CN102607819A - Full-light-field polarization aberration detection device and detection method - Google Patents

Abstract

The invention discloses a full-light-field polarization aberration detection device and a full-light-field polarization aberration detection method. The device comprises a full polarization state generator (PSG), a full polarization state analyzer (PSA) and a signal processing and control system. The detection method comprises the following steps of: changing the magnitude of polarization control voltage applied to a Faraday rotator, and performing primary measurement; changing the magnitude of the polarization control voltage applied to the Faraday rotator, and performing secondary, tertiary and quaternary measurement; and processing primary, secondary, tertiary and quaternary measurement results according to an algorithm. The device and the method have the characteristics of simple device structure, optical coaxiality, stability, no need of mechanical rotation in measurement, simple algorithm, high spatial resolution and higher measurement speed.

Description

All-optical field Polarization aberration pick-up unit and detection method

Technical field

The present invention relates to the Polarization aberration detection range, particularly relate to a kind of all-optical field Polarization aberration pick-up unit and detection method.

Background technology

The use of optical component such as large-numerical aperture projection objective in the high-accuracy imaging system; Cause incident wave seriously to tilt from axle; Make the transmissivity of two kinds of polarized lights of TE and TM different; Thereby cause image contrast seriously to descend, objectively inevitable requirement is extracted and is analyzed the all-optical field Polarization aberration information of optical components such as large-numerical aperture projection objective.

Detection method about information extraction of all-optical field Polarization aberration and analysis mainly is based on the principle that the all-optical field mueller matrix detects; Through to before the testing sample incident and the detection of all-optical field stokes parameter after the outgoing; Obtain the mueller matrix distribution of all-optical field then according to corresponding algorithm; Be all-optical field Polarization aberration information, its device and detection method generally comprise two parts, that is: full polarization state generator PSG and full polarization state analyzer PSA.

Full polarization state generator PSG part, traditional detection method is generally rotating element polarimetry method (rotating element polarimetry), like technology 1 [Hauge, P.S. formerly; Azzam, R.M.A., et al; " Mueller Matrix Polarimetry, " in Polarized Light, Dennis Goldstein. (Second Edition; Revised and Expanded, Marcel Dekker, Inc.; 2003) .], but rotating element polarimetry method needs rotatory polarization device or phase delay device, thus introduce big measuring error; In the traditional detection method; The oscillating element polarimetry method (oscillating element polarimetry) used is also arranged; As formerly technological 2 [R.M.A.Azzam, " Simulation of mechanical rotation by optical rotation:Application to the design of a new Fourier photopolarimeter ", J.Opt.Soc.Am.68; 518-521 (1978) .] in device; Faraday rotator (4) and (6), quarter wave plate (5) and substrate bias controller (15) are arranged in the device, but the voltage that the substrate bias controller (15) in the device loads is Sine Modulated voltage, need use the bessel transform algorithm; Complexity is big; Two Faraday rotators (4) in the device and the clear aperature of (6) is less and the optically-active angle must opposite sign but equal magnitude can't carry out all-optical field Polarization aberration information to testing sample (7) and carry out the moment fast detecting, need carry out point by point scanning.

Full polarization state analyzer PSA part, traditional detection method generally comprises rotating element polarimetry method (Rotating-element polarimeters) and phase-modulated polarized mensuration (Phase modulating polarimeters), but these detection methods are in order to measure the polarization information of a certain site-specific; Need to this some continuous detecting more than four times,, then need pointwise to scan if detect whole light field; Therefore these detection methods can't realize that the quick real-time of all-optical field polarization information measures, and some device needs accurate rotating mechanism to be rotated, thereby introduce measuring error greatly; Formerly technological 3 [John E.Hubbs, Mark E.Gramer, et al; " Measurement of the Radiometric and Polarization Characteristics of a Micro-Grid Polarizer Infrared Focal Plane Array "; Proc.SPIE 6285,62850C, 2006.] and formerly technological 4 [James K.Boger; Et al; " Modeling Precision and Accuracy of a LWIR Microgrid Array Imaging Polarimeter ", Proc.SPIE 5777,57770U; 2005.] in the instantaneous multichannel measurement imaging polarization detection instrument that proposes mainly form by other element of little polarization analyzer array (9), ccd detector array (10) and some; But wherein do not have compensator (8), can realize the real-time detection of the full stokes parameter of all-optical field, and not influenced by environmental change; Yet but can only detect first three stokes parameter; Can not extract the intensity information of dextrorotation or left-hand polarization light, therefore can not extract the 4th Stokes' parameter, incomplete to the detection of polarization information.

Summary of the invention

The objective of the invention is: the problem of complex algorithm when being Sine Modulated voltage for the on-load voltage that solves formerly problem that the accurate rotating mechanism of the needs that exist in the technology 1 is rotated, formerly exist in the technology 2, formerly exist in the technology 1 and 2 need point-to-point measurement repeatedly and problem that all-optical field is scanned and the not congruent problem of the detection to polarization information that formerly exists in the technology 3 and 4; A kind of all-optical field Polarization aberration pick-up unit and detection method are provided, should have that apparatus structure is simple, common optical axis and stable, measure need not that mechanical rotation, algorithm are simple, high spatial resolution and measuring speed characteristics faster.

Technical solution of the present invention is following:

A kind of all-optical field Polarization aberration pick-up unit, this device comprise full polarization state generator, full polarization state analyzer and signal Processing and control system, and its characteristics are;

Said full polarization state generator comprises laser instrument, laser beam expander, the polarizer, first Faraday rotator, quarter wave plate and second Faraday rotator; Said full polarization state analyzer comprises compensator, little polarization analyzer array and ccd detector array; Its position relation is: along the laser outbound course of this laser instrument, be described laser beam expander, the polarizer, first Faraday rotator, quarter wave plate, second Faraday rotator, compensator (8), little polarization analyzer array and ccd detector array successively;

Said little polarization analyzer array is made up of the array of the ultra pixel of little polarization analyzer; The ultra pixel of described little polarization analyzer is made up of the little analyzer of 0 degree linear polarization, the little analyzer of 45 degree linear polarizations, the 90 degree little analyzers of linear polarization and the little analyzer of 135 degree linear polarizations; Described ccd detector array is made up of the array of the ultra pixel of ccd detector, and the ultra pixel of said ccd detector array is made up of four identical ccd detector sub-pixels; Described little polarization analyzer array and described ccd detector array integrate, and described ultra pel array of little polarization analyzer and the ultra pel array of ccd detector are aimed at one by one, form to aim at ultra pel array;

Said signal Processing and control system comprise amplifier, synchronous data collection card, computing machine, first substrate bias controller and second substrate bias controller;

Described ccd detector array links to each other with described input end and computer through described amplifier, synchronous data collection card; The input end of described first substrate bias controller of the output termination of said computing machine and second substrate bias controller; The control end of the described compensator of output termination of described first substrate bias controller, the control end of described first Faraday rotator of the output termination of described second substrate bias controller and second Faraday rotator.

The said polarizer is polaroid, polarizing prism or polarization phase mask.

Said first Faraday rotator and second Faraday rotator are identical, and under the identical on-load voltage condition of said second substrate bias controller, size is identical, direction is identical or optically-active angle in the opposite direction and continuously adjustable to produce two.

Said quarter wave plate is crystalline material type quarter wave plate, multi-component compound quarter wave plate, reflection rib build quarter wave plate or birefringent film type quarter wave plate, and the scope of its phase-delay quantity is: 89 °～91 °.

Said compensator is light ball modulator, liquid crystal phase delay device, lithium columbate crystal, under the on-load voltage condition of said first substrate bias controller, produces optical element or the device that continuous adjustable phase postpones.

Described synchronous data collection card is the multi-channel high-speed data capture card with A/D translation function.

Said computing machine is equipped with the bias voltage Control Software of data processing, analysis software, first substrate bias controller and second substrate bias controller.

Said first substrate bias controller and second substrate bias controller are continuously adjustable D.C. regulated power supplies.

