 0V motor does not have output torque.When action; Controller can first output torque control command be given driver; Driver is according to the output torque of this order control motor; Whether back coupling decides the torque command of output will to strengthen or weaken and controller is simultaneously according to external encoder (generally all being installed in the motor tail end), repeats this action then continuously to reach the position location.The advantage of moment of torsion control mode is the output torque size that can on controller, change motor at any time, and need on driver, not do rigid adjustment, and this control mode of moment of torsion flexibly can be closed at some and reached special application controls.For example, need not export 100% moment of torsion when in application, having a certain segment distance to move, then can temporarily diminish the motor output torque, in the operation of postorder, revert to 100% moment of torsion to it more then via controller.
In order further to optimize technique scheme, in the multi-line cutting machine connecton layout that present embodiment provides, the size of moment of torsion that drive motors is set is near the moment of friction of driving main shaft.The moment of friction of torque direction and the driving main shaft of drive motors through self is set is in the opposite direction; To offset the moment of friction of a part of driving main shaft; Thereby make the external force that in wiring process, provides less that driving main shaft is rotated, the work difficulty that alleviates wiring shortens wiring time.When the torque that drive motors is set during near the moment of friction of driving main shaft, the most rotary resistance of moment of friction is offset through the moment of torsion of motor, then only very little external force need be provided; Make external force and moment of torsion sum size greater than moment of friction; When the size of moment of torsion size near moment of friction, special big or small when basic identical when the two, then only need minimum external force can realize the rotation of driving main shaft; Increase external force during wiring as required; The velocity of rotation response of driving main shaft becomes big, and the cloth linear velocity speeds, thereby the cloth linear velocity is improved.
In order further to optimize technique scheme; In the multi-line cutting machine connecton layout that present embodiment provides, the drive motors of the moving main shaft 12 of the drive motors of the drive motors of first driving main shaft 9, second driving main shaft 10, the drive motors of the 3rd driving main shaft 11 and 4 wheel driven all is set to torque control mode.The drive motors of each driving main shaft all is set to torque control mode; Moment of torsion through the drive motors that is provided with on each driving main shaft provides is offset a part of moment of friction on the single driving main shaft; Then each driving main shaft is in wiring process; Realize that through less external force F driving main shaft is with the direction rotation that winds the line in the wiring process; First driving main shaft 9, second driving main shaft 10, the 3rd driving main shaft 11 and the moving main shaft 13 of 4 wheel driven are all offset the moment of friction of self through the moment of torsion that the drive motors that is provided with it on provides, and make that required external force reduces in the whole roll system, further make the resistance reduction that roll system receives in the wiring process; Thereby the speed of wiring is accelerated, and then improved the efficient of wiring.
In order further to optimize technique scheme, in the multi-line cutting machine connecton layout that present embodiment provides, also comprise swing arm 5, bar tail one end of swing arm 5 fixedly installs, and swing arm 5 is swung in perpendicular.The bar head position of swing arm 5 is provided with swing arm line wheel 6, and the rotational plane of swing arm line wheel 6 is identical with the swinging plane of swing arm 5.The bar tail of swing arm 5 is provided with encoder 4, and swing arm line wheel 6 is in wiring process, and metal wire 13 is walked around swing arm line wheel 6; Swing arm line wheel 6 rotates along with what connect up in metal wire 13 course of conveying, and the winding end of metal wire 13 is arranged on the swaying direction of swing arm 5, therefore in metal wire 13 course of conveying; Because the wiring pulling force on the metal wire 13 drives swing arm and in perpendicular, swings, this moment, encoder 4 was started working, and measured the swing parameter of swing arm 5; And send feedback signal to controller; After controller received feedback signal, the CD-ROM drive motor that is provided with on the control unwrapping wire wheels 14 rotated, and CD-ROM drive motor rotates according to the control signal that controller sends; And, realized the automatic unwrapping wire of unwrapping wire wheels 14 by 14 rotations of certain speed control unwrapping wire wheels.The multi-line cutting machine connecton layout that present embodiment provides converts metal wire upper pulling force in the wiring process into the cycloid bar 5 swing parameters that can detect through swing arm 5; And through the parameter of cycloid bar 5 is handled; Convert the control signal of control unwrapping wire wheels 14 automatic unwrapping wire into; Make that the resistance of roll system reduces greatly in wiring process, practiced thrift wiring time, improved the cloth linear velocity.