Utilize the all-optical field Polarization aberration detection method of above-mentioned all-optical field Polarization aberration pick-up unit to testing sample, this method comprises the following steps:

1. described Faraday rotator is loaded control voltage partially, carry out the first time and measure;

Computing machine changes the size of controlling voltage on said first Faraday rotator and second Faraday rotator partially simultaneously through described second substrate bias controller, and the optically-active angle that said first Faraday rotator and second Faraday rotator are produced is respectively γ ₁With-γ ₁After the laser beam that said laser instrument produces expands bundle through said laser beam expander; Shine on the said polarizer; Become the linear polarization parallel beam, then through the modulation of said first Faraday rotator, quarter wave plate and second Faraday rotator, the Stokes vector that obtains parallel beam is:

$S_1^{\mathrm{in}}=\left(\begin{array}{c}{s}_{01}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="11"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{11}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_1\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_1\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_1\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_1\end{array}\right)$

After this parallel beam sees through said testing sample and compensator; Parallel being incident on above the ultra pel array of said little polarization analyzer; By the ultra pel array of said ccd detector light intensity signal is surveyed; Computing machine changes on the said compensator through said first substrate bias controller and loads the size of control voltage partially, and it is 2 π that the electric light that said compensator is produced postpones, and four little analyzer sub-pixels in this moment and the ultra pixel of said little polarization analyzer: 0 spends the little analyzer of linear polarization; The little analyzer of 45 degree linear polarizations, the light intensity that the little analyzer of 90 degree linear polarizations, corresponding four the identical ccd detector sub-pixels of the 135 degree little analyzers of linear polarization detect is followed successively by: I ₀, I ₄₅, I ₉₀And I ₁₃₅, and close and write as a matrix, being referred to as the electric light delay is the ultra pixel of light intensity matrix (1601) of 2 π, is expressed as:

$\left(\begin{array}{cc}{I}_0& I_{45}\\ I_{135}& I_{90}\end{array}\right)$

The ultra pel array of light intensity matrix that described electric light delay is 2 π closes is write as a bigger matrix, and being referred to as the electric light delay is the light intensity matrix of 2 π:

Under the constant situation of other conditions; Computing machine changes said compensator (8) through said first substrate bias controller and goes up the size that loads inclined to one side control voltage; The electric light that said compensator is produced postpones to be pi/2; Four little analyzer sub-pixels in this moment and the ultra pixel of said little polarization analyzer: 0 spends the little analyzer of linear polarization; The little analyzer of 45 degree linear polarizations, the light intensity that the little analyzer of 90 degree linear polarizations, corresponding four the identical ccd detector sub-pixels of the 135 degree little analyzers of linear polarization detect is followed successively by: I _R0, I _R45, I _R90And I _R135, close and write as a matrix, be referred to as electric light and postpone to be the ultra pixel of light intensity matrix of pi/2:

$\left(\begin{array}{cc}{I}_{R0}& I_{R45}\\ I_{R135}& I_{R90}\end{array}\right)$

This electric light postpones to be write as a bigger matrix for the ultra pel array of light intensity matrix of pi/2 closes, and is referred to as electric light and postpones to be the light intensity matrix of pi/2:

Through computing machine to electric light postpone be the ultra pixel of light intensity matrix of 2 π delay is the analysis and the processing of the ultra pixel of light intensity matrix of pi/2 with electric light, the Stokes vector that draws the site-specific outgoing beam is:

$S_1^{\mathrm{out}}=\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\left(\begin{array}{c}{I}_0+I_{90}\\ I_0-I_{90}\\ I_{45}-I_{135}\\ I_{R45}-I_{\mathrm{<figure-callout\; id="135"\; label="R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">R</figure-callout>}135}\end{array}\right)=\left(\begin{array}{c}{I}_{R0}+I_{R90}\\ I_{R0}-I_{R90}\\ I_{45}-I_{135}\\ I_{R45}-I_{\mathrm{<figure-callout\; id="135"\; label="R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">R</figure-callout>}135}\end{array}\right)$

2. computing machine changes the size of controlling voltage on said first Faraday rotator and second Faraday rotator partially simultaneously through described second substrate bias controller, and the optically-active angle that said first Faraday rotator and second Faraday rotator are produced is respectively γ ₂, γ ₃, γ ₄With-γ ₂,-γ ₃,-γ ₄Change and load the size of control voltage partially on the Faraday rotator; Repeating step 1.; Carry out second and third respectively, measure for four times, the Stokes vector of parallel beam and the Stokes vector of site-specific outgoing beam are respectively after the modulation of said first Faraday rotator, quarter wave plate and second Faraday rotator accordingly:

${\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">S</figure-callout>}}_2^{\mathrm{in}}=\left(\begin{array}{c}{s}_{02}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="12"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{12}^{\mathrm{in}}\\ s_{22}^{\mathrm{in}}\\ s_{32}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_2\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_2\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_2\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_2\end{array}\right)$ ${\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">S</figure-callout>}}_2^{\mathrm{out}}=\left(\begin{array}{c}{s}_{02}^{\mathrm{out}}\\ s_{12}^{\mathrm{out}}\\ s_{22}^{\mathrm{out}}\\ s_{32}^{\mathrm{out}}\end{array}\right)$

${\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_3^{\mathrm{in}}=\left(\begin{array}{c}{s}_{03}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="13"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{13}^{\mathrm{in}}\\ s_{23}^{\mathrm{in}}\\ s_{33}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_3\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_3\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_3\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_3\end{array}\right)$ ${\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_3^{\mathrm{out}}=\left(\begin{array}{c}{s}_{03}^{\mathrm{out}}\\ s_{13}^{\mathrm{out}}\\ s_{23}^{\mathrm{out}}\\ s_{33}^{\mathrm{out}}\end{array}\right)$

${\mathrm{<figure-callout\; id="4"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_4^{\mathrm{in}}=\left(\begin{array}{c}{s}_{04}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="14"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{14}^{\mathrm{in}}\\ s_{24}^{\mathrm{in}}\\ s_{34}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_4\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_4\end{array}\right)$ ${\mathrm{<figure-callout\; id="4"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_4^{\mathrm{out}}=\left(\begin{array}{c}{s}_{04}^{\mathrm{out}}\\ s_{14}^{\mathrm{out}}\\ s_{24}^{\mathrm{out}}\\ s_{34}^{\mathrm{out}}\end{array}\right)$

3. according to algorithm above-mentioned four measurement results are handled;

With in four measuring processes, through the Stokes vector of parallel beam after the modulation of said first Faraday rotator, quarter wave plate and second Faraday rotator

And

Close and write as a matrix S ^In, with the Stokes vector of outgoing beam And

Merge and write as a matrix S ^Out, then have: S ^Out=MS ^In, that is:

$\left(\begin{array}{cccc}{s}_{01}^{\mathrm{out}}& s_{02}^{\mathrm{out}}& s_{03}^{\mathrm{out}}& s_{04}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}& s_{12}^{\mathrm{out}}& s_{13}^{\mathrm{out}}& s_{14}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}& s_{22}^{\mathrm{out}}& s_{23}^{\mathrm{out}}& s_{24}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}& s_{32}^{\mathrm{out}}& s_{33}^{\mathrm{out}}& s_{34}^{\mathrm{out}}\end{array}\right)=\left(\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right)\&times;\left(\begin{array}{cccc}{s}_{01}^{\mathrm{in}}& s_{02}^{\mathrm{in}}& s_{03}^{\mathrm{in}}& s_{04}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="11"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{11}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="12"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{12}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="13"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{13}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="14"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{14}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}& s_{22}^{\mathrm{in}}& s_{23}^{\mathrm{in}}& s_{24}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}& s_{32}^{\mathrm{in}}& s_{33}^{\mathrm{in}}& s_{34}^{\mathrm{in}}\end{array}\right)$

Wherein: M is the mueller matrix of testing sample, works as S ^InWhen being the linear independence invertible matrix, can obtain matrix M, that is:

M＝S ^out(S ⁱⁿ) ^-1

Described matrix M is all-optical field Polarization aberration information.

Advantage of the present invention is:

1, algorithm is simple and need not mechanical rotation: among the present invention; Second substrate bias controller of full polarization state generator PSG part is continuously adjustable D.C. regulated power supply; Replaced Sine Modulated voltage that first Faraday rotator and second Faraday rotator are modulated, algorithm is more simple, and in the whole measuring process; Only need change first and second Faraday rotator and load the size of control voltage partially above the compensator, need not carry out mechanical rotation optical element.

2, common optical axis and simple and stable structure, spatial resolution height: among the present invention; Each element common optical axis; System stability improves greatly; Spatial resolution is mainly limited by the ultra pixel bin size in little polarization analyzer array and the ccd detector array simultaneously, utilizes less ultra pixel bin can obtain higher spatial resolution.

3, can obtain the Polarization aberration of all-optical field: in the present invention; Through measuring that four electric light postpone for four times is that light intensity matrix and four electric light of 2 π postpone to be the light intensity matrix of pi/2; These eight light intensity matrixes are input to carry out corresponding algorithm process in the computing machine, can obtain the Polarization aberration information of all-optical field.

4, measuring speed is very fast: among the present invention; The size that the size of the Faraday rotator anglec of rotation and electric light postpone can change fast in speed through the size that voltage is controlled in computer control partially; And because the use of ultra pel array; Need not carry out point by point scanning, therefore, can carry out fast detecting all-optical field.

In a word, the present invention have that apparatus structure is simple, common optical axis and stable, measure need not that mechanical rotation, algorithm are simple, high spatial resolution and measuring speed characteristics faster.

Description of drawings

Fig. 1 is an all-optical field Polarization aberration pick-up unit structural drawing according to the invention;

Fig. 2 is the polarizer in the embodiment of the invention, first Faraday rotator, quarter wave plate and the second Faraday rotator displacement structure figure;

Fig. 3 implements first and second Faraday rotator bias voltage control structure figure in the row for the present invention;

Fig. 4 is large scale lithium columbate crystal displacement structure figure in the embodiment of the invention;

Fig. 5 is large scale lithium niobate crystal body-bias control structure figure in the embodiment of the invention;

Fig. 6 is that the large scale lithium columbate crystal is placed and bias voltage control structure figure in the embodiment of the invention;

Fig. 7 is little polarization analyzer array and a ccd detector array alignment structural drawing in the embodiment of the invention;

To postpone be that delay is the light intensity matrix align structures figure of pi/2 with electric light for the light intensity matrix of 2 π to Fig. 8 for electric light in the embodiment of the invention;

Fig. 9 is that all-optical field Polarization aberration according to the invention detects the detection method process flow diagram.

Embodiment

The embodiment of the invention provides a kind of all-optical field Polarization aberration pick-up unit and detection method; The purpose of embodiment, technical scheme and advantage for a better understanding of the present invention; To combine the accompanying drawing of the embodiment of the invention to explain below; Based on inventive embodiment, other embodiment that those of ordinary skills are obtained under the prerequisite of not making creative work are the scopes that the present invention protected.

Embodiment 1

In order to measure the all-optical field Polarization aberration; A kind of all-optical field Polarization aberration pick-up unit is provided in the embodiment of the invention; Referring to Fig. 1; This device comprises: full polarization state generator PSG, full polarization state analyzer PSA and signal Processing and control system; Said full polarization state generator PSG comprises laser instrument 1, laser beam expander 2, the polarizer 3, first Faraday rotator 4, quarter wave plate 5 and second Faraday rotator 6; Said full polarization state analyzer PSA comprises compensator 8, little polarization analyzer array 9 and ccd detector array 10; Said signal Processing and control system comprise amplifier 11, synchronous data collection card 12, computing machine 13, first substrate bias controller 14 and second substrate bias controller 15; Its position relation is: on the parallel incident beam working direction that is produced along laser instrument 1; Be described laser beam expander 2, the polarizer 3, first Faraday rotator 4, quarter wave plate 5, second Faraday rotator 6, compensator 8, little polarization analyzer array 9 and ccd detector array 10 successively, described ccd detector array 10 links to each other the input end of described first substrate bias controller 14 of the output termination of said computing machine 13 and second substrate bias controller 15 through described amplifier 11, synchronous data collection card 12 with the input end of described computing machine 13; The control end of the described compensator 8 of output termination of described first substrate bias controller 14, the control end of described first Faraday rotator 4 of the output termination of described second substrate bias controller 15 and second Faraday rotator 6.

In the present embodiment

The said polarizer 3, first Faraday rotator 4, quarter wave plate 5 and second Faraday rotator, 6 displacement structure figure; Referring to Fig. 2, the z axle is the direction of propagation that parallel incident beam advances, and the optical axis of the polarizer 3 is placed along the x direction of principal axis; The logical light face of first Faraday rotator 4 and second Faraday rotator 6 is perpendicular to systematic optical axis; And can under the control of second substrate bias controller 15, modulate accurately the optically-active angle, the optical axis of quarter wave plate is perpendicular to systematic optical axis, and orientation angles can be chosen wantonly.

Said first and second Faraday rotator bias voltage control structure figure; Referring to Fig. 3; Said substrate bias controller 15 is continuously adjustable D.C. regulated power supply; Said first Faraday rotator 4 is identical or opposite with second Faraday rotator, 6 direction of windings, and can be under the identical on-load voltage condition of said second substrate bias controller 15, and size is identical, direction is identical or opposite and continuously adjustable optically-active angle to produce two.

Said compensator 8 is two and makes identical large scale lithium columbate crystal; Referring to Fig. 4; Be large scale lithium columbate crystal displacement structure figure, the z axle is the direction of propagation that parallel incident beam advances, and optical axis 801 directions of first size lithium columbate crystal are along the x axle; The optical axis 802 of second largest size lithium columbate crystal is along the y direction of principal axis; The front 805 of top 803, following 804 and second largest size lithium columbate crystal of first size lithium columbate crystal and back 806 are metal electrode layer, referring to Fig. 5, are large scale lithium niobate crystal body-bias control structure figure; The z axle is the direction of propagation that parallel incident beam advances; Optical axis 801 directions of first size lithium columbate crystal are along the x axle, and the optical axis 802 of second largest size lithium columbate crystal is along the y direction of principal axis, and top 803 and following 804 of first size lithium columbate crystal is connected the positive pole and the negative pole of first substrate bias controller 14 respectively; Positive pole and negative pole that the front 805 of second largest size lithium columbate crystal and back 806 are connected first substrate bias controller 14 respectively, first size lithium columbate crystal produces continuously adjustable phase delay with second largest size lithium columbate crystal under the on-load voltage condition of identical size.Referring to Fig. 6; Be the second way that the large scale lithium columbate crystal is placed and bias voltage is controlled; The z axle is the direction of propagation that parallel incident beam advances; The optical axis direction 801,802 of first and second large scale lithium columbate crystal is all along the x direction of principal axis, above 803 and 806 and following 804 and 805 be metal electrode layer, and top 803 and 806 all be connected first substrate bias controller 14 positive pole; Below 804 and 805 all connect first substrate bias controller 14 negative pole; Between first size lithium columbate crystal and second largest size lithium columbate crystal, place one 1/2 wave plate, its optical axis is parallel or perpendicular to the placement of x axle, first size lithium columbate crystal produces continuously adjustable phase delay with second largest size lithium columbate crystal under the on-load voltage condition of identical size.

Referring to Fig. 7; Be little polarization analyzer array and ccd detector array alignment structural drawing; The z axle is the direction of propagation that parallel incident beam advances; Said little polarization analyzer array 9 is made up of the array of the ultra pixel 901 of little polarization analyzer; The ultra pixel 901 of described little polarization analyzer is made up of 0 degree linear polarization little analyzer 903,90 degree little analyzers 904 of linear polarization of little analyzer 902,45 degree linear polarizations and the little analyzer 905 of 135 degree linear polarizations, and described ccd detector array 10 is made up of the array of the ultra pixel 1001 of ccd detector, and the ultra pixel 1001 of said ccd detector array is made up of four identical ccd detector sub-pixels; Described little polarization analyzer array 9 integrates with described ccd detector array 10; Constitute high resolving power polarization imaging sensor (High Resolution Polarization Imaging Sensor); Ultra pixel 901 arrays of described little polarization analyzer and ultra pixel 1001 arrays of ccd detector are aimed at one by one, form to aim at ultra pel array 901-1001;

Said synchronous data collection card 12 is the multi-channel high-speed data capture cards with A/D translation function.

Said computing machine 13 is equipped with the bias voltage Control Software of data processing, analysis software and first substrate bias controller 14 and second substrate bias controller 15.

Said first substrate bias controller 14 is the continuously adjustable D.C. regulated power supplies of 0V-6000V, and said second substrate bias controller 15 is the continuously adjustable D.C. regulated power supplies of 0V-1000V.

The concrete structure and the parameter of the embodiment of the invention are following:

Said laser instrument 1 is the He-Ne laser instrument of 632.8nm, and first Faraday rotator 4 and second Faraday rotator 6 are the large aperture Faraday rotator, and clear aperature is 40mm～100mm; Use wavelength to be 633nm, extinction ratio is greater than 30dB, and transmitance is more than or equal to 97%; Compensator 8 is the large scale lithium columbate crystal; Non-impurity-doped, the transmitance in 0.4～0.5 mum wavelength scope is up to 98%, and the phase-delay quantity error is less than 0.3 ⁰High resolving power polarization imaging sensor (High Resolution Polarization Imaging Sensor) after little polarization analyzer array 9 adopts the two integrated with ccd detector array 10; Its resolution is 1000 * 1000; Pel spacing is 7.4 μ m, but 14 employings of first substrate bias controller can provide 0V-6000V the D.C. regulated power supply of tuningout control voltage continuously, but second substrate bias controller 15 is for providing 0V-1000V the D.C. regulated power supply of tuningout control voltage continuously.