Multi-line cutting machine connecton layout swing arm control flow chart partly as shown in Figure 2, that Fig. 2 provides for present embodiment.
S01, input metal wire pulling force.Metal wire rotates in swing arm line wheel 6, and swing arm 5 receives the pulling force generation swing of metal wire 13 simultaneously; S02, encoder measured angular speed, angular acceleration.Encoder 4 is measured the angular speed and the angular acceleration of swing arm 5 in swing arm 5 swing process, and output feedback signal; S03, controller PID computing.Controller receives the feedback signal of being sent by encoder 4, and through the PID computing, the swing parameter of swing arm 5 is converted to the control signal of CD-ROM drive motor; S04, driver module receives instruction.The control signal of the CD-ROM drive motor that the driver module reception controller on the controller sends, and the rotation of control CD-ROM drive motor, thus unwrapping wire wheels 14 are rotated; S05, unwrapping wire wheels follow the rotation of metal wire pulling force.Unwrapping wire wheels 14 are by the CD-ROM drive motor driven rotary; Because the control of the payingoff speed of unwrapping wire wheels 14 is controlled by the pulling force on the metal wire; Therefore unwrapping wire wheels 14 speed are followed the size of input pulling force and are changed, thereby accomplish the setting-out work of metal wire 13 fast.
In order further to optimize technique scheme; In the multi-line cutting machine connecton layout that present embodiment provides; Also comprise first transition wheel 8 and second transition wheel 15; The leading-out terminal of the lead-in wire terminal of first transition wheel 8 and swing arm line wheel 6 is in same plane, and the lead-in wire terminal of the leading-out terminal of second transition wheel 15 and swing arm line wheel 6 is in same plane.Swing arm line wheel 6 is by in wiring process, driving swing arm 5 swings by the pulling force on the metal wire; After metal wire 13 is walked around first transition wheel 8 and second transition wheel 15; Drive swing arm 5 swings by the pulling force to swing arm line wheel 6 on the metal wire 13, and the unwrapping wire wheels are controlled through the swing parameter that records this moment.Special; First transition wheel 8 and second transition wheel 15 are arranged on the same side of swing arm line wheel 6; Then metal wire 13 provides the swing arm line to take turns the pulling force of 6 horizontal directions; Can pass through pulling force comparatively simple calculations reflection metal wire 13 on by angular speed and the angular acceleration that encoder 4 records this moment, is easy to controller unwrapping wire wheels 14 payingoff speeds are realized control accurately.
Be provided with coiling wheels 7 between first transition wheel 8 and second driving main shaft 10; The position of coiling wheels 7 is higher than first transition wheel 8 and second driving main shaft 10, and during wiring, metal wire is laid out by first transition wheel 8 and directly is wound into 10 last times of second driving main shaft; Between the two if pulling force hour; Supporting role that can reduction first transition wheel 8 pairs of metal wires 13, like metal wire 13 by 6 outputs of swing arm line wheel directly around to 10 last times of second driving main shaft, if the pulling force of metal wire 13 reduces; Metal wire 13 can be avoided first transition wheel 8; Metal wire 13 is provided to the direction that the swing arm line takes turns 6 upper pulling forces and has deviation with preset horizontal direction like this, then all not corresponding phenomenon can occur by encoder 4 detected swing arms 5 swing parameters with the CD-ROM drive motor unwrapping wire order that controller sends, and makes installation work not carry out normally.After increasing coiling wheels 7; Guaranteed that the swing arm line takes turns the stable of 6 side metal wires, 13 direction of pull; Make 14 work of unwrapping wire wheels reduce the probability of having made mistakes; Guaranteed stable the carrying out of installation work, also avoided to a certain extent simultaneously breaking away from the phenomenon that supports because metal wire appears in the variation of metal wire upper pulling force.
In order further to optimize technique scheme, in the multi-line cutting machine connecton layout that present embodiment provides, first transition wheel 8, second transition wheel 15, swing arm line wheel 6 and coiling wheels 7 are positioned at same working face.In same plane, be easy to the layout of each wiring round, and in the metal wire winding process, also be difficult for taking place the phenomenon that metal wire is thrown off wiring round, guarantee the security of wiring.