Embodiment 2

In order to measure all-optical field Polarization aberration information, provide in the embodiment of the invention based on the all-optical field Polarization aberration detection method of said all-optical field Polarization aberration pick-up unit testing sample 7,, it is characterized in that this detection method comprises the following steps: referring to Fig. 9

1. change the size that loads inclined to one side control voltage on the Faraday rotator, carry out the first time and measure;

For the ease of reasoning and calculation, it is following at first to introduce some relevant ABCs of polarization optics:

The linear phase delayer is α at the quick shaft direction angle, and phase delay is that its mueller matrix is under 6 the situation:

$R_{\mathrm{\&alpha;},\mathrm{\&delta;}}=\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&alpha;}+{\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&alpha;}\cos \mathrm{\&delta;}& (1-\cos \mathrm{\&delta;})\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\sin \mathrm{\&delta;}\\ 0& (1-\cos \mathrm{\&delta;})\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& {\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&alpha;}+{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&alpha;}\cos \mathrm{\&delta;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}\sin \mathrm{\&delta;}\\ 0& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\sin \mathrm{\&delta;}& -\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}\sin \mathrm{\&delta;}& \cos \mathrm{\&delta;}\end{array}\right)$

Therefore, be 0 at the quick shaft direction angle, when electric light postponed to be respectively 2 π, pi/2, its mueller matrix was respectively:

${\mathrm{<figure-callout\; id="2"\; label="R"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">R</figure-callout>}}_{\mathrm{0,2}\mathrm{\&pi;}}=\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 1& 0\\ 0& 0& 0& 1\end{array}\right)$ $R_{0,\mathrm{\&pi;}/2}=\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 0& 1\\ 0& 0& -1& 0\end{array}\right)$

The quick shaft direction angle is the quarter wave plate 5 of α, and its mueller matrix is:

$R_{\mathrm{\&alpha;},\mathrm{\&pi;}/2}=\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&alpha;}& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\\ 0& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& {\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&alpha;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}\\ 0& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}& -\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& 0\end{array}\right)$

When the linear polarization polarizer, analyzer were β at its angle, polarization direction, its mueller matrix was:

$P_{\mathrm{\&beta;}}=\frac{1}{2}\left(\begin{array}{cccc}1& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& 0\\ \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&beta;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& 0\\ \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& {\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&beta;}& 0\\ 0& 0& 0& 0\end{array}\right)$

Therefore, the mueller matrix of 0 degree linear polarization little analyzer 903,90 degree little analyzers 904 of linear polarization of little analyzer 902,45 degree linear polarizations and the little analyzer 905 of 135 degree linear polarizations is respectively:

$P_0=\frac{1}{2}\left(\begin{array}{cccc}1& 1& 0& 0\\ 1& 1& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\end{array}\right)$ ${\mathrm{<figure-callout\; id="45"\; label="P"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">P</figure-callout>}}_{45}=\frac{1}{2}\left(\begin{array}{cccc}1& 0& 1& 0\\ 0& 0& 0& 0\\ 1& 0& 1& 0\\ 0& 0& 0& 0\end{array}\right)$

${\mathrm{<figure-callout\; id="90"\; label="P"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">P</figure-callout>}}_{90}=\frac{1}{2}\left(\begin{array}{cccc}1& -1& 0& 0\\ -1& 1& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\end{array}\right)$ ${\mathrm{<figure-callout\; id="135"\; label="P"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">P</figure-callout>}}_{135}=\frac{1}{2}\left(\begin{array}{cccc}1& 0& -1& 0\\ 0& 0& 0& 0\\ -1& 0& 1& 0\\ 0& 0& 0& 0\end{array}\right)$

Wherein angle, the polarizer 3 polarization direction is 0 when spending, and the mueller matrix of its mueller matrix and the little analyzer 902 of 0 degree linear polarization is identical,

The linearly polarized light of incident sees through after the desirable Faraday rotator; Emergent light electric vector vibration plane (is supposed relative incident light electric vector vibration plane rotation γ angle to see in face of the direction of propagation of light; The angle that is rotated counterclockwise is for just), then the mueller matrix of desirable Faraday rotator is:

$F_{\mathrm{\&gamma;}}=\left[\begin{array}{cccc}1& 0& 0& 0\\ 0& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&gamma;}& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&gamma;}& 0\\ 0& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&gamma;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&gamma;}& 0\\ 0& 0& 0& 1\end{array}\right]$

Computing machine 13 changes the size of controlling voltage on said first Faraday rotator 4 and second Faraday rotator 6 partially simultaneously through described second substrate bias controller 15, and the optically-active angle that said first Faraday rotator 4 and second Faraday rotator 6 are produced is respectively γ ₁With-γ ₁After then this laser beam expands bundle through said laser beam expander 2; Shine on the said polarizer 3, become the linear polarization parallel beam, then the modulation through said first Faraday rotator 4, quarter wave plate 5 and second Faraday rotator 6; Obtain parallel beam, establish the Stokes vector of the laser beam that laser instrument 1 produces and the Stokes vector of this parallel beam and be respectively:

$S_0=\left(\begin{array}{c}I\\ 0\\ 0\\ 0\end{array}\right)$ $S_1^{\mathrm{in}}=\left(\begin{array}{c}{s}_{01}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="11"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{11}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}\end{array}\right)$

Making angle, the polarizer 3 polarization direction is β, and the quick shaft direction angle of quarter wave plate 5 is that α then has:

$S_1^{\mathrm{in}}=\left(\begin{array}{c}{s}_{01}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="11"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{11}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}\end{array}\right)=F_{{-\mathrm{\&gamma;}}_1}{R}_{\mathrm{\&alpha;}}{F}_{{\mathrm{\&gamma;}}_1}{P}_{\mathrm{\&beta;}}{S}_0$

$=\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&gamma;}}_1& {\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&gamma;}}_1& 0\\ 0& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_1& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&gamma;}}_1& 0\\ 0& 0& 0& 1\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&alpha;}& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\\ 0& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& {\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&alpha;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}\\ 0& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&alpha;}& -\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&alpha;}& 0\end{array}\right)\&times;$

$\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_1& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_1& 0\\ 0& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_1& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_1& 0\\ 0& 0& 0& 1\end{array}\right)\&times;\frac{1}{2}\left(\begin{array}{cccc}1& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}& \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& 0\\ \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^{2}2\mathrm{\&beta;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& 0\\ \mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& \mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&beta;}\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&beta;}& {\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}}^{2}2\mathrm{\&beta;}& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{c}I\\ 0\\ 0\\ 0\end{array}\right)$

$=\frac{I}{2}\left(\begin{array}{c}1\\ \frac{\mathrm{Cos}({4\mathrm{\&gamma;}}_1+2\mathrm{\&beta;}-4\mathrm{\&alpha;})+\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}2\mathrm{\&beta;}}{2}\\ -\frac{\mathrm{Sin}({4\mathrm{\&gamma;}}_1+2\mathrm{\&beta;}-4\mathrm{\&alpha;})-\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}2\mathrm{\&beta;}}{2}\\ -\mathrm{Sin}({2\mathrm{\&gamma;}}_1+2\mathrm{\&beta;}+2\mathrm{\&alpha;})\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_1\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_1\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}{2\mathrm{\&gamma;}}_1\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_1\end{array}\right)$ α=0 and β=0 o'clock

After this parallel beam sees through said testing sample 7 and compensator 8; Parallel being incident on above ultra pixel 901 arrays of said little polarization analyzer; By ultra pixel 1001 arrays of said ccd detector light intensity signal is surveyed; Computing machine 13 changes the size that loads inclined to one side control voltage on the said compensator 8 through said first substrate bias controller 14; It is 2 π that the electric light that said compensator 8 is produced postpones; See through four little analyzer sub-pixels in the ultra pixel 901 of said little polarization analyzer this moment: the little analyzer 902 of 0 degree linear polarization; The Stokes vector of four bundle parallel beams of the little analyzer of 45 degree linear polarizations 903,90 degree little analyzers 904 of linear polarization and the little analyzer 905 of 135 degree linear polarizations is made as successively: and

is to be measured ++ ++ ++ on the sample 7 therewith the corresponding site-specific of four bundle parallel beams Stokes vector is

that following relation of plane is then arranged:

$S_0^{\mathrm{out}}=P_0{\mathrm{<figure-callout\; id="2"\; label="P"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">P</figure-callout>}}_{\mathrm{0,2}\mathrm{\&pi;}}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& 1& 0& 0\\ 1& 1& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 1& 0\\ 0& 0& 0& 1\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}+s_{11}^{\mathrm{out}}\\ s_{01}^{\mathrm{out}}+s_{11}^{\mathrm{out}}\\ 0\\ 0\end{array}\right)$

${\mathrm{<figure-callout\; id="45"\; label="S"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">S</figure-callout>}}_{45}^{\mathrm{out}}=P_{45}{\mathrm{<figure-callout\; id="2"\; label="P"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">P</figure-callout>}}_{\mathrm{0,2}\mathrm{\&pi;}}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& 0& 1& 0\\ 0& 0& 0& 0\\ 1& 0& 1& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 1& 0\\ 0& 0& 0& 1\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}+s_{21}^{\mathrm{out}}\\ 0\\ s_{01}^{\mathrm{out}}+s_{21}^{\mathrm{out}}\\ 0\end{array}\right)$

${\mathrm{<figure-callout\; id="90"\; label="S"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">S</figure-callout>}}_{90}^{\mathrm{out}}=P_{90}{\mathrm{<figure-callout\; id="2"\; label="P"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">P</figure-callout>}}_{\mathrm{0,2}\mathrm{\&pi;}}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& -1& 0& 0\\ -1& 1& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 1& 0\\ 0& 0& 0& 1\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}-s_{11}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}-s_{01}^{\mathrm{out}}\\ 0\\ 0\end{array}\right)$

${\mathrm{<figure-callout\; id="135"\; label="S"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">S</figure-callout>}}_{135}^{\mathrm{out}}=P_{135}{\mathrm{<figure-callout\; id="2"\; label="P"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">P</figure-callout>}}_{\mathrm{0,2}\mathrm{\&pi;}}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& 0& -1& 0\\ 0& 0& 0& 0\\ -1& 0& 1& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 1& 0\\ 0& 0& 0& 1\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}-s_{21}^{\mathrm{out}}\\ 0\\ s_{21}^{\mathrm{out}}-s_{01}^{\mathrm{out}}\\ 0\end{array}\right)$

Since with four little analyzer sub-pixels in the ultra pixel 901 of said little polarization analyzer: 0 spends the little analyzer 902 of linear polarization; The little analyzer 903 of 45 degree linear polarizations; Little analyzer 905 corresponding four the identical CCD detectors of little analyzer 904, the 135 degree linear polarizations of 90 degree linear polarizations can only be surveyed light intensity signal; Can not detecting polarization attitude signal; So the signal that sub-detector detects, is respectively corresponding to first parameter of stokes parameter for seeing through the light intensity of little analyzer sub-pixel:

$I_0=\frac{s_{01}^{\mathrm{out}}+s_{11}^{\mathrm{out}}}{2}$ $I_{45}=\frac{s_{01}^{\mathrm{out}}+s_{21}^{\mathrm{out}}}{2}$ $I_{90}=\frac{s_{01}^{\mathrm{out}}-s_{11}^{\mathrm{out}}}{2}$ $I_{135}=\frac{s_{01}^{\mathrm{out}}-s_{21}^{\mathrm{out}}}{2}$

After computing machine 13 analysis and handling, can obtain first three stokes parameter that this little polarization analyzer array 9 surpasses pixel 901 outgoing beam polarization states, be respectively:

$s_{01}^{\mathrm{out}}=I_0+I_{90}$ $s_{11}^{\mathrm{out}}=I_0-I_{90}$ $s_{21}^{\mathrm{out}}=I_{45}-{\mathrm{<figure-callout\; id="135"\; label="I"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">I</figure-callout>}}_{135}$

These four light intensity: I ₀, I ₄₅, I ₉₀And I ₁₃₅, can close and write as a matrix, being referred to as the electric light delay is the ultra pixel 1601 of light intensity matrix of 2 π, can be expressed as:

$\left(\begin{array}{cc}{I}_0& I_{45}\\ I_{135}& I_{90}\end{array}\right)$

Ultra pixel 1601 arrays of light intensity matrix that this electric light delay is 2 π can close is write as a bigger matrix, and being referred to as the electric light delay is the light intensity matrix 16 of 2 π, can be expressed as:

Under the constant situation of other conditions; Computing machine 13 changes the size that loads inclined to one side control voltage on the said compensator 8 through said first substrate bias controller 14; The electric light that said compensator 8 is produced postpones to be pi/2; See through four little analyzer sub-pixels in the ultra pixel 901 of said little polarization analyzer this moment: the little analyzer 902 of 0 degree linear polarization; The Stokes vector of four bundle parallel beams of little analyzer 903,90 degree little analyzers 904 of linear polarization of 45 degree linear polarizations and the little analyzer 905 of 135 degree linear polarizations is made as successively: and

then has following relation of plane:

$S_{R0}^{\mathrm{out}}=P_0{P}_{0,\mathrm{\&pi;}/2}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& 1& 0& 0\\ 1& 1& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 0& 1\\ 0& 0& -1& 0\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}+s_{11}^{\mathrm{out}}\\ s_{01}^{\mathrm{out}}+s_{11}^{\mathrm{out}}\\ 0\\ 0\end{array}\right)$

${\mathrm{<figure-callout\; id="45"\; label="S\; R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">S</figure-callout>}}_R^{45}=P_{45}{P}_{0,\mathrm{\&pi;}/2}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& 0& 1& 0\\ 0& 0& 0& 0\\ 1& 0& 1& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 0& 1\\ 0& 0& -1& 0\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}+s_{31}^{\mathrm{out}}\\ 0\\ s_{01}^{\mathrm{out}}+s_{31}^{\mathrm{out}}\\ 0\end{array}\right)$

${\mathrm{<figure-callout\; id="90"\; label="S\; R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">S</figure-callout>}}_R^{90}=P_{90}{P}_{0,\mathrm{\&pi;}/2}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& -1& 0& 0\\ -1& 1& 0& 0\\ 0& 0& 0& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 0& 1\\ 0& 0& -1& 0\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}-s_{11}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}-s_{01}^{\mathrm{out}}\\ 0\\ 0\end{array}\right)$

${\mathrm{<figure-callout\; id="135"\; label="S\; R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">S</figure-callout>}}_R^{135}=P_{135}{P}_{0,\mathrm{\&pi;}/2}{S}_1^{\mathrm{out}}=\frac{I}{2}\left(\begin{array}{cccc}1& 0& -1& 0\\ 0& 0& 0& 0\\ -1& 0& 1& 0\\ 0& 0& 0& 0\end{array}\right)\&times;\left(\begin{array}{cccc}1& 0& 0& 0\\ 0& 1& 0& 0\\ 0& 0& 0& 1\\ 0& 0& -1& 0\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}-s_{31}^{\mathrm{out}}\\ 0\\ s_{31}^{\mathrm{out}}-s_{01}^{\mathrm{out}}\\ 0\end{array}\right)$

Since with four little analyzer sub-pixels in the ultra pixel 901 of said little polarization analyzer: 0 spends the little analyzer 902 of linear polarization; The little analyzer 903 of 45 degree linear polarizations; Little analyzer 905 corresponding four the identical CCD detectors of little analyzer 904, the 135 degree linear polarizations of 90 degree linear polarizations can only be surveyed light intensity signal; Can not detecting polarization attitude signal; So the signal that sub-detector detects, is respectively corresponding to first parameter of stokes parameter for seeing through the light intensity of little analyzer sub-pixel:

$I_{R0}=\frac{s_{01}^{\mathrm{out}}+s_{11}^{\mathrm{out}}}{2}$ $I_{R45}=\frac{s_{01}^{\mathrm{out}}+s_{31}^{\mathrm{out}}}{2}$ $I_{R90}=\frac{s_{01}^{\mathrm{out}}-s_{11}^{\mathrm{out}}}{2}$ $I_{R135}=\frac{s_{01}^{\mathrm{out}}-s_{31}^{\mathrm{out}}}{2}$

After computing machine 13 analysis and handling, can obtain first and second and four these three stokes parameters that this little polarization analyzer array 9 surpasses pixel 901 outgoing beam polarization states, be respectively:

$s_{01}^{\mathrm{out}}=I_{R0}+I_{R90}$ $s_{11}^{\mathrm{out}}=I_{R0}-I_{R90}$ $s_{31}^{\mathrm{out}}=I_{R45}-{\mathrm{<figure-callout\; id="135"\; label="I\; R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">I</figure-callout>}}_R$

These four light intensity: I _R0, I _R45, I _R90And I _R135, can close and write as a matrix, be referred to as electric light and postpone to be the ultra pixel 1701 of light intensity matrix of pi/2, can be expressed as:

$\left(\begin{array}{cc}{I}_{R0}& I_{R45}\\ I_{R135}& I_{R90}\end{array}\right)$

Electric light postpones to be write as a bigger matrix for ultra pixel 1701 arrays of light intensity matrix of pi/2 can close, and is referred to as electric light and postpones to be the light intensity matrix 17 of pi/2, can be expressed as:

Postponing through 13 pairs of electric light of computing machine is the ultra pixel 1601 of light intensity matrix and analysis and the processing of electric light delay for the ultra pixel 1701 of light intensity matrix of pi/2 of 2 π, and the Stokes vector that can draw the site-specific outgoing beam is:

$S_1^{\mathrm{out}}=\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\left(\begin{array}{c}{I}_0+I_{90}\\ I_0-I_{90}\\ I_{45}-I_{135}\\ I_{R45}-{\mathrm{<figure-callout\; id="135"\; label="I\; R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">I</figure-callout>}}_R\end{array}\right)=\left(\begin{array}{c}{I}_{R0}+I_{R90}\\ I_{R0}-I_{R90}\\ I_{45}-I_{135}\\ I_{R45}-{\mathrm{<figure-callout\; id="135"\; label="I\; R"\; filenames="HDA0000149124520000032.png"\; state="\{\{state\}\}">I</figure-callout>}}_R\end{array}\right)$

2. change the size that loads inclined to one side control voltage on the Faraday rotator, carry out second and third, measure for four times;

Computing machine 13 changes the size of controlling voltage on said first Faraday rotator 4 and second Faraday rotator 6 partially simultaneously through described second substrate bias controller 15, and the optically-active angle that said first Faraday rotator 4 and second Faraday rotator 6 are produced is respectively γ ₂, γ ₃, γ ₄With-γ ₂,-γ ₃,-γ ₄, the work of repeating step in 1., then under three kinds of situation after the modulation of said first Faraday rotator 4, quarter wave plate 5 and second Faraday rotator 6 Stokes vector of parallel beam and the Stokes vector of site-specific outgoing beam be respectively:

${\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">S</figure-callout>}}_2^{\mathrm{in}}=\left(\begin{array}{c}{s}_{02}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="12"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{12}^{\mathrm{in}}\\ s_{22}^{\mathrm{in}}\\ s_{32}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_2\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_2\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_2\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_2\end{array}\right)$ ${\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">S</figure-callout>}}_2^{\mathrm{out}}=\left(\begin{array}{c}{s}_{02}^{\mathrm{out}}\\ s_{12}^{\mathrm{out}}\\ s_{22}^{\mathrm{out}}\\ s_{32}^{\mathrm{out}}\end{array}\right)$

${\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_3^{\mathrm{in}}=\left(\begin{array}{c}{s}_{03}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="13"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{13}^{\mathrm{in}}\\ s_{23}^{\mathrm{in}}\\ s_{33}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_3\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_3\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_3\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_3\end{array}\right)$ ${\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_3^{\mathrm{out}}=\left(\begin{array}{c}{s}_{03}^{\mathrm{out}}\\ s_{13}^{\mathrm{out}}\\ s_{23}^{\mathrm{out}}\\ s_{33}^{\mathrm{out}}\end{array}\right)$

${\mathrm{<figure-callout\; id="4"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_4^{\mathrm{in}}=\left(\begin{array}{c}{s}_{04}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="14"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{14}^{\mathrm{in}}\\ s_{24}^{\mathrm{in}}\\ s_{34}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_4\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_4\end{array}\right)$ ${\mathrm{<figure-callout\; id="4"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_4^{\mathrm{out}}=\left(\begin{array}{c}{s}_{04}^{\mathrm{out}}\\ s_{14}^{\mathrm{out}}\\ s_{24}^{\mathrm{out}}\\ s_{34}^{\mathrm{out}}\end{array}\right)$

3. according to algorithm four measurement results are handled;

In four measuring processes, the Stokes vector

through first Faraday rotator 4, quarter wave plate 5, second Faraday rotator, 6 modulation back parallel beam polarization states and the Stokes vector of outgoing beam polarization state exist as follows and concern:

$S_1^{\mathrm{Out}}=M{S}_1^{\mathrm{In}}$ That is: $\left(\begin{array}{c}{s}_{01}^{\mathrm{Out}}\\ s_{11}^{\mathrm{Out}}\\ s_{21}^{\mathrm{Out}}\\ s_{31}^{\mathrm{Out}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_1\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_1\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}{2\mathrm{\&gamma;}}_1\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_1\end{array}\right)=\left(\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right)\&times;\left(\begin{array}{c}{s}_{01}^{\mathrm{In}}\\ s_{11}^{\mathrm{In}}\\ s_{21}^{\mathrm{In}}\\ s_{31}^{\mathrm{In}}\end{array}\right)$

${\mathrm{<figure-callout\; id="2"\; label="S"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">S</figure-callout>}}_2^{\mathrm{Out}}={\mathrm{<figure-callout\; id="2"\; label="MS"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">MS</figure-callout>}}_2^{\mathrm{In}}$ That is: $\left(\begin{array}{c}{s}_{02}^{\mathrm{In}}\\ s_{12}^{\mathrm{In}}\\ s_{22}^{\mathrm{In}}\\ s_{32}^{\mathrm{In}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_2\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_2\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}{2\mathrm{\&gamma;}}_2\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_2\end{array}\right)=\left(\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right)\&times;\left(\begin{array}{c}{s}_{02}^{\mathrm{Out}}\\ s_{12}^{\mathrm{Out}}\\ s_{22}^{\mathrm{Out}}\\ s_{32}^{\mathrm{Out}}\end{array}\right)$

${\mathrm{<figure-callout\; id="3"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_3^{\mathrm{Out}}={\mathrm{<figure-callout\; id="3"\; label="MS"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">MS</figure-callout>}}_3^{\mathrm{In}}$ That is: $\left(\begin{array}{c}{s}_{03}^{\mathrm{In}}\\ s_{13}^{\mathrm{In}}\\ s_{23}^{\mathrm{In}}\\ s_{33}^{\mathrm{In}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_3\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_3\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}{2\mathrm{\&gamma;}}_3\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_3\end{array}\right)=\left(\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right)\&times;\left(\begin{array}{c}{s}_{03}^{\mathrm{Out}}\\ s_{13}^{\mathrm{Out}}\\ s_{23}^{\mathrm{Out}}\\ s_{33}^{\mathrm{Out}}\end{array}\right)$

${\mathrm{<figure-callout\; id="4"\; label="S"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">S</figure-callout>}}_4^{\mathrm{Out}}={\mathrm{<figure-callout\; id="4"\; label="MS"\; filenames="HDA0000149124520000011.png,HDA0000149124520000012.png"\; state="\{\{state\}\}">MS</figure-callout>}}_4^{\mathrm{In}}$ That is: $\left(\begin{array}{c}{s}_{04}^{\mathrm{In}}\\ s_{14}^{\mathrm{In}}\\ s_{24}^{\mathrm{In}}\\ s_{34}^{\mathrm{In}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_4\mathrm{<figure-callout\; id="2"\; label="Cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Cos</figure-callout>}{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="Sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">Sin</figure-callout>}{2\mathrm{\&gamma;}}_4\end{array}\right)=\left(\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right)\&times;\left(\begin{array}{c}{s}_{04}^{\mathrm{Out}}\\ s_{14}^{\mathrm{Out}}\\ s_{24}^{\mathrm{Out}}\\ s_{34}^{\mathrm{Out}}\end{array}\right)$

Wherein, M is the mueller matrix of testing sample 7, with in four measuring processes, and the Stokes vector of parallel beam

And

Close and write as a matrix S ^In, with the Stokes vector of outgoing beam

And

Merge and write as a matrix S ^Out, that is:

$S^{\mathrm{in}}=\left(\begin{array}{cccc}{s}_{01}^{\mathrm{in}}& s_{02}^{\mathrm{in}}& s_{03}^{\mathrm{in}}& s_{04}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="11"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{11}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="12"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{12}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="13"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{13}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="14"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{14}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}& s_{22}^{\mathrm{in}}& s_{23}^{\mathrm{in}}& s_{24}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}& s_{32}^{\mathrm{in}}& s_{33}^{\mathrm{in}}& s_{34}^{\mathrm{in}}\end{array}\right)$