Based on the multi-line cutting machine connecton layout that provides in the foregoing description, the present invention also provides a kind of multi-line cutting machine, and this multi-line cutting machine is provided with the multi-line cutting machine connecton layout that provides in the foregoing description.
Because this multi-line cutting machine has adopted the multi-line cutting machine connecton layout of the foregoing description, so this multi-line cutting machine please refer to the foregoing description by the beneficial effect that the multi-line cutting machine connecton layout brings.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments among this paper.Therefore, the present invention will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (10)
1. multi-line cutting machine connecton layout; Be used for the wiring of multi-line cutting machine; Said multi-line cutting machine comprises that first driving main shaft (9), second driving main shaft (10), the 3rd driving main shaft (11) and 4 wheel driven move main shaft (12); It is characterized in that; The mode of operation of the drive motors of at least one driving main shaft is set to torque control mode, and it is identical with the rotation direction of said driving main shaft that the torque direction of said drive motors is set to, and the moment of torsion of said drive motors is less than the moment of friction of said driving main shaft.
2. multi-line cutting machine connecton layout according to claim 1 is characterized in that the torque of said drive motors is near said moment of friction.
3. according to any described multi-line cutting machine connecton layout of claim 1-2; It is characterized in that the drive motors of the moving main shaft (12) of the drive motors of the drive motors of said first driving main shaft (9), said second driving main shaft (10), the drive motors of said the 3rd driving main shaft (11) and said 4 wheel driven all is set to torque control mode.
4. multi-line cutting machine connecton layout according to claim 1 is characterized in that, also comprises:
The swing arm (5) that the bar tail is fixed and in perpendicular, swung;
The swing arm line wheel (6) that is arranged on the bar head of said swing arm (5) and in said perpendicular, rotates;
Be arranged on said swing arm (5) the bar tail be used to measure said swing arm (5) swing parameter and send the encoder (4) of feedback signal;
Be used to drive the CD-ROM drive motor that the unwrapping wire wheels (14) of said multi-line cutting machine rotate;
Be used to receive said feedback signal and control the controller that said CD-ROM drive motor rotates.
5. multi-line cutting machine connecton layout according to claim 3 is characterized in that, said swing parameter is the angular speed and the angular acceleration of said swing arm (5) swing.
6. multi-line cutting machine connecton layout according to claim 3 is characterized in that, the control mode of said CD-ROM drive motor is PID control.
7. multi-line cutting machine connecton layout according to claim 3; It is characterized in that the leading-out terminal that also includes line end and said swing arm line wheel (6) is in conplane first transition wheel (8) and leading-out terminal and said swing arm line takes turns the lead-in wire terminal of (6) and be in conplane second transition wheel (15).
8. multi-line cutting machine connecton layout according to claim 7; It is characterized in that; Also comprise coiling wheels (7); It is arranged between said first transition wheel (8) and said second driving main shaft (10), and the position of said coiling wheels (7) is higher than said first transition wheel (8) and said second driving main shaft (10).
9. multi-line cutting machine connecton layout according to claim 8 is characterized in that, said first transition wheel (8), said second transition wheel (15), said swing arm line wheel (6) and said coiling wheels (7) are positioned at same working face.
10. a multi-line cutting machine is characterized in that, said multi-line cutting machine is provided with any described multi-line cutting machine connecton layout like claim 1-9.
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| CN113665009A (en) * | 2021-08-30 | 2021-11-19 | 燕山大学 | Wire bow parameter monitoring device for multi-wire cutting machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105897068B (en) * | 2016-04-07 | 2019-04-26 | 武汉菲仕运动控制系统有限公司 | A kind of hard brittle material multi-wire butting machine bi-motor torque synchronous control system |
| CN112247271A (en) * | 2020-10-09 | 2021-01-22 | 苏州庆耀精密机械科技有限公司 | Multi-wire cutting machine |
| CN113665009A (en) * | 2021-08-30 | 2021-11-19 | 燕山大学 | Wire bow parameter monitoring device for multi-wire cutting machine |
| CN113665009B (en) * | 2021-08-30 | 2022-07-19 | 燕山大学 | Wire bow parameter monitoring device for multi-wire cutting machine |
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| CN102615725B (en) | 2015-11-04 |
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