$=\frac{I}{2}\left(\begin{array}{cccc}1& 1& 1& 1\\ {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_1& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_2& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_3& {\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_1\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_1& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_2\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_2& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_3\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_3& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_4\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">cos</figure-callout>}{2\mathrm{\&gamma;}}_4\\ -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_1& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_2& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_3& -\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">sin</figure-callout>}{2\mathrm{\&gamma;}}_4\end{array}\right)$

$S^{\mathrm{out}}=\left(\begin{array}{cccc}{s}_{01}^{\mathrm{out}}& s_{02}^{\mathrm{out}}& s_{03}^{\mathrm{out}}& s_{04}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}& s_{12}^{\mathrm{out}}& s_{13}^{\mathrm{out}}& s_{14}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}& s_{22}^{\mathrm{out}}& s_{23}^{\mathrm{out}}& s_{24}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}& s_{32}^{\mathrm{out}}& s_{33}^{\mathrm{out}}& s_{34}^{\mathrm{out}}\end{array}\right)$

Then have: S ^Out=MS ^In, that is:

$\left(\begin{array}{cccc}{s}_{01}^{\mathrm{out}}& s_{02}^{\mathrm{out}}& s_{03}^{\mathrm{out}}& s_{04}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}& s_{12}^{\mathrm{out}}& s_{13}^{\mathrm{out}}& s_{14}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}& s_{22}^{\mathrm{out}}& s_{23}^{\mathrm{out}}& s_{24}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}& s_{32}^{\mathrm{out}}& s_{33}^{\mathrm{out}}& s_{34}^{\mathrm{out}}\end{array}\right)=\left(\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right)\&times;\left(\begin{array}{cccc}{s}_{01}^{\mathrm{in}}& s_{02}^{\mathrm{in}}& s_{03}^{\mathrm{in}}& s_{04}^{\mathrm{in}}\\ {\mathrm{<figure-callout\; id="11"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{11}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="12"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{12}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="13"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{13}^{\mathrm{in}}& {\mathrm{<figure-callout\; id="14"\; label="s"\; filenames="HDA0000149124520000011.png"\; state="\{\{state\}\}">s</figure-callout>}}_{14}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}& s_{22}^{\mathrm{in}}& s_{23}^{\mathrm{in}}& s_{24}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}& s_{32}^{\mathrm{in}}& s_{33}^{\mathrm{in}}& s_{34}^{\mathrm{in}}\end{array}\right)$

Work as S ^InIn γ ₁, γ ₂, γ ₃And γ ₄Get four different values, make S ^InWhen being the linear independence invertible matrix (like γ ₁, γ ₂, γ ₃And γ ₄When getting 40 °, 75 °, 105 ° and 140 ° respectively, S ^InDeterminant of a matrix is-1.4741, is not equal to zero, is the linear independence invertible matrix, and the matrix conditional number is 3.3049, and matrix computations is very little to the susceptibility of error, and numerical stability is also very good), can obtain matrix M, that is:

M＝S ^out(S ⁱⁿ) ^-1

Because little polarization analyzer array 9 and ccd detector array 10 are made up of ultra pixel 901 arrays of little polarization analyzer and ultra pixel 1001 arrays of ccd detector respectively; Therefore; By 13 pairs of four electric light of computing machine postpone be light intensity matrix 16 and four electric light of 2 π postpone be the light intensity matrix 17 of pi/2 analyze and processing after; Promptly can draw all-optical field Polarization aberration information, promptly the mueller matrix of all-optical field distributes.

Experiment shows, the present invention has that apparatus structure is simple, common optical axis and stable, measure need not that mechanical rotation, algorithm are simple, high spatial resolution and measuring speed characteristics faster.

Claims (9)

1. all-optical field Polarization aberration pick-up unit, this device comprise full polarization state generator, full polarization state analyzer and signal Processing and control system, it is characterized in that;

Said full polarization state generator comprises laser instrument (1), laser beam expander (2), the polarizer (3), first Faraday rotator (4), quarter wave plate (5) and second Faraday rotator (6); Said full polarization state analyzer comprises compensator (8), little polarization analyzer array (9) and ccd detector array (10); Its position relation is: along the laser outbound course of this laser instrument (1), be described laser beam expander (2), the polarizer (3), first Faraday rotator (4), quarter wave plate (5), the described compensator of second Faraday rotator (6) (8), little polarization analyzer array (9) and ccd detector array (10) successively;

Said little polarization analyzer array (9) is made up of the array of the ultra pixel of little polarization analyzer (901); The described ultra pixel of little polarization analyzer (901) is made up of the 0 degree little analyzer of linear polarization (902), the 45 degree little analyzers of linear polarization (903), the 90 degree little analyzers of linear polarization (904) and the 135 degree little analyzers of linear polarization (905); Described ccd detector array (10) is made up of the array of the ultra pixel of ccd detector (1001), and the ultra pixel of said ccd detector array (1001) is made up of four identical ccd detector sub-pixels; Described little polarization analyzer array (9) and described ccd detector array (10) integrate; Described little polarization analyzer ultra pixel (901) array and the ultra pixel of ccd detector (1001) array are aimed at one by one, formed and aim at ultra pel array (901-1001);

Said signal Processing and control system comprise amplifier (11), synchronous data collection card (12), computing machine (13), first substrate bias controller (14) and second substrate bias controller (15);

Described ccd detector array (10) links to each other with the input end of described computing machine (13) through described amplifier (11), synchronous data collection card (12); The input end of described first substrate bias controller of the output termination of said computing machine (13) (14) and second substrate bias controller (15); The control end of the described compensator of output termination (8) of described first substrate bias controller (14), the control end of described first Faraday rotator of the output termination of described second substrate bias controller (15) (4) and second Faraday rotator (6).

2. all-optical field Polarization aberration pick-up unit according to claim 1 is characterized in that: the said polarizer (3) is polaroid, polarizing prism or polarization phase mask.

3. all-optical field Polarization aberration pick-up unit according to claim 1; It is characterized in that: said first Faraday rotator (4) and second Faraday rotator (6) are identical; And under the identical on-load voltage condition of said second substrate bias controller (15), size is identical, direction is identical or optically-active angle in the opposite direction and continuously adjustable to produce two.

4. all-optical field Polarization aberration pick-up unit according to claim 1; It is characterized in that: said quarter wave plate (5) is crystalline material type quarter wave plate, multi-component compound quarter wave plate, reflection rib build quarter wave plate or birefringent film type quarter wave plate, and the scope of its phase-delay quantity is: 89 °～91 °.

5. all-optical field Polarization aberration pick-up unit according to claim 1; It is characterized in that: said compensator (8) is light ball modulator, liquid crystal phase delay device, lithium columbate crystal, under the on-load voltage condition of said first substrate bias controller (14), produces optical element or the device that continuous adjustable phase postpones.

6. all-optical field Polarization aberration pick-up unit according to claim 1 is characterized in that: described synchronous data collection card (12) is the multi-channel high-speed data capture card with A/D translation function.

7. all-optical field Polarization aberration pick-up unit according to claim 1 is characterized in that: said computing machine (13) is equipped with the bias voltage Control Software of data processing, analysis software, first substrate bias controller (14) and second substrate bias controller (15).

8. all-optical field Polarization aberration pick-up unit according to claim 1 is characterized in that: said first substrate bias controller (14) and second substrate bias controller (15) are continuously adjustable D.C. regulated power supplies.

9. utilize the all-optical field Polarization aberration detection method of the described all-optical field Polarization aberration of claim 1 pick-up unit, it is characterized in that this method comprises the following steps: testing sample (7)

1. described Faraday rotator is loaded control voltage partially, carry out the first time and measure;

Computing machine (13) changes said first Faraday rotator (4) simultaneously through described second substrate bias controller (15) and second Faraday rotator (6) is gone up the size of control voltage partially, and the optically-active angle that said first Faraday rotator (4) and second Faraday rotator (6) are produced is respectively γ ₁With-γ ₁After the laser beam that said laser instrument (1) produces expands bundle through said laser beam expander (2); Shine on the said polarizer (3); Become the linear polarization parallel beam, then through the modulation of said first Faraday rotator (4), quarter wave plate (5) and second Faraday rotator (6), the Stokes vector that obtains parallel beam is:

$S_1^{\mathrm{in}}=\left(\begin{array}{c}{s}_{01}^{\mathrm{in}}\\ s_{11}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\cos }^2{2\mathrm{\&gamma;}}_1\\ -\sin {2\mathrm{\&gamma;}}_1\cos {2\mathrm{\&gamma;}}_1\\ -\sin {2\mathrm{\&gamma;}}_1\end{array}\right)$

After this parallel beam sees through said testing sample (7) and compensator (8); The parallel said ultra pixel of little polarization analyzer (901) that is incident on is above the array; By the ultra pixel of said ccd detector (1001) array light intensity signal is surveyed; Computing machine (13) changes said compensator (8) through said first substrate bias controller (14) and goes up the size that loads inclined to one side control voltage; It is 2 π that the electric light that said compensator (8) is produced postpones; Four little analyzer sub-pixels in this moment and the said ultra pixel of little polarization analyzer (901): the 0 degree little analyzer of linear polarization (902), the 45 degree little analyzers of linear polarization (903), the 90 degree little analyzers of linear polarization (904), 135 are spent the light intensity that corresponding four the identical ccd detector sub-pixels of the little analyzers of linear polarization (905) detect and are followed successively by: I ₀, I ₄₅, I ₉₀And I ₁₃₅, and close and write as a matrix, being referred to as the electric light delay is the ultra pixel of light intensity matrix (1601) of 2 π, is expressed as:

$\left(\begin{array}{cc}{I}_0& I_{45}\\ I_{135}& I_{90}\end{array}\right)$

The ultra pixel of light intensity matrix (1601) array that described electric light delay is 2 π closes is write as a bigger matrix, and being referred to as the electric light delay is the light intensity matrix (16) of 2 π:

Under the constant situation of other conditions; Computing machine (13) changes said compensator (8) through said first substrate bias controller (14) and goes up the size that loads inclined to one side control voltage; The electric light that said compensator (8) is produced postpones to be pi/2; Four little analyzer sub-pixels in this moment and the said ultra pixel of little polarization analyzer (901): 0 spends the little analyzer of linear polarization (902); The 45 degree little analyzers of linear polarization (903), the light intensity that the 90 degree little analyzers of linear polarization (904), corresponding four the identical ccd detector sub-pixels of the 135 degree little analyzers of linear polarization (905) detect is followed successively by: I _R0, I _R45, I _R90And I _R135, close and write as a matrix, be referred to as electric light and postpone to be the ultra pixel of light intensity matrix (1701) of pi/2:

$\left(\begin{array}{cc}{I}_{R0}& I_{R45}\\ I_{R135}& I_{R90}\end{array}\right)$

This electric light postpones to be write as a bigger matrix for the ultra pixel of light intensity matrix (1701) array of pi/2 closes, and is referred to as electric light and postpones to be the light intensity matrix (17) of pi/2:

Through computing machine (13) to electric light postpone be the ultra pixel of light intensity matrix (1601) of 2 π delay is the analysis and the processing of the ultra pixel of light intensity matrix (1701) of pi/2 with electric light, the Stokes vector that draws the site-specific outgoing beam is:

$S_1^{\mathrm{out}}=\left(\begin{array}{c}{s}_{01}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}\end{array}\right)=\left(\begin{array}{c}{I}_0+I_{90}\\ I_0-I_{90}\\ I_{45}-I_{135}\\ I_{R45}-I_{R135}\end{array}\right)=\left(\begin{array}{c}{I}_{R0}+I_{R90}\\ I_{R0}-I_{R90}\\ I_{45}-I_{135}\\ I_{R45}-I_{R135}\end{array}\right)$

2. computing machine (13) changes said first Faraday rotator (4) and the upward inclined to one side size of controlling voltage of second Faraday rotator (6) simultaneously through described second substrate bias controller (15), and the optically-active angle that said first Faraday rotator (4) and second Faraday rotator (6) are produced is respectively γ ₂, γ ₃, γ ₄With-γ ₂,-γ ₃,-γ ₄Change and load the size of control voltage partially on the Faraday rotator; Repeating step 1.; Carry out second and third, measure for four times, the Stokes vector of parallel beam and the Stokes vector of site-specific outgoing beam are respectively after the modulation of said first Faraday rotator (4), quarter wave plate (5) and second Faraday rotator (6) accordingly:

$S_2^{\mathrm{in}}=\left(\begin{array}{c}{s}_{02}^{\mathrm{in}}\\ s_{12}^{\mathrm{in}}\\ s_{22}^{\mathrm{in}}\\ s_{32}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\cos }^2{2\mathrm{\&gamma;}}_2\\ -\sin {2\mathrm{\&gamma;}}_2\cos {2\mathrm{\&gamma;}}_2\\ -\sin {2\mathrm{\&gamma;}}_2\end{array}\right)$ $S_2^{\mathrm{out}}=\left(\begin{array}{c}{s}_{02}^{\mathrm{out}}\\ s_{12}^{\mathrm{out}}\\ s_{22}^{\mathrm{out}}\\ s_{32}^{\mathrm{out}}\end{array}\right)$

$S_3^{\mathrm{in}}=\left(\begin{array}{c}{s}_{03}^{\mathrm{in}}\\ s_{13}^{\mathrm{in}}\\ s_{23}^{\mathrm{in}}\\ s_{33}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\cos }^2{2\mathrm{\&gamma;}}_3\\ -\sin {2\mathrm{\&gamma;}}_3\cos {2\mathrm{\&gamma;}}_3\\ -\sin {2\mathrm{\&gamma;}}_3\end{array}\right)$ $S_3^{\mathrm{out}}=\left(\begin{array}{c}{s}_{03}^{\mathrm{out}}\\ s_{13}^{\mathrm{out}}\\ s_{23}^{\mathrm{out}}\\ s_{33}^{\mathrm{out}}\end{array}\right)$

$S_4^{\mathrm{in}}=\left(\begin{array}{c}{s}_{04}^{\mathrm{in}}\\ s_{14}^{\mathrm{in}}\\ s_{24}^{\mathrm{in}}\\ s_{34}^{\mathrm{in}}\end{array}\right)=\frac{I}{2}\left(\begin{array}{c}1\\ {\cos }^2{2\mathrm{\&gamma;}}_4\\ -\sin {2\mathrm{\&gamma;}}_4\cos {2\mathrm{\&gamma;}}_4\\ -\sin {2\mathrm{\&gamma;}}_4\end{array}\right)$ $S_4^{\mathrm{out}}=\left(\begin{array}{c}{s}_{04}^{\mathrm{out}}\\ s_{14}^{\mathrm{out}}\\ s_{24}^{\mathrm{out}}\\ s_{34}^{\mathrm{out}}\end{array}\right)$

3. according to algorithm four measurement results are handled;

With in four measuring processes, through the Stokes vector of parallel beam after the modulation of said first Faraday rotator (4), quarter wave plate (5) and second Faraday rotator (6)

And

Close and write as a matrix S ^In, with the Stokes vector of outgoing beam And

Merge and write as a matrix S ^Out, then have: S ^Out=MS ^In, that is:

$\left(\begin{array}{cccc}{s}_{01}^{\mathrm{out}}& s_{02}^{\mathrm{out}}& s_{03}^{\mathrm{out}}& s_{04}^{\mathrm{out}}\\ s_{11}^{\mathrm{out}}& s_{12}^{\mathrm{out}}& s_{13}^{\mathrm{out}}& s_{14}^{\mathrm{out}}\\ s_{21}^{\mathrm{out}}& s_{22}^{\mathrm{out}}& s_{23}^{\mathrm{out}}& s_{24}^{\mathrm{out}}\\ s_{31}^{\mathrm{out}}& s_{32}^{\mathrm{out}}& s_{33}^{\mathrm{out}}& s_{34}^{\mathrm{out}}\end{array}\right)=\left(\begin{array}{cccc}{M}_{11}& M_{12}& M_{13}& M_{14}\\ M_{21}& M_{22}& M_{23}& M_{24}\\ M_{31}& M_{32}& M_{33}& M_{34}\\ M_{41}& M_{42}& M_{43}& M_{44}\end{array}\right)\&times;\left(\begin{array}{cccc}{s}_{01}^{\mathrm{in}}& s_{02}^{\mathrm{in}}& s_{03}^{\mathrm{in}}& s_{04}^{\mathrm{in}}\\ s_{11}^{\mathrm{in}}& s_{12}^{\mathrm{in}}& s_{13}^{\mathrm{in}}& s_{14}^{\mathrm{in}}\\ s_{21}^{\mathrm{in}}& s_{22}^{\mathrm{in}}& s_{23}^{\mathrm{in}}& s_{24}^{\mathrm{in}}\\ s_{31}^{\mathrm{in}}& s_{32}^{\mathrm{in}}& s_{33}^{\mathrm{in}}& s_{34}^{\mathrm{in}}\end{array}\right)$

Wherein: M is the mueller matrix of testing sample (7), works as S ^InWhen being the linear independence invertible matrix, can obtain matrix M, that is:

M＝S ^out(S ⁱⁿ) ^-1

Described matrix M is all-optical field Polarization aberration information.

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